AMR transport vehicle

Abstract

The utility model discloses an AMR transport vehicle which comprises a vehicle body and a pallet arranged on the vehicle body, at least one loading station is arranged on the pallet, a first enclosure and a second enclosure are arranged in the loading station, the first enclosure forms a first position used for limiting a wafer box in an enclosure mode, the second enclosure is arranged on the periphery of the first enclosure, and the second enclosure is arranged on the periphery of the second enclosure. And the second enclosure encloses to form a second position for limiting the wafer tray carrier, and at least part of the second enclosure extends to the upper part of the first enclosure. According to the AMR transport vehicle, the first enclosure and the second enclosure are arranged on the carrying station, the wafer boxes can be limited on the pallets, the wafer tray carriers can be limited on the pallets, and the AMR transport vehicle can adapt to transport of the wafer boxes and the wafer tray carriers at the same time.

Description

Technical Field

[0001] The present application relates to the technical field of transport vehicles, and in particular to an AMR transport vehicle. Background Art

[0002] In the existing semiconductor production process, wafer boxes and wafer tray carriers are common tools for transporting wafers. In the process of moving wafer boxes and wafer tray carriers, in order to save manpower, AMR (Autonomous Mobile Robot) transport vehicles are usually used for autonomous transportation. However, the existing AMR transport vehicles are customized according to wafer boxes or wafer tray carriers. One AMR transport vehicle can only transport one tool and cannot be used in combination. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application provides an AMR transport vehicle to solve the problem that the prior art AMR transport vehicle cannot be used to transport both wafer cassettes and wafer tray carriers.

[0004] The purpose of this application can be achieved through the following technical solutions:

[0005] The present application provides an AMR transport vehicle, which includes a vehicle body and a cargo pallet arranged on the vehicle body, at least one loading station being arranged on the cargo pallet, and a first enclosure and a second enclosure being arranged in the loading station, the first enclosure being arranged to form a first position for limiting a wafer box, the second enclosure being arranged on the periphery of the first enclosure, the second enclosure being arranged to form a second position for limiting a wafer tray carrier, and the second enclosure at least partially extending above the first enclosure.

[0006] Optionally, the first enclosure includes a plurality of first stop blocks arranged at intervals, each of the first stop blocks has a first stop surface, the first stop surface is L-shaped, and the first stop surfaces of the plurality of first stop blocks are arranged on the pallet to form the first position.

[0007] Optionally, the first stop block includes a first support portion and a first side stop portion arranged on the edge of the top surface of the first support portion, the first stop surface is located on the first side stop portion, and the first side stop portion is surrounded on the inner side of the first support portion to form a first position.

[0008] Optionally, there is an arc transition between two mutually perpendicular surfaces of each first stop surface.

[0009] Optionally, the first position is substantially rectangular, and four first stops are provided, and the four first stops are respectively located at four corners of the first position.

[0010] Optionally, the second enclosure includes a plurality of second blocks arranged at intervals around the outside of the first enclosure, each second block has a second stop surface, the second stop surface is L-shaped, and the second stop surfaces of the plurality of second blocks are arranged above the first enclosure to form the second position.

[0011] Optionally, the second stop block includes a second supporting portion and a second side stop portion arranged on the edge of the top surface of the second supporting portion, the second stop surface is located on the second side stop portion, and the second side stop portion is surrounded on the inner side of the second supporting portion to form a second position.

[0012] Optionally, the cargo pallet includes a fixed cargo pallet fixed on the vehicle body and a sliding cargo pallet slidably arranged on the vehicle body, the sliding cargo pallet is arranged below the fixed cargo pallet, the vehicle body is provided with a loading platform, the sliding cargo pallet is slidably mounted on the loading platform, a sliding rail and a slider matched with the sliding rail are arranged between the sliding cargo pallet and the loading platform, one of the sliding rail and the slider is mounted on the sliding cargo pallet, and the other of the sliding rail and the slider is mounted on the loading platform.

[0013] Optionally, a roller follower is provided on one side of the slide rail, and the roller follower is configured to support the sliding pallet. When the sliding pallet moves relative to the load-bearing platform, the slider moves closer to or away from the roller follower.

[0014] Optionally, the vehicle body includes a mobile base and a central control box arranged in the middle of the top surface of the mobile base, and cargo trays are symmetrically arranged on both sides of the central control box.

[0015] Beneficial effect: By setting a first enclosure and a second enclosure on the loading station, and setting the second enclosure on the periphery of the first enclosure, and extending the second enclosure at least partially above the first enclosure, both the wafer box and the wafer pallet carrier can be confined on the pallet, so that the AMR transport vehicle in this application can adapt to the transportation of wafer boxes and wafer pallet carriers at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present application will be further described below with reference to the accompanying drawings.

