Workpiece loading mechanism and vacuum processing equipment

Abstract

The utility model belongs to the technical field of vacuum treatment, and discloses a workpiece loading mechanism and vacuum treatment equipment. The workpiece loading mechanism comprises a support, a connecting arm, a supporting piece, an adjusting assembly and an operating piece. Wherein the connecting arm is connected with the bracket; the supporting pieces are arranged between the two adjacent connecting arms and used for containing workpieces. The adjusting assembly is arranged between the connecting arm and the supporting piece and used for driving the supporting piece to rotate, and the operating piece is connected with the support and used for being matched with a mechanical arm and transferring the workpiece loading mechanism through the mechanical arm. By means of the workpiece loading mechanism, angle adjustment of workpieces can be achieved, the quality and consistency of vacuum treatment such as film coating can be improved, meanwhile, the workpiece loading mechanism can adapt to different workpiece types, and adaptability and carrying convenience are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum processing, in particular to a workpiece loading mechanism and vacuum processing equipment. Background Art

[0002] The workpiece loading mechanism is responsible for carrying and securing the workpiece during vacuum treatment processes such as vacuum coating. It stably positions the workpiece and transports it into the vacuum treatment chamber, ensuring uniform vacuum treatment of the workpiece, thereby achieving high-quality vacuum treatment results.

[0003] With the development of vacuum processing equipment, there is an increasing demand for the adjustability of workpiece angles during vacuum processing.

[0004] At present, the workpieces in some existing workpiece loading mechanisms are usually unable to be angle-adjusted, have poor adaptability, and are not convenient to transport. Utility Model Content

[0005] The purpose of the utility model is to provide a workpiece loading mechanism and a vacuum processing device, which are used to adjust the angle of the workpiece and improve the adaptability and convenience of transportation.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] Workpiece loading mechanism, comprising:

[0008] Bracket;

[0009] a connecting arm connected to the bracket;

[0010] A support member is provided between two adjacent connecting arms, and the support member is used to place a workpiece;

[0011] an adjusting assembly, the adjusting assembly being disposed between the connecting arm and the supporting member, and the adjusting assembly being used to drive the supporting member to rotate;

[0012] An operating member is connected to the bracket, and the operating member is used to cooperate with the manipulator and transfer the workpiece loading mechanism through the manipulator.

[0013] As an optional solution for a workpiece loading mechanism, the adjustment assembly includes a driving member and an adjusting member, the adjusting member is rotatably connected to the connecting arm, and the driving member is used to push the adjusting member and rotate the adjusting member to drive the support member to rotate.

[0014] As an optional solution for a workpiece loading mechanism, the adjustment assembly also includes a fixed seat fixed on the connecting arm, the adjustment member includes a first end, a second end and a connecting shaft, the first end is fixedly connected to the support member, the connecting shaft is hinged to the fixed seat, the two ends of the connecting shaft are respectively fixedly connected to the first end and the second end, and the driving member pushes the second end to make the first end rotate around the axis of the connecting shaft.

[0015] As an optional solution of the workpiece loading mechanism, the driving member is a screw connected to the fixing seat, and the end of the screw can push the second end by rotating the screw.

[0016] As an optional solution for a workpiece loading mechanism, a guide groove is provided on the second end portion, and the guide groove extends along the rotation direction of the second end portion. A locking bolt is also screwed on the fixed seat, and the locking bolt is passed through the guide groove. The locking bolt has a first state for locking the second end portion and a second state for releasing the lock.

[0017] As an optional solution of the workpiece loading mechanism, the outer periphery of the operating member is connected to the bracket via a plurality of support arms.

[0018] As an optional solution for the workpiece loading mechanism, at least part of the structure of the bracket and / or at least part of the structure of the connecting arm forms an operating member, which is used to cooperate with a robot and transfer the workpiece loading mechanism through the robot.

[0019] As an optional solution for the workpiece loading mechanism, the bracket is further provided with a plurality of hanging members, and the plurality of hanging members are distributed at intervals along the circumference of the bracket, and the workpiece loading mechanism is connected to the public turntable through the hanging members.

