Leak detection device

Abstract

The utility model provides a leak detection device which comprises a valve body, a detector and a pressure adjusting mechanism, the valve body is connected to a target reaction cavity, the detector is detachably connected to the valve body and used for detecting the leak rate in the target reaction cavity when the valve body is conducted, and an adjusting cavity is formed between the valve body and the detector; the pressure adjusting mechanism is communicated with the adjusting cavity and is used for adjusting the pressure in the adjusting cavity, so that the detector is convenient to disassemble, after the leak rate of the target reaction cavity is detected, the valve body is closed, and the pressure adjusting mechanism is started again to increase the pressure in the adjusting cavity, so that the pressure in the adjusting cavity is flush with the external atmospheric pressure; therefore, the detector can be conveniently detached from the valve body.

Description

Technical Field

[0001] The present application belongs to the technical field of vacuum leak detection, and more specifically, relates to a leak detection device. Background Art

[0002] Dry etcher is widely used in the semiconductor field. For example, in the semiconductor wafer manufacturing process, the wafer is placed in the reaction chamber of the dry etcher, and physical and chemical methods such as plasma or high-energy ion beam are used to remove specific parts of the wafer surface, so that the required pattern is accurately engraved on the wafer surface to construct various components of the integrated circuit, such as transistors, capacitors, etc.

[0003] When processing wafers in a dry etching machine, the reaction chamber must maintain a vacuum environment. If the reaction chamber leaks, it can easily lead to excessive fine particles in the reaction chamber, thus affecting the quality of the wafer. Therefore, the sealing of the reaction chamber must be frequently tested to determine whether the leakage rate is within an acceptable range.

[0004] In the prior art, leak rate testing of a reaction chamber typically requires increasing the pressure inside the chamber to facilitate connecting a measuring instrument to the chamber via a valve. The chamber is then evacuated again to allow the measuring instrument to test the leak rate. After the test is complete, the measuring instrument is disassembled. This technical solution presents a problem: once the measuring instrument is connected to the valve body, the pressure difference between the vacuum environment inside the valve body and the outside atmosphere is significant, making disassembly of the measuring instrument difficult due to the pressure. Summary of the Invention

[0005] The purpose of the embodiments of the present application is to provide a leak detection device to solve the technical problem in the prior art leak detection device that the measuring instrument is difficult to disassemble due to the excessively large internal and external pressure difference.

[0006] To achieve the above objectives, the technical solution adopted in this application is to provide a leak detection device, comprising:

[0007] a valve body connected to the target reaction chamber;

[0008] a detector, detachably connected to an end of the valve body away from the target reaction chamber, for detecting the leakage rate in the target reaction chamber when the valve body is open, and a regulating chamber is provided between the valve body and the detector;

[0009] A pressure regulating mechanism is communicated with the regulating chamber and is used to regulate the pressure in the regulating chamber to facilitate disassembly of the detector.

[0010] By adopting the above technical solution, the detector is detachably connected to the valve body.

[0011] Initially, a blind plate is detachably connected to a side of the valve body away from the target reaction chamber to seal the side of the valve body away from the target reaction chamber.

[0012] When it is necessary to measure the leakage rate of the target reaction chamber, gas is injected into the regulating chamber through the pressure regulating mechanism to reduce the pressure difference between the regulating chamber and the outside world, thereby facilitating the removal of the blind plate from the valve body. After the blind plate is removed, the detector is connected to the end of the valve body away from the target reaction chamber.

[0013] Subsequently, the pressure regulating mechanism is closed to stop the injection of gas into the regulating chamber. The pressure regulating mechanism can be connected to an external vacuum generator to extract the gas in the regulating chamber from the target reaction chamber, so that the regulating chamber returns to a vacuum state.

[0014] After the regulating chamber returns to a vacuum state, the valve body is opened to connect the target reaction chamber with the regulating chamber, and then the detector is turned on to detect the leakage rate of the target reaction chamber to determine whether the leakage rate of the target reaction chamber is within a reasonable range.

[0015] After completing the leak rate detection of the target reaction chamber, the valve body is closed and the pressure regulating mechanism is opened again so that the pressure in the regulating chamber is equal to the external atmospheric pressure. Subsequently, the detector is removed from the side of the valve body away from the target reaction chamber, and the blind plate is reinstalled on the side of the valve body away from the target reaction chamber to seal the side of the valve body away from the target reaction chamber.