[0017] Figure 1 This is a three-dimensional diagram of an AMR transport vehicle in one embodiment of the present application;

[0018] Figure 2 This is a schematic structural diagram of a sliding cargo tray, a load-bearing platform, a first enclosure, and a second enclosure in one of the embodiments of the present application.

[0019] Description of reference numerals:

[0020] 1. Vehicle body; 11. Loading platform; 12. Mobile base; 13. Central control box; 2. Pallet; 21. Fixed pallet; 22. Sliding pallet; 3. Loading station; 4. First enclosure; 41. First stopper; 411. First stop surface; 412. First support portion; 413. First side stopper; 414. First guide portion; 5. Second enclosure; 51. Second stopper; 511. Second stop surface; 512. Second support portion; 513. Second side stopper; 514. Second guide portion; 6. Limit rod; 61. Third guide portion; 7. Slide rail; 8. Slider; 100. Wafer box; 200. Wafer tray carrier. DETAILED DESCRIPTION

[0021] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0022] See also Figure 1 and Figure 2 As shown, in some embodiments, the present application provides an AMR transport vehicle, which includes a vehicle body 1 and a cargo pallet 2 arranged on the vehicle body 1, at least one loading station 3 is arranged on the cargo pallet 2, and a first enclosure 4 and a second enclosure 5 are arranged in the loading station 3, the first enclosure 4 is configured to form a first position for limiting the wafer box 100, the second enclosure 5 is arranged on the periphery of the first enclosure 4, the second enclosure 5 is configured to form a second position for limiting the wafer pallet carrier 200, and the second enclosure 5 at least partially extends above the first enclosure 4, thereby avoiding the first enclosure 4 interfering with the second enclosure 5 in limiting the wafer pallet carrier 200.

[0023] By arranging a first enclosure 4 and a second enclosure 5 on the loading station 3, and arranging the second enclosure 5 on the periphery of the first enclosure 4, and extending the second enclosure 5 at least partially above the first enclosure 4, both the wafer box 100 and the wafer tray carrier 200 can be confined on the pallet 2, so that the AMR transport vehicle in this application can adapt to the transportation of the wafer box 100 and the wafer tray carrier 200 at the same time.

[0024] See also Figure 1 and Figure 2 As shown, in some embodiments, the first enclosure 4 includes a plurality of first stops 41 arranged at intervals, each first stop block 41 has a first stop surface 411, the first stop surface 411 is L-shaped, and the first stop surfaces 411 of the plurality of first stops 41 are arranged on the pallet 2 to form a first position, so that the wafer box 100 is restricted between the first stop surfaces 411 of the plurality of first stops 41.

[0025] See also Figure 1 and Figure 2 As shown, in some embodiments, the first stopper 41 includes a first support portion 412 and a first side stop 413 disposed on the top edge of the first support portion 412. Both the first support portion 412 and the first side stop 413 are generally L-shaped, with one side portion of the first support portion 412 extending inwardly of the first side stop 413 to facilitate subsequent installation of a first sensor on the first support portion 412 for detecting whether a wafer cassette 100 is placed in the first position. A first stop surface 411 is located on the first side stop 413, which surrounds the first support portion 412 to form the first position. When the wafer cassette 100 is placed in the first position, the first support portion 412 supports the wafer cassette 100, while the first side stop 413 blocks the wafer cassette 100 from all sides, ensuring that the wafer cassette 100 is stably restrained on the pallet 2 and preventing it from swaying on the pallet 2 during transport by the AMR.

[0026] See also Figure 1 and Figure 2 As shown, in some embodiments, a first guide portion 414 is provided on the first side stop 413 , and the first guide portion 414 is inclined downward from the top of the first side stop 413 to guide the wafer box 100 to fall into the first position inside the first side stop 413 .

[0027] See also Figure 1 and Figure 2 As shown, in some embodiments, the arc transition between the two mutually perpendicular surfaces of each first stop surface 411 allows the corners of the wafer box 100 to fit with the corner clearance of the first stop surface 411 after the wafer box 100 is placed in the first position, thereby avoiding collision and damage between the corners of the wafer box 100 and the first side stop portion 413.

[0028] See also Figure 1 and Figure 2 As shown, in some embodiments, the first position is generally rectangular, and four first stops 41 are provided. The four first stops 41 are respectively located at the four corners of the first position, thereby improving the stability of the wafer box 100 in the first position and preventing the wafer box 100 from shaking during transportation.

[0029] See also Figure 1 and Figure 2 As shown, in some embodiments, the second enclosure 5 includes a plurality of second stops 51 spaced apart around the outside of the first enclosure 4, each second stop block 51 having a second stop surface 511, and the second stop surface 511 is L-shaped. The second stop surfaces 511 of the plurality of second stops 51 are arranged above the first enclosure 4 to form a second position, so that the wafer tray carrier 200 is restricted between the second stop surfaces 511 of the plurality of second stops 51.

