High-pressure vacuum adsorption coating device

Abstract

The utility model provides a high-pressure vacuum adsorption coating device, which relates to the technical field of coating and comprises a device shell, a base is arranged in the device shell, a mounting plate is mounted at the top of the base, a fixing seat is arranged in the mounting plate, and the mounting plate and the fixing seat are connected through a quick release component. A partition heating assembly is arranged at the top of the fixing seat, a PLC is arranged on the right side wall of the device shell, and the partition heating assembly is divided into a plurality of independent heating areas and controls the independent heating areas respectively, so that the required temperature gradient can be accurately formed on the surface of a substrate, which is very critical to some coating processes sensitive to temperature; for example, a thin film with special optical properties or electrical properties is prepared, and different temperature regions can promote deposition, diffusion or crystallization of a coating material on a substrate at different rates, so that a thin film with an ideal microstructure and properties is formed.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a high-pressure vacuum adsorption film coating device. Background Art

[0002] In traditional high-pressure vacuum adsorption coating devices, the heating system often adopts an overall uniform heating method. This method has limitations in some specific coating processes. For example, when a thin film with a specific temperature gradient distribution needs to be formed on a substrate, traditional uniform heating cannot meet the requirements, because different coating materials and processes may require the substrate surface to present different temperatures in different areas to achieve ideal growth, crystallization or chemical reaction of the film. At the same time, with the continuous development of coating technology and the expansion of application fields, the requirements for coating quality and accuracy are getting higher and higher. Traditional heating methods are difficult to accurately control the temperature of each area of ​​the substrate, which may lead to problems such as uneven film thickness, inconsistent composition, and unstable performance. Moreover, in some complex coating processes, it may be necessary to quickly switch different temperature distribution modes at different stages. The response speed and flexibility of traditional heating systems are also difficult to meet these requirements.

[0003] Therefore, we propose a high-pressure vacuum adsorption coating device. Utility Model Content

[0004] The purpose of the present utility model is to solve the shortcomings existing in the prior art. When the existing coating device is in use, it is unable to meet the requirements of different regions of the substrate presenting different temperatures in a specific coating process to achieve ideal growth, crystallization or chemical reaction of the thin film. With the development of coating technology and the expansion of application fields, the requirements for coating quality and precision are improved. Traditional heating methods are difficult to accurately control the temperature of each region of the substrate, which can easily lead to problems such as uneven film thickness, different composition, unstable performance, etc., and its response speed and flexibility are insufficient when quickly switching the temperature distribution mode at different stages of a complex coating process.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A high-pressure vacuum adsorption coating device comprises a device housing, a base provided inside the device housing, a mounting plate mounted on the top of the base, a fixing seat provided inside the mounting plate, the mounting plate and the fixing seat connected via a quick-release assembly, a zoned heating assembly provided on the top of the fixing seat, and a PLC controller for controlling the zoned heating assembly provided on a side wall of the device housing;

[0007] The zoned heating assembly includes a low-temperature zone plate, a medium-temperature zone plate is provided inside the low-temperature zone plate, a high-temperature zone plate is provided inside the medium-temperature zone plate, and a heat insulation seat is installed between the low-temperature zone plate and the medium-temperature zone plate and between the medium-temperature zone plate and the high-temperature zone plate, respectively. A first heating tube is provided inside the high-temperature zone plate, a second heating tube is provided inside the medium-temperature zone plate, and a third heating tube is provided inside the low-temperature zone plate. The first heating tube, the second heating tube and the third heating tube are connected to the PLC controller.

[0008] As a preferred solution of the present invention, the quick-release assembly includes two installation slots, and limiting slots are provided inside the two installation slots and close to the front side, and limiting blocks are installed inside the two limiting slots.

[0009] As a preferred solution of the present invention, the quick-release assembly further comprises two quick-release parts, the two quick-release parts are inserted into the two installation slots, and the two quick-release parts can be limited by the two limiting blocks.

[0010] As a preferred solution of the present invention, the bottom of the insulation seat and the fixed seat are fixed to each other, the low temperature zone plate and the medium temperature zone plate are fixedly connected through the insulation seat, and the high temperature zone plate and the medium temperature zone plate are fixedly connected through the insulation seat.

