Safety shutter structure and photoetching machine

Abstract

The utility model relates to a safe shutter structure and a photoetching machine, the safe shutter structure comprises: a light blocking member having a set length direction, the light blocking member having a set first end and a set second end along the length direction, the first end of the light blocking member being rotatably connected to the photoetching machine; the supporting assembly is arranged at the second end of the light blocking piece; the driving assembly is used for driving the light blocking piece to rotate so as to block or be far away from a light outlet of the photoetching machine; the supporting assembly is configured to provide upward supporting for the light blocking piece when the light blocking piece rotates. The light blocking piece can be prevented from being bent and deformed downwards under the action of high temperature and gravity, and then the light blocking piece is prevented from being clamped due to friction between the light blocking piece and the base where the light outlet is located.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a safety shutter structure and a photolithography machine. Background Art

[0002] The shutter has a safety protection function in the lithography machine. It uses the movement of the light blocking member to block or move away from the light outlet of the lithography machine to achieve the switching of the light source light path between closing and opening.

[0003] In the prior art, the light-blocking member of the door opening is constructed with one end connected to a drive shaft that drives its rotation, while the other end is suspended in the air without support. When the light-blocking member moves to block the light outlet of the lithography machine, light emitted from the light outlet hits the light-blocking member, causing it to heat up. Under the influence of the high temperature and gravity, the light-blocking member bends downward, causing the suspended end of the light-blocking member to rub against the base of the light outlet, causing the light-blocking member to become stuck. Utility Model Content

[0004] The Summary of the Utility Model introduces a series of simplified concepts that will be further described in the Detailed Description of the Utility Model. The Summary of the Utility Model of the Utility Model does not intend to limit the key features and essential technical features of the claimed technical solution, nor does it intend to determine the scope of protection of the claimed technical solution.

[0005] In response to the existing problems, the utility model provides a safety shutter structure, including:

[0006] A light blocking member having a set length direction, wherein the light blocking member has a set first end and a set second end along the length direction, and the first end of the light blocking member is rotatably connected to the photolithography machine;

[0007] a supporting assembly, disposed at the second end of the light blocking member;

[0008] A driving assembly, configured to drive the light blocking member to rotate so as to block or move away from the light outlet of the lithography machine;

[0009] Wherein, the supporting assembly is configured to provide upward support to the light blocking member when the light blocking member rotates.

[0010] In some embodiments of the present application, the support assembly includes:

[0011] a sliding member, disposed at the second end of the light blocking member;

[0012] guides;

[0013] The sliding member has a sliding portion, the guide member has a guide portion matching the sliding portion, the sliding portion is used to slide along the guide portion when the light blocking member drives the sliding member to rotate, and the guide member is used to provide upward support to the light blocking member through the sliding member.

[0014] In some embodiments of the present application, a connecting member is further included, and one end of the guide member is rotatably disposed on the base where the light outlet is located through the connecting member;

[0015] The guide member is used to cooperate with the sliding member to rotate when the light blocking member drives the sliding member to move, so as to guide the sliding part to slide along the guide member.

[0016] In some embodiments of the present application, the support assembly includes:

[0017] A sliding member is arranged on the light blocking member; the sliding member has a sliding portion, and a guide portion matching the sliding portion is provided on the base where the light outlet is located. The sliding member is used to slide along the guide portion through the sliding portion and provide upward support for the light blocking member.

[0018] In some embodiments of the present application, the sliding portion includes a sliding surface or a rolling surface, and the guiding portion includes a guide groove or a guide surface.

[0019] In some embodiments of the present application, the driving assembly is connected to the light blocking member to drive the light blocking member to rotate, or,

[0020] The driving assembly is connected to the sliding member to drive the light blocking member to rotate.

