Three-axis mechanical arm plate taking device

Abstract

The utility model provides a three-axis mechanical arm plate taking device which comprises a workbench, a containing frame is fixed to the top of the workbench through bolts, a first containing disc and a second containing disc are fixed to the top of the containing frame through bolts, and an electric push rod arranged in an X-axis sliding frame pushes a movable plate to slide in the inner wall of the X-axis sliding frame. Meanwhile, the Y-axis sliding frame is driven to conduct left-right position adjustment, left-right position adjustment of the plate taking frame is achieved, then the lifting single-axis mechanical arm is controlled to work, the plate taking frame is pushed to ascend and descend on the outer wall of the Z-axis sliding frame, and the height of the plate taking frame is adjusted; an electric push rod arranged on the inner wall of a Y-axis sliding frame is used for pushing a plate taking frame to move front and back, the plate taking frame extends into a photomask box, a plate carrying assembly and a clamping block are taken out from the interior of the photomask box, and then a mask plate is placed on the top of a cushion block of a second storage disc, so that the practicability and convenience of the device are improved, manual operation is not needed, and the working efficiency is improved. The working efficiency of the device is improved; and the pollution to the mask plate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of plate takers, in particular to a three-axis mechanical arm plate taker. Background Art

[0002] A mask is an opaque, light-blocking film that forms a mask pattern on a transparent substrate. This pattern is then transferred to the wafer through exposure. It is an essential component in the photolithography process, carrying intellectual property information such as the pattern design and process technology. The mask's function is similar to the film in a traditional camera, serving as the linchpin between industrial design and manufacturing.

[0003] After cleaning small-sized masks, a robotic arm inside the cleaning equipment sequentially loads them into a high-purity, sealed SMIF-Pod, ensuring the cleanliness of the masks during transport to other equipment. Currently, after the masks enter the next process, they are removed manually. This is due to the relatively small spacing between the masks in the pod, which can easily scratch adjacent masks and, more importantly, affect the cleanliness of the masks. To address these issues, a three-axis robotic arm was designed and manufactured to sequentially remove each layer of the mask without contact. Summary of the Invention

[0004] In order to solve the above problems, the present invention proposes a three-axis robotic arm plate remover to more accurately solve the problems raised in the above background technology.

[0005] The utility model is achieved through the following technical solutions:

[0006] The utility model proposes a three-axis robotic arm plate remover, comprising a workbench, a placement rack fixed to the top of the workbench by bolts, a first placement tray and a second placement tray fixed to the top of the placement rack by bolts, a storage assembly provided on the top of the first placement tray, a plate placement fixture assembly provided on the top of the second placement tray, and a three-axis robotic arm assembly provided on the top of the workbench below the placement rack;

[0007] The three-axis robotic arm assembly includes an X-axis slide and a plate removal frame. A driving device is provided inside the X-axis slide to drive the plate removal frame to adjust its position.

[0008] Furthermore, the inner wall of the X-axis slide is slidably connected to a movable plate, the outer wall of the movable plate is bolted to a first tank chain, and one end of the first tank chain away from the movable plate is bolted to the outer wall of the X-axis slide, the top of the movable plate is bolted to the Y-axis slide, and the inner wall of the Y-axis slide is slidably connected to the movable frame, the outer wall of the movable frame is bolted to the Z-axis slide, and the top of the Z-axis slide is bolted to a lifting cylinder, and the power rod end of the lifting cylinder is fixed to the top bolt of the plate removal frame.

[0009] Furthermore, the X-axis slide is bolted to the top of the workbench, and the X-axis slide is located at the bottom of the placement rack. An electric push rod is provided on the inner wall of the X-axis slide, and one end of the electric push rod is bolted to the outer wall of the movable plate. An electric push rod is provided on the inner wall of the movable plate, and the power rod end of the electric push rod is bolted to the outer wall of the movable rack.

[0010] Furthermore, a second tank chain is fixed to the outer wall bolts of the movable frame, and one end of the second tank chain away from the movable frame is fixedly connected to the top of the X-axis slide, and cables are arranged inside the first tank chain and the second tank chain.