[0011] As a preferred solution of the present invention, the arrangement density of the first heating tubes is twice that of the second heating tubes, and the arrangement density of the second heating tubes is twice that of the third heating tubes.

[0012] As a preferred solution of the present invention, a door panel is hinged on the front of the device housing, and an observation window is provided inside the door panel.

[0013] As a preferred solution of the present invention, a plurality of temperature sensors are installed at the bottom of the low temperature zone plate, the medium temperature zone plate and the high temperature zone plate, and the PLC controller is connected to the temperature sensors and the zoned heating components.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] In the present invention, by setting up a zoned heating component, it is divided into multiple independent heating areas and controlled separately, so that the required temperature gradient can be accurately formed on the surface of the substrate. This is very critical for some temperature-sensitive coating processes, such as the preparation of thin films with special optical or electrical properties. Different temperature zones can cause the coating material to be deposited, diffused or crystallized at different rates on the substrate, thereby forming a thin film with ideal microstructure and properties. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1This is a schematic diagram of the main structure of a high-pressure vacuum adsorption coating device provided by the utility model.

[0017] Figure 2 This is a schematic diagram of the internal structure of a device shell of a high-pressure vacuum adsorption coating device provided by the utility model.

[0018] Figure 3 This is a schematic diagram of a quick-release assembly of a high-pressure vacuum adsorption coating device provided by the utility model.

[0019] Figure 4 This is a front cross-sectional schematic diagram of a high-pressure vacuum adsorption coating device provided by the utility model.

[0020] Figure 5 This is a top cross-sectional schematic diagram of a high-pressure vacuum adsorption coating device provided by the utility model.

[0021] Legend: 1. Device housing; 2. Base; 3. Mounting plate; 4. Mounting slot; 5. Limiting slot; 6. Limiting block; 7. Fixing seat; 8. Quick release part; 9. Low-temperature zone plate; 10. Medium-temperature zone plate; 11. High-temperature zone plate; 12. Insulation seat; 13. First heating tube; 14. Second heating tube; 15. Third heating tube; 16. Temperature sensor; 17. Door panel; 18. Observation window; 19. PLC controller. DETAILED DESCRIPTION

[0022] The following will combine the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0023] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to relevant references, and several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0024] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are for the purpose of describing specific embodiments only and are not intended to limit this invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0026] Example:

[0027] like Figure 1-5 As shown, the utility model provides a technical solution: the device shell 1 plays a role in protecting the internal components, and at the same time provides a relatively stable working environment for the entire coating device to prevent external dust, impurities, etc. from interfering with the coating process. It is usually made of a material with a certain strength and sealing performance, such as metal. The metal shell can effectively block the interference of external electromagnetic fields on internal precision electronic components (such as PLC controller 19, etc.), ensuring the stable operation of the device.

[0028] The front-hinged door panel 17 makes it convenient for the operator to open and close the device, and facilitates internal maintenance, debugging, and placement of substrates. An observation window 18 is set on the door panel 17, so that the operator can observe the situation inside the device in real time during the coating process without having to frequently open the door panel 17, thereby reducing the impact of outside air on the vacuum environment. The observation window 18 is generally made of high-temperature resistant and highly transparent materials, such as tempered glass or special plastic materials, which can not only meet observation needs, but also withstand the high-temperature environment during the coating process.

[0029] The base 2 is located inside the device housing 1 and provides stable support for the entire device. It is usually made of heavier and stronger materials to ensure that there is no shaking or displacement during the operation of the device. The design of the base 2 must take into account the center of gravity distribution and stability of the device. A reasonable base 2 structure can effectively disperse the weight of the device and improve the seismic performance of the device.

[0030] The mounting plate 3 is used to install the fixing seat 7 and provides a mounting platform for the fixing seat 7. The mounting plate 3 is connected to the base 2 to connect and support the fixing seat 7.

[0031] The fixing seat 7 is an important structure for supporting key components such as the zoned heating assembly. Its design should be optimized according to the shape, size and weight of the zoned heating assembly to ensure that the zoned heating assembly can be stably installed on the fixing seat 7 and will not be displaced or deformed during operation.

