Correction plate adjusting and lifting device of evaporation coating machine

Abstract

The utility model provides a correction plate adjusting lifting device of an evaporation coating machine, which comprises a process chamber, a plating pot is arranged at the center of the top in the process chamber, and a correction plate adjusting structure comprises a driving mechanism and a driving rod. When the correction plate needs to be used, the driving mechanism drives the correction plate to rotate upwards to be parallel to the tangent position of the umbrella-shaped structure of the plating pot, so that the correction plate is closer to the evaporation area of the plating pot, and evaporation materials in the evaporation process of a coated product are corrected better; the correction plate rotates downwards to a designated position through the driving mechanism to avoid the next procedure, and meanwhile, the driving rod is detachably connected with the connecting rod assembly, so that different plating pots can be adapted by replacing the driving rod with the correction plates of different sizes.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, and more specifically to a correction plate regulating and lifting device of an evaporation coating machine. Background Art

[0002] Currently, the optical thin film industry uses coating machines to manufacture optical thin films. This principle involves spraying a vaporized optical thin film material, which has been vaporized into a molecular structure, onto an umbrella frame equipped with coating units. The umbrella frame continuously rotates, allowing the vaporized optical thin film material to solidify within the coating units to form the optical thin film. However, due to the umbrella frame's umbrella-shaped structure, the vaporized optical thin film material has an initial velocity when it is sprayed out. This causes the vaporized optical thin film material to reach different points on the umbrella frame at different distances. This results in different amounts of vaporized optical thin film material reaching each point on the umbrella frame, resulting in uneven thickness of the optical thin film produced within the same coating unit and between different coating units, significantly impacting the precision of the optical thin film. Prior art production processes also employ a flat correction plate to prevent the vaporized optical thin film material from being directly sprayed onto the umbrella frame, thereby reducing the uneven thickness of the optical film caused by the varying initial velocities of the vaporized optical thin film material when sprayed. However, due to the inconsistent distances between each point on the flat correction plate and each point on the umbrella frame, the optical film thickness still remains uneven, failing to meet the current requirements for high-precision optical films and significantly hindering the development of the optical thin film industry.

[0003] Existing patent publication number: CN208151466U, a correction plate with a simple structure that is convenient for forming a film with uniform thickness, the patented coating machine includes an umbrella frame and a uniform correction device, the uniform correction device includes a correction plate and a support mechanism, the correction plate is bent to form an arc surface, the arc surface matches the spherical surface of the umbrella frame, when the gas is sprayed toward the umbrella frame, the arc surface of the correction plate matches the spherical surface of the umbrella frame to effectively block the gas from being directly sprayed toward the umbrella frame, so that the gas can evenly form a film with uniform thickness on the coating unit of the correction plate, avoiding the gas from being sprayed toward the umbrella frame, Since the distance between the gas and the spherical surface of the umbrella frame is different when the gas is ejected, the time it takes for the gas with the same initial velocity to reach the different parts of the spherical surface of the umbrella frame is different, resulting in uneven film thickness in the same coating unit and between different coating units, which effectively improves the optical accuracy of the film; one end of the support arm of the support mechanism is connected to the correction plate, and the other end is connected to the roller. The support arm swings up and down with the roller as the axis to drive the correction plate to swing up and down, and adjust the distance between the curved surface of the correction plate and the spherical surface of the umbrella frame, so as to reasonably correct the relative height of the curved surface according to actual production needs to optimize the formation of a film with uniform thickness.

[0004] However, the above patent directly connects the correction plate to the rotating mechanism. Since the specifications and sizes of the plating pots are different, correction plates of different sizes are required. Therefore, it is more complicated to replace the correction plate. How to simply replace the correction plate while ensuring the up and down rotation of the correction plate is a problem that needs to be solved at present. Utility Model Content