[0011] Furthermore, the interior of the X-axis slide is a hollow structure, and a through hole is provided at the position where the outer wall of the X-axis slide is connected to the movable plate. The interior of the Y-axis slide is also a hollow structure, and a through hole is provided at the position where the outer wall of the Y-axis slide is connected to the movable frame. The shape of the plate removal frame is L-shaped.

[0012] Furthermore, the storage assembly includes a mask box, the inner wall of the mask box is provided with a plurality of slide grooves, and the inner walls of the slide grooves are slidably connected to the mask plate.

[0013] Furthermore, a plate carrier assembly is provided at the bottom of the mask plate on the inner wall of the mask box, and the plate carrier assembly includes a plate carrier frame, the bottom of the plate carrier frame is slidably connected to the inner wall of the mask box, and the top of the plate carrier frame is bolted with a clamping block.

[0014] Furthermore, the plate placement fixture assembly includes a base plate, which is bolted to the top of the second placement tray, and four pads are bolted to the top of the base plate. The pads are stepped in shape and are slidably connected to the outer wall of the mask.

[0015] Beneficial effects of the utility model:

[0016] The utility model proposes a three-axis robotic arm plate remover, which pushes the movable plate to slide in the inner wall of the X-axis slide through the electric push rod arranged inside the X-axis slide, and at the same time drives the Y-axis slide to adjust the left and right position, so as to adjust the left and right position of the plate remover, and then controls the operation of the lifting cylinder to push the plate remover to rise and fall on the outer wall of the Z-axis slide, so as to adjust the height of the plate remover. When the plate remover is adjusted to a suitable position, the electric push rod arranged on the inner wall of the Y-axis slide is used to push the plate remover to move back and forth, and extend the plate remover into the mask box, take out the plate carrier assembly and the card block from the inside of the mask box, and then place the mask plate on the top of the pad, thereby improving the practicability and convenience of the device, eliminating the need for manual operation, and improving the working efficiency of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1This is a schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 This is a schematic structural diagram of the plate-taking device of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the photomask box of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the plate carrier of the utility model;

[0021] Figure 5 This is a schematic diagram of the plate structure of the utility model.

[0022] The reference numerals are as follows:

[0023] 1. Workbench; 2. Placement rack; 3. Three-axis robotic arm assembly; 301. X-axis slide; 302. First tank chain; 303. Moving plate; 304. Y-axis slide; 305. Second tank chain; 306. Moving rack; 307. Lifting cylinder; 308. Z-axis slide; 309. Plate removal rack; 4. First storage tray; 5. Storage assembly; 501. Mask box; 502. Mask plate; 6. Second storage tray; 7. Plate placement fixture assembly; 701. Bottom plate; 702. Pad; 8. Plate carrier assembly; 801. Plate carrier; 802. Clamping block. DETAILED DESCRIPTION

[0024] In order to more clearly and completely illustrate the technical solution of the present invention, the present invention will be further described below with reference to the accompanying drawings.

[0025] Please refer to Figure 1-Figure 5 The utility model proposes a three-axis robotic arm plate remover, comprising a workbench 1, a placement rack 2 is fixed to the top of the workbench 1 by bolts, a first placement tray 4 and a second placement tray 6 are fixed to the top of the placement rack 2 by bolts, a storage component 5 is provided on the top of the first placement tray 4, and a plate placement fixture component 7 is provided on the top of the second placement tray 6. A three-axis robotic arm component 3 is provided on the top of the workbench 1 below the placement rack 2;

