Stepped halogen tungsten lamp reflection cooling mounting plate

Abstract

The utility model discloses a stepped halogen tungsten lamp reflection cooling mounting plate, and belongs to the technical field of semiconductor equipment. The reflection cooling mounting plate of the halogen tungsten lamp comprises stepped cooling plates which are symmetrically arranged, each stepped cooling plate comprises a plurality of water cooling plates which are sequentially arranged outwards at intervals in the height direction, the water cooling plates are sequentially connected in the height direction, water cooling grooves are formed in the water cooling plates, and the water cooling grooves are communicated with the water cooling plates. The water cooling grooves are communicated in a snakelike mode in the height direction, and a first ventilation opening is further formed between every two adjacent water cooling plates. The water cooling grooves are formed in the water cooling plates which are sequentially arranged outwards at intervals in the height direction, and the water cooling grooves are communicated in the snakelike shape in the height direction, so that the heat exchange frequency can be effectively reduced, and the heat transfer and cooling efficiency is improved.

Description

Technical Field

[0001] The utility model relates to a stepped halogen tungsten lamp reflective cooling installation plate, belonging to the technical field of semiconductor equipment. Background Art

[0002] During wafer coating and rapid annealing processes in semiconductor epitaxial equipment, the wafers within the reaction chamber must be heated to a certain temperature to improve reaction efficiency. Typically, semiconductor equipment uses halogen lamps for indirect heating of the wafers. However, while the halogen lamps heat the wafers, the heat generated by the infrared radiation can also adversely affect the equipment components and the operating environment.

[0003] The existing cooling method for halogen lamp heating processes involves indirect heat exchange, using a metal plate with cooling water flowing through it to attach to the surface of the halogen lamp's mounting plate. This method first transfers the heat generated by the halogen lamp's infrared radiation to the mounting plate, which then transfers the heat to the metal plate. The heat is then removed by the cooling water flowing through the metal plate. This requires multiple heat exchanges, resulting in low heat transfer and cooling efficiency. Furthermore, the gap between the metal plate and the mounting plate requires regular addition / replacement of a thermally conductive medium, which is time-consuming and labor-intensive. Furthermore, existing halogen lamps are typically laid out in a circular or rectangular pattern. During heating, adjacent layers of halogen lamps at the same height are subject to mutual radiation, reducing the concentrated heating capacity and increasing the risk of localized high temperatures and cracking the halogen lamp walls due to the mutual radiation from adjacent layers. On the other hand, when cooling air enters from the outside to the inside to lower the ambient operating temperature of the halogen tungsten lamp, due to the flat design between adjacent layers of halogen tungsten lamps, it is impossible to ensure that the tube walls and lamp feet of each layer of halogen tungsten lamps are cooled by cooling air with the same cooling air temperature and uniform air volume. Therefore, it is urgent to design a halogen tungsten lamp reflective cooling mounting plate that can take into account direct water cooling and ensure that the installed multi-layer halogen tungsten lamps are cooled by the same cooling air temperature and uniform air volume. Utility Model Content

[0004] The purpose of the present invention is to design a reflective cooling mounting plate for halogen tungsten lamps that can both use direct water cooling to reduce temperature and allow the installed lamps to be cooled and dissipated by air at the same air temperature and uniform air volume, so as to solve the problems raised in the above-mentioned background technology.

[0005] The utility model specifically adopts the following technical scheme: a stepped halogen tungsten lamp reflective cooling mounting plate, including symmetrically arranged stepped cooling plates, the stepped cooling plates including a plurality of water-cooling plates arranged outward in sequence along the height direction, the plurality of water-cooling plates being connected in sequence along the height direction, the interiors of the plurality of water-cooling plates being provided with water-cooling grooves, the water-cooling grooves being connected in a serpentine shape along the height direction, and a ventilation opening being provided between two adjacent water-cooling plates.

[0006] As a preferred embodiment, the two ends of a plurality of water-cooling plates arranged along the height direction are sequentially connected by a connecting section 1, and the ventilation opening 1 is located between the connecting sections 1 at the two ends of two adjacent water-cooling plates.

[0007] As a preferred embodiment, the water-cooling plate includes a water trough cover plate, the water-cooling trough is opened at the bottom of the water-cooling plate, and the water trough cover plate is located below the water-cooling trough and is sealed to the water-cooling plate.

