Front flower basket conveying system of full-automatic wafer groove type cleaning machine

Abstract

The utility model discloses a front-arranged flower basket conveying system of a full-automatic wafer groove type cleaning machine. The front-arranged flower basket conveying system comprises a mechanical back plate. X-axis sliding rails are arranged in the mechanical back plate in an array mode, the mechanical back plate is formed by connecting a plurality of metal plates, a front conveying mechanical arm box is arranged on the outer side of the mechanical back plate, and a jig body is arranged on the top of the front conveying mechanical arm box. A lifting column fixing seat is arranged in the front conveying manipulator box body, wire grooves are formed in the left side and the right side in the front conveying manipulator box body respectively, and a Z-axis motor is arranged at the bottom of the front conveying manipulator box body; according to the system, high-precision automatic operation is achieved through the Z / X-axis motor, the ball screw and the like, and stable vibration reduction of the lifting and transverse moving structure is achieved. The wire duct drag chain facilitates cable management and maintenance, the limiting block guarantees safety, and the sensor groove achieves position monitoring. The clamping jaw and the sliding rail are matched with multiple workpieces, operation accuracy is improved through the induction rod, and the whole device is compact and space-saving.

Description

Technical Field

[0001] The utility model belongs to the technical field related to etching machines, and particularly relates to a front flower basket conveying system for a full-automatic wafer tank cleaning machine. Background Art

[0002] Wet etching technology is an etching process used in microelectronics manufacturing and the semiconductor industry. Wet etching uses chemical solutions to remove materials. It is usually used for cleaning, removing surface films or etching materials. By immersing the sample in a chemical etching solution, the material is removed by chemical reaction. Commonly used etching solutions include hydrofluoric acid, nitric acid, phosphoric acid, etc. Wet etching is particularly suitable for the processing of materials such as silicon, silicon oxide, silicon nitride and metals. It can selectively remove certain layers according to the chemical properties of different materials, while leaving other layers unchanged. The etching process is very sensitive to temperature and immersion time, which requires precise control during operation to ensure the required etching depth and quality. Wet etcher is usually equipped with a safety system, a liquid circulation system and a temperature control system to ensure operational safety and etching uniformity. In the manufacture of MEMS, it is used for the processing of microstructures.

[0003] However, most of the existing wet etching machines have a top-mounted or rear-mounted transport system, which makes it inconvenient to debug the hardware during equipment debugging. At the same time, the long lever arm makes the equipment unstable during transportation, making hardware debugging more difficult and requiring complex disassembly and assembly, which increases the time and difficulty of debugging. Utility Model Content

[0004] The purpose of the present invention is to provide a front-mounted basket transport system for a fully automatic wafer tank cleaning machine, so as to solve the problem proposed in the above background technology that most of the existing wet etching machines have top-mounted or rear-mounted transport systems, which makes it inconvenient to debug the hardware during equipment debugging. At the same time, due to the long force arm, the equipment is unstable during transportation, and the hardware debugging of the equipment becomes more difficult, requiring complex disassembly and assembly, which increases the time and difficulty of debugging.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a front flower basket conveying system for a fully automatic wafer tank cleaning machine, comprising a mechanical backplane;

[0006] An X-axis slide rail is arranged in an array at the inner position of the mechanical backplate, and the mechanical backplate is connected by a plurality of metal plates. A front transport robot box is arranged at the outer position of the mechanical backplate, and a fixture body is arranged at the top position of the front transport robot box;

[0007] A lifting column fixing seat is provided at an inner position of the front transport robot box, wire grooves are provided at the left and right sides of the front transport robot box respectively, and a Z-axis motor is provided at the bottom position of the front transport robot box.

[0008] Preferably, a lifting column is provided at the top of the lifting column fixing seat, a Z-axis slide rail is provided below the lifting column fixing seat, a Z-axis limit block is provided at the top of the Z-axis slide rail, and a drag chain is provided inside the wire trough.

[0009] Preferably, a Z-axis sensor mounting slot is provided at the outer position inside the wire trough, a Z-axis motor tensioning block is provided at the outer position of the front conveying robot box, an X-axis motor is provided at the inner position of the wire trough, a ball screw is provided at the middle position inside the front conveying robot box, the Z-axis motor drives the ball screw to rotate through the synchronous belt mechanism below, and the lifting column fixing seat moves up and down in the Z-axis slide rail through the ball screw.