[0016] Optionally, the pressure regulating mechanism includes:

[0017] A pressure regulating valve is communicated with the regulating chamber and is used for injecting gas into the regulating chamber.

[0018] Using the above technical solution, when it is necessary to test the leak rate of the target reaction chamber, the pressure regulating valve is opened, allowing the regulating chamber to communicate with the outside world through the pressure regulating valve. At this time, the side of the valve body away from the target reaction chamber is sealed by a blind plate. Since the regulating chamber is in a vacuum environment, the blind plate is difficult to remove under the influence of the external atmospheric pressure. At this time, the pressure regulating valve is opened to allow external gas to enter the regulating chamber through the pressure regulating valve, thereby reducing the pressure difference between the regulating chamber and the outside world, thereby facilitating the removal of the blind plate from the valve body. After the blind plate is removed, the detector is connected to the end of the valve body away from the target reaction chamber, and a vacuum generator is connected to the pressure regulating valve. The vacuum environment in the regulating chamber is re-established by the vacuum generator. The pressure regulating valve is then closed, and the valve body is opened to connect the target reaction chamber with the regulating chamber, thereby allowing the detector to perform leak rate detection on the target reaction chamber.

[0019] Optionally, the pressure regulating mechanism further includes:

[0020] The gas buffer is detachably connected to one end of the pressure regulating valve away from the valve body, and is used to adjust the flow rate of the gas injected into the valve body.

[0021] By adopting the above technical solution, when it is necessary to inflate the target reaction chamber so that the pressure in the target reaction chamber is equal to the external atmospheric pressure, the gas buffer is provided on the pressure regulating valve. When the valve body is opened and the opening degree of the pressure regulating valve is too large, the gas buffer is used to reduce the flow rate of the gas injected into the target reaction chamber, thereby preventing damage to the components in the target reaction chamber due to the excessively fast flow rate of the gas flowing into the target reaction chamber.

[0022] Optionally, the gas buffer is connected to the pressure regulating valve via a first clamp.

[0023] By adopting the above technical solution, the gas buffer component is connected to the pressure regulating valve through the first clamp, so that the gas buffer component and the pressure regulating valve can be quickly disassembled and assembled.

[0024] Optionally, a first sealing ring is provided between the gas buffer and the pressure regulating valve.

[0025] According to the above technical solution, the first sealing ring is provided between the gas buffer and the pressure regulating valve to seal the connection portion between the buffer and the pressure regulating valve.

[0026] Optionally, a first filter element is provided on a side of the pressure regulating valve away from the regulating chamber.

[0027] By adopting the above technical solution, when it is necessary to inflate the target reaction chamber so that the pressure in the target reaction chamber is equal to the external atmospheric pressure, a first filter element is provided at an end of the pressure regulating valve away from the regulating chamber. When gas is injected into the target reaction chamber through the pressure regulating valve, the first filter element is used to filter the gas to prevent particulate matter in the gas from entering the target reaction chamber and causing contamination to the target reaction chamber.

[0028] At the same time, when it is necessary to inflate the target reaction chamber so that the pressure in the target reaction chamber is equal to the external atmospheric pressure, if the toxic gas remaining in the target reaction chamber escapes from the pressure regulating valve, the first filter element is used to filter the toxic gas to prevent the toxic gas in the target reaction chamber from diffusing into the atmosphere and polluting the environment.

[0029] Optionally, the leak detection device further includes:

[0030] A vacuum generator is communicated with the regulating chamber and is used to create a vacuum environment in the regulating chamber.

[0031] By adopting the above technical solution, the vacuum generator can be set up as one piece with the detector, or can be set up separately.

[0032] After connecting the detector to the end of the valve body away from the target reaction chamber, the pressure regulating valve is closed to stop injecting gas into the regulating chamber. The vacuum generator is activated to place the regulating chamber in a vacuum state. After the regulating chamber is in a vacuum state, the valve body is opened to connect the regulating chamber and the target reaction chamber. The detector is then activated to detect the leak rate of the target reaction chamber to determine whether the leak rate of the target reaction chamber is within a reasonable range.

