Wafer line device for conveying silicon wafers

Abstract

The utility model relates to the technical field of wafer inserting equipment, in particular to a silicon wafer conveying water channel line device which comprises a feeding device, the feeding device comprises a base, a movable seat, a mounting seat, a stepping mechanism and a wafer inserting mechanism, the base is in sliding connection with the movable seat, the mounting seat is fixedly connected with the movable seat, a fixing groove used for containing a flower basket is formed in the mounting seat, and the wafer inserting mechanism is arranged in the fixing groove. The wafer inserting mechanism is fixedly connected with the base, the wafer inserting mechanism is used for inserting silicon wafers into the flower basket, the stepping mechanism is fixedly connected with the base, the output end of the stepping mechanism is in transmission connection with the movable seat, and the stepping mechanism is used for gradually driving the movable seat to move. And the silicon wafers can accurately reach the wafer inserting station, so that the silicon wafers can be accurately inserted into the flower basket, and defective products are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer inserting equipment, in particular to a waterway line device for conveying silicon wafers. Background Art

[0002] The waterway line device for conveying silicon wafers mainly includes the following key parts: main conveying line, return line, manipulator, circulating filter water tank, blocking and stopping mechanism, and loading mechanism. Silicon wafer basket, also known as wafer basket, is a special tool for carrying, protecting and transporting silicon wafers. It is widely used in semiconductor, polysilicon, solar energy, lithium battery, new materials, new energy and other industries. Especially in the process of silicon wafer cleaning, corrosion, conversion and other processes, silicon wafer basket plays a vital role as a key equipment for carrying silicon wafers. In the prior art, the loading mechanism of the waterway line device for conveying silicon wafers uses a conveyor belt to transport the silicon wafer basket, which results in inaccurate position of the silicon wafer basket. During the loading and inserting process, if there is a deviation between the position of the silicon wafer and the slot, the silicon wafer will be damaged, resulting in the need to stop the machine for cleaning. Utility Model Content

[0003] The technical problem to be solved by the present invention is: in order to overcome the problem that the wafer insertion machine in the prior art uses a conveyor belt to transport the silicon wafer basket, which leads to inaccurate movement of the silicon wafer basket. During the wafer insertion process, if there is a deviation between the position of the silicon wafer and the slot, the silicon wafer will be damaged, resulting in the need to stop the machine for cleaning. A waterway line device for conveying silicon wafers is provided.

[0004] The technical solution adopted by the utility model to solve its technical problems is: a waterway line device for conveying silicon wafers, including a loading device, the loading device including a base, a movable seat, a mounting seat, a stepping mechanism and a piece insertion mechanism, the base and the movable seat are slidably connected, the mounting seat and the movable seat are fixedly connected, a fixed groove for accommodating a flower basket is provided on the mounting seat, the piece insertion mechanism is fixedly connected to the base, the piece insertion mechanism is used to insert the silicon wafer into the flower basket, the stepping mechanism is fixedly connected to the base, the output end of the stepping mechanism is transmission-connected to the movable seat, the stepping mechanism is used to gradually drive the movable seat to move, and through the design of the stepping mechanism, the movement of the silicon wafer flower basket is precise, and it can accurately reach the piece insertion station, so that the silicon wafer can be accurately inserted into the flower basket, avoiding the generation of defective products.

[0005] In order to solve the problem of how to arrange the stepping mechanism, the stepping mechanism further includes a mobile driving member, a positioning bar, a positioning rod and a positioning driving member. The mobile driving member is fixedly connected to the base, and the output end of the mobile driving member is transmission-connected to the movable seat. The mobile driving member is used to provide power for the movement of the mounting seat. The positioning bar is fixedly connected to the movable seat, and the positioning bar is provided with a number of positioning grooves matching the positioning rod. The positioning driving member is fixedly connected to the base, and the output end of the positioning driving member is fixedly connected to the positioning rod.

[0006] In order to solve the problem of low reset speed of the positioning rod, the stepping mechanism further includes an elastic element, one end of the elastic element abuts against the positioning rod, and the other end abuts against the positioning drive member.

[0007] The base is further provided with a slide rail, the movable seat is provided with a slide groove matching the slide rail, and the movable seat and the slide rail are slidably connected.

[0008] It further includes an insert mechanism including a frame, a lateral movement component, an insert drive and a suction seat. The frame and the base are fixedly connected, the lateral movement component is fixedly connected to the frame, the output end of the lateral movement component is transmission-connected to the insert drive, the lateral movement component is used to provide power for the lateral movement of the suction seat, the output end of the insert drive is transmission-connected to the suction seat, the insert drive is used to provide power for the lifting and lowering movement of the suction seat, the output end of the insert drive is transmission-connected to the suction seat, and the suction seat is used to absorb silicon wafers.