[0032] The mounting groove 4 is used to accommodate the quick-release part 8 and provide an installation position for the quick-release part 8. The limit groove 5 is located inside the mounting groove 4 near the front. Its function is to limit the quick-release part 8 through the limit block 6 installed inside, preventing the quick-release part 8 from unnecessary movement after installation. This design can ensure that the quick-release part 8 can be accurately positioned after being inserted into the mounting groove 4, ensuring the stability and reliability of the installation. During the installation process, after the quick-release part 8 is inserted into the mounting groove 4, the limit block 6 will clamp the corresponding part of the quick-release part 8, so that it will not fall out due to vibration of the device or other external forces, thereby ensuring the firmness of the connection between the mounting plate 3 and the fixing seat 7.

[0033] The quick-release part 8 is a key component for realizing the rapid connection and disassembly of the mounting plate 3 and the fixing seat 7. When the fixing seat 7 needs to be installed, the quick-release part 8 is inserted into the mounting groove 4, and the limit block 6 will limit it so that the fixing seat 7 can be quickly and accurately installed on the mounting plate 3. This quick-release design greatly improves the assembly and disassembly efficiency of the device, and facilitates the maintenance and replacement of parts of the equipment. For example, when the zoned heating component needs to be repaired or replaced, the fixing seat 7 can be quickly removed from the mounting plate 3 by simply pulling out the quick-release part 8, saving maintenance time and labor costs.

[0034] The zoned heating assembly realizes independent control of different temperature zones by dividing the heating area into a low-temperature zone plate 9, a medium-temperature zone plate 10 and a high-temperature zone plate 11. This zone design is based on the different requirements of different coating processes for substrate temperature. For example, in some coating processes, the edge of the substrate may require a lower temperature (low-temperature zone plate 9) to prevent the coating material from being deposited too quickly at the edge, resulting in uneven film thickness; while the central area may require a higher temperature (high-temperature zone plate 11) to promote sufficient crystallization or chemical reaction of the coating material, thereby obtaining better film performance.

[0035] The low-temperature zone plate 9, the medium-temperature zone plate 10 and the high-temperature zone plate 11 are connected by an insulating seat 12. The function of the insulating seat 12 is to reduce the heat transfer between different temperature zones, ensure that the temperature of each zone can be independently controlled, and is not excessively affected by the temperature of the adjacent zones. For example, if there is no insulating seat 12, a large amount of heat from the high-temperature zone plate 11 may be transferred to the low-temperature zone plate 9, causing the temperature of the low-temperature zone plate 9 to rise, and the expected temperature gradient distribution cannot be achieved, thereby affecting the coating quality.

[0036] The first heating tubes 13 are located inside the high-temperature zone plate 11, and their arrangement density is twice that of the second heating tubes 14. This is because the high-temperature zone requires a higher heat output to reach and maintain a higher temperature. A higher heating tube arrangement density can provide greater heating power, ensuring that the high-temperature zone can quickly heat up and maintain a stable high-temperature state. For example, in some coating processes that require high-temperature conditions, such as the preparation of certain metal oxide films, the first heating tubes 13 of the high-temperature zone plate 11 can provide sufficient heat to allow the coating material to fully evaporate at high temperature and react chemically with the substrate to form a film with specific properties.

[0037] The second heating tube 14 is located inside the medium temperature zone plate 10, and its arrangement density is moderate, which can meet the temperature requirements of the medium temperature zone without causing excessive energy waste. The medium temperature zone usually plays a role in some process steps that require moderate temperatures. For example, in the initial deposition stage of the thin film, the medium temperature zone can enable the coating material to form a uniform transition layer on the substrate, providing a good foundation for subsequent process treatment in the high temperature zone or low temperature zone.

[0038] The third heating tube 15 is located inside the low-temperature zone plate 9, and its arrangement density is relatively low. Because the low-temperature zone requires less heat, the temperature of the low-temperature zone can be precisely controlled through the lower arrangement density of the heating tubes to avoid excessive temperature. For example, in the preparation of some temperature-sensitive films, precise temperature control of the low-temperature zone can prevent excessive crystallization or other adverse physical and chemical changes in the edge area of ​​the film, thereby ensuring the uniformity of the overall performance of the film.

