Lever type piezoelectric displacement device for scanning probe microscope

Abstract

The utility model relates to the technical field of piezoelectric positioning, and discloses a lever type piezoelectric displacement device for a scanning probe microscope. The piezoelectric displacement device includes a uniaxial plate. The single-shaft plate comprises at least one displacement assembly, and each displacement assembly comprises a lever body and a piezoelectric block. The side, away from the fulcrum end, of the lever body is divided into a first part and a second part according to thickness changes. The piezoelectric block is arranged between the fulcrum end and the output force end of the lever body and used for driving the lever body to move. The piezoelectric block is arranged between the fulcrum end and the output force end of the lever body and used for driving the lever body to move. On the basis, the side, away from the fulcrum end, of the lever body is cut into the first part and the second part with the variable thicknesses, the non-working area in the lever and the space occupied by the lever are reduced, the invalid weight of the lever is reduced, and therefore the transmission efficiency of the lever in the piezoelectric displacement device is improved.

Description

Technical Field

[0001] The present application relates to the field of piezoelectric positioning technology, for example, to a lever-type piezoelectric displacement device for a scanning probe microscope. Background Art

[0002] Currently, the demand for precisely controlling the position of objects is growing in fields such as precision manufacturing, micro- and nanotechnology, biomedical engineering, and optical instruments. Among the numerous precision positioning technologies, piezoelectric displacement stages have attracted significant attention due to their ability to achieve nanometer-scale displacement control, driving the rapid development of piezoelectric displacement stage technology. Piezoelectric displacement stages utilize the deformation of piezoelectric materials under the influence of an electric field to drive a load. Under the influence of the electric field, the piezoelectric material undergoes microstructural changes, resulting in macroscopic deformation. While this deformation is minute, it is extremely precise, making it ideal for applications requiring fine adjustment. However, because the displacement produced by piezoelectric materials is typically very small, direct application in many practical applications may not be sufficient to meet larger displacement requirements.

[0003] To overcome these limitations, existing technologies often employ lever amplification mechanisms. This mechanism, a classic mechanical principle, effectively amplifies the tiny displacements generated by piezoelectric materials by increasing the length of the lever arm. In a piezoelectric displacement stage, the lever is typically designed with lever arms of varying lengths, with the shorter arm connecting the piezoelectric element and the longer arm acting on the load. This way, when the piezoelectric element is displaced by an electric field, the longer lever arm produces a greater displacement, enabling precise and large-scale position adjustment of the load.

[0004] During the implementation of the embodiments of the present disclosure, it was found that at least the following problems exist in the related art:

[0005] In traditional rectangular lever designs, the overall thickness results in regions of minimal stress. These regions bear virtually no effective load during operation and participate in no transmission of stress or strain, resulting in large, inactive areas within the lever. Because these inactive areas contribute minimally to force transmission, they actually increase the lever's ineffective weight and occupy space, resulting in low transmission efficiency. Utility Model Content

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] An embodiment of the present disclosure provides a lever-type piezoelectric displacement device for a scanning probe microscope, so as to reduce a non-working area in a lever, thereby improving the transmission efficiency of the lever in the piezoelectric displacement device.

[0008] In some embodiments, the piezoelectric displacement device includes: a uniaxial plate, including at least one displacement component, the displacement component includes a lever body and a piezoelectric block; wherein, the side of the lever body away from the fulcrum end is divided into a first part and a second part according to a thickness change; the piezoelectric block is arranged between the fulcrum end and the output force end of the lever body, and is used to drive the displacement of the lever body.

[0009] Optionally, a ratio of the projected lengths of the first portion and the second portion on the plane where the uniaxial plate is located is in a range of [0.297, 0.363].

[0010] Optionally, the thickness of the lever body portion corresponding to the connection between the first part and the second part is the largest.

[0011] Optionally, the thickness of the lever body portion on both sides of the connection between the first part and the second part decreases as the vertical distance from the connection increases.

[0012] Optionally, the ratio of the power arm to the resistance arm of the lever body is in the range of [0.225, 0.275].

[0013] Optionally, the uniaxial plate further includes: a first outer frame connected to the fulcrum end of the lever body, comprising a receiving cavity for placing the piezoelectric block.

[0014] Optionally, the single-axis plate further includes: a central platform connected to the output force end of the lever body.