[0010] Preferably, X-axis limit blocks are provided at the left and right sides of the mechanical backplate, a transverse rack is provided at the internal position of the mechanical backplate, X-axis slide rails are provided on the upper and lower sides of the mechanical backplate respectively, and an X-axis sensor mounting slot is provided at the bottom position of the mechanical backplate.

[0011] Preferably, a wire passing shaft fixing seat is provided at an internal position of the jig body, a clamping claw slide rail is provided at the bottom position of the wire passing shaft fixing seat, an air curtain plate is provided at the right position of the wire passing shaft fixing seat, and a wire passing shaft is provided at an internal position of the wire passing shaft fixing seat.

[0012] Preferably, a mechanical clamp is provided at the bottom of the wire passing shaft, a workpiece body is provided at the bottom of the mechanical clamp, and a tooling sensing rod is provided at the right side of the mechanical clamp.

[0013] Preferably, box anti-collision blocks are provided on the left and right sides of the front transport robot box, a safety switch is provided on the side of the front transport robot box, corrosion-resistant plastic materials are used for the parts where the mechanical grippers contact the liquid, and a fluorine-sprayed stainless steel cover is used on the outside of the wire shaft fixing seat for overall covering and protection. The front flower basket transport system of the fully automatic wafer slot cleaning machine is powered by an external power supply.

[0014] Compared with the existing technology, the utility model provides a front flower basket conveying system for a fully automatic wafer tank cleaning machine, which has the following beneficial effects:

[0015] 1. Through the arrangement of the lifting column fixing seat, wire trough, Z-axis motor, lifting column, Z-axis slide rail, Z-axis limit block, drag chain, Z-axis sensor mounting slot, Z-axis motor tensioning block, X-axis motor, ball screw, X-axis limit block, transverse rack, X-axis slide rail and X-axis sensor mounting slot, the use of ball screw provides high-precision displacement control, so that the lifting column fixing seat can move up and down smoothly and accurately in the Z-axis slide rail, thereby ensuring the positioning accuracy of the workpiece during the processing process. The configuration of the Z-axis motor and the X-axis motor enables the entire robot's transportation process to be automated, reducing manual intervention and improving production efficiency. The design of the lifting column and the Z-axis slide rail makes the coordination between the components more stable, and during lifting and lowering During operation, it can effectively reduce vibration and swing, enhance the stability of the system, and ensure working accuracy. The drag chain is set inside the cable duct to effectively manage cables and other cables, avoid cable entanglement, reduce failure rate, and facilitate daily maintenance and replacement. The design of the front transport robot box makes the internal layout of the components reasonable, saves equipment space, and improves the compactness of the overall system, making it suitable for smaller working areas. The Z-axis limit block and X-axis limit block can effectively protect the equipment, avoid mechanical damage caused by the device exceeding the range of motion, and enhance the safety and reliability of the equipment. Equipped with a Z-axis sensor installation slot, it can realize real-time monitoring and feedback of the Z-axis position, realize a rapid response mechanism, and improve the working efficiency of the entire system.

[0016] 2. Through the setting of the wire shaft fixing seat, clamping claw slide, air curtain plate, wire shaft, mechanical clamping claw and tooling sensing rod, the wire shaft fixing seat provides good structural support, which can effectively fix the wire shaft, ensure the stability of the workpiece during operation, and reduce the possibility of deviation and swing. The mechanical clamping claw can flexibly adapt to workpieces of various sizes and shapes. Through the clamping claw slide, precise clamping action can be achieved to ensure the stability of the workpiece during cleaning. Through the sensing rod, automatic detection can be performed before the workpiece is clamped to ensure the existence and correct position of the workpiece, which helps to improve the accuracy and safety of the operation. The clamping claw slide facilitates the installation and removal of the clamping claw, simplifies the process of daily maintenance and troubleshooting, and reduces downtime. The entire structural design ensures that the mechanical clamping claw can achieve high-precision positioning during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural diagram of the present utility model.

[0018] Figure 2 This is a structural diagram of the main body of the flower basket in the present invention.

[0019] Figure 3 This is a structural diagram of the mechanical backboard in the present utility model.

[0020] Figure 4 It is a structural schematic diagram of the fixture main body in the utility model.

[0021] Figure 5 This is a schematic structural diagram of the box body in the utility model.