[0020] As an optional solution for the workpiece loading mechanism, the hanging member is L-shaped.

[0021] As an optional solution of the workpiece loading mechanism, a plurality of support members are provided along the circumference of the bracket.

[0022] A vacuum processing device comprises a conveying assembly, a workpiece loading mechanism as described in any one of the above schemes, and a vacuum processing chamber, wherein the conveying assembly can convey the workpiece loading mechanism into the vacuum processing chamber.

[0023] Beneficial effects:

[0024] In the first aspect of the present invention, the rotation of the workpiece on the support is achieved through the adjustment component, and the workpiece loading mechanism can achieve angle adjustment of the workpiece. The angle adjustment of the workpiece can not only ensure that the coating material and other vacuum-treated working materials act evenly on various parts of the workpiece, thereby improving the quality and consistency of vacuum treatments such as coating, but also further adapt to different types of workpieces and enhance adaptability. The operating part can be conveniently coordinated with the robot arm to achieve transportation of the entire workpiece loading mechanism, while achieving the rotation of the workpiece and taking into account the convenience of transportation.

[0025] In the second aspect of the present invention, the vacuum processing equipment based on the workpiece loading mechanism can realize the angle adjustment of the workpiece, improve the quality and consistency of vacuum processing such as coating, and further adapt to different types of workpieces, thereby improving adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of a workpiece loading mechanism provided by an embodiment of the present utility model;

[0027] Figure 2 This is a schematic structural diagram of an adjusting member provided in an embodiment of the present utility model;

[0028] Figure 3 This is a schematic structural diagram of a first viewing angle of an adjustment assembly provided by an embodiment of the utility model;

[0029] Figure 4 This is a schematic structural diagram of a second viewing angle of an adjustment component provided by an embodiment of the utility model;

[0030] Figure 5 It is a structural schematic diagram of the third viewing angle of the adjustment component provided by an embodiment of the utility model.

[0031] In the picture:

[0032] 100. Workpiece;

[0033] 1. Bracket; 11. Mounting piece;

[0034] 2. Connecting arm;

[0035] 3. Support parts;

[0036] 4. Adjustment assembly; 41. Driving member; 42. Adjustment member; 421. First end portion; 422. Second end portion; 4221. Guide groove; 423. Connecting shaft; 43. Fixing seat; 431. Locking bolt;

[0037] 5. Operating part; 51. Support arm. DETAILED DESCRIPTION

[0038] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0039] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0040] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0041] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0042] Please see the attached Figure 1 -Attached Figure 5 The first aspect of this embodiment relates to a workpiece loading mechanism, which can be used in vacuum processing equipment. The workpiece loading mechanism is a key component of the vacuum processing equipment. Its main function is to place the workpiece 100 to be processed. Specifically, the workpiece loading mechanism plays a supporting and fixing role in vacuum processing processes such as vacuum coating to ensure that the workpiece 100 can stably receive the coating material or other vacuum processing working substances.

[0043] Specifically, the workpiece loading mechanism includes a bracket 1, connecting arms 2, a support member 3, and an adjustment assembly 4. The connecting arms 2 are connected to the bracket 1; the support member 3 is located between two adjacent connecting arms 2 and is used to place a workpiece 100; the adjustment assembly 4 is located between the connecting arms 2 and the support member 3 and is used to drive the support member 3 to rotate; the operating member 5 is connected to the bracket 1 and is used to cooperate with the robot arm to transfer the workpiece loading mechanism through the robot arm.

[0044] In this embodiment, the bracket 1 is annular or plate-shaped. The specific shape can be selected based on the weight and cost of the entire workpiece loading mechanism. This application uses the ring-shaped bracket 1 as an example to describe the specific structure and connection relationship of the workpiece loading mechanism. Specifically, the bracket 1 is a metal ring structure with a relatively large diameter, and the cross-sectional shape of the bracket 1 is a quadrilateral or polygon. The connecting arm 2 is a long strip rod, which can be a straight rod or a bent rod. One end of the connecting arm 2 is connected to the bracket 1. It can be connected by a non-detachable method such as welding, or by a detachable method such as screwing. The connecting arm 2 and the bracket 1 can even be an integrated structure. In other embodiments, the connecting arm 2 is not limited to a strip rod, but can also be a plate-shaped member or a block-shaped member; the support member 3 is a disc-shaped member that adapts to the shape of the workpiece 100, and connecting arms 2 are respectively provided on both sides of the support member 3, and one end of the support member 3 along a diameter direction can be hinged to one of the connecting arms 2, or one end of the support member 3 along a diameter direction is relative to the connecting arm 2 but the two have no connection relationship, and at the same time, the other opposite side is connected to the other connecting arm 2 through an adjustment component 4.