[0015] Optionally, the piezoelectric displacement device further includes: an adapter plate, including a main platform; wherein the first surface and the second surface of the adapter plate are respectively overlapped and connected with different uniaxial plates, and the uniaxial plates are used to drive the main platform to displace along the corresponding preset axial direction.

[0016] Optionally, the preset axial directions of the uniaxial plates respectively connected to the first surface and the second surface are different.

[0017] Optionally, the first surface and the second surface are two opposite surfaces of the adapter plate.

[0018] The lever-type piezoelectric displacement device for a scanning probe microscope provided by the embodiments of the present disclosure can achieve the following technical effects:

[0019] The piezoelectric block is positioned between the fulcrum and the output end of the lever body, driving its displacement. Furthermore, by cutting the lever body away from the fulcrum into a first portion and a second portion with varying thicknesses, the inactive area and space occupied by the lever are reduced, reducing the ineffective weight of the lever and thereby improving the transmission efficiency of the lever in the piezoelectric displacement device.

[0020] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] One or more embodiments are exemplarily described by corresponding drawings. These exemplary descriptions and drawings do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation. In addition,

[0022] Figure 1 is a schematic structural diagram of a single-axis plate provided in an embodiment of the present disclosure;

[0023] Figure 2 is a structural diagram of a lever body provided by an embodiment of the present disclosure;

[0024] Figure 3 is a schematic structural diagram of an adapter board provided in an embodiment of the present disclosure;

[0025] Figure 4 It is a structural schematic diagram of a superimposed connection between a single-axis plate and an adapter plate provided in an embodiment of the present disclosure.

[0026] Reference numerals:

[0027] 10: Adapter plate; 11: Main platform; 12: Second outer frame; 13: Hinge; 14: Screw hole;

[0028] 20: Single-axis plate; 21: Lever body; 22: Fulcrum end; 23: Output force end; 24: Input force end; 25: First part; 26: Second part; 27: Accommodating cavity; 28: Boss; 29: First outer frame; 30: Center platform; 32: First single-axis plate; 33: Second single-axis plate; 34: Power arm; 35: Resistance arm. DETAILED DESCRIPTION

[0029] In order to be able to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The accompanying drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0030] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0031] Combine Figures 1 to 4 As shown, an embodiment of the present disclosure provides a piezoelectric displacement device, including a uniaxial plate 20. The uniaxial plate 20 includes at least one displacement assembly, which includes a lever body 21 and a piezoelectric block. The lever body 21 is divided into a first portion 25 and a second portion 26 on the side away from the fulcrum end 22 according to thickness variation. The piezoelectric block is disposed between the fulcrum end 22 and the output end 23 of the lever body 21 to drive the displacement of the lever body 21.

[0032] In the disclosed embodiment, the side of the lever body 21 away from the fulcrum end 22 refers to the side opposite to the side where the output force end 23 is located, that is, the side away from the central platform 30. The first portion 25 refers to the portion of the lever body 21 whose thickness increases as the distance from the fulcrum end 22 toward the output force end 23 increases, and the second portion 26 refers to the portion of the lever body 21 whose thickness decreases as the distance from the fulcrum end 22 toward the output force end 23 increases.

[0033] In the disclosed embodiment, the central platform 30 of the uniaxial plate 20 is connected to the main platform 11 of the adapter plate 10. The uniaxial plate 20 is configured to drive the main platform 11 to move along a corresponding predetermined axial direction. The uniaxial plate 20 may be provided with one or more displacement assemblies for driving the main platform 11 to move along the predetermined axial direction. When multiple displacement assemblies are provided, they can be positioned along the predetermined axial direction of the uniaxial plate 20. This allows the multiple displacement assemblies to cooperatively drive the main platform 11 to move along the predetermined axial direction, thereby more precisely controlling the displacement of the piezoelectric displacement device along the predetermined axial direction. For example, displacement assemblies can be positioned symmetrically about the center point of the uniaxial plate 20 at diagonal corners of the uniaxial plate 20, or symmetrically about an axis perpendicular to the predetermined axial direction of the uniaxial plate 20 at adjacent corners of the uniaxial plate 20. The output force end 23 of the lever body 21 of each displacement assembly is positioned along the predetermined axial direction corresponding to the uniaxial plate 20, thereby causing the main platform 11 to move along the predetermined axial direction. The predetermined axial direction includes both the positive and negative directions of the predetermined axis. The preset axial direction may be any axial direction. For example, the preset axial direction includes an X-axis direction and a Y-axis direction.