[0008] As a preferred embodiment, a water channel is provided in the connecting section 1 staggered along the height direction, which can connect two adjacent water-cooling grooves. The water channel is used to connect the water-cooling grooves in a serpentine shape. A water inlet is provided inside the water-cooling plate at the top, and the water inlet is connected to the water-cooling groove provided inside the water-cooling plate at the top. A water outlet is provided inside the water-cooling plate at the bottom, and the water outlet is connected to the water-cooling groove provided inside the water-cooling plate at the bottom.

[0009] As a preferred embodiment, a plurality of halogen tungsten lamps are arranged on the water-cooling plate, wherein one end or both ends of the halogen tungsten lamp close to the side of the symmetrical surface of the stepped cooling plate pass through the water-cooling plate and are fixedly connected to the water-cooling plate through a lamp tube fixing clamp 1, and the other end of the halogen tungsten lamp close to the side of the symmetrical surface of the stepped cooling plate and the two ends of the remaining halogen tungsten lamps except those close to the side of the symmetrical surface of the stepped cooling plate pass through the water-cooling plate and are fixedly connected to the water-cooling plate through a lamp tube fixing clamp 2.

[0010] As a preferred embodiment, the lamp tube fixing clamp 1 includes a wide rectangular mounting block and a short semicircular clamping ring, the wide rectangular mounting block and the short semicircular clamping ring are integrally arranged, and a clamping groove 1 is provided at one end or both ends of the halogen tungsten lamp close to the side of the symmetrical surface of the stepped cooling plate, the short semicircular clamping ring is clamped with the clamping groove 1, and the wide rectangular mounting block is fixedly connected to the water cooling plate; the lamp tube fixing clamp 2 includes a narrow rectangular mounting block and a long semicircular clamping ring, the narrow rectangular mounting block and the long semicircular clamping ring are integrally arranged, and a clamping groove 2 is provided at the other end of the halogen tungsten lamp close to the side of the symmetrical surface of the stepped cooling plate and the two ends of the remaining halogen tungsten lamps except the side close to the symmetrical surface of the stepped cooling plate, the long semicircular clamping ring is clamped with the clamping groove 2, and the narrow rectangular mounting block is fixedly connected to the water cooling plate.

[0011] As a preferred embodiment, the stepped halogen tungsten lamp reflective cooling mounting plate also includes symmetrically arranged mounting components, one mounting component corresponds to one stepped cooling plate, and the symmetrically arranged stepped cooling plates are interconnected through their corresponding mounting components.

[0012] As a preferred embodiment, the mounting assembly includes a mounting plate and a shell, the mounting plate is connected to the water-cooling plate located at the top, the shell is connected to the outside of the mounting plate, and the shells are symmetrically arranged and connected to each other.

[0013] As a preferred embodiment, the two ends of the mounting plate are connected to the water-cooling plate at the top through connecting section 2, and a ventilation opening 2 is provided between the mounting plate and the water-cooling plate at the top, and the ventilation opening 2 is located between the connecting section 2 at both ends.

[0014] As a preferred embodiment, the stepped cooling plate also includes a cylindrical light shield one that separates the several halogen tungsten lamps arranged on two adjacent water-cooled plates, the two ends of the cylindrical light shield one are connected to the corresponding connecting section one, the cylindrical light shield one is provided with a notch one corresponding to the ventilation opening one, a cylindrical light shield two is provided on the outside of the several halogen tungsten lamps arranged on the top water-cooled plate, the two ends of the cylindrical light shield two are connected to the corresponding connecting section two, the cylindrical light shield two is provided with a notch two corresponding to the ventilation opening two, a cylindrical light shield three is provided on the inside of the several halogen tungsten lamps arranged on the bottom water-cooled plate, and the two ends of the cylindrical light shield three are connected to the bottom water-cooled plate.

[0015] The beneficial effects achieved by the present invention are as follows: the present invention opens water-cooling grooves inside several water-cooling plates which are arranged outward at intervals in the height direction, and connects the water-cooling grooves in a serpentine shape in the height direction, which not only effectively reduces the number of heat exchanges and improves the heat transfer and cooling efficiency, that is, the heat generated by the infrared irradiation of several halogen tungsten lamps on each layer is first transferred to the corresponding water-cooling plate, and then carried out by the flowing cooling water in the water-cooling grooves, but also avoids the halogen tungsten lamps installed on water-cooling plates at different heights from irradiating each other, effectively reducing the risk of the halogen tungsten lamps on adjacent layers causing tube wall rupture due to mutual irradiation; a ventilation opening is also provided between two adjacent water-cooling plates in the height direction, which can effectively ensure that when the cooling air enters from the outside to the inside, the halogen tungsten lamps on each layer are cooled and dissipated by the same cooling air temperature and uniform air volume. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall structure provided by an embodiment of the present utility model;