[0005] In view of this, in order to solve the above problems, the present invention proposes a correction plate adjustment and lifting device for an evaporation coating machine, comprising a process chamber 10, a coating pot 50 is provided at the top center position inside the process chamber 10, an evaporation mechanism 70 is provided at the bottom of the process chamber 10 corresponding to the position of the coating pot 50, for evaporating and coating the product to be coated on the coating pot 50, the coating pot 50 is an umbrella-shaped structure open downward, correction plate adjustment structures 30 are symmetrically provided on both sides of the process chamber 10, the correction plate adjustment structure 30 includes a driving mechanism 31 and a driving rod 32, the driving mechanism 31 is located outside the outer shell of the process chamber 10, a winding rod assembly 312 is fixed to the lower part of the end of the first mounting bracket 311 away from the mounting seat 20, the winding rod assembly 312 is rotatably sleeved with one end of the connecting rod assembly, and a part of the connecting assembly is also connected to The driving mechanism 31 is connected to the driving shaft of the outer shell of the process chamber 10, and the other end of the connecting rod assembly is detachably connected to one end of the driving rod 32. When coating correction is required, the driving mechanism 31 drives the correction plate 40 to rotate upward to a tangential position parallel to the umbrella structure of the coating pot 50, so that the correction plate 40 is closer to the evaporation area of ​​the coating pot 50, thereby making better correction to the evaporation material of the evaporation process of the coating product. When the correction plate 40 is not needed, the correction plate 40 is rotated downward to a designated position by the driving mechanism 31 to avoid the lower process. The correction plate 40 can flexibly adjust its position, which is conducive to better operation of the process chamber 10. At the same time, the driving rod 32 is detachably connected to the connecting rod assembly, and can be adapted to different coating pots 50 by replacing the driving rod 32 with correction plates 40 of different sizes.

[0006] A correction plate adjustment and lifting device for an evaporation coating machine includes a process chamber 10, a coating pot 50 is provided at the top center of the process chamber 10, and an evaporation mechanism 70 is provided at the bottom of the process chamber 10 corresponding to the position of the coating pot 50, for evaporating and coating the product to be coated on the coating pot 50. It is characterized in that the coating pot 50 is an umbrella-shaped structure with an open bottom, and correction plate adjustment structures 30 are symmetrically provided on both sides of the process chamber 10. The correction plate adjustment structure 30 includes a driving mechanism 31 and a driving rod 32. The driving mechanism 31 is located outside the shell of the process chamber 10. The shell of the process chamber 10 is provided with a mounting hole, and a mounting seat 20 is provided at the mounting hole. The mounting seat 20 is fixedly connected to the mounting hole. It is characterized in that: the inner wall of the mounting seat 20 is provided with a first mounting bracket 311, and the first mounting bracket 311 is vertically fixedly connected to the inner wall of the mounting seat 20. The lower part of the end of the first mounting bracket 311 away from the mounting seat 20 is fixedly provided with a winding rod assembly 312, and the winding rod assembly 312 is connected to one end of the connecting rod assembly. The connecting rod 31 is connected to the driving shaft of the outer shell of the process chamber 10 through the rotating sleeve. The other end of the connecting rod assembly is detachably connected to one end of the driving rod 32. The other end of the driving rod 32 extends upward and toward the evaporation area of ​​the coating pot 50. The driving rod 32 is provided with a correction plate 40 near the evaporation area of ​​the coating pot 50. When the coating correction is required, the driving mechanism 31 drives the correction plate 40 to rotate upward to a tangent position parallel to the umbrella structure of the coating pot 50, so that the coating correction is required. The correction plate 40 is closer to the evaporation area of ​​the plating pot 50, so as to better correct the evaporation material in the evaporation process of the coating product. When the correction plate 40 is not needed, the correction plate 40 is rotated downward to the specified position through the driving mechanism 31 to avoid the lower process. The correction plate 40 can flexibly adjust its position, which is conducive to better operation of the process chamber 10. At the same time, the driving rod 32 is detachably connected to the connecting rod assembly, and can be adapted to different plating pots 50 by replacing the driving rod 32 with correction plates 40 of different sizes.

[0007] Furthermore, a sealing structure 21 is provided at the connection between the mounting seat 20 and the mounting hole to ensure the sealing degree between the mounting seat 20 and the mounting hole after installation.

[0008] Furthermore, the connecting rod assembly includes a first connecting rod 313 and a second connecting rod 314, one end of the first connecting rod 313 is rotatably connected to the winding rod assembly 312, and the other end is fixedly connected to one end of the second connecting rod 314, and the other end of the second connecting rod 314 is fixedly connected to the other end of the driving rod 32.