[0045] This workpiece loading mechanism enables the angle adjustment of the workpiece 100. This angle adjustment not only ensures that the coating material or other working substance being vacuum-treated is evenly applied to all parts of the workpiece 100, thereby improving the quality and consistency of the vacuum treatment, but also further adapts to different types of workpieces 100, thereby enhancing adaptability to various types of workpieces 100. Furthermore, the operating member 5 facilitates coordination with the robot arm to achieve transport of the entire workpiece loading mechanism, achieving both rotation of the workpiece 100 and convenient transport.

[0046] In this embodiment, multiple connecting arms 2 can be directly connected to the inward side wall of the bracket 1 to form a relatively compact spoke-like structure, or they can be directly connected to the outward side wall of the bracket 1 to form a radiating umbrella-like structure with a slightly larger outward structural size. Technicians in this field can make targeted choices based on the specific usage space. This embodiment mainly takes the example of multiple connecting arms 2 directly connected to the inward side wall of the bracket 1 for specific development.

[0047] Optionally, the adjustment assembly 4 includes a driving member 41 and an adjusting member 42 . The adjusting member 42 is rotatably connected to the connecting arm 2 . The driving member 41 is used to push the adjusting member 42 and rotate the adjusting member 42 to drive the support member 3 to rotate.

[0048] In this embodiment, the driving member 41 can selectively adopt the form of direct manual drive or electric drive, so that the driving member 41 pushes the adjusting member 42, and uses the adjusting member 42 to drive the support member 3 to rotate, thereby realizing the rotation of the workpiece 100 on the support member 3.

[0049] The matching structure of the driving member 41 and the adjusting member 42 is simple and does not require a complex transmission mechanism, which can make the structure of the adjusting assembly 4 smaller, reduce the complexity and volume of the adjusting assembly 4, and thus improve the compactness of the entire workpiece loading mechanism.

[0050] Optionally, a blind plate (not shown in the figure) is provided on the upper cover of the bracket 1 or a blind plate is provided on the hollow portion of the bracket 1 .

[0051] Specifically, a blind plate is provided above the bracket 1, and the blind plate can be directly and detachably connected to the annular top wall of the bracket 1. In addition, a blind plate can be detachably provided on the hollow part of the bracket 1 to collect the coating material or other vacuum-treated working substances and limit the diffusion of the coating material or other vacuum-treated working substances in the vacuum processing chamber.

[0052] Optionally, a plurality of support members 3 are provided along the circumference of the bracket 1 .

[0053] In this embodiment, the internal space of the bracket 1 can accommodate three support members 3, and the three support members 3 are arranged along the circumference. Connecting arms 2 are provided on both sides of each support member 3, that is, six connecting arms 2 are adaptively provided along the circumference of the bracket 1.

[0054] Those skilled in the art will understand that by reasonably designing the size of the bracket 1 and, subject to the connection strength permitting, the number of supports 3 can be adjusted to suit the efficiency of vacuum processing, and is not limited to the three provided in this embodiment.

[0055] Please see the attached Figure 2 -Attached Figure 5 Optionally, the adjustment assembly 4 also includes a fixed base 43 fixed on the connecting arm 2, the adjustment member 42 includes a first end 421, a second end 422 and a connecting shaft 423, the first end 421 is fixedly connected to the support member 3, the connecting shaft 423 is hinged to the fixed base 43, and the two ends of the connecting shaft 423 are respectively fixedly connected to the first end 421 and the second end 422, and the driving member 41 pushes the second end 422 to make the first end 421 rotate around the axis of the connecting shaft 423.