[0030] See also Figure 1 and Figure 2 As shown, in some embodiments, the second stopper 51 includes a second support portion 512 and a second side stop portion 513. The second support portion 512 is generally rectangular, and the second side stop portion 513 is generally L-shaped. The second side stop portion 513 is disposed on the top edge of the second support portion 512, so that the top surface of the second support portion 512 is located inside the second side stop portion 513, leaving sufficient space for mounting a second sensor to subsequently detect whether a wafer tray carrier 200 is placed at the second position. The second stop surface 511 is located on the second side stop portion 513, and the second side stop portion 513 is disposed inside the second support portion 512 to form the second position. When the wafer tray carrier 200 is placed in the second position, the second supporting portion 512 supports the wafer tray carrier 200, and the second side stop portion 513 stops the wafer box 100 from all sides of the wafer tray carrier 200, so that the wafer tray carrier 200 can be stably restricted on the pallet 2, preventing the wafer tray carrier 200 from shaking freely on the pallet 2 during the AMR transport vehicle.

[0031] See also Figure 1 and Figure 2 As shown, in some embodiments, a second guide portion 514 is provided on the second side stop 513 , and the second guide portion 514 is inclined downward from the top of the second side stop 513 to guide the wafer tray carrier 200 to fall into the second position inside the second side stop 513 .

[0032] See also Figure 1 and Figure 2 As shown, in some embodiments, the arc transition between the two mutually perpendicular surfaces of each second stop surface 511 allows the corners of the wafer tray carrier 200 to fit with the corner clearances of the second stop surfaces 511 after the wafer tray carrier 200 is placed in the second position, thereby avoiding collision and damage between the corners of the wafer tray carrier 200 and the second side stop portions 513.

[0033] See also Figure 1 and Figure 2 As shown, in some embodiments, the second position is generally rectangular, and four second stops 51 are provided. The four second stops 51 are respectively located at the four corners of the second position, thereby improving the stability of the wafer tray carrier 200 in the second position and preventing the wafer tray carrier 200 from shaking during transportation.

[0034] See also Figure 1 and Figure 2As shown, in some embodiments, a limiting rod 6 is provided at each end of the loading station 3 to limit the position of the wafer cassette 100 and the wafer tray carrier 200. This prevents the wafer cassette 100 and the wafer tray carrier 200 from jumping out of the corresponding first and second positions during transportation and falling off the pallet 2 to the ground, thereby providing secondary protection for the wafer cassette 100 and the wafer tray carrier 200. Furthermore, a third guide portion 61 is provided at the top of the limiting rod 6. The third guide portion 61 is arranged downwardly from the top of the limiting rod 6 to guide the placement of the wafer cassette 100 and the wafer tray carrier 200.

[0035] See also Figure 1 and Figure 2 As shown, in some embodiments, the cargo pallet 2 includes a fixed cargo pallet 21 fixedly set on the vehicle body 1 and a sliding cargo pallet 22 slidably set on the vehicle body 1, the sliding cargo pallet 22 is set below the fixed cargo pallet 21, the vehicle body 1 has a carrying platform 11, the sliding cargo pallet 22 is slidably installed on the carrying platform 11, a slide rail 7 and a slider 8 matched with the slide rail 7 are set between the sliding cargo pallet 22 and the carrying platform 11, one of the slide rail 7 and the slider 8 is installed on the sliding cargo pallet 22, and the other of the slide rail 7 and the slider 8 is installed on the carrying platform 11, so that the sliding cargo pallet 22 can be pulled out relative to the fixed cargo pallet 21, so that the subsequent mechanical gripper can grab the wafer box 100 or the wafer tray carrier 200 and place it on the loading station 3 of the sliding cargo pallet 22.

[0036] See also Figure 1 and Figure 2 As shown, in some embodiments, the slide rail 7 is fixedly mounted on the carrier platform 11 , and the slider 8 is fixedly mounted on the sliding pallet 22 .

[0037] See also Figure 1 and Figure 2 As shown, in some embodiments, a slider 8 is fixedly mounted at one end of the bottom of the sliding pallet 22 along the length of the slide rail 7. A roller follower (not shown) is also fixedly mounted on the support platform 11. The roller follower is located on one side of the slide rail 7 and is disposed near the first end of the slide rail 7. The roller follower is configured to support the sliding pallet 22, while the slider 8 is initially located at the second end of the slide rail 7. When the sliding pallet 22 is withdrawn from directly beneath the fixed pallet 21, the slider 8 moves toward the roller follower. When the sliding pallet 22 is pushed back under the fixed pallet 21, the slider 8 moves away from the roller follower. The provision of the roller follower can further improve the stability of the movement of the sliding pallet 22, making the sliding pallet 22 more stable when moving relative to the fixed pallet 21.

