Alignment device and film coating equipment

Abstract

The utility model discloses an alignment device and coating equipment, the alignment device comprises a bearing part, the bearing part comprises a first carrier and a second carrier, the first carrier and the second carrier are arranged in parallel along the X-axis direction, and a reserved gap is arranged between the two carriers; the first positioning assembly and the second positioning assembly are oppositely arranged in the X-axis direction and are arranged on the two sides of the bearing part so as to position the position of the substrate in the X-axis direction; the third positioning assembly and the fourth positioning assembly are oppositely arranged in the Y-axis direction and are arranged on the two sides of the bearing part so as to position the position of the base plate in the Y-axis direction, the third positioning assembly and the fourth positioning assembly each comprise a positioning block, and the positioning blocks face the reserved gap; therefore, the substrates on the first carrier and the second carrier are prevented from deviating from the corresponding carriers in the alignment process. According to the utility model, the alignment of the substrates on the first carrier and the second carrier on a two-dimensional plane can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating equipment alignment, in particular to an alignment device and a film coating equipment. Background Art

[0002] In current coating processes, slit-coating equipment is widely used due to its high precision and uniform coating. However, this type of equipment faces a technical challenge in actual operation: it is difficult to directly form a stable and precise positioning structure between the coated substrate and the suction cup carrier. Due to the structural characteristics and process requirements of slit-coating equipment, the suction cup carrier is usually designed to be simple and lightweight to facilitate rapid movement and position adjustment, but this directly leads to the lack of a positioning structure.

[0003] To address this issue, the industry typically adopts a compromise solution: adding movable positioning blocks to the suction cup carrier. While these blocks can help position the coated substrate to a certain extent, they also have significant drawbacks. First, the addition of movable positioning blocks increases the complexity and manufacturing cost of the suction cup carrier. Second, these additional components also increase the overall weight of the suction cup carrier, hindering rapid movement and precise positioning of the equipment, especially in production environments where coated substrates need to be frequently changed or repositioned.

[0004] In addition, the movable positioning block may also introduce additional error sources, such as wear, looseness or inaccurate positioning of the positioning block, which may affect the relative position accuracy between the coated substrate and the suction cup carrier, thereby affecting the coating quality and production efficiency.

[0005] In order to solve at least one of the above technical problems, the present invention provides a positioning device and a coating device. Summary of the Invention

[0006] The purpose of the utility model is to provide an alignment device and a coating device, which can realize the alignment of substrates on a first carrier and a second carrier on a two-dimensional plane.

[0007] The purpose of this utility model is achieved by the following technical solutions:

[0008] On the one hand, the utility model provides a positioning device, comprising

[0009] A carrying portion, the carrying portion is used to carry the substrate, the carrying portion includes a first carrier and a second carrier, the first carrier and the second carrier are arranged side by side along the X-axis direction, and a reserved gap is left between the two carriers;

[0010] a first positioning assembly and a second positioning assembly, wherein the first positioning assembly and the second positioning assembly are arranged opposite to each other along the X-axis direction and are arranged on both sides of the carrying portion to locate the position of the substrate in the X-axis direction;

[0011] The third positioning assembly and the fourth positioning assembly are arranged opposite to each other along the Y-axis direction and on both sides of the carrying portion to locate the position of the substrate in the Y-axis direction. The third positioning assembly and the fourth positioning assembly both include positioning blocks, and the positioning blocks are oriented toward the reserved gap to prevent the substrates on the first carrier and the second carrier from deviating from the corresponding carrier during the alignment process.

[0012] Furthermore, the alignment device further includes:

[0013] A lifting assembly connects the first carrier and the second carrier and is used to make the first carrier and the second carrier move back and forth along the Z-axis direction, and the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other.

[0014] Furthermore, the alignment device further includes two groups of fine adjustment components, which are respectively associated with the first carrier and the second carrier, and each group of fine adjustment components includes:

[0015] a plurality of sensors, each of the sensors being configured to detect an actual height of a different position of an associated vehicle;

[0016] Multiple motors, each motor driving an associated laser measurement sensor, each motor connected to the associated laser measurement sensor detects the position of the carrier, and drives the corresponding part of the carrier to move back and forth along the Z-axis direction, so that the actual height of each position of the carrying part is the same as the preset height.