[0021] In some embodiments of the present application, the support assembly includes:

[0022] A connecting piece, fixedly arranged on the base where the light outlet is located;

[0023] A support member, wherein the support member has a first end and a second end set along a length direction;

[0024] Wherein, the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is rotatably connected to the connecting member;

[0025] The driving assembly is connected to the light blocking member to drive the light blocking member to rotate. The light blocking member drives the supporting member to rotate around the connecting member. The supporting member provides upward support to the second end of the light blocking member.

[0026] In some embodiments of the present application, the support assembly includes:

[0027] A connecting member, rotatably disposed on the base where the light outlet is located;

[0028] A support member, wherein the support member has a first end and a second end set along a length direction;

[0029] Wherein, the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is fixedly connected to the connecting member;

[0030] The driving assembly is connected to the connecting member to drive the connecting member to rotate, the connecting member drives the supporting member to rotate, and the supporting member drives the light blocking member to rotate and provides upward support to the second end of the light blocking member.

[0031] According to another aspect of the present application, a lithography machine is provided, comprising the safety shutter structure described in any one of the above.

[0032] The safety shutter structure and photolithography machine of the present invention have a support assembly that can provide upward support to the light blocking member, thereby preventing the light blocking member from bending and deforming downward under the action of high temperature and gravity, and further preventing the light blocking member from rubbing against the base where the light outlet is located and causing the light blocking member to be stuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The following drawings of the present invention are used as a part of the present invention for understanding the present invention. The drawings show embodiments of the present invention and their descriptions, and are used to explain the principle of the present invention.

[0034] In the attached figure:

[0035] Figure 1 The figure shows a front view of a safety shutter structure according to a specific embodiment of the present invention.

[0036] Figure 2 A top view of a safety shutter structure according to a specific embodiment of the present invention is shown.

[0037] Figure 3 A schematic diagram showing a safety shutter structure of a specific embodiment of the present invention rotated at a certain angle is shown.

[0038] Figure 4 A partial structural diagram of a safety shutter structure of a specific embodiment of the present utility model is shown.

[0039] In the attached figure:

[0040] 110 light blocking element;

[0041] 121 drive shaft;

[0042] 130 Slide;

[0043] 140 guides;

[0044] 150 connectors;

[0045] 200 base;

[0046] 201 light outlet. DETAILED DESCRIPTION

[0047] In the following description, numerous specific details are provided to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features known in the art are not described to avoid confusion with the present invention.

[0048] It should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to make the disclosure thorough and complete and to fully convey the scope of the present invention to those skilled in the art. In the accompanying drawings, the dimensions and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals throughout represent like elements.

[0049] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it may be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present invention, the first element, component, region, layer, or part discussed below may be represented as a second element, component, region, layer, or part.

[0050] Spatially relative terms such as "under," "beneath," "below," "under," "above," "above," etc., may be used herein for convenience of description to describe the relationship of one element or feature shown in the figures to other elements or features. It should be understood that the spatially relative terms are intended to include different orientations of the device in use and operation in addition to the orientations shown in the figures. For example, if the device in the drawings is flipped, then the elements or features described as "under" or "beneath" or "beneath" the other elements will be oriented as "over" the other elements or features. Thus, the exemplary terms "under" and "under" may include both the upper and lower orientations. The device may be oriented otherwise (rotated 90 degrees or in other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0051] The purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present invention. When used herein, the singular forms "a", "an" and "the" are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0052] In the prior art, the light-blocking member of the door opening is constructed with one end connected to a drive shaft that drives its rotation, while the other end is suspended in the air without support. When the light-blocking member moves to block the light outlet of the lithography machine, light emitted from the light outlet hits the light-blocking member, causing it to heat up. Under the influence of the high temperature and gravity, the light-blocking member bends downward, causing the suspended end of the light-blocking member to rub against the base of the light outlet, causing the light-blocking member to become stuck.