[0038] See also Figure 1 and Figure 2As shown, in some embodiments, the vehicle body 1 includes a mobile base 12 and a central control box 13 located in the middle of the top surface of the mobile base 12. Cargo trays 2 are symmetrically arranged on both sides of the central control box 13, so that the weight of the two sides of the central control box 13 is roughly equal, thereby ensuring the stability of the vehicle body during movement. Furthermore, having cargo trays 2 on both sides can also enable more cargo to be transported at one time, improving transportation efficiency.

[0039] Specifically, fixed cargo pallets 21 and sliding cargo pallets 22 are installed on both sides of the central control box 13. The fixed cargo pallets are fixedly installed on the central control box 13, and the sliding cargo pallets 22 are slidably installed on the supporting platform 11 of the mobile base 12. Three loading stations 3 are set on each fixed cargo pallet 21 and sliding cargo pallet 22, so that the AMR transport vehicle of the present application has 12 loading stations 3 and has a strong carrying capacity.

[0040] The above is a detailed description of an embodiment of the present application, but the content is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.

[0041] It should be noted that the words "second", "second" and similar terms used in this application do not indicate any order, quantity or importance, but are only used to distinguish different components. The descriptions of the directions of "left", "right", "left side", "right side", "upper", "lower", "top", "bottom" and so on in this application are all defined based on the relationship between the orientations or positions shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application. In the description of this application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0042] In the description of this application, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

Claims

1. An AMR transport vehicle, characterized in that: The AMR transport vehicle includes a vehicle body and a cargo pallet arranged on the vehicle body, at least one loading station is arranged on the cargo pallet, and a first enclosure and a second enclosure are arranged in the loading station, the first enclosure is arranged to form a first position for limiting the wafer box, the second enclosure is arranged on the periphery of the first enclosure, the second enclosure is arranged to form a second position for limiting the wafer tray carrier, and the second enclosure extends at least partially above the first enclosure.

2. The AMR transport vehicle according to claim 1, characterized in that: The first enclosure includes a plurality of first stop blocks arranged at intervals, each of the first stop blocks has a first stop surface, the first stop surface is L-shaped, and the first stop surfaces of the plurality of first stop blocks are arranged on the pallet to form the first position.

3. The AMR transport vehicle according to claim 2, characterized in that: The first stop block includes a first support portion and a first side stop portion arranged at the edge of the top surface of the first support portion. The first stop surface is located on the first side stop portion. The first side stop portion is surrounded by the first support portion to form a first position.

4. The AMR transport vehicle according to claim 2, characterized in that: There is an arc transition between two mutually perpendicular surfaces of each of the first stop surfaces.

5. The AMR transport vehicle according to claim 2, characterized in that: The first position is substantially rectangular, and four first stoppers are provided. The four first stoppers are respectively located at four corners of the first position.

6. The AMR transport vehicle according to claim 2, characterized in that: The second enclosure includes a plurality of second blocks arranged at intervals around the outside of the first enclosure, each of the second blocks has a second stop surface, the second stop surface is L-shaped, and the second stop surfaces of the plurality of second blocks are arranged above the first enclosure to form the second position.

7. The AMR transport vehicle according to claim 6, characterized in that: The second stop block includes a second support portion and a second side stop portion arranged at the edge of the top surface of the second support portion, the second stop surface is located on the second side stop portion, and the second side stop portion is surrounded inside the second support portion to form a second position.

8. The AMR transport vehicle according to any one of claims 1 to 7, characterized in that: The cargo pallet includes a fixed cargo pallet fixed on the vehicle body and a sliding cargo pallet slidably arranged on the vehicle body, the sliding cargo pallet is arranged below the fixed cargo pallet, the vehicle body is provided with a carrying platform, the sliding cargo pallet is slidably mounted on the carrying platform, a slide rail and a slider matched with the slide rail are provided between the sliding cargo pallet and the carrying platform, one of the slide rail and the slider is mounted on the sliding cargo pallet, and the other of the slide rail and the slider is mounted on the carrying platform.

9. The AMR transport vehicle according to claim 8, characterized in that: A roller follower is provided on one side of the slide rail, and the roller follower is configured to support the sliding pallet. When the sliding pallet moves relative to the fixed pallet, the slider moves closer to or farther away from the roller follower.

10. The AMR transport vehicle according to claim 1, characterized in that: The vehicle body includes a mobile base and a central control box arranged in the middle of the top surface of the mobile base, and cargo trays are symmetrically arranged on both sides of the central control box.

Images