[0039] Several temperature sensors 16 are installed at the bottom of the low-temperature zone plate 9, the medium-temperature zone plate 10 and the high-temperature zone plate 11. The function of the temperature sensors 16 is to monitor the temperature of each area in real time. They can accurately transmit the detected temperature data to the PLC controller 19. These temperature sensors 16 use high-precision thermistors, can quickly respond to temperature changes, and have high measurement accuracy. For example, the thermocouple temperature sensor 16 can accurately measure the temperature within a wide temperature range, and its measurement accuracy can reach ±0.5°C or even higher, which can meet the strict requirements of the coating process for temperature accuracy.

[0040] The PLC controller 19 is the core component of the temperature control of the entire coating device. It receives temperature data from the temperature sensor 16 and accurately controls the zoned heating components according to preset temperature parameters and control algorithms. For example, when the temperature sensor 16 of the high-temperature zone plate 11 detects that the temperature is lower than the preset value, the PLC controller 19 will increase the power output of the first heating tube 13 to heat it up; when the temperature reaches the preset value, the PLC controller 19 will maintain the current power or reduce the power appropriately to keep the temperature stable. At the same time, the PLC controller 19 can also realize independent control and coordination of the temperatures of different areas, and flexibly adjust the temperature settings of the low-temperature zone, medium-temperature zone and high-temperature zone according to the requirements of the coating process to ensure that the required temperature gradient distribution is formed on the substrate surface, thereby achieving a high-quality coating process.

[0041] In summary, the operator places the substrate to be coated on the fixing seat 7 of the zoned heating assembly and confirms through the observation window 18 that the substrate is placed in a correct and stable position.

[0042] Check whether the connections of the various components of the device are normal, especially whether the quick-release assembly between the mounting plate 3 and the fixing seat 7 is firmly connected, and ensure that the device housing 1 is well sealed to create conditions for the subsequent vacuum environment.

[0043] According to the specific coating process requirements, the target temperatures of the low-temperature zone plate 9, the medium-temperature zone plate 10 and the high-temperature zone plate 11 are set on the PLC controller 19. For example, for the coating process of a special optical film, the high-temperature zone may be set to 500°C, the medium-temperature zone to 300°C, and the low-temperature zone to 100°C.

[0044] After the PLC controller 19 is started, the temperature sensor 16 begins to monitor the temperature of each area in real time and transmits the temperature data to the PLC controller 19. The operator can view the current temperature conditions of each area through the display screen of the PLC controller 19.

[0045] When the PLC controller 19 receives the signal from the temperature sensor 16 , it controls the zone heating assembly according to the preset temperature parameters.

[0046] In the high-temperature zone plate 11, since the arrangement density of the first heating tubes 13 is relatively large, the PLC controller 19 will adjust its power output according to the temperature difference, so that the high-temperature zone will heat up rapidly and reach the set temperature of 500°C. For example, if the initial temperature is room temperature, the PLC controller 19 will gradually increase the current of the first heating tube 13 to generate more heat until the temperature sensor 16 detects that the high-temperature zone reaches 500°C.

[0047] Under the control of the PLC controller 19, the second heating tube 14 of the medium temperature zone plate 10 is heated with appropriate power to make the medium temperature zone reach the set 300°C. The PLC controller 19 will accurately adjust the power of the second heating tube 14 according to the feedback from the temperature sensor 16 in the medium temperature zone to ensure that the temperature is stable at around 300°C.

[0048] The third heating tube 15 of the low temperature zone plate 9 also operates at a lower power under the control of the PLC controller 19, so that the low temperature zone reaches the set 100°C. By precisely controlling the power of the third heating tube 15, the temperature of the low temperature zone is prevented from being too high, which affects the coating effect at the edge of the substrate.

[0049] After the substrate reaches the required temperature gradient distribution, other related systems of the coating device, such as the vacuum system, coating material source, etc., are started. Under a high-pressure vacuum environment, the coating material is deposited on the substrate in a predetermined manner.