[0053] In order to solve at least one of the above technical problems, the present application provides a safety shutter structure, including: a light blocking member having a set length direction, the light blocking member having a set first end and a second end along the length direction, the first end of the light blocking member being rotatably connected to the photolithography machine; a support assembly, arranged at the second end of the light blocking member; a drive assembly, used to drive the light blocking member to rotate to block or move away from the light outlet of the photolithography machine; wherein, the support assembly is configured to provide upward support to the light blocking member when the light blocking member rotates.

[0054] According to the safety shutter structure of the present application, the support assembly can provide upward support to the light blocking member, thereby preventing the light blocking member from bending and deforming downward under the action of high temperature and gravity, and further preventing the light blocking member from rubbing against the base where the light outlet is located and causing the light blocking member to be stuck.

[0055] In order to thoroughly understand the present application, detailed steps and structures will be provided in the following description to illustrate the technical solution proposed by the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may also have other implementation methods.

[0056] Reference below Figures 1 to 4 A safety shutter structure according to one embodiment of the present application is described. The safety shutter structure includes: a light blocking member 110 having a predetermined length and a predetermined first end and second end along the length, the first end of the light blocking member 110 being rotatably connected to the photolithography machine; a support assembly disposed at the second end of the light blocking member 110; and a drive assembly for driving the light blocking member 110 to rotate so as to block or move away from the light outlet 201 of the photolithography machine. The support assembly is configured to provide upward support for the light blocking member 110 during its rotation.

[0057] The drive assembly can drive the light blocking member 110 to rotate to block or move away from the light outlet 201 of the lithography machine. For example, when the lithography machine is performing a normal production process, the drive assembly can drive the light blocking member 110 to rotate away from the light outlet 201 of the lithography machine, so that light in the lamp room of the lithography machine can be emitted from the light outlet 201. When the lithography machine is being maintained or repaired, or in other unexpected situations, the drive assembly can drive the light blocking member 110 to rotate to block the light outlet 201 of the lithography machine. The light blocking member 110 blocks the light emitted from the light outlet 201 to prevent the light emitted from the light outlet 201 from irradiating the human body and causing harm.

[0058] Since the support assembly can provide upward support to the light blocking member 110 when the light blocking member 110 rotates, when the light blocking member 110 blocks the light outlet 201, even if the light blocking member 110 softens under the action of high temperature, the upward support provided by the support assembly to the light blocking member 110 can prevent the light blocking member 110 from bending and deforming downward under the action of high temperature and gravity, and further prevent the light blocking member 110 from rubbing against the base 200 where the light outlet 201 is located and thus jamming the light blocking member 110.

[0059] In some embodiments, as Figures 1 to 3 As shown, the support assembly includes: a sliding member 130, which is arranged on the light blocking member 110; a guide member 140, which is slidably connected to the sliding member 130, and the guide member 140 is used to provide upward support to the light blocking member 110 through the sliding member 130.

[0060] Since the guide member 140 can provide upward support to the light blocking member 110 through the sliding member 130, when the light blocking member 110 blocks the light outlet 201, even if the light blocking member 110 softens under the action of high temperature, the upward support provided by the guide member 140 to the light blocking member 110 can prevent the light blocking member 110 from bending and deforming downward under the action of high temperature and gravity, and further prevent the light blocking member 110 from rubbing against the base 200 where the light outlet 201 is located and thus jamming the light blocking member 110.

[0061] It is worth noting that although the guide member 140 can provide upward support to the light blocking member 110 through the sliding member 130, there is a possibility that the light blocking member 110 may rub against the guide member 140 and become stuck when the drive assembly drives the light blocking member 110 to rotate to block or move away from the light outlet 201 of the lithography machine. In this embodiment, the sliding member 130 provided on the light blocking member 110 is slidably connected to the guide member 140, thereby preventing the light blocking member 110 from rubbing against the guide member 140 and becoming stuck during the rotation process.

[0062] In some embodiments, the light blocking member 110 may be implemented as fan-shaped blades or any other suitable structural form, which is not limited.

[0063] In some embodiments, the light blocking member 110 may be made of aluminum alloy, or may be replaced with other materials that are resistant to high temperatures, not easily deformed, and can block ultraviolet light.