[0017] Furthermore, the alignment device further includes a base, and the base includes:

[0018] A first support plate, the first support plate is used to carry the first positioning assembly, the second positioning assembly, the third positioning assembly and the fourth positioning assembly, and a first through hole is opened on the first support plate to form an accommodating space for accommodating the carrying portion; and / or,

[0019] The second support plate is used to support the lifting assembly.

[0020] Furthermore, the first carrier and the second carrier both include:

[0021] A hollow carrier, the upper surface of the hollow carrier is used to carry the substrate, at least one adsorption hole is opened on the upper surface of the hollow carrier, and a vacuum hole is opened on the side of the hollow carrier, and the vacuum hole is connected to an external vacuum device.

[0022] Furthermore, the first carrier and the second carrier each include a first side and a second side facing each other, and a third side and a fourth side facing each other, wherein the first side and the second side are two sides along the X-axis direction of the carrier, and the third side and the fourth side are two sides along the Y-axis direction of the carrier;

[0023] The first positioning assembly is disposed on one side of the first side of the first carrier;

[0024] The second positioning assembly is disposed on one side of the second side of the second carrier;

[0025] The third positioning assembly is disposed on one side of the third side of the two carriers;

[0026] The fourth positioning assembly is disposed on one side of the fourth side edges of the two carriers.

[0027] Furthermore, the first positioning assembly, the second positioning assembly, the third positioning assembly and the fourth positioning assembly each include:

[0028] A plurality of positioning posts, each of the positioning posts facing the substrate;

[0029] A positioning mounting plate, with a plurality of positioning posts spaced apart and distributed on the positioning mounting plate;

[0030] An electric push rod is driven to connect to the positioning mounting plate so as to make the positioning column contact with or away from the base plate.

[0031] Furthermore, the first positioning assembly includes: a first positioning mounting plate, a plurality of first positioning posts, and a first electric push rod, wherein the plurality of first positioning posts are evenly spaced on the first positioning mounting plate and face the first side of the first carrier, and the first electric push rod drives the first positioning mounting plate to reciprocate along the X-axis direction so that the first positioning posts abut against or move away from the first side of the first carrier;

[0032] The second positioning assembly includes: a second positioning mounting plate, a plurality of second positioning posts, and a second electric push rod. The plurality of second positioning posts are evenly spaced on the second positioning mounting plate and face the second side of the second carrier. The second electric push rod drives the second positioning mounting plate to reciprocate along the X-axis direction so that the second positioning posts abut against or move away from the second side of the second carrier.

[0033] The third positioning assembly includes: a third positioning mounting plate, a plurality of third positioning posts, and a third electric push rod. The plurality of third positioning posts are evenly spaced on the third positioning mounting plate, some of the third positioning posts face the third side of the first carrier, and some of the third positioning posts face the third side of the second carrier. The third electric push rod drives the third positioning mounting plate to reciprocate along the Y-axis direction, so that the third positioning posts abut against or move away from the third sides of the first and second carriers.

[0034] The fourth positioning assembly includes: a fourth positioning mounting plate, a plurality of fourth positioning posts, and a fourth electric push rod, wherein the plurality of fourth positioning posts are evenly spaced on the fourth positioning mounting plate, some of the fourth positioning posts are oriented toward the fourth side of the first carrier, and some of the fourth positioning posts are oriented toward the fourth side of the second carrier, and the fourth electric push rod drives the fourth positioning mounting plate to reciprocate along the Y-axis direction so that the fourth positioning posts abut against or move away from the fourth sides of the first and second carriers;

[0035] The first positioning post, the second positioning post and the third positioning post are all rigid positioning posts, and the fourth positioning post is an elastic positioning post.

[0036] Furthermore, the rigid positioning column includes:

[0037] a first base, the first base being arranged on a positioning mounting plate;

[0038] a first column, wherein the first column and the first base are perpendicular to each other, the first column is threadedly connected to the first base, and faces the substrate;

[0039] The elastic positioning column includes:

[0040] A second base, the second base is arranged on the positioning mounting plate, and a mounting hole is provided on the second base;

[0041] A limiting seat, wherein the limiting seat has a groove, and a limiting step is provided at the bottom of the groove, which divides part of the groove into a first limiting groove and a second limiting groove;

[0042] a first positioning tube, one end of which is inserted into the mounting hole, and the other end of which is inserted into the first limiting groove and abuts against one side of the limiting step;

[0043] Springs and positioning steps;

[0044] a second positioning tube, the second positioning tube being sleeved on the spring, one end of the second positioning tube being inserted into the first positioning tube, and the other end of the second positioning tube being connected to the positioning step;

[0045] The second column is connected to the positioning step, and the second column is perpendicular to the second positioning tube and faces the base plate.