[0017] Figure 2 This is a perspective diagram of a partial structure provided by an embodiment of the present utility model;

[0018] Figure 3 This is a schematic diagram of a partial structure provided by an embodiment of the present utility model from another perspective;

[0019] Figure 4 This is a schematic structural diagram of a stepped cooling plate provided by an embodiment of the present utility model from one perspective;

[0020] Figure 5 This is a schematic structural diagram of a stepped cooling plate provided by an embodiment of the present invention from another perspective;

[0021] Figure 6 This is a schematic diagram of a partial assembly structure provided by an embodiment of the present utility model;

[0022] Figure 7 This is a schematic structural diagram of a lamp tube fixing clamp 1 provided in an embodiment of the present utility model;

[0023] Figure 8 This is a structural diagram of the lamp tube fixing clamp 2 provided in an embodiment of the present utility model;

[0024] Figure 9 This is a schematic diagram of the flow of cooling water in a water-cooling tank provided by an embodiment of the present utility model;

[0025] Figure 10 This is a schematic diagram of the structure of the water cooling grooves provided by the embodiment of the utility model in a serpentine connection;

[0026] Figure 11 It is a schematic diagram of the inlet and outlet wind directions provided by an embodiment of the present utility model.

[0027] The meanings of the marks in the figure are: 1-water cooling plate; 2-water cooling trough; 3-ventilation opening 1; 4-connecting section 1, 5-water trough cover, 6-water channel, 7-water inlet, 8-water outlet, 9-halogen tungsten lamp, 10-lamp tube fixing clamp 1, 11-lamp tube fixing clamp 2, 12-wide rectangular mounting block, 13-short semicircular retaining ring, 14-slot 1, 15-narrow rectangular mounting block, 16-long semicircular retaining ring, 17-slot 2, 18-mounting plate, 19-housing, 20-connecting section 2, 21-ventilation opening 2, 22-cylinder light shield 1, 23-gap 1, 24-cylinder light shield 2, 25-gap 2, 26-cylinder light shield 3. DETAILED DESCRIPTION

[0028] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention and are not intended to limit the scope of protection of the present invention.