[0064] In some embodiments, the driving assembly may be connected to the light blocking member 110 to directly drive the light blocking member 110 to rotate, or the driving assembly may be connected to the sliding member 130 to indirectly drive the light blocking member 110 to rotate.

[0065] For example, the driving assembly is connected to the light blocking member 110 to drive the light blocking member 110 to rotate. Figure 1 and Figure 4 As shown, the driving assembly includes: a driving element; a transmission shaft 121, which is connected to the first end of the light blocking member 110; the driving element is used to drive the transmission shaft 121 to rotate, and the transmission shaft 121 drives the light blocking member 110 to rotate through its own rotation to block or move away from the light outlet 201 of the lithography machine.

[0066] The driving element may be a motor, a hydraulic motor, or the like, and is not limited thereto. For example, if the motor is used, the motor can drive the transmission shaft 121 to rotate forward or reverse, and the transmission shaft 121 can then drive the light blocking member 110 to rotate forward or reverse around the axis of the transmission shaft 121 through its own forward or reverse rotation, so that the light blocking member 110 moves toward the light outlet 201 of the lithography machine to block the light outlet 201, or moves away from the light outlet 201 of the lithography machine.

[0067] Taking the example of the driving component being connected to the sliding member 130 to drive the light blocking member 110 to rotate, the driving component can drive the sliding member 130 to slide along the guide member 140, and the sliding member 130 drives the light blocking member 110 to rotate through its own movement to block or move away from the light outlet 201 of the lithography machine.

[0068] In some embodiments, the rotation angle range of the light blocking member 110 can be limited, for example, it can be 0 to 120 degrees or any other suitable range, and this is not limited. For example, the maximum rotation angle of the light blocking member 110 can be 5 degrees, 10 degrees, 15 degrees, 20 degrees, 25 degrees, 30 degrees, 35 degrees, 40 degrees, 45 degrees, 50 degrees, 55 degrees, 60 degrees, 65 degrees, 70 degrees, 75 degrees, 80 degrees, 85 degrees, 90 degrees, 95 degrees, 100 degrees, 105 degrees, 110 degrees, 115 degrees, 120 degrees, etc., and this is not limited.

[0069] In some embodiments, the sliding member 130 may be disposed at the second end of the light blocking member 110 .

[0070] In some embodiments, the sliding member 130 has a sliding portion, and the guide member 140 has a guiding portion matching the sliding portion. The sliding portion is configured to slide along the guiding portion when the light blocking member 110 drives the sliding member 130 to rotate.

[0071] Specifically, when the driving element drives the light blocking member 110 to rotate around the axis of the transmission shaft 121, the light blocking member 110 can also drive the sliding member 130 to rotate around the axis of the transmission shaft 121. When the sliding member 130 rotates around the axis of the transmission shaft 121, the sliding portion of the sliding member 130 can slide along the guide portion of the guide member 140, thereby preventing the light blocking member 110 from rubbing against the guide member 140 during the rotation process and causing the light blocking member 110 to be stuck.

[0072] In some embodiments, as Figure 1 As shown, it also includes a connecting member 150, and one end of the guide member 140 is rotatably set on the base 200 where the light outlet 201 is located through the connecting member 150; wherein, the guide member 140 is used to cooperate with the sliding member 130 to rotate when the light blocking member drives the sliding member 130 to move to guide the sliding part to slide along the guide part.

[0073] Specifically, the connecting member 150 can be rotatably set on the base 200, and one end of the guide member 140 is fixedly connected to the connecting member 150, so that one end of the guide member 140 is rotatably set on the base 200 where the light outlet 201 is located through the connecting member 150; or the connecting member 150 can be fixedly set on the base 200, and one end of the guide member 140 is rotatably connected to the connecting member 150, so that one end of the guide member 140 is rotatably set on the base 200 where the light outlet 201 is located through the connecting member 150.