[0046] In a second aspect, the present invention provides a film coating device, comprising:

[0047] Such as the above-mentioned positioning device;

[0048] A coating device, the coating device is arranged on one side of the carrying part

[0049] Compared with the prior art, the beneficial effects of the present invention include at least:

[0050] The present invention realizes the simultaneous carrying and processing of two substrates by means of a first carrier and a second carrier arranged in parallel, that is, it is possible to simultaneously perform alignment and subsequent operations, such as coating and cutting, on the two substrates within one working cycle, thereby improving production efficiency. In addition, by providing four sets of positioning components, it is possible to achieve precise positioning of the substrates on a two-dimensional plane, ensuring the accuracy and stability of the position of the substrates during processing, and helping to improve the quality and consistency of the products. Furthermore, by designing a reserved gap between the two carriers and providing corresponding positioning blocks, it is not only possible to avoid the midpoint of the substrate deviating from the midpoint of the corresponding carrier during the alignment process, thereby improving the alignment accuracy, but also to provide sufficient operating space for the placement and removal of the substrates. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 This is a top view of the alignment device according to an embodiment of the present utility model.

[0052] Figure 2 It is a structural schematic diagram of the alignment device of an embodiment of the utility model.

[0053] Figure 3 This is a structural diagram of a rigid positioning column according to an embodiment of the present utility model.

[0054] Figure 4 This is a structural diagram of the elastic positioning column in an embodiment of the present utility model.

[0055] Figure 5 This is a structural diagram of a positioning block according to an embodiment of the present utility model.

[0056] In the figure: 11, first carrier; 12, second carrier; 101, reserved gap; 102, hollow carrier; 103, adsorption hole; 21, first positioning assembly; 211, first positioning mounting plate; 212, first positioning column; 213, first electric push rod; 22, second positioning assembly; 221, second positioning mounting plate; 222, second positioning column; 223, second electric push rod; 23, third positioning assembly; 231, third positioning mounting plate; 232, third positioning column; 233, third electric push rod; 234, third Three positioning blocks; 24. Fourth positioning assembly; 241. Fourth positioning mounting plate; 242. Fourth positioning column; 243. Fourth electric push rod; 244. Fourth positioning block; 3. Sensor; 4. First support plate; 41. First through hole; 51. First base; 52. First column; 61. Second base; 611. Mounting hole; 62. Limit seat; 621. Groove; 63. First positioning tube; 64. Spring; 65. Positioning step; 66. Second positioning tube; 67. Second column; 71. Connecting seat; 72. Positioning plate. DETAILED DESCRIPTION

[0057] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make this disclosure more comprehensive and complete and to fully convey the concepts of the example embodiments to those skilled in the art. Identical reference numerals in the figures denote identical or similar structures, and thus repeated descriptions thereof will be omitted.

[0058] The words expressing positions and directions described in this utility model are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of this utility model.

[0059] In order to realize the alignment of the substrates on the first carrier 11 and the second carrier 12 on a two-dimensional plane, the alignment device of the present invention includes: a carrying portion, a first positioning component 21, a second positioning component 22, a third positioning component 23 and a fourth positioning component 24, Figure 1 and Figure 2 . Furthermore, in order to be able to adjust the height of the substrate to adapt to different processes, the alignment device of the present invention may also include: a lifting component. Further, in order to provide a stable support platform for the alignment device and improve the integration of the alignment device, the alignment device of the present invention may also include: a base. Further, in order to eliminate the alignment error caused by the unevenness of the carrier or the inconsistent thickness of the substrate, the alignment device of the present invention may also include: a fine adjustment component.

[0060] The carrying portion of the present invention includes a first carrier 11 and a second carrier 12. The first carrier 11 and the second carrier 12 each include a first side and a second side relative to each other, and a third side and a fourth side relative to each other. The first side and the second side are two sides in the X-axis direction of the carrier, and the third side and the fourth side are two sides in the Y-axis direction of the carrier. When used, the first carrier 11 and the second carrier 12 are arranged side by side along the X-axis direction, and there is a reserved gap 101 between the two carriers. In actual application, the carrying portion is used to carry a substrate. Before alignment, the first carrier 11 and the second carrier 12 respectively carry a substrate to be processed. It can be seen that the present invention realizes the simultaneous carrying and processing of two substrates by the first carrier 11 and the second carrier 12 arranged side by side, that is, it can simultaneously perform alignment and subsequent operations on the two substrates within one working cycle, such as coating, cutting, etc., thereby improving production efficiency.