[0034] In some embodiments, in addition to one or more displacement assemblies for driving the main platform 11 along a predetermined axial direction, the uniaxial plate 20 may also be equipped with one or more displacement assemblies for driving the main platform 11 along a non-predetermined axial direction. The non-predetermined axial direction includes any direction that the main platform 11 may deviate from during displacement, such as an axis perpendicular to the predetermined axial direction, a direction at a 45° angle to the predetermined axial direction, and / or a direction at other angles to the predetermined axial direction. The output force end 23 of the lever body 21 of each displacement assembly is positioned along the non-predetermined axial direction to cause the main platform 11 to displace along the non-predetermined axial direction. Thus, when only one uniaxial plate 20 is driving the main platform 11 to displace, and the main platform 11 deviates from the corresponding predetermined axial direction, the one or more displacement assemblies for driving the main platform 11 along the non-predetermined axial direction can be used to drive the main platform 11 back to the predetermined axial direction, thereby reducing displacement errors caused by uneven weight distribution on the main platform 11. In practical applications, the displacement assemblies can be positioned anywhere on either side of the predetermined axial direction, such as in the middle of two symmetrical sides of the uniaxial plate 20 about the predetermined axial direction, or at the front and rear of both sides.

[0035] In the embodiment of the present disclosure, the piezoelectric block can be made of any piezoelectric material and can be configured according to specific requirements. The piezoelectric materials include piezoelectric ceramics, quartz, lithium niobate, lead tantalate, lead zirconate titanate, barium titanate, polymer piezoelectric materials and / or piezoelectric single crystals, etc.

[0036] In the piezoelectric displacement device provided in the embodiments of the present disclosure, a piezoelectric block is disposed between the fulcrum end 22 and the output end 23 of the lever body 21, driving the displacement of the lever body 21. Furthermore, by cutting the lever body 21 away from the fulcrum end 22 into a first portion 25 and a second portion 26 of varying thickness, the inactive area of ​​the lever and the space occupied by the lever are reduced, thereby reducing the ineffective weight of the lever and thereby improving the transmission efficiency of the lever in the piezoelectric displacement device.

[0037] Optionally, a ratio of the projected lengths of the first portion 25 and the second portion 26 on the plane where the uniaxial plate 20 is located is in a range of [0.297, 0.363].

[0038] In the embodiment of the present disclosure, the ratio of the projected lengths of the first part 25 and the second part 26 on the plane where the uniaxial plate 20 is located can be any value in [0.297, 0.363]. For example, the ratio of the projected lengths of the first part 25 and the second part 26 on the plane where the uniaxial plate 20 is located can be 1:2.9, 1:3 or 1:3.1, etc.

[0039] Thus, by cutting the non-fulcrum end 22 of the lever body 21 into a first portion 25 and a second portion 26 of different lengths and thicknesses, and setting the ratio of the projected lengths of these two portions onto the plane of the uniaxial plate 20 to a value between [0.297 and 0.363], the stress distribution of the lever can be optimized. The first portion 25 is relatively short and thick, corresponding to the high-stress area of ​​the lever. Therefore, it can withstand greater forces and provide sufficient rigidity to resist bending. The second portion 26 is longer and thinner, reducing weight and the non-operating area. The longer length also helps amplify the displacement generated by the piezoelectric block.

[0040] Optionally, the thickness of the lever body 21 portion corresponding to the connection between the first portion 25 and the second portion 26 is the largest.

[0041] In this way, the thickness of the lever body 21 corresponding to the connection between the first portion 25 and the second portion 26 is the largest after cutting. This can increase the local stiffness of the lever body 21 corresponding to the connection, reduce bending or deformation under high load or dynamic load, and thus improve the stability of the entire lever body 21 structure.

[0042] Optionally, the thickness of the lever body 21 on both sides of the connection between the first portion 25 and the second portion 26 decreases as the vertical distance from the connection increases.

[0043] Thus, by maintaining a greater thickness at the connection, it is ensured that there is enough material in the lever body 21 in the area where the stress is greatest to withstand the stress. As the vertical distance from the connection increases, the stress gradually decreases, so the material thickness is reduced accordingly to accommodate this changing stress distribution.