[0033] Optionally, the leak detection device further includes:

[0034] a first tube body, one end of which is connected to the input end of the valve body, and the other end of which is connected to the target reaction chamber;

[0035] A second tube body has one end connected to the output end of the valve body and the other end connected to the detector. The regulating chamber is located in the second tube body.

[0036] Using the above technical solution, the input end of the valve body is connected to the target reaction chamber through the first tube, the output end of the valve body is connected to the detector through the second tube, and the vacuum generator is connected to the regulating chamber in the second tube. Both the first and second tubes are provided with flanges to facilitate connection with the target reaction chamber, the valve body, the detector, and the vacuum generator.

[0037] Optionally, a second filter element is provided in the first tube body, a third filter element is provided in the second tube body, and the third filter element is arranged at one end of the second tube body close to the detector.

[0038] By adopting the above technical solution, by arranging the second filter element in the first tube body and the third filter element in the second tube body, when it is necessary to adjust the pressure in the target reaction chamber to be balanced with the external atmospheric pressure, and when the valve body and the pressure regulating valve are both opened, the second filter element is used to further filter the gas entering the target reaction chamber to prevent particulate matter in the gas from entering the target reaction chamber and causing contamination to the target reaction chamber.

[0039] At the same time, the first filter element, the second filter element and the third filter element are also used to filter the toxic gas remaining in the target reaction chamber to prevent the toxic gas in the target reaction chamber from diffusing into the atmosphere and polluting the environment.

[0040] Optionally, the leak detection device further includes:

[0041] The heat-insulating layer is sleeved on the outer sides of the first tube body, the valve body and the second tube body.

[0042] With the above technical solution, since the temperature of the target reaction chamber is relatively high during operation, the heat radiation generated by the target reaction chamber heats the valve body. If the temperature of the valve body is too high, the polymer that falls off in the vacuum chamber is easily gathered in the valve body under the drive of the gas, thereby blocking the valve body. The insulation layer is sheathed on the outside of the first tube body, the valve body and the second tube body to prevent the heat radiation generated by the vacuum chamber from heating the valve body.

[0043] The beneficial effect of the leak detection device provided by the present application is that, compared with the prior art, the leak detection device provided by the present application includes a valve body, a detector and a pressure regulating mechanism, the valve body is connected to the target reaction chamber, the detector is detachably connected to the valve body, and is used to detect the leakage rate in the target reaction chamber when the valve body is conducted, and a regulating chamber is provided between the valve body and the detector; the pressure regulating mechanism is connected to the regulating chamber, and is used to adjust the pressure in the regulating chamber to facilitate the disassembly of the detector, and after completing the leakage rate detection of the target reaction chamber, the valve body is closed and the pressure regulating mechanism is opened again to increase the pressure in the regulating chamber, so that the pressure in the regulating chamber is equal to the external atmospheric pressure, thereby facilitating the disassembly of the detector from the valve body. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0045] Figure 1 A schematic structural diagram of a leak detection device provided in an embodiment of the present application;

[0046] Figure 2 A schematic diagram of the structure of the leak detection device provided in an embodiment of the present application when a blind plate seal is used;

[0047] Figure 3 A cross-sectional view of a leak detection device provided in an embodiment of the present application;

[0048] Figure 4 A schematic structural diagram of a leak detection device provided in another embodiment of the present application;

[0049] Figure 5 A schematic structural diagram of a leak detection device provided in another embodiment of the present application when a blind plate seal is used;

[0050] Figure 6 A cross-sectional view of a leak detection device provided in another embodiment of the present application;

[0051] Figure 7 A schematic structural diagram of a leak detection device provided in another embodiment of the present application.

[0052] Among them, the reference numerals in the figures are:

[0053] 10. Valve body; 20. Detector; 30. Pressure regulating mechanism; 31. Pressure regulating valve; 32. First filter element; 33. Gas buffer element; 34. First clamp; 35. First sealing ring; 40. Target reaction chamber; 50. Blind plate; 60. First tube body; 61. Second filter element; 70. Second tube body; 71. Adjusting chamber; 72. Third filter element; 73. Second clamp; 74. Second sealing ring; 80. Insulation layer; 90. Vacuum generator. DETAILED DESCRIPTION

[0054] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0055] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0056] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0057] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0058] Please also refer to Figures 1 to 7 , the leak detection device provided in the embodiment of the present application is now described.