[0022] In the figure: 1. Fixture body; 2. Threaded shaft fixing seat; 3. Gripper slide rail; 4. Threaded shaft; 5. Tooling sensor rod; 6. Mechanical gripper; 7. Workpiece body; 8. Lifting column; 9. Wire trough; 10. Z-axis sensor mounting slot; 11. Drag chain; 12. Z-axis slide rail; 13. Ball screw; 14. X-axis motor; 15. Z-axis motor; 16. Box anti-collision block; 17. X-axis limit block; 18. Mechanical back plate; 19. Transverse rack; 20. X-axis sensor mounting slot; 21. Z-axis limit block; 22. Air curtain plate; 23. Lifting column fixing seat; 24. X-axis slide rail; 25. Z-axis motor tensioning block; 26. Safety switch; 27. Front transport robot box. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] The utility model provides Figure 1-5 The front basket conveying system of a fully automatic wafer tank cleaning machine shown includes a mechanical backplane 18;

[0025] An X-axis slide rail 24 is arranged in an array at the inner position of the mechanical back plate 18. The mechanical back plate 18 is connected by multiple metal plates. A front transport robot box 27 is arranged at the outer position of the mechanical back plate 18. The fixture body 1 is arranged at the top position of the front transport robot box 27.

[0026] A lifting column fixing seat 23 is provided inside the front transport robot box 27 , wire grooves 9 are provided on the left and right sides of the front transport robot box 27 , and a Z-axis motor 15 is provided at the bottom of the front transport robot box 27 .

[0027] A lifting column 8 is provided at the top of the lifting column fixing seat 23, a Z-axis slide rail 12 is provided below the lifting column fixing seat 23, a Z-axis limit block 21 is provided at the top of the Z-axis slide rail 12, and a drag chain 11 is provided inside the wire trough 9.

[0028] A Z-axis sensor mounting groove 10 is provided at the outer position inside the wire groove 9, a Z-axis motor tensioning block 25 is provided at the outer position of the front conveying robot box 27, an X-axis motor 14 is provided at the inner position of the wire groove 9, and a ball screw 13 is provided at the middle position inside the front conveying robot box 27. The Z-axis motor 15 drives the ball screw 13 to rotate through the synchronous belt mechanism below, and the lifting column fixing seat 23 moves up and down in the Z-axis slide rail 12 through the ball screw 13.

[0029] X-axis limit blocks 17 are provided on the left and right sides of the mechanical back plate 18, a transverse rack 19 is provided inside the mechanical back plate 18, X-axis slide rails 24 are provided on the upper and lower sides of the mechanical back plate 18, and an X-axis sensor mounting slot 20 is provided at the bottom of the mechanical back plate 18.

[0030] A wire passing shaft fixing seat 2 is provided at the internal position of the fixture body 1, a clamping claw slide rail 3 is provided at the bottom position of the wire passing shaft fixing seat 2, an air curtain plate 22 is provided at the right position of the wire passing shaft fixing seat 2, and a wire passing shaft 4 is provided at the internal position of the wire passing shaft fixing seat 2.

[0031] A mechanical clamp 6 is provided at the bottom of the wire reel 4 , a workpiece body 7 is provided at the bottom of the mechanical clamp 6 , and a tooling sensing rod 5 is provided at the right side of the mechanical clamp 6 .

[0032] Box anti-collision blocks 16 are set on the left and right sides of the front transport robot box 27, and a safety switch 26 is set on the side of the front transport robot box 27. The mechanical clamp 6 is made of corrosion-resistant plastic material at the contact point with the liquid medicine, and the outer side of the wire reel fixing seat 2 is covered and protected by a fluorine-sprayed stainless steel cover. The front flower basket transport system of the fully automatic wafer slot cleaning machine is powered by an external power supply.

[0033] In this embodiment, the specific implementation steps of the front flower basket conveying system of a fully automatic wafer slot cleaning machine are as follows: the operator places the tooling in the loading area, the X-axis motor 14 of the front flower basket conveying system is started, the box moves to the loading position, the Z-axis motor 15 is started, the mechanical gripper 6 reaches the clamping position for clamping, the tooling sensing rod 5 contacts the product workpiece body 7, and feedback signals are given. The front flower basket conveying system continues to operate, the Z-axis motor 15 is started, and the mechanical gripper 6 moves to the transplanting position and then the Y-axis begins to transport to each liquid medicine tank. After the liquid medicine tank processing time is reached, the front flower basket conveying system continues to repeat the previous action until it is finally placed in the unloading area, and the operator can take it out.