[0026] The three-axis robot arm assembly 3 includes an X-axis slide 301 and a plate-taking frame 309. A driving device is provided inside the X-axis slide 301 to drive the plate-taking frame 309 to adjust its position. The inner wall of the X-axis slide 301 is slidably connected to the moving plate 303. The outer wall of the moving plate 303 is bolted with a first tank chain 302, and the end of the first tank chain 302 away from the moving plate 303 is bolted to the outer wall of the X-axis slide 301. The top of the moving plate 303 is bolted to the Y-axis slide 304, and the inner wall of the Y-axis slide 304 is slidably connected to the moving frame 306. The outer wall of the moving frame 306 is bolted to the Z-axis slide 308, and the top of the Z-axis slide 308 is bolted to the lifting cylinder 307. The power rod end of the lifting cylinder 307 is fixed to the top bolt of the plate-taking frame 309. The X-axis slide 301 is bolted to the top of the workbench 1, and the X-axis slide 301 is located at the bottom of the placement frame 2. The inner wall of the frame 301 is provided with an electric push rod, and one end of the electric push rod is bolted to the outer wall of the movable plate 303. The inner wall of the movable plate 303 is provided with an electric push rod, and the power rod end of the electric push rod is bolted to the outer wall of the movable frame 306. The electric push rod provided inside the X-axis slide 301 pushes the movable plate 303 to slide in the inner wall of the X-axis slide 301, and at the same time drives the Y-axis slide 304 to adjust the left and right position, so as to achieve the left and right position adjustment of the plate taking frame 309, and then controls the lifting cylinder 307 to work, pushes the plate taking frame 309 to rise and fall on the outer wall of the Z-axis slide 308, so as to achieve the height adjustment of the plate taking frame 309. When the plate taking frame 309 is adjusted to the appropriate position, the electric push rod provided on the inner wall of the Y-axis slide 304 is used to push the plate taking frame 309 to move back and forth, and extends the plate taking frame 309 into the mask box 501 to adjust the front and back position of the plate taking frame 309.

[0027] The outer wall of the mobile frame 306 is bolted with a second tank chain 305, and the end of the second tank chain 305 away from the mobile frame 306 is fixedly connected to the top of the X-axis slide 301, and the first tank chain 302 and the second tank chain 305 are provided with cables inside. The interior of the X-axis slide 301 is a hollow structure, and a through hole is provided at the position where the outer wall of the X-axis slide 301 is connected to the movable plate 303. The interior of the Y-axis slide 304 is also a hollow structure, and a through hole is provided at the position where the outer wall of the Y-axis slide 304 is connected to the mobile frame 306. The shape of the plate removal frame 309 is L-shaped, and the first tank chain 302 and the second tank chain 305 are used to protect the cables to prevent them from breaking during use. The through holes provided on the outer walls of the X-axis slide 301 and the Y-axis slide 304 facilitate the sliding of the movable plate 303 and the mobile frame 306, thereby reducing the friction resistance and friction loss between the X-axis slide 301 and the Y-axis slide 304 during sliding.

[0028] The storage component 5 includes a mask box 501, and a plurality of slide grooves are provided on the inner wall of the mask box 501, and the inner wall of the slide groove is slidably connected to the mask plate 502. The inner wall of the mask box 501 is located at the bottom of the mask plate 502 and a plate carrier component 8 is provided. The plate carrier component 8 includes a plate carrier 801, and the bottom of the plate carrier 801 is slidably connected to the inner wall of the mask box 501. The top bolt of the plate carrier 801 is fixed with a clamping block 802. The clamping block 802 can be used to limit the mask plate 502, and can prevent the mask plate 502 from falling during transportation. The multiple slide grooves are then used to facilitate the storage of the mask plate 502 and prevent the mask plates 502 from contacting each other.

[0029] The plate placement fixture assembly 7 includes a base plate 701, which is bolted to the top of the second placement tray 6. Four pads 702 are bolted to the top of the base plate 701. The pads 702 are stepped in shape and are slidably connected to the outer wall of the mask plate 502. The four pads 702 can be used to place and limit the mask plate 502.