[0009] Furthermore, the second connecting rod 314 is an L-shaped structure, and a connecting groove 315 is provided at the connection between the second connecting rod 314 and the first connecting rod 313 and the driving rod 32, and the first connecting rod 313 or the driving rod 32 is limited and fixed by the connecting groove 315.

[0010] Furthermore, a first limit block 316 is fixedly installed on the upper part of the winding rod assembly 312 and on the upper part of the first mounting bracket 311, and a limit rod 317 is inserted into the first limit block 316. When the second connecting rod 314 rotates around the winding rod assembly 312 to the limit rod 317, the protruding end of the limit rod 317 just abuts against the corner of the second connecting rod 314, preventing the second connecting rod 314 from continuing to rotate toward the first limit block 316. If it is adapted only by a simple angle change, the accuracy and effect cannot be guaranteed. The position of the second connecting rod 314 is fixed by the limit rod 317, ensuring that the position of the origin when the correction plate 40 is needed each time it swings back to the same, thereby ensuring the position accuracy of the correction plate 40 when the correction plate 40 is needed.

[0011] Furthermore, the driving rod 32 includes a first cross bar 321, a first vertical bar 322 and a first diagonal bar 323. The first cross bar 321 and the first diagonal bar 323 are connected through the first vertical bar 322, and the first cross bar 321, the first vertical bar 322 and the first diagonal bar 323 are integrally formed. A correction plate 40 is fixed to the extending end of the first diagonal bar 323. The first cross bar 321 is fitted into the connecting groove 315 of the second connecting rod 314 and fixedly connected by a nut.

[0012] Furthermore, a movable connecting piece 318 is connected to the bottom of the first connecting rod 313, one end of the movable connecting piece 318 is rotatably connected to the bottom of the first connecting rod 313, and the other end is rotatably connected to the driving shaft of the driving mechanism 31. The driving shaft of the driving mechanism 31 pushes and pulls the movable connecting piece 318 to drive the first connecting rod 313 to rotate at the winding rod assembly 312, thereby adjusting the relative position of the umbrella-shaped structure of the correction plate 40 and the plating pot 50.

[0013] Furthermore, a second mounting bracket 60 is provided at the lower part of the first mounting bracket 311 and at the lower part of the driving shaft of the driving mechanism 31. A second limit block is provided at one end of the second mounting bracket 60 away from the mounting seat 20. When the correction plate 40 is not in use, the driving mechanism 31 is pulled back so that the second connecting rod 314 contacts and abuts against the second limit block. At this time, the connection between the second connecting rod 314 and the driving rod 32 is vertically downward, and the correction plate 40 is located at the lower part of the process chamber 10.

[0014] Beneficial effects of the present invention: The present invention proposes a correction plate adjustment and lifting device for an evaporation coating machine, comprising a process chamber 10, a coating pot 50 is provided at the top center position inside the process chamber 10, an evaporation mechanism 70 is provided at the bottom of the process chamber 10 corresponding to the position of the coating pot 50, for evaporating and coating the product to be coated on the coating pot 50, the coating pot 50 is an umbrella-shaped structure open downward, correction plate adjustment structures 30 are symmetrically provided on both sides of the process chamber 10, the correction plate adjustment structure 30 includes a driving mechanism 31 and a driving rod 32, the driving mechanism 31 is located outside the outer shell of the process chamber 10, a winding rod assembly 312 is fixed to the lower part of the end of the first mounting bracket 311 away from the mounting seat 20, the winding rod assembly 312 is rotatably sleeved with one end of the connecting rod assembly, and a part of the connecting assembly is also connected to the The driving mechanism 31 is connected to the driving shaft of the outer shell of the process chamber 10, and the other end of the connecting rod assembly is detachably connected to one end of the driving rod 32. When coating correction is required, the driving mechanism 31 drives the correction plate 40 to rotate upward to a tangential position parallel to the umbrella structure of the coating pot 50, so that the correction plate 40 is closer to the evaporation area of ​​the coating pot 50, thereby making better correction to the evaporation material of the evaporation process of the coating product. When the correction plate 40 is not needed, the correction plate 40 is rotated downward to a specified position by the driving mechanism 31 to avoid the lower process. The correction plate 40 can flexibly adjust its position, which is conducive to better operation of the process chamber 10. At the same time, the driving rod 32 is detachably connected to the connecting rod assembly, and can be adapted to different coating pots 50 by replacing the driving rod 32 with correction plates 40 of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is an overall structural diagram of the correction plate adjustment and lifting device of the evaporation coating machine of the present invention.