[0061] In some preferred embodiments, reference Figure 2, the first carrier 11 and the second carrier 12 both include: a hollow carrier 102. The upper surface of the hollow carrier 102 is used to carry the substrate, and at least one adsorption hole 103 is provided on the upper surface of the hollow carrier 102, and a vacuum hole is provided on the side of the hollow carrier 102. When in use, the vacuum hole is connected to an external vacuum device. In actual application, before alignment, the substrate to be processed is placed on the first carrier 11 and the second carrier 12, but the first carrier 11 and the second carrier 12 are not vacuumed. At this time, the substrates on the first carrier 11 and the second carrier 12 can be moved. After the alignment is completed, the first carrier 11 and the second carrier 12 are vacuumed. At this time, the aligned substrates cannot be moved, and their relative positions with the corresponding carriers are fixed.

[0062] The first positioning assembly 21 and the second positioning assembly 22 of the present invention are arranged relatively along the X-axis direction, and are arranged on both sides of the bearing part, for positioning the position of the substrate in the X-axis direction. When in use, the first positioning assembly 21 is arranged on one side of the first side of the first carrier 11; the second positioning assembly 22 is arranged on one side of the second side of the second carrier 12. The third positioning assembly 23 and the fourth positioning assembly 24 of the present invention are arranged relatively along the Y-axis direction, and are arranged on both sides of the bearing part, for positioning the position of the substrate in the Y-axis direction. When in use, the third positioning assembly 23 is arranged on one side of the third side of the two carriers; the fourth positioning assembly 24 is arranged on one side of the fourth side of the two carriers. It can be seen that the present invention can achieve precise positioning of the substrate on a two-dimensional plane by setting four groups of positioning assemblies, ensure the accuracy and stability of the position of the substrate during the processing process, and help improve the quality and consistency of the product.

[0063] Since it is necessary to make the carrier and the substrate it carries coaxial as much as possible, the present invention provides positioning blocks in both the third positioning assembly 23 and the fourth positioning assembly 24, and directs the positioning blocks toward the reserved gap 101. During the alignment process, inserting the positioning blocks into the reserved gap 101 can prevent the substrates on the first carrier 11 and the second carrier 12 from being connected during the alignment process, that is, the substrates on the carriers deviate from their corresponding carriers. It can be seen that the present invention, by designing the reserved gap 101 and the corresponding positioning blocks between the two carriers, not only prevents the midpoint of the substrate from deviating from the midpoint of the corresponding carrier during the alignment process, thereby improving the alignment accuracy, but also provides sufficient operating space for the placement and removal of the substrates.

[0064] Furthermore, the first positioning assembly 21, the second positioning assembly 22, the third positioning assembly 23, and the fourth positioning assembly 24 of the present invention each include: a plurality of positioning posts, a positioning mounting plate, and an electric push rod. During use, the plurality of positioning posts are spaced apart on the positioning mounting plate and all face the base plate. The electric push rod drives the positioning mounting plate to move the positioning posts into contact with or away from the base plate.