[0074] When the driving element drives the light blocking member 110 to rotate about the axis of the transmission shaft 121, the light blocking member 110 can also drive the sliding member 130 to rotate about the axis of the transmission shaft 121. Since the sliding portion of the sliding member 130 is slidably connected to the guide portion of the guide member 140, the guide member 140 can rotate about one end under the action of the sliding member 130, and then guide the sliding portion of the sliding member 130 to slide along the guide portion through its own rotation.

[0075] In some embodiments, the sliding portion of the slider 130 can be configured as any suitable sliding structure, such as a sliding surface, a rolling surface, etc., without limitation. For example, if the sliding portion includes a sliding surface, the slider 130 can be implemented as a slider fixedly disposed at the second end of the light blocking member 110. For example, if the sliding portion includes a rolling surface, the slider 130 can be implemented as a pulley rotatably disposed at the second end of the light blocking member 110.

[0076] In some embodiments, the guide portion on the guide member 140 can be configured as any suitable guide structure, such as a guide groove, a guide surface, etc., without limitation. For example, if the guide portion includes a guide groove, the guide member 140 can be implemented as a guide groove member having a guide groove. For example, if the guide portion includes a guide surface, the guide member 140 can be implemented as a guide rail having a guide surface.

[0077] For example, Figure 2 and Figure 3 As shown, taking the sliding member 130 as a pulley rotatably arranged at the second end of the light blocking member 110, and the guide member 140 as a slide member with a guide groove as an example, the pulley is slidably arranged in the guide groove of the slide member, and when the driving element drives the light blocking member 110 to rotate around the axis of the transmission shaft 121, the light blocking member 110 can also drive the pulley to slide along the guide groove of the slide member. When the light blocking member 110 rotates to block the light outlet 201 of the lithography machine, the upward support provided by the slide member to the second end of the light blocking member 110 through the pulley can prevent the light blocking member 110 from bending and deforming downward under the action of high temperature and gravity, thereby preventing the second end of the light blocking member 110 from rubbing against the base 200 where the light outlet 201 is located and jamming the light blocking member 110.

[0078] In some embodiments, the guide member 140 may be made of stainless steel or any other suitable material, without limitation. The guide portion of the guide member 140 may be coated with a high-temperature resistant lubricant to improve the sliding performance of the sliding portion of the sliding member 130 when sliding along the guide portion of the guide member 140 .

[0079] In some embodiments, there is a gap between the guide 140 and the base 200 .

[0080] Specifically, the guide member 140 may be disposed at the upper end of the connection member 150 so that a gap exists between the guide member 140 and the base 200 .

[0081] When the drive assembly drives the light blocking member 110 to rotate, the light blocking member 110 simultaneously drives the sliding member 130 to slide along the guide member 140, causing the guide member 140 to rotate under the action of the sliding member 130. If the guide member 140 is in direct contact with the base 200, the guide member 140 may easily rub against the base 200 during rotation, causing the guide member 140 to become stuck, thereby causing the light blocking member 110 to become stuck during rotation. In this embodiment, by providing a gap between the guide member 140 and the base 200, friction between the guide member 140 and the base 200 during rotation and thus preventing the guide member 140 from becoming stuck, thereby preventing the light blocking member 110 from becoming stuck during rotation.

[0082] In some embodiments, the sliding member 130 and the guide member 140 are both located on the light-facing side of the light blocking member 110. That is, the sliding member 130 and the guide member 140 are both located below the light blocking member 110, so that the guide member 140 can provide upward support to the second end of the light blocking member 110 through the sliding member 130.

[0083] In other embodiments, the support assembly includes: a sliding member, which is arranged on the light blocking member; the sliding member has a sliding portion, and a guide portion matching the sliding portion is provided on the base where the light outlet is located, and the sliding member is used to slide along the guide portion through the sliding portion and provide upward support for the light blocking member.