[0056] Specifically, the fixing seat 43 is a block structure. The fixing seat 43 can be integrally formed on the connecting arm 2, or fixed to the connecting arm 2 by a threaded fastener. A hinge hole is provided on the fixing seat 43, and the connecting shaft 423 passes through the hinge hole. The connecting shaft 423 can rotate inside the hinge hole. Furthermore, a first end 421 and a second end 422 are fixedly connected on both sides of the connecting shaft 423, respectively. The first end 421 is fixedly connected to the support member 3 by a threaded fastener, and the second end 422 forms an eccentric wheel structure with the axis of the connecting shaft 423 as the rotation center. The eccentric wheel structure of the second end 422 is cooperated with the driving member 41, that is, the driving member 41 pushes the second end 422, so that the second end 422 drives the connecting shaft 423 to rotate, further rotating the first end 421 and the entire support member 3.

[0057] In this embodiment, the adjusting member 42 formed by the fixed connection between the first end 421, the second end 422 and the connecting shaft 423 has a simple structure and the adjusting member 42 can be rotated by utilizing the single drive mode of the driving member 41. The adjusting member 42 and the driving member 41 occupy a very small volume, thereby ensuring the compactness of the structure.

[0058] Optionally, the driving member 41 is a screw threadedly connected to the fixing seat 43 , and the end of the screw can push the second end 422 by screwing the screw.

[0059] Specifically, the driving member 41 can be directly in the form of a screw, with a threaded hole formed on the fixing base 43. The screw is screwed into the threaded hole. By rotating the screw, the screw moves back and forth relative to the fixing base 43, thereby squeezing and pushing the second end portion 422. When the screw is screwed in, the end of the screw continuously squeezes the second end portion 422, thereby driving the second end portion 422 and the connecting shaft 423 to rotate, thereby achieving rotation of the first end portion 421 and the support member 3. The rotation angle range can be comprehensively set based on the actual needs of the vacuum treatment process such as coating, as well as the size and rotation range of the second end portion 422, and is not specifically limited in this embodiment.

[0060] In this embodiment, the drive member 41 adopts a simple screw structure, which not only facilitates manual actuation by the user, but also ensures a simple and compact overall structure. In addition, by utilizing the screw-shaped drive member 41 to push the adjustment member 42, the adjustment member 42 further drives the support member 3 to rotate, thereby achieving rotation of the workpiece 100 on the support member 3, which makes the rotation accuracy of the workpiece 100 highly controllable.

[0061] Of course, in other embodiments, if space permits, the driving member 41 can also be directly set as a linear motor, and the linear motor can be used to directly squeeze and push the second end 422 to rotate, so as to improve the automation level of the entire workpiece loading mechanism and vacuum processing equipment.

[0062] In this embodiment, the other side (non-driving side) of the support member 3 is hinged to the connecting arm 2 on the other side. A hinge shaft can be directly set on the non-driving side of the support member 3 to be hinged to the connecting arm 2 on the other side, or a structure roughly the same as the driving side can be set on the non-driving side of the support member 3. For example, an adjusting member 42 consisting of a first end 421, a second end 422 and a connecting shaft 423 and a fixed seat 43 fixed on the connecting arm 2 are symmetrically arranged on the non-driving side of the support member 3. The second end 422 is fixed to the non-driving side of the support member 3 by screwing. The non-driving side is only a driven structure. The roughly symmetrical structure of the driving side and the non-driving side can ensure that the service life of the two sides is roughly the same, thereby facilitating the overall maintenance of various parts of the workpiece loading mechanism in the same maintenance cycle.

[0063] Furthermore, a guide groove 4221 is provided on the second end portion 422, and the guide groove 4221 extends along the rotation direction of the second end portion 422. A locking bolt 431 is also screwed on the fixing seat 43, and the locking bolt 431 is passed through the guide groove 4221. The locking bolt 431 has a first state for locking the second end portion 422 and a second state for releasing the lock.