[0065] In some preferred embodiments, the first positioning assembly 21 of the present invention includes: a first positioning mounting plate 211, a plurality of first positioning posts 212, and a first electric push rod 213. The plurality of first positioning posts 212 are evenly spaced on the first positioning mounting plate 211 and face the first side of the first carrier 11. The first electric push rod 213 drives the first positioning mounting plate 211 to move back and forth along the X-axis direction, causing the first positioning posts 212 to abut against or move away from the first side of the first carrier 11. The second positioning assembly 22 of the present invention includes: a second positioning mounting plate 221, a plurality of second positioning posts 222, and a second electric push rod 223. The plurality of second positioning posts 222 are evenly spaced on the second positioning mounting plate 221 and face the second side of the second carrier 12. The second electric push rod 223 drives the second positioning mounting plate 221 to move back and forth along the X-axis direction, causing the second positioning posts 222 to abut against or move away from the second side of the second carrier 12. The third positioning assembly 23 of the present invention includes a third positioning mounting plate 231, a plurality of third positioning posts 232, and a third electric push rod 233. The plurality of third positioning posts 232 are evenly spaced on the third positioning mounting plate 231. During use, the third positioning mounting plate 231 is provided with a third positioning block 234, which is positioned between two adjacent third positioning posts 232, thereby dividing the plurality of third positioning posts 232 into a first group of third positioning posts 232 and a second group of third positioning posts 232. The first group of third positioning posts 232 all face the third side of the first carrier 11, while the second group of third positioning posts 232 all face the third side of the second carrier 12. The third electric push rod 233 drives the third positioning mounting plate 231 to reciprocate along the Y-axis, causing the first group of third positioning posts 232 to abut or move away from the third side of the first carrier 11, and the second group of third positioning posts 232 to abut or move away from the third side of the second carrier 12. The fourth positioning assembly 24 of the present invention includes a fourth positioning mounting plate 241, a plurality of fourth positioning posts 242, and a fourth electric push rod 243. The plurality of fourth positioning posts 242 are evenly spaced on the fourth positioning mounting plate 241. During use, the fourth positioning mounting plate 241 is provided with fourth positioning blocks 244, which are positioned between two adjacent fourth positioning posts 242, thereby dividing the plurality of fourth positioning posts 242 into a first group of fourth positioning posts 242 and a second group of fourth positioning posts 242. The first group of fourth positioning posts 242 all face the fourth side of the first carrier 11, while the second group of fourth positioning posts 242 all face the fourth side of the second carrier 12. The fourth electric push rod 243 drives the fourth positioning mounting plate 241 to reciprocate along the Y-axis, causing the first group of fourth positioning posts 242 to abut or move away from the fourth side of the first carrier 11, and the second group of fourth positioning posts 242 to abut or move away from the fourth side of the second carrier 12.

[0066] In some preferred embodiments, reference Figure 5, the positioning blocks of the present invention all include a connecting seat 71 and a positioning plate 72. Specifically, the third positioning block 234 includes a third connecting seat and a third positioning plate, and the fourth positioning block 244 includes a fourth connecting seat and a fourth positioning plate. The third positioning plate and the fourth positioning plate are both L-shaped. When used, the third connecting seat is installed on the third positioning mounting plate 231, and the L-shaped third positioning plate is connected to the third connecting seat on one side, and corresponds to the reserved gap 101 on the other side, and is inserted into the corresponding reserved gap 101 when aligned. The fourth connecting seat is installed on the fourth positioning mounting plate 241, and the L-shaped fourth positioning plate is connected to the fourth connecting seat on one side, and corresponds to the reserved gap 101 on the other side, and is inserted into the corresponding reserved gap 101 when aligned.

[0067] Furthermore, both sides of the third positioning block 234 and the fourth positioning block 244 of the present invention are provided with limiting beams, which abut against the upper surface of the corresponding carrier. During application, two symmetrical third limiting beams are provided on both sides of the third positioning plate, and two symmetrical fourth limiting beams are provided on both sides of the fourth positioning plate. Each limiting beam has the same size, and the length of each limiting beam along the X-axis is less than or equal to 1 / 2 · {F + (CH)}, where F is the spacing of the reserved gap 101, C is the length of the first carrier 11 or the second carrier 12 in the X-axis direction, and the first and second carriers 11 and 12 have the same size. H is the length of the first substrate or the second substrate in the X-axis direction, and the first and second substrates have the same size. In actual use, when the third positioning block 234 is inserted into the reserved gap 101, two symmetrical third limiting beams abut against the upper surfaces of the first and second carriers 11, 12, respectively. When the fourth positioning block 244 is inserted into the reserved gap 101, two symmetrical fourth limiting beams abut against the upper surfaces of the first and second carriers 11, 12, respectively. When the first positioning assembly 21 pushes the first substrate on the first carrier 11 to move, the distance between the fourth edge of the first substrate and the fourth side of the first carrier 11 is greater than or equal to a first threshold (the first threshold is less than or equal to 1 / 2·(CH)). When the second positioning assembly 22 pushes the second substrate on the second carrier 12 to move, the distance between the third edge of the second substrate and the third side of the first carrier 11 is greater than or equal to the first threshold. This allows the alignment device of the present invention to not only ensure that each substrate and its corresponding carrier are aligned relative to each other, but also ensure that each substrate and its corresponding carrier are coaxial.

[0068] In some preferred embodiments, the first positioning post 212, the second positioning post 222, and the third positioning post 232 of the present invention are all rigid positioning posts, and the fourth positioning post 242 is an elastic positioning post. In practice, the combination of the rigid positioning posts and the elastic positioning posts not only ensures stable positioning of the substrate in the X-axis and Y-axis directions, but also reduces stress on the substrate to a certain extent, preventing uneven stress on the substrate and damage to the substrate.