[0029] Example 1: Figures 1 to 11As shown, the utility model proposes a stepped halogen tungsten lamp reflective cooling mounting plate, including symmetrically arranged stepped cooling plates, the stepped cooling plates including a plurality of water-cooling plates 1 arranged outwardly in sequence along the height direction, the plurality of water-cooling plates 1 being connected in sequence along the height direction, a water-cooling groove 2 being provided inside the plurality of water-cooling plates 1, the water-cooling groove 2 being connected in a serpentine shape along the height direction, and a ventilation opening 3 being provided between two adjacent water-cooling plates 1. The utility model provides water-cooling grooves 2 inside several water-cooling plates 1 arranged outward at intervals in the height direction, and the water-cooling grooves 2 are connected in a serpentine shape in the height direction, which not only effectively reduces the number of heat exchanges and improves the heat transfer and cooling efficiency, that is, the heat generated by the infrared irradiation of several halogen tungsten lamps 9 on each layer is first transferred to the corresponding water-cooling plate 1, and then carried out by the flowing cooling water in the water-cooling grooves 2, but also can avoid the halogen tungsten lamps 9 installed on water-cooling plates 1 at different heights from irradiating each other, effectively reducing the risk of the halogen tungsten lamps 9 on adjacent layers causing tube wall rupture due to mutual irradiation; the ventilation opening 3 provided between two adjacent water-cooling plates 1 in the height direction can effectively ensure that when the cooling air enters from the outside to the inside, the halogen tungsten lamps 9 on each layer are cooled and dissipated by the same cooling air temperature and uniform air volume. Specifically, in this embodiment, the water-cooling plate 1 is provided with three layers along the height direction, and the two ends of each layer of water-cooling plate 1 are fixedly connected in sequence along the height direction through the connecting section 1 4. The ventilation opening 3 is located between the connecting sections 1 4 at both ends of two adjacent layers of water-cooling plates 1. Each layer of water-cooling plate 1 includes a water tank cover 5. The water-cooling tank 2 is opened at the bottom of the water-cooling plate 1. The water tank cover 5 is located below the water-cooling tank 2 and is sealed with the water-cooling plate 1. A water channel 6 that can connect the two adjacent water-cooling tanks 2 is opened in the connecting section 1 4 at one end where each two adjacent layers of water-cooling plates 1 are connected, and the water channel 6 is opened inside. The connecting section 4 with a water channel 6 is staggered along the height direction. The water channel 6 is used to connect the water-cooling groove 2 arranged along the height direction in a serpentine shape. A water inlet 7 is opened inside the water-cooling plate 1 at the top, and the water inlet 7 is connected to the water-cooling groove 2 arranged inside the top water-cooling plate 1. A water outlet 8 is opened inside the water-cooling plate 1 at the bottom, and the water outlet 8 is connected to the water-cooling groove 2 arranged inside the bottom water-cooling plate 1. During operation, cooling water enters from the water inlet 7, passes through the water-cooling groove 2 connected in a serpentine shape, and then flows out from the water outlet 8.A plurality of halogen tungsten lamps 9 are provided on the water-cooling plate 1, wherein one end or both ends of the halogen tungsten lamp 9 near the side of the symmetrical surface of the stepped cooling plate pass through the water-cooling plate 1 and are fixedly connected to the water-cooling plate 1 through a lamp tube fixing clamp 10, the other end of the halogen tungsten lamp 9 near the side of the symmetrical surface of the stepped cooling plate and both ends of the remaining halogen tungsten lamps 9 except those near the side of the symmetrical surface of the stepped cooling plate pass through the water-cooling plate 1 and are fixedly connected to the water-cooling plate 1 through a lamp tube fixing clamp 11. In this embodiment, a halogen tungsten lamp 9 is provided on the water-cooling plate 1 at the bottom, and both ends of the halogen tungsten lamp 9 pass through the water-cooling plate 1 and are fixedly connected to the water-cooling plate 1 through a lamp tube fixing clamp 10. The water-cooling plate 1 at the middle and top is fixedly connected to the water-cooling plate 1. Two halogen tungsten lamps 9 are respectively provided on the cold plate 1. One end of the two halogen tungsten lamps 9 close to the side of the symmetrical surface of the stepped cooling plate passes through the water-cooled plate 1 and is fixedly connected to the water-cooled plate 1 through a lamp tube fixing clamp 10. The one end of the two halogen tungsten lamps 9 away from the side of the symmetrical surface of the stepped cooling plate passes through the water-cooled plate 1 and is fixedly connected to the water-cooled plate 1 through a lamp tube fixing clamp 2 11. It should be noted that, in this embodiment, the halogen tungsten lamps 9 provided on each layer of the water-cooled plate 1 are all arranged in an arc shape. In actual applications, the number and shape of the halogen tungsten lamps 9 provided on each layer of the water-cooled