[0034] like Figure 1-2 and Figure 5As shown, a lifting column fixing seat 23 is provided at the internal position of the front transport robot box 27, and a wire groove 9 is provided at the left and right sides of the front transport robot box 27 respectively. A Z-axis motor 15 is provided at the bottom position of the front transport robot box 27, a lifting column 8 is provided at the top position of the lifting column fixing seat 23, a Z-axis slide rail 12 is provided at the lower position of the lifting column fixing seat 23, a Z-axis limit block 21 is provided at the top position of the Z-axis slide rail 12, a drag chain 11 is provided at the internal position of the wire groove 9, a Z-axis sensor installation groove 10 is provided at the outer position of the inner side of the wire groove 9, and a Z-axis sensor installation groove 10 is provided at the outer position of the front transport robot box 27. A Z-axis motor tensioning block 25 is provided, an X-axis motor 14 is provided at the inner position of the wire groove 9, a ball screw 13 is provided at the middle position inside the front transport robot box 27, and the Z-axis motor 15 drives the ball screw 13 to rotate through the synchronous belt mechanism below. The lifting column fixing seat 23 moves up and down in the Z-axis slide rail 12 through the ball screw 13, and X-axis limit blocks 17 are provided on the left and right sides of the mechanical back plate 18. A transverse rack 19 is provided inside the mechanical back plate 18, and X-axis slide rails 24 are respectively provided on the upper and lower sides of the mechanical back plate 18. An X-axis sensor mounting groove 20 is provided at the bottom of the mechanical back plate 18.

[0035] Preferably, the fixture body 1 is connected to the lifting column 8, and the lifting column 8 is fixed to the lifting column fixing seat 23 with bolts. The Z-axis motor 15 drives the ball screw 13 to rotate through the synchronous belt mechanism below. The ball nut is fixed on the lifting column fixing seat 23. When the ball screw 13 rotates, the lifting column fixing seat 23 moves up and down. At the same time, in order to ensure stability, the Z-axis slide rail 12 is used for support and guidance. At the same time, the Z-axis sensor mounting slot 10 is also installed with a sensor for real-time signal feedback. The X-axis operation is driven by a gear rack mechanism and is controlled by the X-axis motor 14 installed on the manipulator box. A gear is installed on the head of the X-axis motor 14, which cooperates with the transverse rack 19 on the mechanical back plate and is tensioned by the Z-axis motor tensioning block 25. The clearance between the gear rack is adjusted. The front transport robot box 27 is installed on the front mechanical back plate 18. The mechanical back plate 18 is made of metal to ensure stability under long-term stress and a long service life. The mechanical back plate 18 is connected by multiple metal plates, which are positioned by pins to ensure the horizontality of the z-axis. At the same time, a horizontal adjustment screw is left to ensure that the entire back plate is horizontal on the z-axis. An X-axis limit block 17 is installed on the left and right of the mechanical back plate. The mechanical limit limits the X-axis movement stroke of the operating robot box. The transverse rack 19 on the mechanical back plate 18 cooperates with the gear in the robot box to achieve the effect of transverse movement of the robot box. At the same time, the X-axis is also installed with an X-axis slide rail 24 to ensure the overall stability of the robot box.

[0036] like Figure 1-2 and Figure 4As shown, a wire passing shaft fixing seat 2 is provided at the internal position of the fixture body 1, a clamping claw slide rail 3 is provided at the bottom position of the wire passing shaft fixing seat 2, an air curtain plate 22 is provided at the right side position of the wire passing shaft fixing seat 2, a wire passing shaft 4 is provided at the internal position of the wire passing shaft fixing seat 2, a mechanical clamping claw 6 is provided at the bottom position of the wire passing shaft 4, a workpiece body 7 is provided at the bottom position of the mechanical clamping claw 6, and a tooling sensing rod 5 is provided at the right side position of the mechanical clamping claw 6.

[0037] Preferably, the opening and closing of the mechanical clamp 6 is controlled by the fixture body 1 to ensure operational stability and precise positioning of the clamp. At the same time, when the tooling is in place, the sensor provides feedback of the information in place to ensure information display on the PC during automatic operation. The bobbin 4 and the clamp slide 3 are fixed and forcibly locked by the bobbin fixing seat 2 to ensure the stability and life of the bobbin 4 during long-term use. When the mechanical clamp 6 is in operation, the clamp is used to clamp and hook the product tooling. At the same time, when the tooling is in place, the tooling sensing rod 5 senses the tooling in place to ensure timely feedback signals when the tooling is abnormally unhooked during clamping and transportation.