[0084] Since the sliding part can provide upward support to the light blocking part, when the light blocking part blocks the light outlet, even if the light blocking part softens under the action of high temperature, the upward support provided by the sliding part to the light blocking part can prevent the light blocking part from bending and deforming downward under the action of high temperature and gravity, and further prevent the light blocking part from rubbing against the base where the light outlet is located and getting stuck.

[0085] It is worth noting that the sliding member can provide upward support for the light blocking member. However, when the drive assembly drives the light blocking member to rotate to block or move away from the light outlet of the lithography machine, there is a possibility that the sliding member rubs against the base on which the light outlet is located, causing the light blocking member to become stuck. In this embodiment, the sliding member slides along a guide portion provided on the base via a sliding portion, thereby preventing the sliding member from rubbing against the base on which the light outlet is located during rotation, thereby preventing the light blocking member from becoming stuck.

[0086] Among them, other contents related to this embodiment, such as the specific structural form of the sliding part and the guide part, the specific structural form of the driving component driving the light blocking member to rotate, etc., can be referred to the description above and will not be repeated here.

[0087] In other embodiments, the support assembly includes: a connecting member, fixedly arranged on a base where the light outlet is located; a supporting member, the supporting member having a set first end and a second end along the length direction; wherein the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is rotatably connected to the connecting member; a driving assembly is connected to the light blocking member to drive the light blocking member to rotate, the light blocking member drives the supporting member to rotate around the connecting member, and the supporting member provides upward support to the second end of the light blocking member.

[0088] In this embodiment, the light blocking member is driven to rotate by the driving assembly. During the rotation of the light blocking member, the second end of the light blocking member can drive the connecting member to rotate around the connecting member, and the support member can also provide upward support to the second end of the light blocking member. Therefore, when the light blocking member blocks the light outlet, even if the light blocking member softens under the action of high temperature, the upward support provided by the second support member to the light blocking member through the first support member under the support of the driving assembly can also prevent the light blocking member from bending and deforming downward under the action of high temperature and gravity, and further prevent the light blocking member from rubbing against the base where the light outlet is located and getting stuck.

[0089] In other embodiments, the support assembly includes: a connecting member, which is rotatably arranged on a base where the light outlet is located; a supporting member, which has a set first end and a second end along the length direction; wherein the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is fixedly connected to the connecting member; a driving assembly is connected to the connecting member to drive the connecting member to rotate, the connecting member drives the supporting member to rotate, and the supporting member drives the light blocking member to rotate and provides upward support to the second end of the light blocking member.

[0090] In this embodiment, the connecting member is driven to rotate by the driving assembly, and the connecting member can then drive the supporting member to rotate, and the supporting member can then drive the light blocking member to rotate and provide upward support to the second end of the light blocking member. Therefore, when the light blocking member blocks the light outlet, even if the light blocking member softens under the action of high temperature, the upward support provided to the light blocking member by the second supporting member through the first supporting member under the support of the driving assembly can prevent the light blocking member from bending and deforming downward under the action of high temperature and gravity, and thus prevent the light blocking member from rubbing against the base where the light outlet is located and getting the light blocking member stuck.

[0091] For other contents related to this embodiment, please refer to the above description and will not be repeated here.

[0092] According to another aspect of the present application, a lithography machine is provided, which includes: a safety shutter structure.

[0093] The safety shutter structure may be implemented as the safety shutter structure described above, and reference may be made to the above description, which will not be repeated here.

[0094] In summary, according to the safety shutter structure and photolithography machine of the embodiments of the present application, the support assembly can provide upward support to the light blocking member, thereby preventing the light blocking member from bending and deforming downward under the action of high temperature and gravity, and further preventing the light blocking member from rubbing against the base where the light outlet is located and causing the light blocking member to be stuck.

[0095] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely illustrative and are not intended to limit the scope of the present application. Various changes and modifications may be made therein by those skilled in the art without departing from the scope and spirit of the present application. All such changes and modifications are intended to be included within the scope of the present application as required by the appended claims.