plate 1 are not limited and can be determined according to the shape and size of the corresponding water-cooled plate 1 and the power required by the halogen tungsten lamps 9 on the water-cooled plate 1 of that layer.The lamp tube fixing clamp 10 includes a wide rectangular mounting block 12 and a short semicircular snap ring 13. The wide rectangular mounting block 12 and the short semicircular snap ring 13 are integrally arranged. A clamping groove 14 is provided at one or both ends of the halogen tungsten lamp 9 near the symmetrical surface of the stepped cooling plate. The short semicircular snap ring 13 is clamped with the clamping groove 14. The wide rectangular mounting block 12 is fixedly connected to the water cooling plate 1. The lamp tube fixing clamp 2 11 includes a narrow rectangular mounting block 15 and a long semicircular snap ring 16. The narrow rectangular mounting block 15 and the long semicircular snap ring 16 are clamped with the short semicircular snap ring 16. The halogen tungsten lamp 9 is provided as an integral unit. The other end of the halogen tungsten lamp 9 on the side of the symmetrical surface of the stepped cooling plate and the two ends of the remaining halogen tungsten lamps 9 except the one on the side of the symmetrical surface of the stepped cooling plate are provided with a second card groove 17. The long semicircular snap ring 16 is engaged with the second card groove 17. The narrow rectangular mounting block 15 is fixedly connected to the water-cooling plate 1. In this embodiment, the two ends of the halogen tungsten lamp provided on the bottom water-cooling plate 1 are provided with a card groove 14. The short semicircular snap ring 13 is engaged with the card groove 14. The wide rectangular mounting block 12 is fixedly connected to the bottom The water-cooling plate 1 is fixedly connected; a clamping groove 14 is provided at one end of the halogen tungsten lamp arranged on the middle water-cooling plate 1, which is close to the symmetrical surface of the stepped cooling plate; a short semicircular clamping ring 13 is clamped with the clamping groove 14; a wide rectangular mounting block 12 is fixedly connected to the middle water-cooling plate 1; a clamping groove 2 17 is provided at one end of the halogen tungsten lamp arranged on the middle water-cooling plate 1, which is away from the symmetrical surface of the stepped cooling plate; a long semicircular clamping ring 16 is clamped with the clamping groove 2 17; a narrow rectangular mounting block 15 is fixed to the middle water-cooling plate 1 Connection; a clamping groove 14 is provided at one end of the halogen tungsten lamp arranged on the top water-cooling plate 1, which is close to the symmetrical surface of the stepped cooling plate. A short semicircular clamping ring 13 is clamped with the clamping groove 14. The wide rectangular mounting block 12 is fixedly connected to the top water-cooling plate 1. A clamping groove 2 17 is provided at one end of the halogen tungsten lamp arranged on the top water-cooling plate 1, which is away from the symmetrical surface of the stepped cooling plate. A long semicircular clamping ring 16 is clamped with the clamping groove 2 17. The narrow rectangular mounting block 15 is fixedly connected to the top water-cooling plate 1.The halogen tungsten lamp reflective cooling mounting plate also includes a symmetrically arranged mounting assembly, one mounting assembly corresponds to a stepped cooling plate, and the symmetrically arranged stepped cooling plates are connected to each other through their corresponding mounting assemblies. The mounting assembly includes a mounting plate 18 and a shell 19. The mounting plate 18 is fixedly connected to the water-cooled plate 1 at the top, and the shell 19 is fixedly connected to the outside of the mounting plate 18, and the symmetrically arranged shells 19 are fixedly connected to each other; the two ends of the mounting plate 18 are fixedly connected to the water-cooled plate 1 at the top through a second connecting section 20, and a second ventilation opening 21 is provided between the mounting plate 18 and the water-cooled plate 1 at the top, and the second ventilation opening 21 is located between the second connecting section 20 at both ends; the halogen tungsten lamp reflective cooling mounting plate The plate also includes a cylindrical light shield 1 (22) that separates the halogen lamps installed on two adjacent water-cooled plates 1. Both ends of cylindrical light shield 1 (22) are fixedly connected to corresponding connecting segments 1 (4). A notch 1 (23) is defined in cylindrical light shield 1 (22), corresponding to ventilation opening 1 (3). A cylindrical light shield 2 (24) is located outside the halogen lamps 9 installed on the top water-cooled plate 1. Both ends of cylindrical light shield 2 (24) are fixedly connected to corresponding connecting segments 2 (20). A notch 2 (25) is defined in cylindrical light shield 2 (24), corresponding to ventilation opening 2 (21). A cylindrical light shield 3 (26) is located inside the halogen lamps 9 installed on the bottom water-cooled plate 1. Both ends of cylindrical light shield 3 (26) are fixedly connected to the bottom water-cooled plate 1. Cylindrical light shield 1 (22), cylindrical light shield 2 (24), and cylindrical light shield 3 (26) effectively improve the concentrated heating capability and effectively prevent the diffusion of heat from the halogen lamps during infrared irradiation.