[0044] Optionally, the ratio of the power arm 34 to the resistance arm 35 of the lever body 21 is in the range of [0.225, 0.275].

[0045] In the disclosed embodiment, the power arm 34 refers to the distance on the lever from the fulcrum to the point where the power is applied, that is, the vertical distance from the input force end 24 to the fulcrum end 22 of the disclosed embodiment. The resistance arm 35 refers to the distance on the lever from the fulcrum to the point where the load or resistance is applied, that is, the vertical distance from the output force end 23 to the fulcrum end 22 of the disclosed embodiment. The ratio of the power arm 34 to the resistance arm 35 is any value in the range [0.297, 0.363]. For example, the ratio of the power arm 34 to the resistance arm 35 is 1:3.9, 1:4, or 1:4.1.

[0046] Thus, the ratio of the power arm 34 to the resistance arm 35 is any value between [0.297, 0.363], which helps optimize the torque distribution on the lever. A shorter power arm 34 can apply a larger torque, while a longer resistance arm 35 can generate a larger displacement, thereby achieving efficient force and displacement conversion while maintaining torque balance.

[0047] Optionally, the uniaxial plate 20 further includes a first outer frame 29. The first outer frame 29 is connected to the fulcrum end 22 of the lever body 21 and includes an accommodating cavity 27 for placing the piezoelectric block.

[0048] In the embodiment disclosed herein, the first outer frame 29 is hinged to the fulcrum end 22 of the lever body 21, so that the lever body 21 can rotate around the fulcrum end 22. The accommodating cavity 27 can be any shape that is suitable for the piezoelectric block. For example, the accommodating cavity 27 can be rectangular, circular, elliptical or other shapes, depending on the shape and size of the piezoelectric block. A boss 28 is provided at the input force end 24 of the lever body 21, and the boss 28 is hinged to the input force end 24 of the lever. In this way, the boss 28 can serve as a stress concentration point. By providing the boss 28, the force generated by the deformation of the piezoelectric block can be effectively transmitted to the input force end 24 of the lever, reducing the loss of force during the transmission process and improving the efficiency of force transmission. In addition, by separating the piezoelectric block from the lever body 21 through the boss 28, the wear caused by the direct effect of the deformation of the piezoelectric block on the lever body 21 can be reduced, thereby improving the durability of the lever.

[0049] In some embodiments, to ensure that the piezoelectric block moves along a predetermined axial direction during displacement, a guide rail or slide rail along the predetermined axial direction may be provided within the accommodating cavity 27. Furthermore, the accommodating cavity 27 may be designed with a heat dissipation channel or use thermally conductive materials to help dissipate the heat generated by the piezoelectric block during operation.

[0050] By securing the piezoelectric block within the housing cavity 27 of the first outer frame 29, possible displacement or vibration of the piezoelectric block during operation can be reduced. The stability of the fulcrum end 22 is crucial for precisely controlling the displacement of the lever. The first outer frame 29 is connected to the fulcrum end 22 of the lever body 21, providing a fixed fulcrum for the lever body 21 through the first outer frame 29, thereby facilitating more precise displacement control.

[0051] Optionally, the single-axis plate 20 further includes a central platform 30 , which is connected to the output force end 23 of the lever body 21 .

[0052] In the embodiment of the present disclosure, the central platform 30 is hinged to the output force end 23 of the lever body 21 through an extension portion in a preset axial direction. The position where the extension portion is hinged to the output force end 23 of the lever body 21 is located in the preset axial direction corresponding to the single-axis plate 20. The extension portion of the central platform 30 in the preset axial direction can be of any shape, for example, rectangular or circular. The extension portion of the central platform 30 in the preset axial direction is symmetrical about the preset axial direction. The central platform 30 is superimposed and connected to the main platform 11 of the adapter plate 10. The central platform 30 is hinged to the first outer frame 29 at the four corners through flexible hinges 13, for example, metal flexible hinges 13, plastic flexible hinges 13, rubber hinges 13, spherical hinges 13, damping hinges 13, coil spring hinges 13, leaf spring hinges 13, roller hinges 13, universal hinges 13, hinge 13 bearings, elastic couplings and / or polymer hinges 13, etc. Thus, if the extension of the central platform 30 were rigidly connected to the output force end 23 of the lever body 21, the rotation of the lever body 21 might generate a torsional moment on the central platform 30, causing the central platform 30 to deflect in an unpredictable axial direction. However, by hingedly connecting the extension of the central platform 30 in the predetermined axial direction to the output force end 23 of the lever body 21, when the piezoelectric block deforms and drives the lever body 21 to rotate about the fulcrum end 22, the hinged connection can eliminate the torsional moment on the central platform 30 generated by the rotation of the lever body 21, thereby reducing the deflection of the central platform 30 in the unpredictable axial direction and improving the accuracy of displacement.