[0016] Figure 2 This is a left side structural diagram of the correction plate adjustment and lifting device of the evaporation coating machine of the present invention.

[0017] Figure 3 This is the right side structural diagram of the correction plate adjustment and lifting device of the evaporation coating machine of the present invention.

[0018] Description of main component symbols

[0019] Process chamber 10, mounting seat 20, sealing structure 21, correction plate adjustment structure 30, driving mechanism 31, first mounting bracket 311, winding rod assembly 312, first connecting rod 313, second connecting rod 314, connecting groove 315, first limit block 316, limit rod 317, movable connecting piece 318, driving rod 32, first horizontal rod 321, first vertical rod 322, first oblique rod 323, correction plate 40, plating pot 50, second mounting bracket 60, evaporation mechanism 70.

[0020] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION Example 1:

[0021] like Figure 1-3 As shown, a correction plate adjustment and lifting device of an evaporation coating machine includes a process chamber 10, a coating pot 50 is provided at the top center position inside the process chamber 10, and an evaporation mechanism 70 is provided at the bottom of the process chamber 10 corresponding to the position of the coating pot 50, for evaporating and coating the product to be coated on the coating pot 50, the coating pot 50 is an umbrella-shaped structure with an open bottom downward, and correction plate adjustment structures 30 are symmetrically provided on both sides of the process chamber 10, the correction plate adjustment structure 30 includes a driving mechanism 31 and a driving rod 32, and the driving shaft of the driving mechanism 31 passes through the outer shell of the process chamber 10 and is connected to one end of the driving rod 32.

[0022] The driving mechanism 31 is located outside the outer shell of the process chamber 10. A mounting hole is provided at the outer shell of the process chamber 10. A mounting seat 20 is provided at the mounting hole. The mounting seat 20 is fixedly connected to the mounting hole. A sealing structure 21 is provided at the connection between the mounting seat 20 and the mounting hole to ensure the sealing degree of the mounting seat 20 and the mounting hole after installation.

[0023] The inner wall of the mounting seat 20 is provided with a first mounting bracket 311, and the first mounting bracket 311 is vertically fixedly connected to the inner wall of the mounting seat 20, and the lower part of the end of the first mounting bracket 311 away from the mounting seat 20 is fixedly provided with a winding rod assembly 312, and the winding rod assembly 312 is rotatably sleeved with one end of the connecting rod assembly, and a part of the connecting assembly is also connected to the driving shaft of the driving mechanism 31 passing through the outer shell of the process chamber 10, and the other end of the connecting rod assembly is detachably connected to the driving rod 32, and the connecting rod assembly includes a first connecting rod 313 and a second connecting rod 314, one end of the first connecting rod 313 is rotatably sleeved with the winding rod assembly 312, and the other end is fixedly connected to one end of the second connecting rod 314, and the other end of the second connecting rod 314 is fixedly connected to the other end of the driving rod 32, and the second connecting rod 314 is an L-shaped structure. When the second link 314 is rotated around the winding rod assembly 312 to the limit rod 317, the extended end of the limit rod 317 and the second link 314 are exactly abutted against the corner of the second link 314, preventing the second link 314 from continuing to rotate toward the first limit block 316. If only relying on simple angle changes to adapt, the accuracy and effect cannot be guaranteed. The position of the second link 314 is fixed by the limit rod 317, ensuring that the position of the origin when the correction plate 40 is needed is the same each time it swings back to the point where the correction plate 40 needs to be used, thereby ensuring the position accuracy of the correction plate 40 when the correction plate 40 needs to be used.