[0059] A leak detection device includes a valve body 10, a detector 20 and a pressure regulating mechanism 30.

[0060] See also Figures 1 to 3 The valve body 10 is any one of a ball valve, a gate valve, a stop valve and a butterfly valve. For the sake of convenience, in this application, the valve body 10 is taken as an example of a ball valve, wherein the input end of the valve body 10 is connected to the target reaction chamber 40, and the target reaction chamber 40 is the reaction chamber in the dry etching machine.

[0061] The detector 20 is a helium detector 20 , and the detector 20 is detachably connected to an end of the valve body 10 away from the target reaction chamber 40 , that is, an output end of the valve body 10 .

[0062] When performing a leak rate test on the target reaction chamber 40, the valve body 10 is opened to connect the detector 20 and the target reaction chamber 40, and an air gun is used to spray helium toward the outside of the target reaction chamber 40. The helium enters the target reaction chamber 40 through the leakage point. The detector 20 detects the helium entering the vacuum chamber through its highly sensitive detector and calculates the leak rate of the target reaction chamber 40 based on the concentration and entry rate of the helium.

[0063] A regulating chamber 71 is provided between the valve body 10 and the detector 20 . The pressure regulating mechanism 30 is in communication with the regulating chamber 71 for regulating the pressure in the regulating chamber 71 to facilitate disassembly of the detector 20 .

[0064] With the above technical solution, initially, the valve body 10 away from the target reaction chamber 40 is detachably connected to a blind plate 50 to seal the side of the valve body 10 away from the target reaction chamber 40 .

[0065] When the leak rate of the target reaction chamber 40 needs to be measured, gas is injected into the regulating chamber 71 through the pressure regulating mechanism 30 to reduce the pressure difference between the regulating chamber 71 and the outside world. Subsequently, the pressure regulating mechanism 30 is closed to stop injecting gas into the regulating chamber 71. A vacuum generator 90 can be detachably connected to the pressure regulating mechanism 30, and the gas in the regulating chamber 71 is extracted from the target reaction chamber 40 through the vacuum generator 90 to return the regulating chamber 71 to a vacuum state.

[0066] After the regulating chamber 71 returns to a vacuum state, the detector 20 and the valve body 10 are opened to connect the target reaction chamber 40 with the regulating chamber 71. An air gun is used to spray helium gas toward the outside of the target reaction chamber 40. The helium gas enters the target reaction chamber 40 through the leak point. The detector 20 detects the helium gas entering the vacuum chamber through its highly sensitive detector and calculates the leak rate of the target reaction chamber 40 based on the concentration and entry rate of the helium gas to detect the leak rate of the target reaction chamber 40 and determine whether the leak rate of the target reaction chamber 40 is within a reasonable range.

[0067] After completing the leak rate detection of the target reaction chamber 40, the valve body 10 is closed and the pressure regulating mechanism 30 is opened again, so that the pressure in the regulating chamber 71 is equal to the external atmospheric pressure. Then, the detector 20 is removed from the side of the valve body 10 away from the target reaction chamber 40, and the blind plate 50 is reinstalled on the side of the valve body 10 away from the target reaction chamber 40 to seal the side of the valve body 10 away from the target reaction chamber 40.

[0068] Compared with the prior art, the leak detection device provided in the present application includes a valve body 10, a detector 20 and a pressure regulating mechanism 30. The valve body 10 is connected to the target reaction chamber 40. The detector 20 is detachably connected to the valve body 10 and is used to detect the leakage rate in the target reaction chamber 40 when the valve body 10 is turned on. A regulating chamber 71 is provided between the valve body 10 and the detector 20; the pressure regulating mechanism 30 is communicated with the regulating chamber 71 and is used to adjust the pressure in the regulating chamber 71 to facilitate the disassembly of the detector 20. After completing the leakage rate detection of the target reaction chamber 40, the valve body 10 is closed and the pressure regulating mechanism 30 is opened again to increase the pressure in the regulating chamber 71, so that the pressure in the regulating chamber 71 is equal to the external atmospheric pressure, thereby facilitating the disassembly of the detector 20 from the valve body 10.