[0069] refer to Figure 3 The rigid positioning column of the present invention comprises a first base 51 and a first column 52. The first base 51 is mounted on a positioning mounting plate, and the first column 52 is perpendicular to the first base 51. The first column 52 is threadedly connected to the first base 51 and faces the base plate. During use, the height of the first column 52 can be adjusted by adjusting the thread, thereby expanding the applicability of the positioning device of the present invention.

[0070] refer to Figure 4 The elastic positioning column of the present invention includes: a second base 61, a limiting seat 62, a first positioning tube 63, a spring 64, a positioning step 65, a second positioning tube 66 and a second column 67. When in use, the second base 61 is set on the positioning mounting plate, and the second base 61 is provided with a mounting hole 611, and the mounting hole 611 faces the substrate. The limiting seat 62 is connected to the second base 61, and the limiting seat 62 has a groove 621 that passes through on both sides, and the groove 621 is connected to the mounting hole 611. A limiting step is provided at the bottom of the groove 621, which divides the bottom of the groove 621 into a first limiting groove and a second limiting groove. The first limiting groove is close to the mounting hole 611, and the second limiting groove is close to the substrate. One end of the first positioning tube 63 is inserted into the mounting hole 611, and the other end of the first positioning tube 63 is inserted into the first limiting groove and abuts against one side of the limiting step to fix the working position of the first positioning tube 63. A second positioning tube 66 is sleeved onto spring 64. One end of the second positioning tube 66 is inserted into the first positioning tube 63. The other end of the second positioning tube 66 is connected to a positioning step 65, which wraps around the periphery of the first positioning tube 63. A second column 67 is connected to the positioning step 65. The second column 67 is perpendicular to the second positioning tube 66 and faces the substrate. This shows that the elastic positioning column of the present invention provides a certain degree of cushioning and adaptability for the substrate during the alignment process, which not only achieves the positioning of the substrate but also prevents the substrate from being damaged by uneven force during the alignment process.

[0071] In some preferred embodiments, the length of the spring 64 of the present invention is greater than the length of the second positioning tube 66. When the second cylinder 67 abuts against the substrate and pushes the substrate, the substrate exerts a reaction force on the second cylinder 67, or the reaction force increases. Under the action of elastic potential energy, the spring 64 is compressed, the second positioning tube 66 is inserted into the first positioning tube 63, and the positioning step 65 moves toward the limiting step. In use, when the positioning step 65 abuts against the limiting step, the spring 64 no longer continues to compress. When the second cylinder 67 moves away from the substrate, the reaction force exerted by the substrate on the second cylinder 67 disappears or decreases. Under the action of elastic potential energy, the spring 64 recovers its deformation, and the positioning step 65 moves away from the limiting step. In use, when the spring 64 returns to its original length, the distance between the positioning step 65 and the limiting step no longer changes.

[0072] The lifting assembly of the present invention connects the first carrier 11 and the second carrier 12, and is used to make the first carrier 11 and the second carrier 12 move back and forth along the Z-axis direction, and the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other. In application, after the alignment is completed, the height of the carrier and the height of the positioning assembly can be staggered by adjusting the Z-axis direction to facilitate subsequent fine adjustment. In actual application, after the alignment is completed, the Z-axis position of the substrate can be adjusted according to the preset coating height. It can be seen that the alignment device of the present invention can adjust the substrate height according to actual needs to adapt to different process requirements.

[0073] The number of fine-adjustment components of the present invention is 2, and the two groups of fine-adjustment components are respectively associated with the first carrier 11 and the second carrier 12. Each group of fine-adjustment components includes: multiple sensors 3 and multiple motors. Among them, each motor drives an associated laser measurement sensor 3, and each sensor 3 is used to detect the actual height of different positions of the associated carrier. When used, each motor is connected to the position of the carrier detected by the associated laser measurement sensor 3, and drives part of the carrier at the corresponding position to move back and forth along the Z-axis direction, so that the actual height of each position of the carrying part is the same as the preset height. It can be seen that the present invention can adjust the actual height of different positions of the carrier to be consistent with the preset height through the fine-adjustment components composed of multiple sensors 3 and motors, so as to improve the accuracy of alignment.

[0074] In some preferred embodiments, each fine-tuning component of the present invention includes three sensors 3 and three motors, and the three sensors 3 constitute the vertices of an equilateral triangle, thereby realizing height adjustment of various positions on the upper surface of the substrate to improve the adjustment accuracy of the flatness of the upper surface of the substrate.