[0064] In this embodiment, the guide groove 4221 is an arc-shaped strip groove. When the angle of the workpiece 100 needs to be adjusted, the locking bolt 431 should be in the second unlocked state. At this time, the driving member 41 can squeeze and push the second end 422 to rotate the adjusting member 42. When the workpiece 100 reaches the preset adjustment angle, the second end 422 is locked on the fixing seat 43 by tightening the locking bolt 431. Specifically, a vertical plate is provided on the fixing seat 43, and the locking bolt 431 passes through the guide groove 4221 and is screwed on the vertical plate. The locking and unlocking of the adjusting member 42 can be easily achieved through the locking bolt 431, and the use of the locking bolt 431 has a simple structure and reliable locking.

[0065] Optionally, the outer periphery of the operating member 5 is connected to the inner wall of the bracket 1 through a plurality of support arms 51 .

[0066] In this embodiment, the operating member 5 is disc-shaped, with a diameter smaller than that of the bracket 1. The center of the operating member 5 coincides with the center of the bracket 1. The bottom wall of the operating member 5 is connected to one end of multiple support arms 51, while the other ends of the support arms 51 are respectively connected to the inner wall of the bracket 1. Furthermore, the operating member 5 is provided with multiple holes and connecting bosses for mating with the robot. The robot moves above the operating member 5 and engages with the operating member 5 to achieve transfer of the entire workpiece loading mechanism.

[0067] By placing the operating member 5 at the center of the entire bracket 1, the structure that cooperates with the robotic arm is not required to be placed on the large diameter bracket 1, thereby miniaturizing and improving the compactness of the robotic arm and other transport mechanisms. If space permits, the operating member 5 can also be connected to the outside of the bracket 1 when the connecting arm 2 extends radially outward along the outer wall of the bracket 1.

[0068] In this embodiment, the bracket 1, the connecting arm 2, the operating member 5, and the support arm 51 can be connected by a non-detachable method such as welding, or by a detachable method such as screwing.

[0069] Optionally, at least a portion of the structure of the bracket 1 and / or at least a portion of the structure of the connecting arm 2 forms an operating member 5, which is used to cooperate with the robot arm and transfer the workpiece loading mechanism via the robot arm. Of course, any two or all of the bracket 1, connecting arm 2, and operating member 5 can be an integrated structure to reduce the number of parts and assembly steps.

[0070] Optionally, one end of the connecting arm 2 away from the bracket 1 is connected to the operating member 5 .

[0071] In this embodiment, the other end of the connecting arm 2 can be fixed to the operating member 5 by a threaded fastener, thereby further reinforcing the operating member 5 and ensuring the stability of the connecting arm 2 itself.

[0072] Optionally, the bracket 1 is further provided with a plurality of hanging members 11 , and the plurality of hanging members 11 are distributed at intervals along the circumference of the bracket 1 , and the workpiece loading mechanism is connected to the public turntable through the hanging members 11 .

[0073] In this embodiment, the workpiece loading mechanism as a whole needs to be hung on the public turntable, which can drive the entire workpiece loading mechanism to rotate, thereby improving the uniformity of vacuum treatment such as coating. In this embodiment, three hanging parts 11 are arranged along the circumference, that is, a hanging part 11 is arranged every 120°, so as to cooperate with the docking structure on the public turntable to achieve stable hanging and reliable rotation.

[0074] Furthermore, the hanging member 11 is L-shaped.

[0075] In this embodiment, the hanging member 11 is an inverted L-shape. One end of the hanging member 11 is screwed to the bracket 1, and the other end is matched with a screw to realize a complete hook structure. After the hanging member 11 is hung on the docking structure of the rotating disk, the hook part can be closed by screwing the screw to ensure the stability of the hanging. It should be noted that Figure 1In the embodiment, the rotation axes of the multiple support members 3 are roughly located in the circumferential direction of the revolution axis of the revolution disk, so that the workpiece loading mechanism of the present application can not only utilize the revolution of the revolution disk to effectively regulate the vacuum treatment uniformity of the workpiece 100 in the circumferential direction of the revolution axis of the revolution disk, but also utilize the rotation of the support members 3 to effectively regulate the vacuum treatment uniformity of the workpiece 100 in the radial direction of the revolution axis of the revolution disk, thereby improving the quality of vacuum treatment.