[0024] The driving rod 32 includes a first cross bar 321, a first vertical bar 322 and a first diagonal bar 323. The first cross bar 321 and the first diagonal bar 323 are connected by the first vertical bar 322, and the first cross bar 321, the first vertical bar 322 and the first diagonal bar 323 are formed as one piece. The extending end of the first diagonal bar 323 is fixed with a correction plate 40. The first cross bar 321 and the connecting groove 315 of the second connecting rod 314 are fitted together and fixedly connected by a nut. The bottom of the first connecting rod 313 is also connected to a movable connecting piece 318. One end of the movable connecting piece 318 is rotatably connected to the bottom of the first connecting rod 313, and the other end is rotatably connected to the driving shaft of the driving mechanism 31. The movable connecting piece 318 is pushed and pulled by the driving shaft of the driving mechanism 31 to drive the first connecting rod 313 to rotate at the winding rod assembly 312, thereby adjusting the relative position of the correction plate 40 and the umbrella-shaped structure of the plating pot 50.

[0025] A second mounting bracket 60 is provided at the lower part of the first mounting bracket 311 and at the lower part of the driving shaft of the driving mechanism 31. A second limiting block is provided at the end of the second mounting bracket 60 away from the mounting seat 20. When the correction plate 40 is not in use, the driving mechanism 31 is pulled back so that the second connecting rod 314 contacts and abuts against the second limiting block. At this time, the connection between the second connecting rod 314 and the driving rod 32 is vertically downward, and the correction plate 40 is located at the lower part of the process chamber 10.

[0026] Beneficial effects of the present invention: The present invention proposes a correction plate adjustment and lifting device for an evaporation coating machine, comprising a process chamber 10, a coating pot 50 is provided at the top center position inside the process chamber 10, an evaporation mechanism 70 is provided at the bottom of the process chamber 10 corresponding to the position of the coating pot 50, for evaporating and coating the product to be coated on the coating pot 50, the coating pot 50 is an umbrella-shaped structure open downward, correction plate adjustment structures 30 are symmetrically provided on both sides of the process chamber 10, the correction plate adjustment structure 30 includes a driving mechanism 31 and a driving rod 32, the driving mechanism 31 is located outside the outer shell of the process chamber 10, a winding rod assembly 312 is fixed to the lower part of the end of the first mounting bracket 311 away from the mounting seat 20, the winding rod assembly 312 is rotatably sleeved with one end of the connecting rod assembly, and a part of the connecting assembly is also connected to the The driving mechanism 31 is connected to the driving shaft of the outer shell of the process chamber 10, and the other end of the connecting rod assembly is detachably connected to one end of the driving rod 32. When coating correction is required, the driving mechanism 31 drives the correction plate 40 to rotate upward to a tangential position parallel to the umbrella structure of the coating pot 50, so that the correction plate 40 is closer to the evaporation area of ​​the coating pot 50, thereby making better correction to the evaporation material of the evaporation process of the coating product. When the correction plate 40 is not needed, the correction plate 40 is rotated downward to a specified position by the driving mechanism 31 to avoid the lower process. The correction plate 40 can flexibly adjust its position, which is conducive to better operation of the process chamber 10. At the same time, the driving rod 32 is detachably connected to the connecting rod assembly, and can be adapted to different coating pots 50 by replacing the driving rod 32 with correction plates 40 of different sizes.

[0027] The above-described embodiments merely represent several implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A correction plate adjustment and lifting device for an evaporation coating machine, comprising a process chamber (10), wherein a coating pot (50) is provided at the top center position of the interior of the process chamber (10), and an evaporation mechanism (70) is provided at the bottom of the interior of the process chamber (10) corresponding to the position of the coating pot (50), for evaporating and coating the product to be coated on the coating pot (50), wherein the coating pot (50) is an umbrella-shaped structure with an open bottom facing downward, and correction plate adjustment structures (30) are symmetrically provided on both sides of the process chamber (10), wherein the correction plate adjustment structure (30) comprises a driving mechanism (31) and a driving rod (32), wherein the driving mechanism (31) is located outside the shell of the process chamber (10), the shell of the process chamber (10) is provided with a mounting hole, the mounting hole is provided with a mounting seat (20), the mounting seat (20) is fixedly connected to the mounting hole, and is characterized in that: The inner wall of the mounting seat (20) is provided with a first mounting bracket (311), and the first mounting bracket (311) is vertically fixedly connected to the inner wall of the mounting seat (20). A winding rod assembly (312) is fixedly provided at the lower part of the end of the first mounting bracket (311) away from the mounting seat (20). The winding rod assembly (312) is rotatably sleeved with one end of the connecting rod assembly. A part of the connecting assembly is also connected to the driving shaft of the driving mechanism (31) passing through the outer shell of the process chamber (10). The other end of the connecting rod assembly is detachably connected to one end of the driving rod (32). The driving rod The other end of (32) extends upward and toward the evaporation area of ​​the coating pot (50), and a correction plate (40) is provided near the evaporation area of ​​the coating pot (50) at the driving rod (32). When the coating correction is required, the driving mechanism (31) drives the correction plate (40) to rotate upward to a position parallel to the tangent position of the umbrella structure of the coating pot (50), so that the correction plate (40) is closer to the evaporation area of ​​the coating pot (50), thereby making better correction to the evaporation material of the evaporation process of the coating product. When the correction plate (40) is not needed, the correction plate (40) is rotated downward to a specified position by the driving mechanism (31) to avoid the lower process. The correction plate (40) can adjust its position, which is beneficial to the better operation of the process chamber (10). At the same time, the driving rod (32) is detachably connected to the connecting rod assembly, and can be adapted to different coating pots (50) by replacing the driving rod (32) with correction plates (40) of different sizes.

2. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 1, characterized in that: The connecting rod assembly includes a first connecting rod (313) and a second connecting rod (314), one end of the first connecting rod (313) is rotatably sleeved with the winding rod assembly (312), and the other end is fixedly connected to one end of the second connecting rod (314), and the other end of the second connecting rod (314) is fixedly connected to the other end of the driving rod (32).

3. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 2, wherein: The second connecting rod (314) is an L-shaped structure, and a connecting groove (315) is provided at the connection between the second connecting rod (314), the first connecting rod (313) and the driving rod (32), and the first connecting rod (313) or the driving rod (32) is limited and fixed by the connecting groove (315).

4. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 1, wherein: The first limit block (316) is fixedly installed on the upper part of the winding rod assembly (312) and located on the upper part of the first mounting bracket (311), and a limit rod (317) is inserted into the first limit block (316). When the second connecting rod (314) rotates around the winding rod assembly (312) to the limit rod (317), the protruding end of the limit rod (317) is exactly in contact with the corner of the second connecting rod (314), preventing the second connecting rod (314) from continuing to rotate toward the first limit block (316). If the adaptation is only based on a simple angle change, the accuracy and effect are not guaranteed. The position of the second connecting rod (314) is fixed by the limit rod (317), ensuring that the position of the origin when the correction plate (40) is needed is the same each time it swings back, thereby ensuring the position accuracy of the correction plate (40) when the correction plate (40) is needed.

5. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 1, wherein: The driving rod (32) comprises a first cross bar (321), a first vertical bar (322) and a first oblique bar (323); the first cross bar (321) and the first oblique bar (323) are connected via the first vertical bar (322); the first cross bar (321), the first vertical bar (322) and the first oblique bar (323) are integrally formed; a correction plate (40) is fixedly provided at an extending end of the first oblique bar (323); the first cross bar (321) and the connecting groove (315) of the second connecting rod (314) are sleeved and fixedly connected via a nut.

6. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 2, wherein: The bottom of the first connecting rod (313) is also connected to a movable connecting piece (318), one end of the movable connecting piece (318) is rotatably connected to the bottom of the first connecting rod (313), and the other end is rotatably connected to the driving shaft of the driving mechanism (31). The driving shaft of the driving mechanism (31) pushes and pulls the movable connecting piece (318) to drive the first connecting rod (313) to rotate at the winding rod assembly (312), thereby adjusting the relative position of the correction plate (40) and the umbrella-shaped structure of the plating pot (50).

7. The correction plate adjustment and lifting device for an evaporation coating machine according to claim 4, characterized in that: A second mounting bracket (60) is provided at the lower part of the first mounting bracket (311) and at the lower part of the driving shaft of the driving mechanism (31). A second limiting block is provided at one end of the second mounting bracket (60) away from the mounting seat (20). When the correction plate (40) is not in use, the driving mechanism (31) is pulled back so that the second connecting rod (314) contacts and abuts against the second limiting block. At this time, the connection between the second connecting rod (314) and the driving rod (32) is vertically downward, and the correction plate (40) is located at the lower part of the process chamber (10).

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