[0075] The base of the present invention comprises a first support plate 4 and a second support plate. The second support plate is used to support the lifting assembly. The first support plate 4 is used to support the first positioning assembly 21, the second positioning assembly 22, the third positioning assembly 23, and the fourth positioning assembly 24. During use, the first support plate 4 is provided with a first through-hole 41, forming a space for accommodating the supporting components, thereby facilitating the lifting and precision adjustment of the supporting components.

[0076] In some preferred embodiments, the base of the present invention includes four sets of brackets, which are respectively used to adjust the positions of the first positioning component 21, the second positioning component 22, the third positioning component 23 and the fourth positioning component 24 in the XYZ axis directions.

[0077] In some preferred embodiments, the present invention introduces a film coating device.

[0078] The coating equipment of the present invention comprises the aforementioned alignment device and a coating device, with the coating device disposed on one side of the carrier. When applied, the alignment device can achieve precise alignment of the substrate before coating, thereby ensuring uniformity and quality of the coating, improving production efficiency, reducing production costs, and making the coating equipment more flexible and efficient.

[0079] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are illustrative and cannot be understood as limiting the present invention. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the utility model without departing from the principles and purpose of the utility model. All of these changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A positioning device, characterized in that: include A carrying portion, the carrying portion is used to carry a substrate, the carrying portion comprises a first carrier (11) and a second carrier (12), the first carrier (11) and the second carrier (12) are arranged side by side along the X-axis direction, and a reserved gap (101) is provided between the two carriers; A first positioning assembly (21) and a second positioning assembly (22), wherein the first positioning assembly (21) and the second positioning assembly (22) are arranged opposite to each other along the X-axis direction and are arranged on both sides of the supporting portion to locate the position of the substrate in the X-axis direction; A third positioning component (23) and a fourth positioning component (24), wherein the third positioning component (23) and the fourth positioning component (24) are arranged relative to each other along the Y-axis direction and are arranged on both sides of the supporting portion to locate the position of the substrate in the Y-axis direction, and the third positioning component (23) and the fourth positioning component (24) both include positioning blocks, and the positioning blocks face the reserved gap (101) to prevent the substrates on the first carrier (11) and the second carrier (12) from deviating from the corresponding carrier during the alignment process.

2. The alignment device according to claim 1, wherein: The alignment device further includes: A lifting assembly is provided, wherein the lifting assembly connects the first carrier (11) and the second carrier (12) and is used to enable the first carrier (11) and the second carrier (12) to move back and forth along the Z-axis direction, wherein the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other.

3. The alignment device according to claim 1, wherein: The alignment device further includes: Two groups of fine-tuning components are respectively associated with the first carrier (11) and the second carrier (12), and each group of fine-tuning components includes: A plurality of sensors (3), each of the sensors (3) being used to detect the actual height of a different position of an associated vehicle; A plurality of motors are provided, each motor driving an associated laser measurement sensor (3), and each motor is connected to the associated laser measurement sensor (3) to detect the position of the carrier, and drives a portion of the carrier at a corresponding position to move back and forth along the Z-axis direction, so that the actual height of each position of the carrier portion is the same as the preset height.

4. The alignment device according to claim 2, wherein: The alignment device further includes: A base, comprising: a first support plate (4), the first support plate (4) being used to carry the first positioning assembly (21), the second positioning assembly (22), the third positioning assembly (23) and the fourth positioning assembly (24), the first support plate (4) being provided with a first through hole (41) to form a receiving space for accommodating the bearing portion; and / or, The second support plate is used to support the lifting assembly.

5. The alignment device according to claim 1, wherein: The first carrier (11) and the second carrier (12) both include: A hollow carrier (102), wherein the upper surface of the hollow carrier (102) is used to carry a substrate, at least one adsorption hole (103) is provided on the upper surface of the hollow carrier (102), and a vacuum hole is provided on the side surface of the hollow carrier (102), and the vacuum hole is connected to an external vacuum device.

6. The alignment device according to claim 1, wherein: The first carrier (11) and the second carrier (12) each include a first side and a second side opposite to each other, and a third side and a fourth side opposite to each other, wherein the first side and the second side are two sides in the X-axis direction of the carrier, and the third side and the fourth side are two sides in the Y-axis direction of the carrier; The first positioning component (21) is arranged on one side of the first side of the first carrier (11); The second positioning component (22) is arranged on one side of the second side of the second carrier (12); The third positioning component (23) is arranged on one side of the third side of the two carriers; The fourth positioning component (24) is arranged on one side of the fourth side edges of the two carriers.