[0069] In one embodiment of the present application, see Figures 1 to 3 The pressure regulating mechanism 30 includes a pressure regulating valve 31 , which is a piston-type pressure regulating valve or a film-type pressure regulating valve. The pressure regulating valve 31 is connected to the regulating chamber 71 and is used to inject gas into the regulating chamber 71 .

[0070] Specifically, when it is necessary to test the leak rate of the target reaction chamber 40, the pressure regulating valve 31 is opened to connect the regulating chamber 71 with the outside world through the pressure regulating valve 31. External gas enters the regulating chamber 71 through the pressure regulating valve 31 to reduce the pressure difference between the regulating chamber 71 and the outside world, thereby facilitating the removal of the blind plate 50 from the valve body 10. After the blind plate 50 is removed, the detector 20 is connected to the end of the valve body 10 away from the target reaction chamber 40, and the pressure regulating valve 31 is closed. The vacuum generator 90 can be detachably connected to the pressure regulating valve 31. After activation, the vacuum generator 90 returns the regulating chamber 31 to a vacuum state.

[0071] Then, the detector 20 and the valve body 10 are opened to connect the target reaction chamber 40 with the regulating chamber 71 , so that the detector 20 can detect the leakage rate of the target reaction chamber 40 .

[0072] At the same time, when the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, the valve body 10 and the pressure regulating valve 31 need to be opened simultaneously to facilitate the gas to enter the target reaction chamber 40 .

[0073] In one embodiment of the present application, see Figures 1 to 3 The pressure regulating mechanism 30 further includes a gas buffer 33 , which is detachably connected to one end of the pressure regulating valve 31 away from the valve body 10 and is used to regulate the flow rate of the gas injected into the valve body 10 .

[0074] When the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, after both the valve body 10 and the pressure regulating valve 10 are opened, if the pressure regulating valve 31 is opened too far, the gas will flow into the target reaction chamber 40 at a high velocity, potentially damaging components within the target reaction chamber 40. By providing a gas buffer 33 on the pressure regulating valve 31, when the pressure regulating valve 31 is opened too far, the gas buffer 33 is used to reduce the flow rate of the gas injected into the target reaction chamber 40, thereby preventing damage to components within the target reaction chamber 40 caused by the excessively high gas flow rate.

[0075] In the present application, the pressure regulating mechanism 30 also includes a vacuum generator 90 , which can be integrated with the detector 20 or separately from the detector 20 , and the vacuum generator 90 is connected to the regulating chamber 71 for creating a vacuum environment in the regulating chamber 71 .

[0076] See also Figure 1 and Figure 3In one embodiment of the present application, the vacuum generator 90 is arranged between the detector 20 and the valve body 10, and the vacuum generator 90 is integrated with the detector 20, the vacuum generator 90 is connected to the regulating chamber 71, and the detector 20 is connected to the regulating chamber 71 through the vacuum generator 90.

[0077] When leak rate detection is required for the target reaction chamber 40, after the blind plate 50 is removed from the valve body 10, the vacuum generator 90 is installed on the valve body 10, wherein the vacuum generator 90 is connected to the valve body 10 through a flange. After the vacuum generator 90 is connected to the valve body 10, the flange on the vacuum generator 90 is fixedly connected to the flange on the valve body 10 through the second clamp 73, wherein a second sealing ring 74 is also provided between the flange on the vacuum generator 90 and the flange on the valve body 10.

[0078] After connecting the detector 20 to the end of the valve body 10 away from the target reaction chamber 40 via the vacuum generator, the pressure regulating valve 31 is closed, and the injection of gas into the regulating chamber 71 is stopped. The vacuum generator 90 is then turned on to return the regulating chamber 71 to a vacuum state. After the regulating chamber 71 returns to a vacuum state, the detector 20 and the valve body 10 are turned on to detect the leak rate of the target reaction chamber 40 and determine whether the leak rate of the target reaction chamber 40 is within a reasonable range.

[0079] In another embodiment of the present application, the vacuum generator and the detector 20 are separately provided.

[0080] In this embodiment, the vacuum generator may be directly connected to the regulating chamber 71 or may be connected to the pressure regulating valve 31 .