[0076] A second aspect of this embodiment further relates to a vacuum processing equipment, which includes a conveying assembly, the workpiece loading mechanism and a vacuum processing chamber, wherein the conveying assembly can convey the workpiece loading mechanism into the vacuum processing chamber.

[0077] Specifically, the transport assembly includes a robotic arm that can engage with the operating member 5 for gripping, thereby driving the workpiece loading mechanism to be transported to the interior of the vacuum processing chamber for vacuum coating or other vacuum processing. It is understood that in some implementations, the vacuum processing equipment is a vacuum processing equipment capable of automatically transporting the workpiece 100.

[0078] The vacuum processing equipment based on the workpiece loading mechanism can realize the angle adjustment of the workpiece 100, improve the quality and consistency of vacuum processing such as coating, and further adapt to different types of workpieces 100 to improve adaptability.

[0079] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Workpiece loading mechanism, characterized in that, include: Bracket (1); A connecting arm (2) connected to the bracket (1); A support member (3) is provided between two adjacent connecting arms (2), and the support member (3) is used to place a workpiece (100); An adjusting component (4), the adjusting component (4) being arranged between the connecting arm (2) and the supporting member (3), and the adjusting component (4) being used to drive the supporting member (3) to rotate: An operating member (5) is connected to the bracket (1), and the operating member (5) is used to cooperate with a manipulator and transfer the workpiece loading mechanism through the manipulator.

2. The workpiece loading mechanism according to claim 1, wherein: The adjusting assembly (4) comprises a driving member (41) and an adjusting member (42), wherein the adjusting member (42) is rotatably connected to the connecting arm (2), and the driving member (41) is used to push the adjusting member (42) and rotate the adjusting member (42) to drive the supporting member (3) to rotate.

3. The workpiece loading mechanism according to claim 2, characterized in that: The adjustment assembly (4) further comprises a fixing seat (43) fixed on the connecting arm (2); the adjustment member (42) comprises a first end (421), a second end (422) and a connecting shaft (423); the first end (421) is fixedly connected to the support member (3); the connecting shaft (423) is hinged to the fixing seat (43); the two ends of the connecting shaft (423) are respectively fixedly connected to the first end (421) and the second end (422); the driving member (41) pushes the second end (422) to make the first end (421) rotate around the axis of the connecting shaft (423).

4. The workpiece loading mechanism according to claim 3, wherein: The driving member (41) is a screw connected to the fixing seat (43), and the end of the screw can push the second end (422) by screwing the screw.

5. The workpiece loading mechanism according to claim 3, characterized in that: A guide groove (4221) is provided on the second end portion (422), and the guide groove (4221) extends along the rotation direction of the second end portion (422). A locking bolt (431) is also screwed on the fixing seat (43), and the locking bolt (431) is passed through the guide groove (4221). The locking bolt (431) has a first state for locking the second end portion (422) and a second state for releasing the lock.

6. The workpiece loading mechanism according to claim 1, wherein: The outer periphery of the operating member (5) is connected to the bracket (1) via a plurality of support arms (51).

7. The workpiece loading mechanism according to claim 1, wherein: At least a portion of the structure of the bracket (1) and / or at least a portion of the structure of the connecting arm (2) forms an operating member (5), and the operating member (5) is used to cooperate with a robot and transfer the workpiece loading mechanism through the robot.

8. The workpiece loading mechanism according to claim 1, wherein: The bracket (1) is further provided with a plurality of hanging parts (11), and the plurality of hanging parts (11) are distributed at intervals along the circumference of the bracket (1), and the workpiece loading mechanism is connected to the rotary disk via the hanging parts (11).

9. The workpiece loading mechanism according to claim 8, characterized in that: The hanging member (11) is L-shaped.

10. The workpiece loading mechanism according to any one of claims 1 to 9, characterized in that: A plurality of support members (3) are provided along the circumference of the bracket (1).

11. Vacuum processing equipment, characterized in that The invention comprises a conveying component, a workpiece loading mechanism according to any one of claims 1 to 10, and a vacuum processing chamber, wherein the conveying component can convey the workpiece loading mechanism into the vacuum processing chamber.

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