[0030] Furthermore, the water-cooling plates 1 at the top and the middle are respectively provided with through holes for accommodating temperature sensors for monitoring the surface temperature of the heated substrate. After the temperature sensors are installed, the temperature conditions of various positions on the surface of the heated substrate can be monitored in real time.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. A stepped halogen tungsten lamp reflective cooling mounting plate, characterized in that: The invention comprises a stepped cooling plate which is symmetrically arranged, wherein the stepped cooling plate comprises a plurality of water-cooling plates (1) which are arranged outwardly at intervals in a height direction, wherein the plurality of water-cooling plates (1) are connected in a height direction, and a water-cooling groove (2) is provided inside the plurality of water-cooling plates (1), wherein the water-cooling groove (2) is connected in a serpentine shape in a height direction, and a ventilation opening (3) is provided between two adjacent water-cooling plates (1).

2. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 1, characterized in that: The two ends of a plurality of water-cooling plates (1) arranged in a height direction are sequentially connected via a connecting section (4), and the ventilation opening (3) is located between the connecting sections (4) at the two ends of two adjacent water-cooling plates (1).

3. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 1, characterized in that: The water-cooling plate (1) includes a water trough cover plate (5), the water-cooling trough (2) is opened at the bottom of the water-cooling plate (1), and the water trough cover plate (5) is located below the water-cooling trough (2) and is sealed and connected to the water-cooling plate (1).

4. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 2, characterized in that: A water channel (6) is provided in the connecting section (4) staggered along the height direction, which is capable of connecting two adjacent water-cooling grooves (2). The water channel (6) is used to connect the water-cooling grooves (2) in a serpentine shape. A water inlet (7) is provided inside the water-cooling plate (1) at the top, and the water inlet (7) is connected to the water-cooling groove (2) provided inside the water-cooling plate (1) at the top. A water outlet (8) is provided inside the water-cooling plate (1) at the bottom, and the water outlet (8) is connected to the water-cooling groove (2) provided inside the water-cooling plate (1) at the bottom.

5. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 1, characterized in that: A plurality of halogen tungsten lamps (9) are provided on the water-cooling plate (1), wherein one end or both ends of the halogen tungsten lamp (9) close to the side of the symmetrical surface of the stepped cooling plate passes through the water-cooling plate (1) and is fixedly connected to the water-cooling plate (1) through a lamp tube fixing clamp (10), and the other end of the halogen tungsten lamp (9) close to the side of the symmetrical surface of the stepped cooling plate and both ends of the remaining halogen tungsten lamps (9) except the one close to the side of the symmetrical surface of the stepped cooling plate pass through the water-cooling plate (1) and are fixedly connected to the water-cooling plate (1) through a lamp tube fixing clamp (11).

6. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 5, characterized in that: The lamp tube fixing clamp 1 (10) includes a wide rectangular mounting block (12) and a short semicircular snap ring (13), the wide rectangular mounting block (12) and the short semicircular snap ring (13) are integrally arranged, one end or both ends of the halogen tungsten lamp (9) close to the symmetrical surface of the stepped cooling plate are provided with a snap groove 1 (14), the short semicircular snap ring (13) is snapped with the snap groove 1 (14), and the wide rectangular mounting block (12) is fixedly connected to the water cooling plate (1); the lamp tube fixing clamp 2 (11) includes a narrow A rectangular mounting block (15) and a long semicircular retaining ring (16), the narrow rectangular mounting block (15) and the long semicircular retaining ring (16) are integrally arranged, the other end of the halogen tungsten lamp (9) close to the side of the symmetrical surface of the stepped cooling plate and the two ends of the remaining halogen tungsten lamps (9) except the side close to the side of the symmetrical surface of the stepped cooling plate are provided with a second retaining groove (17), the long semicircular retaining ring (16) is engaged with the second retaining groove (17), and the narrow rectangular mounting block (15) is fixedly connected to the water cooling plate (1).

7. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 2, characterized in that: It also includes symmetrically arranged mounting components, one mounting component corresponds to one stepped cooling plate, and the symmetrically arranged stepped cooling plates are connected to each other through their corresponding mounting components.

8. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 7, characterized in that: The mounting assembly includes a mounting plate (18) and a shell (19), wherein the mounting plate (18) is connected to the water-cooling plate (1) located at the top, and the shell (19) is connected to the outside of the mounting plate (18), and the shells (19) are symmetrically arranged and connected to each other.

9. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 8, characterized in that: The two ends of the mounting plate (18) are connected to the water-cooling plate (1) located at the top through the second connecting section (20), and a second ventilation opening (21) is provided between the mounting plate (18) and the water-cooling plate (1) located at the top, and the second ventilation opening (21) is located between the second connecting section (20) at the two ends.

10. The stepped halogen tungsten lamp reflective cooling mounting plate according to claim 9, characterized in that: The invention also includes a cylindrical light shield (22) for separating a plurality of halogen tungsten lamps provided on two adjacent water-cooling plates (1), the two ends of the cylindrical light shield (22) being connected to the corresponding connecting section (4), the cylindrical light shield (22) being provided with a notch (23) corresponding to the ventilation opening (3), a cylindrical light shield (24) being provided on the outer side of the plurality of halogen tungsten lamps (9) provided on the top water-cooling plate (1), the two ends of the cylindrical light shield (24) being connected to the corresponding connecting section (20), the cylindrical light shield (24) being provided with a notch (25) corresponding to the ventilation opening (21), a cylindrical light shield (3) being provided on the inner side of the plurality of halogen tungsten lamps (9) provided on the bottom water-cooling plate (1), the two ends of the cylindrical light shield (3) being connected to the bottom water-cooling plate (1).

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