[0009] It further includes a lateral movement component including a guide rail, a slider matching the guide rail, and a lateral drive member, the guide rail is fixedly connected to the frame, the guide rail is slidably connected to the slider, the lateral drive member is fixedly connected to the frame, and the output end of the lateral drive member is slidably connected to the slider.

[0010] The beneficial effect of the present invention is that the waterway line device for conveying silicon wafers provided by the present invention makes the movement of the silicon wafer basket precise through the design of the stepping mechanism, can accurately reach the wafer insertion station, and enables the silicon wafers to be accurately inserted into the basket, thus avoiding the generation of defective products. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0012] Figure 1 This is a schematic diagram of the top view of the structure of the utility model;

[0013] Figure 2 This utility model Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0014] Figure 3 It is a front view structural schematic diagram of the present utility model.

[0015] In the figure: 1. base, 2. movable seat, 3. mounting seat, 4. stepping mechanism, 41. moving drive member, 42. positioning bar, 421. positioning slot, 43. positioning rod, 44. positioning drive member, 45. elastic element, 5. insert mechanism, 51. frame, 52. lateral moving assembly, 521. guide rail, 522. slider, 523. lateral drive member, 53. insert drive member, 54. suction seat, 6. slide rail. DETAILED DESCRIPTION

[0016] The present invention will now be described in further detail with reference to the accompanying drawings, which are simplified schematic diagrams that illustrate the basic structure of the present invention in a schematic manner.

[0017] like Figure 1 It is a structural schematic diagram of the present invention, a waterway line device for conveying silicon wafers, including a loading device, the loading device including a base 1, a movable seat 2, a mounting seat 3, a stepping mechanism 4 and a piece insertion mechanism 5, the base 1 and the movable seat 2 are slidably connected, the mounting seat 3 and the movable seat 2 are fixedly connected, a fixed groove for accommodating a flower basket is provided on the mounting seat 3, the piece insertion mechanism 5 is fixedly connected to the base 1, the piece insertion mechanism 5 is used to insert the silicon wafer into the flower basket, the stepping mechanism 4 is fixedly connected to the base 1, the output end of the stepping mechanism 4 is transmission-connected to the movable seat 2, the stepping mechanism 4 is used to gradually drive the movable seat 2 to move, and through the design of the stepping mechanism 4, the movement of the silicon wafer flower basket is precise, and it can accurately reach the piece insertion station, so that the silicon wafer can be accurately inserted into the flower basket, avoiding the production of defective products.

[0018] like Figure 1 、 Figure 2 As shown, the stepping mechanism 4 includes a moving drive member 41, a positioning bar 42, a positioning rod 43 and a positioning drive member 44. The moving drive member 41 is a power element such as a cylinder. The moving drive member 41 is fixedly connected to the base 1. The output end of the moving drive member 41 is transmission-connected to the movable seat 2. The moving drive member 41 is used to provide power for the movement of the mounting seat 3. The positioning bar 42 is fixedly connected to the movable seat 2. The positioning bar 42 is provided with a number of positioning grooves 421 that match the positioning rod 43. The positioning drive member 44 is fixedly connected to the base 1. The output end of the positioning drive member 44 is fixedly connected to the positioning rod 43. The positioning drive member 44 is a power element such as a cylinder. The positioning bar 42 extends along the moving direction of the movable seat 2. The spacing between adjacent positioning grooves 421 is equal to the insertion spacing of the silicon wafers.

[0019] like Figure 1 、 Figure 2 As shown, the stepping mechanism 4 includes an elastic element 45 , one end of the elastic element 45 abuts against the positioning rod 43 , and the other end abuts against the positioning driving member 44 . The elastic element 45 is a spring.

[0020] like Figure 1 、 Figure 2 As shown, a slide rail 6 is arranged on the base 1, and a slide groove matching the slide rail 6 is provided on the movable seat 2, and the movable seat 2 and the slide rail 6 are slidably connected.

[0021] like Figure 1 、 Figure 3As shown, the insert mechanism 5 includes a frame 51, a lateral movement component 52, an insert driver 53 and a suction seat 54. The insert driver 53 is a power element such as a cylinder. The frame 51 is fixedly connected to the base 1. The suction seat 54 is connected to the air pump. The lateral movement component 52 is fixedly connected to the frame 51. The output end of the lateral movement component 52 is transmission-connected to the insert driver 53. The lateral movement component 52 is used to provide power for the lateral movement of the suction seat 54. The output end of the insert driver 53 is transmission-connected to the suction seat 54. The insert driver 53 is used to provide power for the lifting and lowering movement of the suction seat 54. The output end of the insert driver 53 is transmission-connected to the suction seat 54. The suction seat 54 is used to absorb silicon wafers.