[0081] In one implementation of this application, see Figure 3 A first filter element 32 is provided on the side of the pressure regulating valve 31 away from the regulating chamber 71 .

[0082] Since the gas mainly used in the reaction chamber (target reaction chamber 40) of the dry etcher during the process of processing wafers is called etching gas, these gases are usually fluoride gases, such as carbon tetrafluoride, nitrogen trifluoride, hexafluoroethane, perfluoropropane, and trifluoromethane, and fluoride gases are toxic. Therefore, in order to prevent the pressure in the target reaction chamber 40 from being adjusted to be equal to the external atmospheric pressure, the fluoride gas escapes from the target reaction chamber 40 when the valve body 10 and the pressure regulating valve 31 are opened. Therefore, a first filter element 32 is set at the end of the pressure regulating valve 31 away from the regulating chamber 71.

[0083] When the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, a first filter element 32 is provided at the end of the pressure regulating valve 31 away from the regulating chamber 71. When the gas enters the target reaction chamber 40, the first filter element 32 is used to filter the gas entering the target reaction chamber 40 to prevent particulate matter in the gas from entering the target reaction chamber 40 and causing contamination to the target reaction chamber 40.

[0084] At the same time, when the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, if the valve body 10 and the regulating valve 31 are both opened, the first filter element 32 is used to filter the toxic gas to prevent the toxic gas in the target reaction chamber 40 from diffusing into the atmosphere and polluting the environment.

[0085] In one embodiment of the application, see Figure 1 and Figure 2 The gas buffer 33 is connected to the pressure regulating valve 31 through a first clamp 34 .

[0086] Both the gas buffer 33 and the pressure regulating valve 31 are provided with flanges. After the flange on the gas buffer 33 and the flange on the pressure regulating valve 31 abut against each other, the flange on the gas buffer 33 and the flange on the pressure regulating valve 31 are fixedly connected by a first clamp 34, thereby connecting the gas buffer 33 to the pressure regulating valve 31, and connecting the gas buffer 33 to the pressure regulating valve 31 through the first clamp 34, so that the gas buffer 33 and the pressure regulating valve 31 can be quickly disassembled and installed.

[0087] In one embodiment of the application, see Figure 3 A first sealing ring 35 is provided between the gas buffer 33 and the pressure regulating valve 31. By providing the first sealing ring 35 between the gas buffer 33 and the pressure regulating valve 31, the connection portion between the buffer and the pressure regulating valve 31 is sealed.

[0088] In one embodiment of the present application, see Figure 3 The input end of the valve body 10 is provided with a second filter element 61 , and the output end of the valve body 10 is provided with a third filter element 72 .

[0089] When the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, the second filter element 61 is used to further filter the gas entering the target reaction chamber 40 to prevent particulate matter in the gas from entering the target reaction chamber 40 and causing pollution to the target reaction chamber 40.

[0090] At the same time, when it is necessary to adjust the pressure in the target reaction chamber 40 to be equal to the external atmospheric pressure, by setting a second filter element 61 and a third filter element 72 in the valve body 10, the toxic gas in the target reaction chamber 40 is filtered for the first time by the second filter element 61, and the toxic gas is filtered for the second time by the third filter element 72 to prevent the toxic gas in the target reaction chamber 40 from diffusing into the atmosphere and polluting the environment.

[0091] It should be noted that the first filter element 32 , the second filter element 61 and the third filter element 72 are all made of polytetrafluoroethylene or polyvinylidene fluoride.

[0092] In one embodiment of the present application, see Figures 4 to 7 The leak detection device further includes a first tube body 60 and a second tube body 70 .

[0093] The first tube body 60 is fixedly connected to the target reaction chamber 40 via a flange, and the first tube body 60 is in communication with the target reaction chamber 40. The input end of the valve body 10 is fixedly connected to the end of the first tube body 60 away from the target reaction chamber 40 via a flange. The second tube body 70 is connected to the output end of the valve body 10 via a flange. The regulating chamber 71 is located in the second tube body 70. The pressure regulating valve 31 is connected to the second tube body 70 and in communication with the regulating chamber 71.