[0038] like Figure 1-5 As shown, box anti-collision blocks 16 are installed on the left and right sides of the box to prevent the two boxes from colliding during operation. At the same time, safety switches 26 are also installed on both sides. When they come into contact with an object, an emergency stop signal will be issued to prevent people from being squeezed and causing safety accidents. Box anti-collision blocks 16 are set on the left and right sides of the front transport robot box 27, and a safety switch 26 is set on the side of the front transport robot box 27. The mechanical clamp 6 is made of corrosion-resistant plastic material at the contact point with the liquid medicine, and a fluorine-sprayed stainless steel cover is used on the outside of the wire reel fixing seat 2 for overall covering and protection. The front flower basket transport system of the fully automatic wafer slot cleaning machine is powered by an external power supply.

[0039] Optionally, in order to prevent liquid splashing or gas corrosion, corrosion-resistant plastic materials are used for the parts of the mechanical gripper 6 that contact the liquid, while ensuring that the metal ion content in the liquid is not affected. The wind curtain plate 22 seals and blocks the operating wire shaft avoidance groove. The wire shaft 4 and other metal materials are treated with a surface fluorine spraying process to ensure that they are not corroded. A fluorine-sprayed stainless steel cover is used for overall covering and protection to increase the service life of the device.

[0040] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A front basket transport system for a fully automatic wafer tank cleaning machine, comprising a mechanical backplane (18); An X-axis slide rail (24) is arranged in an array at an inner position of the mechanical back plate (18), the mechanical back plate (18) is formed by connecting a plurality of metal plates, a front transport robot box (27) is arranged at an outer position of the mechanical back plate (18), and a fixture body (1) is arranged at a top position of the front transport robot box (27); Its characteristics are: A lifting column fixing seat (23) is provided at an internal position of the front transport robot box (27), wire grooves (9) are provided at left and right sides of the front transport robot box (27), and a Z-axis motor (15) is provided at the bottom of the front transport robot box (27).

2. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 1 is characterized in that: A lifting column (8) is provided at the top of the lifting column fixing seat (23), a Z-axis slide rail (12) is provided at the bottom of the lifting column fixing seat (23), a Z-axis limit block (21) is provided at the top of the Z-axis slide rail (12), and a drag chain (11) is provided at an inner position of the wire trough (9).

3. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 2, characterized in that: A Z-axis sensor mounting groove (10) is provided at an outer position inside the wire groove (9), a Z-axis motor tensioning block (25) is provided at an outer position of the front conveying robot box (27), an X-axis motor (14) is provided at an inner position of the wire groove (9), a ball screw (13) is provided at an inner middle position of the front conveying robot box (27), the Z-axis motor (15) drives the ball screw (13) to rotate through a synchronous belt mechanism below, and the lifting column fixing seat (23) moves up and down in the Z-axis slide rail (12) through the ball screw (13).

4. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 3, characterized in that: X-axis limit blocks (17) are provided at the left and right sides of the mechanical back plate (18), a transverse rack (19) is provided at the inner position of the mechanical back plate (18), X-axis slide rails (24) are provided at the upper and lower sides of the mechanical back plate (18), and an X-axis sensor installation groove (20) is provided at the bottom position of the mechanical back plate (18).

5. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 1, characterized in that: A wire passing shaft fixing seat (2) is provided at an internal position of the fixture body (1), a clamping claw slide rail (3) is provided at a bottom position of the wire passing shaft fixing seat (2), an air curtain plate (22) is provided at a right position of the wire passing shaft fixing seat (2), and a wire passing shaft (4) is provided at an internal position of the wire passing shaft fixing seat (2).

6. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 5, characterized in that: A mechanical clamp (6) is provided at the bottom of the wire passing shaft (4), a workpiece body (7) is provided at the bottom of the mechanical clamp (6), and a tooling sensing rod (5) is provided at the right side of the mechanical clamp (6).

7. The front basket transport system of the fully automatic wafer tank cleaning machine according to claim 6, characterized in that: The front conveying robot box (27) is provided with box anti-collision blocks (16) at the left and right sides, and a safety switch (26) is provided at the side of the front conveying robot box (27). The mechanical clamp (6) is made of corrosion-resistant plastic material at the contact point with the liquid medicine, and the outer side of the wire shaft fixing seat (2) is covered and protected by a fluorine-sprayed stainless steel cover. The front basket conveying system of the fully automatic wafer slot cleaning machine is powered by an external power supply.

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