[0022] like Figure 1 、 Figure 3 As shown, the lateral movement assembly 52 includes a guide rail 521, a slider 522 matching the guide rail 521, and a lateral drive member 523. The lateral drive member 523 is a power element such as a cylinder. The guide rail 521 is fixedly connected to the frame 51, the guide rail 521 is slidably connected to the slider 522, the lateral drive member 523 is fixedly connected to the frame 51, and the output end of the lateral drive member 523 is slidably connected to the slider 522.

[0023] In the initial state, the positioning rod 43 is engaged in the positioning groove 421 , so that the position of the mounting seat 3 is fixed.

[0024] During movement, the positioning drive 44 starts to retract its piston rod, so that the positioning rod 43 moves away from and disengages from the positioning groove 421, and the moving drive 41 starts to extend to move. After moving a silicon wafer insertion spacing, the positioning drive 44 starts to extend, so that the positioning rod 43 is located in the next positioning groove 421. On the one hand, it realizes the step-by-step advancement of the mounting seat 3, making the movement precise, and on the other hand, it starts the positioning function.

[0025] Based on the above-mentioned ideal embodiment of the present invention, and in accordance with the above description, relevant personnel can make various changes and modifications without departing from the technical scope of the present invention. The technical scope of the present invention is not limited to the content of the specification, but must be determined according to the scope of the claims.

Claims

1. A waterway line device for conveying silicon wafers, characterized in that: The invention comprises a feeding device, wherein the feeding device comprises a base (1), a movable base (2), a mounting base (3), a stepping mechanism (4) and an inserting mechanism (5); the base (1) and the movable base (2) are slidably connected; the mounting base (3) and the movable base (2) are fixedly connected; a fixing groove for accommodating a flower basket is provided on the mounting base (3); the inserting mechanism (5) and the base (1) are fixedly connected; the inserting mechanism (5) is used to insert a silicon wafer into the flower basket; the stepping mechanism (4) and the base (1) are fixedly connected; an output end of the stepping mechanism (4) is transmission-connected to the movable base (2); and the stepping mechanism (4) is used to gradually drive the movable base (2) to move.

2. The silicon wafer conveying waterway line device according to claim 1, characterized in that: The stepping mechanism (4) comprises a moving drive member (41), a positioning bar (42), a positioning rod (43) and a positioning drive member (44); the moving drive member (41) is fixedly connected to the base (1); the output end of the moving drive member (41) is transmission-connected to the movable seat (2); the moving drive member (41) is used to provide power for the movement of the mounting seat (3); the positioning bar (42) is fixedly connected to the movable seat (2); a plurality of positioning grooves (421) matching the positioning rod (43) are provided on the positioning bar (42); the positioning drive member (44) is fixedly connected to the base (1); and the output end of the positioning drive member (44) is fixedly connected to the positioning rod (43).

3. The silicon wafer conveying waterway line device according to claim 2, characterized in that: The stepping mechanism (4) comprises an elastic element (45), one end of the elastic element (45) abuts against the positioning rod (43), and the other end abuts against the positioning driving member (44).

4. The waterway line device for conveying silicon wafers according to claim 1, wherein: A slide rail (6) is arranged on the base (1), a slide groove matching the slide rail (6) is provided on the movable seat (2), and the movable seat (2) and the slide rail (6) are slidably connected.

5. The waterway line device for conveying silicon wafers according to claim 1, characterized in that: The inserting mechanism (5) comprises a frame (51), a transverse moving assembly (52), an inserting driving member (53) and a material suction seat (54); the frame (51) is fixedly connected to the base (1); the transverse moving assembly (52) is fixedly connected to the frame (51); the output end of the transverse moving assembly (52) is transmission-connected to the inserting driving member (53); the transverse moving assembly (52) is used to provide power for the transverse movement of the material suction seat (54); the output end of the inserting driving member (53) is transmission-connected to the material suction seat (54); the inserting driving member (53) is used to provide power for the lifting movement of the material suction seat (54); the output end of the inserting driving member (53) is transmission-connected to the material suction seat (54); the material suction seat (54) is used to absorb silicon wafers.

6. The waterway line device for transporting silicon wafers according to claim 5, characterized in that: The transverse movement assembly (52) comprises a guide rail (521), a slider (522) matched with the guide rail (521), and a transverse driving member (523); the guide rail (521) is fixedly connected to the frame (51); the guide rail (521) is slidably connected to the slider (522); the transverse driving member (523) is fixedly connected to the frame (51); and the output end of the transverse driving member (523) is slidably connected to the slider (522).

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