[0050] Due to the different temperatures in different areas of the substrate, the deposition rate and crystallization state of the coating material on the substrate will also vary. For example, in the high-temperature area, the coating material may crystallize more fully to form a dense film structure; in the low-temperature area, the deposition rate of the coating material is relatively slow, which may form a smoother film surface.

[0051] During the coating process, the temperature sensor 16 continuously monitors the temperature of each area, and the PLC controller 19 compares the actual temperature with the preset temperature in real time. If a temperature deviation is found, the PLC controller 19 will adjust the power output of the heating tube in time to maintain temperature stability.

[0052] The operator observes the conditions during the coating process, such as the evaporation and deposition state of the coating material, through the observation window 18. If an abnormality is found, the coating process can be suspended in time for inspection and adjustment.

[0053] When the coating is completed, the coating material source and other related systems are turned off first, and then the PLC controller 19 gradually reduces the power of the zone heating component to slowly reduce the substrate temperature to avoid problems such as substrate or film cracking due to a sudden drop in temperature.

[0054] When the substrate temperature drops to near room temperature, open the door panel 17 of the device housing 1, take out the coated substrate, perform a quality inspection on the substrate, and evaluate whether the coating effect meets the requirements. If the next coating operation is required, repeat the above steps.

[0055] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-pressure vacuum adsorption coating device, comprising a device housing (1), characterized in that: A base (2) is provided inside the device housing (1), a mounting plate (3) is installed on the top of the base (2), a fixing seat (7) is provided inside the mounting plate (3), the mounting plate (3) and the fixing seat (7) are connected via a quick-release assembly, a zoned heating assembly is provided on the top of the fixing seat (7), and a PLC controller (19) for controlling the zoned heating assembly is provided on one side wall of the device housing (1); The zoned heating assembly comprises a low-temperature zone plate (9), a medium-temperature zone plate (10) is provided inside the low-temperature zone plate (9), a high-temperature zone plate (11) is provided inside the medium-temperature zone plate (10), a heat insulation seat (12) is installed between the low-temperature zone plate (9) and the medium-temperature zone plate (10) and between the medium-temperature zone plate (10) and the high-temperature zone plate (11), a first heating tube (13) is provided inside the high-temperature zone plate (11), a second heating tube (14) is provided inside the medium-temperature zone plate (10), and a third heating tube (15) is provided inside the low-temperature zone plate (9), and the first heating tube (13), the second heating tube (14) and the third heating tube (15) are connected to the PLC controller (19).

2. The high-pressure vacuum adsorption coating device according to claim 1, characterized in that: The quick-release assembly comprises two installation slots (4), and limiting slots (5) are provided inside the two installation slots (4) and close to the front side. Limiting blocks (6) are installed inside the two limiting slots (5).

3. The high-pressure vacuum adsorption coating device according to claim 2, characterized in that: The quick-release assembly further comprises two quick-release parts (8), the two quick-release parts (8) being inserted into the two mounting slots (4), and the two quick-release parts (8) can be limited by the two limiting blocks (6).

4. The high-pressure vacuum adsorption coating device according to claim 1, characterized in that: The bottom of the heat-insulating seat (12) and the fixing seat (7) are fixed to each other, the low-temperature zone plate (9) and the medium-temperature zone plate (10) are fixedly connected via the heat-insulating seat (12), and the high-temperature zone plate (11) and the medium-temperature zone plate (10) are fixedly connected via the heat-insulating seat (12).

5. The high-pressure vacuum adsorption coating device according to claim 1, characterized in that: The arrangement density of the first heating tubes (13) is twice that of the second heating tubes (14), and the arrangement density of the second heating tubes (14) is twice that of the third heating tubes (15).

6. The high-pressure vacuum adsorption coating device according to claim 1, characterized in that: A door panel (17) is hingedly connected to the front of the device housing (1), and an observation window (18) is provided inside the door panel (17).

7. The high-pressure vacuum adsorption coating device according to claim 1, characterized in that: A plurality of temperature sensors (16) are installed on the bottom of the low-temperature zone plate (9), the medium-temperature zone plate (10), and the high-temperature zone plate (11), and the PLC controller (19) is connected to the temperature sensors (16) and the zone heating components.

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