[0053] In some embodiments, in addition to the flexible hinges 13 at the four corners of the central platform 30, the central platform 30 can also be hinged to the first outer frame 29 via other flexible hinges 13 symmetrically distributed along a predetermined axis. For example, flexible hinges 13 can be symmetrically arranged about the predetermined axis in the middle of both sides of the central platform 30 to be hinged to the first outer frame 29, and / or flexible hinges 13 can be symmetrically arranged about the predetermined axis at other locations on both sides of the central platform 30 other than the middle to be hinged to the first outer frame 29. In this way, the first outer frame 29 provides a solid peripheral support, and the central platform 30 is connected to the first outer frame 29 at both ends of the predetermined axis via displacement assemblies. The connection of the first outer frame 29 via the displacement assemblies at both ends of the central platform 30 enhances the overall rigidity and stability of the single-axis plate 20. By arranging the displacement assemblies on both sides of the central platform 30 along the predetermined axis, the force generated by the displacement assemblies in the predetermined axis can be transmitted to the central platform 30, causing the central platform 30 to displace in the predetermined axis and driving the main platform 11, which is superimposed and connected to the central platform 30, to displace.

[0054] In this way, the central platform 30 is connected to the output force end 23 of the lever body 21 , and the lever body 21 can apply a force to the central platform 30 through the output force end 23 , so that the central platform 30 is displaced in a preset axial direction.

[0055] Optionally, the piezoelectric displacement device further includes an adapter plate 10. The adapter plate 10 includes a main platform 11; wherein the first and second surfaces of the adapter plate 10 are respectively superimposed and connected to different uniaxial plates 20, and the uniaxial plates 20 are used to drive the main platform 11 to displace along the corresponding preset axial direction.

[0056] In the embodiment of the present disclosure, the first surface and the second surface may be two opposite surfaces, two adjacent surfaces, or two surfaces that are neither adjacent nor opposite. The preset axial direction includes the positive direction and the negative direction of the preset axis. The preset axial direction may be any axial direction, for example, the preset axial direction includes the X-axis direction and the Y-axis direction. In actual applications, the uniaxial plate 20 includes a first uniaxial plate 32 that is superimposed and connected to the first surface, and a second uniaxial plate 33 that is superimposed and connected to the second surface. The preset axial direction corresponding to the first uniaxial plate 32 and the preset axial direction corresponding to the second uniaxial plate 33 may be the same or different. For example, the preset axial direction of the first uniaxial plate 32 may be the X-axis direction, and the preset axial direction of the second uniaxial plate 33 may also be the X-axis direction; the preset axial direction of the first uniaxial plate 32 may be the X-axis direction, and the preset axial direction of the second uniaxial plate 33 may be the Y-axis direction; the preset axial direction of the first uniaxial plate 32 may be the Y-axis direction, and the preset axial direction of the second uniaxial plate 33 may also be the Y-axis direction, etc.

[0057] Thus, the piezoelectric displacement device is provided with an adapter plate 10, as well as a first uniaxial plate 32 and a second uniaxial plate 33, which are superimposed and connected to the first and second surfaces of the adapter plate 10, respectively. By placing the adapter plate 10 between the two uniaxial plates 20, the different displacement components are separated, eliminating the need for superimposing the components, thereby reducing system complexity. Furthermore, by placing the uniaxial plates 20 on both sides of the adapter plate 10, components such as the displacement components, driver, and displacement detection device are exposed on both sides of the main platform 11 of the adapter plate 10, facilitating component assembly and maintenance. This increases the flexibility of the device assembly layout and reduces maintenance costs.

[0058] Optionally, the preset axial directions of the uniaxial plates 20 respectively connected to the first surface and the second surface are different.