[0094] The input end of the valve body 10 is connected to the target reaction chamber 40 through the first tube body 60, the output end of the valve body 10 is connected to the detector 20 through the second tube body 70, and the vacuum generator 90 is connected to the regulating chamber 71 in the second tube body 70, wherein the first tube body 60 and the second tube body 70 are both provided with flanges to facilitate connection with the target reaction chamber 40, the valve body 10, the detector 20 and the vacuum generator 90.

[0095] In one embodiment of the present application, see Figure 6 A second filter element 61 is provided in the first tube body 60 , a third filter element 72 is provided in the second tube body 70 , and the third filter element 72 is arranged at one end of the second tube body 70 close to the detector 20 .

[0096] When the pressure in the target reaction chamber 40 needs to be adjusted to be equal to the external atmospheric pressure, the second filter element 61 is used to further filter the gas entering the target reaction chamber 40 to prevent particulate matter in the gas from entering the target reaction chamber 40 and causing pollution to the target reaction chamber 40.

[0097] At the same time, when it is necessary to adjust the pressure in the target reaction chamber 40 to be equal to the external atmospheric pressure, by setting a second filter element 61 and a third filter element 72 in the valve body 10, the toxic gas in the target reaction chamber 40 is filtered for the first time by the second filter element 61, and the toxic gas is filtered for the second time by the third filter element 72 to prevent the toxic gas in the target reaction chamber 40 from diffusing into the atmosphere and polluting the environment.

[0098] In the present application, the leak detection device further includes a heat-insulating layer 80 .

[0099] In one embodiment of this application, please participate again Figure 3 The insulation layer 80 is sleeved on the outer side of the valve body 10 .

[0100] In another embodiment of this application, please participate again Figure 6 , the insulation layer 80 is provided on the outside of the valve body 10, the first tube 60 and the second tube 70.

[0101] Since the temperature of the target reaction chamber 40 is relatively high during operation, the heat radiation generated by the target reaction chamber 40 heats the valve body 10. If the temperature of the valve body 10 is too high, the polymer that has fallen off in the target reaction chamber 40 is easily gathered in the valve body 10 under the drive of the gas, thereby blocking the valve body 10. By arranging the outer sides of the valve body 10, the first tube body 60 and the second tube body 70 with an insulation layer 80, the heat radiation generated by the target reaction chamber 40 can be prevented from heating the valve body 10.

[0102] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A leak detection device, characterized in that: a valve body connected to the target reaction chamber; a detector, detachably connected to an end of the valve body away from the target reaction chamber, for detecting the leakage rate in the target reaction chamber when the valve body is open, and a regulating chamber is provided between the valve body and the detector; A pressure regulating mechanism is communicated with the regulating chamber and is used to regulate the pressure in the regulating chamber to facilitate disassembly of the detector.

2. The leak detection device according to claim 1, wherein: The pressure regulating mechanism comprises: A pressure regulating valve is communicated with the regulating chamber and is used for injecting gas into the regulating chamber.

3. The leak detection device according to claim 2, wherein: The pressure regulating mechanism further comprises: A gas buffer is detachably connected to one end of the pressure regulating valve away from the valve body, and is used to adjust the flow rate of the gas injected into the regulating chamber and the target reaction chamber.

4. The leak detection device according to claim 3, wherein: The gas buffer is connected to the pressure regulating valve through a first clamp.

5. The leak detection device according to claim 4, characterized in that: A first sealing ring is provided between the gas buffer component and the pressure regulating valve.

6. The leak detection device according to claim 5, characterized in that: A first filter is provided on a side of the pressure regulating valve away from the regulating chamber.

7. The leak detection device according to claim 1 or 6, characterized in that: Also includes: A vacuum generator is communicated with the regulating chamber and is used to create a vacuum environment in the regulating chamber.

8. The leak detection device according to claim 7, wherein: Also includes: a first tube body, one end of which is connected to the input end of the valve body, and the other end of which is connected to the target reaction chamber; A second tube body has one end connected to the output end of the valve body and the other end connected to the detector. The regulating chamber is located in the second tube body.

9. The leak detection device according to claim 8, characterized in that: A second filter element is provided in the first tube body, a third filter element is provided in the second tube body, and the third filter element is arranged at one end of the second tube body close to the detector.

10. The leak detection device according to claim 9, characterized in that: Also includes: The heat-insulating layer is sleeved on the outer sides of the first tube body, the valve body and the second tube body.

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