7. The alignment device according to claim 1, wherein: The first positioning component (21), the second positioning component (22), the third positioning component (23) and the fourth positioning component (24) all include: A plurality of positioning posts, each of the positioning posts facing the substrate; A positioning mounting plate, with a plurality of positioning posts spaced apart and distributed on the positioning mounting plate; An electric push rod is driven to connect to the positioning mounting plate so as to make the positioning column contact with or away from the base plate.

8. The alignment device according to claim 6, characterized in that: The first positioning assembly (21) includes: a first positioning mounting plate (211), a plurality of first positioning columns (212) and a first electric push rod (213), wherein the plurality of first positioning columns (212) are arranged on the first positioning mounting plate (211) at equal intervals and face the first side of the first carrier (11), and the first electric push rod (213) drives the first positioning mounting plate (211) to move back and forth along the X-axis direction, so that the first positioning columns (212) abut against or move away from the first side of the first carrier (11); The second positioning assembly (22) includes: a second positioning mounting plate (221), a plurality of second positioning columns (222) and a second electric push rod (223), wherein the plurality of second positioning columns (222) are arranged on the second positioning mounting plate (221) at equal intervals and face the second side of the second carrier (12), and the second electric push rod (223) drives the second positioning mounting plate (221) to move back and forth along the X-axis direction, so that the second positioning columns (222) abut against or move away from the second side of the second carrier (12); The third positioning assembly (23) includes: a third positioning mounting plate (231), a plurality of third positioning columns (232) and a third electric push rod (233), wherein the plurality of third positioning columns (232) are arranged on the third positioning mounting plate (231) at equal intervals, some of the third positioning columns (232) are oriented toward the third side of the first carrier (11), and some of the third positioning columns (232) are oriented toward the third side of the second carrier (12), and the third electric push rod (233) drives the third positioning mounting plate (231) to move back and forth along the Y-axis direction, so that the third positioning columns (232) are in contact with or away from the third sides of the first carrier (11) and the second carrier (12); The fourth positioning assembly (24) includes: a fourth positioning mounting plate (241), a plurality of fourth positioning columns (242) and a fourth electric push rod (243), wherein the plurality of fourth positioning columns (242) are arranged on the fourth positioning mounting plate (241) at equal intervals, some of the fourth positioning columns (242) are oriented toward the fourth side of the first carrier (11), and some of the fourth positioning columns (242) are oriented toward the fourth side of the second carrier (12), and the fourth electric push rod (243) drives the fourth positioning mounting plate (241) to move back and forth along the Y-axis direction, so that the fourth positioning columns (242) are in contact with or away from the fourth side of the first carrier (11) and the second carrier (12); The first positioning column (212), the second positioning column (222) and the third positioning column (232) are all rigid positioning columns, and the fourth positioning column (242) is an elastic positioning column.

9. The alignment device according to claim 8, characterized in that: The rigid positioning column comprises: A first base (51), the first base (51) being arranged on a positioning mounting plate; A first column (52), the first column (52) and the first base (51) are perpendicular to each other, the first column (52) is threadedly connected to the first base (51) and faces the base plate; The elastic positioning column includes: A second base (61), the second base (61) being arranged on the positioning mounting plate, and a mounting hole (611) being provided on the second base (61); A limiting seat (62), wherein the limiting seat (62) has a groove (621), and a limiting step is provided at the bottom of the groove (621), which divides a portion of the groove (621) into a first limiting groove and a second limiting groove; a first positioning tube (63), one end of the first positioning tube (63) being inserted into the mounting hole (611), and the other end of the first positioning tube (63) being inserted into the first limiting groove and abutting against one side of the limiting step; Spring (64) and positioning step (65); a second positioning tube (66), wherein the second positioning tube (66) is sleeved on the spring (64), one end of the second positioning tube (66) is inserted into the first positioning tube (63), and the other end of the second positioning tube (66) is connected to the positioning step (65); A second column (67), the second column (67) is connected to the positioning step (65), the second column (67) is perpendicular to the second positioning tube (66) and faces the base plate.

10. A film coating device, characterized in that: include: The alignment device according to any one of claims 1 to 9; A film coating device is provided on one side of the carrying portion.

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