[0059] In this way, the first uniaxial plate 32 and the second uniaxial plate 33 achieve displacement along different axes, and each uniaxial plate 20 can be independently controlled, providing the piezoelectric displacement device with multi-axial displacement capability, increasing the flexibility and application range of the piezoelectric displacement device.

[0060] Optionally, the first surface and the second surface are two opposite surfaces of the adapter plate 10 .

[0061] In the embodiment of the present disclosure, the first surface and the second surface are respectively the top and bottom of the adapter plate 10. In other embodiments, the first surface and the second surface can also be respectively the front and back of the adapter plate 10 or the left and right surfaces of the adapter plate 10.

[0062] Thus, by arranging the uniaxial plates 20 on two opposing surfaces of the adapter plate 10, the first uniaxial plate 32 and the second uniaxial plate 33 are symmetrical about the center of the adapter plate 10. The weight and load of the first uniaxial plate 32 and the second uniaxial plate 33 are evenly distributed on both sides of the adapter plate 10, reducing eccentricity caused by uneven weight distribution, thereby helping to achieve uniform weight and load distribution and reducing torque and vibration caused by eccentricity.

[0063] Optionally, the adapter plate 10 includes a second outer frame 12 . The second outer frame 12 is hinged to the main platform 11 .

[0064] In the embodiment of the present disclosure, the main platform 11 is connected to the second outer frame 12 on both sides of the preset axial direction corresponding to the first uniaxial plate 32 and on both sides of the preset axial direction corresponding to the second uniaxial plate 33 through symmetrically arranged hinges 13. In addition, screw holes 14 symmetrically distributed about different preset axial directions are provided on the main platform 11 and the second outer frame 12 of the adapter plate 10. The adapter plate 10 is connected to the corresponding screw holes 14 on the first uniaxial plate 32 and the second uniaxial plate 33 through the above-mentioned screw holes 14 by bolts. The bolts can be of any type and can be configured according to needs. For example, M1.2, M1.6 and / or M2 bolts can be used to connect the adapter plate 10 and the uniaxial plate 20.

[0065] In this way, the connection between the second outer frame 12 and the main platform 11 not only provides support for the main platform 11, but also enables relative rotation and displacement between the adapter plate 10 and the main platform 11 through a hinged connection, thereby enabling displacement of the main platform 11 in different preset axial directions. In addition, by symmetrically arranging the hinges 13 along different preset axial directions, the coupling error of the main platform 11 along different preset axial directions can be reduced, thereby reducing the mutual dependence or influence between different parts of the system and improving the accuracy of displacement control.

[0066] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless expressly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A lever-type piezoelectric displacement device for a scanning probe microscope, characterized in that: include: A single-axis plate includes at least one displacement component, which includes a lever body and a piezoelectric block; wherein the lever body is divided into a first part and a second part according to the thickness change on the side away from the fulcrum end; the piezoelectric block is arranged between the fulcrum end and the output force end of the lever body to drive the displacement of the lever body.

2. The device according to claim 1, characterized in that The ratio of the projected lengths of the first part and the second part on the plane where the uniaxial plate is located is in the range of [0.297, 0.363].

3. The device according to claim 1, characterized in that The thickness of the lever body portion corresponding to the connection between the first portion and the second portion is the largest.

4. The device according to claim 3, characterized in that The thickness of the lever body portion on both sides of the connection between the first portion and the second portion decreases as the vertical distance from the connection increases.

5. The device according to any one of claims 1 to 4, characterized in that The ratio of the power arm to the resistance arm of the lever body ranges from [0.225, 0.275].

6. The device according to any one of claims 1 to 4, characterized in that The single axis plate also includes: The first outer frame is connected to the fulcrum end of the lever body and includes a receiving cavity for placing the piezoelectric block.

7. The device according to any one of claims 1 to 4, characterized in that The single axis plate also includes: The central platform is connected to the output force end of the lever body.

8. The device according to any one of claims 1 to 4, characterized in that Also includes: The adapter plate includes a main body platform; wherein the first surface and the second surface of the adapter plate are respectively overlapped and connected with different uniaxial plates, and the uniaxial plates are used to drive the main body platform to move along the corresponding preset axial direction.

9. The device according to claim 8, characterized in that The preset axial directions of the uniaxial plates respectively connected to the first surface and the second surface are different.

10. The device according to claim 8, characterized in that The first surface and the second surface are two opposite surfaces of the adapter plate.

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