[0030] Working principle: When in use, the electric push rod provided inside the X-axis slide 301 pushes the movable plate 303 to slide in the inner wall of the X-axis slide 301, and at the same time drives the Y-axis slide 304 to adjust the left and right position, so as to adjust the left and right position of the plate taking frame 309, and then controls the lifting cylinder 307 to work, and pushes the plate taking frame 309 to rise and fall on the outer wall of the Z-axis slide 308, so as to adjust the height of the plate taking frame 309. After the plate taking frame 309 is adjusted to the appropriate position, the electric push rod provided on the inner wall of the Y-axis slide 304 is used to push the plate taking frame 309 to move back and forth, and extend the plate taking frame 309 into the mask box 501, take out the plate carrier assembly 8 and the block 802 from the inside of the mask box 501, and then place the mask plate 502 on the top of the pad 702, thereby improving the practicality and convenience of the device, eliminating the need for manual operation, and improving the working efficiency of the device.

[0031] Of course, the present invention may have many other implementations. Based on this implementation, other implementations obtained by ordinary technicians in this field without any creative work are all within the scope of protection of the present invention.

Claims

1. A three-axis robotic arm plate remover, characterized in that: The machine comprises a workbench, a placement rack is fixed to the top of the workbench by bolts, a first placement tray and a second placement tray are fixed to the top of the placement rack by bolts, a storage assembly is provided on the top of the first placement tray, a plate placement fixture assembly is provided on the top of the second placement tray, and a three-axis robotic arm assembly is provided on the top of the workbench below the placement rack; The three-axis robotic arm assembly includes an X-axis slide and a plate removal frame. A driving device is provided inside the X-axis slide to drive the plate removal frame to adjust its position.

2. A three-axis robotic arm plate remover according to claim 1, characterized in that: The inner wall of the X-axis slide is slidably connected to a movable plate, the outer wall of the movable plate is bolted to a first tank chain, and one end of the first tank chain away from the movable plate is bolted to the outer wall of the X-axis slide, the top of the movable plate is bolted to the Y-axis slide, and the inner wall of the Y-axis slide is slidably connected to the movable frame, the outer wall of the movable frame is bolted to the Z-axis slide, and the top of the Z-axis slide is bolted to a lifting cylinder, and the power rod end of the lifting cylinder is fixed to the top bolt of the plate removal frame.

3. A three-axis robotic arm plate remover according to claim 2, characterized in that: The X-axis slide is bolted to the top of the workbench, and the X-axis slide is located at the bottom of the placement rack. An electric push rod is provided on the inner wall of the X-axis slide, and one end of the electric push rod is bolted to the outer wall of the movable plate. An electric push rod is provided on the inner wall of the movable plate, and the power rod end of the electric push rod is bolted to the outer wall of the movable rack.

4. A three-axis robotic arm plate remover according to claim 2, characterized in that: A second tank chain is fixed to the outer wall bolts of the movable frame, and one end of the second tank chain away from the movable frame is fixedly connected to the top of the X-axis slide, and cables are arranged inside the first tank chain and the second tank chain.

5. A three-axis robotic arm plate remover according to claim 2, characterized in that: The interior of the X-axis slide is a hollow structure, and a through hole is provided at the position where the outer wall of the X-axis slide is connected to the movable plate. The interior of the Y-axis slide is also a hollow structure, and a through hole is provided at the position where the outer wall of the Y-axis slide is connected to the movable frame. The plate removal frame is L-shaped.

6. A three-axis robotic arm plate remover according to claim 1, characterized in that: The storage component comprises a mask box, the inner wall of the mask box is provided with a plurality of slide grooves, and the inner walls of the slide grooves are slidably connected with a mask plate.

7. A three-axis robotic arm plate remover according to claim 6, characterized in that: The inner wall of the mask box is located at the bottom of the mask plate and a plate carrier assembly is provided. The plate carrier assembly includes a plate carrier frame. The bottom of the plate carrier frame is slidably connected to the inner wall of the mask box. The top of the plate carrier frame is bolted with a clamping block.

8. The three-axis robotic arm plate remover according to claim 1, characterized in that: The plate placement fixture assembly includes a bottom plate, which is bolted to the top of the second placement tray. Four pads are bolted to the top of the bottom plate. The pads are stepped and slidably connected to the outer wall of the mask.

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