[0096] Similarly, it should be understood that in order to streamline the present application and aid in understanding one or more of the various application aspects, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, this approach of the present application should not be interpreted as reflecting the intention that the claimed application requires more features than those explicitly recited in each claim. More precisely, as reflected in the corresponding claims, the point of the application is that the corresponding technical problem can be solved with fewer features than all the features of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into the detailed description, with each claim itself serving as a separate embodiment of the present application.

[0097] Furthermore, those skilled in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, combinations of features from different embodiments are intended to be within the scope of this application and to form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.

[0098] It should be noted that the above embodiments are illustrative rather than limiting of the present application, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not denote any order. These words may be interpreted as designations.

Claims

1. A safety shutter structure, characterized in that: Applied to a lithography machine, the safety shutter structure includes: A light blocking member having a set length direction, wherein the light blocking member has a set first end and a set second end along the length direction, and the first end of the light blocking member is rotatably connected to the photolithography machine; a supporting assembly, disposed at the second end of the light blocking member; A driving assembly, configured to drive the light blocking member to rotate so as to block or open a light outlet of the lithography machine; Wherein, the supporting assembly is configured to provide upward support to the light blocking member when the light blocking member rotates.

2. The safety shutter structure according to claim 1, characterized in that: The support assembly comprises: A sliding member, disposed on the light blocking member; guides; The sliding member has a sliding portion, and the guide member has a guide portion matching the sliding portion. The sliding portion is used to slide along the guide portion when the light blocking member drives the sliding member to rotate, and the guide member provides upward support to the light blocking member through the sliding member.

3. The safety shutter structure according to claim 2, characterized in that: It also includes a connecting member, through which one end of the guide member is rotatably arranged on the base where the light outlet is located; The guide member is used to cooperate with the sliding member to rotate when the light blocking member drives the sliding member to move, so as to guide the sliding part to slide along the guide member.

4. The safety shutter structure according to claim 1, wherein: The support assembly comprises: A sliding member is arranged on the light blocking member; the sliding member has a sliding portion, and a guide portion matching the sliding portion is provided on the base where the light outlet is located. The sliding member is used to slide along the guide portion through the sliding portion and provide upward support for the light blocking member.

5. The safety shutter structure according to claim 3 or 4, characterized in that: The sliding portion includes a sliding surface or a rolling surface, and the guide portion includes a guide groove or a guide surface.

6. The safety shutter structure according to claim 2 or 4, characterized in that: The driving assembly is connected to the light blocking member to drive the light blocking member to rotate, or, The driving assembly is connected to the sliding member to drive the light blocking member to rotate.

7. The safety shutter structure according to claim 1, wherein: The support assembly comprises: A connecting piece, fixedly arranged on the base where the light outlet is located; A support member, wherein the support member has a first end and a second end set along a length direction; Wherein, the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is rotatably connected to the connecting member; The driving assembly is connected to the light blocking member to drive the light blocking member to rotate. The light blocking member drives the supporting member to rotate around the connecting member. The supporting member provides upward support to the second end of the light blocking member.

8. The safety shutter structure according to claim 1, wherein: The support assembly comprises: A connecting member, rotatably disposed on the base where the light outlet is located; A support member, wherein the support member has a first end and a second end set along a length direction; Wherein, the first end of the supporting member is rotatably connected to the second end of the light blocking member, and the second end of the supporting member is fixedly connected to the connecting member; The driving assembly is connected to the connecting member to drive the connecting member to rotate, the connecting member drives the supporting member to rotate, and the supporting member drives the light blocking member to rotate and provides upward support to the second end of the light blocking member.

9. The safety shutter structure according to claim 1, wherein: The rotation angle range of the light blocking member is 0 to 120 degrees.

10. A photolithography machine, characterized in that: The invention comprises the safety shutter structure according to any one of claims 1 to 9.

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