Semiconductor ceramic sand blasting machine with nozzle

Abstract

The semiconductor ceramic sand blasting machine comprises a machine body, a working cavity is formed in the machine body, a recycling cavity is formed in the machine body, the recycling cavity is communicated with the working cavity, the working cavity is provided with a conveying plate, a filtering box and an adsorption mechanism, the conveying plate is in sliding connection with the inner side wall of the recycling cavity, and the filtering box is connected with the adsorption mechanism. The filter box is connected with the machine body, and a filter plate is arranged in the filter box; the dust recovery device is simple in structure and reasonable in design, and dust in the recovery cavity is adsorbed through the adsorption mechanism and the filter plate, so that the dust in the recovery cavity is reduced, the emission requirement is met, and the environment is protected.

Description

Technical Field

[0001] The utility model relates to the technical field of sandblasting machines, in particular to a semiconductor ceramic sandblasting machine with a nozzle. Background Art

[0002] Semiconductor ceramic sandblasting machine is a kind of equipment used for material surface treatment, which is widely used in semiconductor manufacturing and other precision industries. Generally, semiconductor ceramic sandblasting machine is often used for surface pretreatment, cleaning and preparing the material surface for subsequent coating or processing; removing oxides, removing oxides or other contaminants on the metal surface; repairing and reprocessing, repairing worn parts, and reprocessing the product surface to improve performance or appearance.

[0003] Deficiencies of existing technology:

[0004] The semiconductor ceramic sandblasting machine with a nozzle includes a machine body with a working chamber. Workers process the workpiece in the working chamber. During this process, a large amount of dust is easily generated. The dust directly contacts the air, thereby easily causing environmental pollution. Utility Model Content

[0005] The purpose of the present utility model is to provide a semiconductor ceramic sandblasting machine with a nozzle to solve the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A semiconductor ceramic sandblasting machine with a nozzle includes a machine body, a working chamber is defined in the machine body, a recovery chamber is defined in the machine body, the recovery chamber is communicated with the working chamber, a transmission plate, a filter box and an adsorption mechanism are provided in the working chamber, the transmission plate is slidably connected to the inner side wall of the recovery chamber, the filter box is connected to the machine body, and a filter plate is provided in the filter box;

[0008] The adsorption mechanism includes:

[0009] An adsorption tube, one end of which is connected to the transmission plate, with the tube opening facing the working chamber, and the other end of which is connected to the filter box;

[0010] a connecting pipe, the connecting pipe being in communication with a side of the filter box away from the adsorption tube;

[0011] A vacuum pump is located on one side of the filter box and is connected to the connecting pipe.

[0012] Preferably, a support plate is provided at the bottom of the transmission plate, and the side wall of the support plate is slidably connected to the side wall of the recovery chamber. A driving motor, a screw and a cross bar are provided at the bottom of the support plate, and the driving motor is connected to the inner wall of the recovery chamber. The output shaft of the driving motor is coaxially connected to the screw, and the axial direction of the screw is perpendicular to the length direction of the support plate. The end of the screw away from the driving motor is threaded through the support plate and connected to the inner wall of the recovery chamber. The cross bar is located on one side of the screw, and one end of the cross bar is connected to the inner wall of the recovery chamber, and the other end of the cross bar passes through the support plate and is slidably connected to the support plate.

[0013] Preferably, a cylinder and a transmission rod are provided on the support plate, the cylinder body of the cylinder is connected to the top of the transmission plate, the axial direction of the piston rod of the cylinder is consistent with the length direction of the transmission plate, the piston rod of the cylinder is coaxially connected to the transmission plate, and the end of the transmission rod away from the cylinder is connected to the transmission plate.

[0014] Preferably, a vertical hole for the filter plate to pass through is opened on the top of the filter box, and a cover plate is provided on the top of the filter box. The cover plate is detachably connected to the filter box and is used to cover the vertical hole.

[0015] Preferably, a transverse plate and an abutment are provided in the filter box, the bottom of the transverse plate is connected to the bottom wall of the filter box, the side wall of the transverse plate is slidably connected to the filter plate, the abutment is located on the side of the filter plate away from the transverse plate, the abutment is connected to the filter plate and is used to abut and limit the filter plate.

[0016] Preferably, an abutment groove is horizontally opened on the side wall of the filter plate, and the abutment member includes:

[0017] an abutment block, the abutment block being located on a side of the filter plate away from the transverse plate, the abutment block being used to contact the abutment groove;

[0018] An abutting rod, one end of which is connected to the abutting block, and the other end of which extends outside the filter box.

[0019] Preferably, a plurality of balls are provided at the bottom of the transmission plate, and the plurality of balls are evenly distributed along the length direction of the transmission plate, one side of each of the balls is connected to the transmission plate, and the other side of each of the balls is slidably connected to the support plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] 1. This semiconductor ceramic sandblasting machine with a nozzle has a transmission plate and an adsorption mechanism in the machine body. When the worker starts the vacuum pump, the dust in the recovery chamber is transmitted to the filter box through the adsorption tube. After being filtered by the filter plate and meeting the emission requirements, it is transmitted to the outside of the machine through the connecting pipe, thereby reducing the dust in the recovery chamber, protecting the environment, and reducing the pollution of dust to the air.

[0022] 2. This semiconductor ceramic sandblasting machine with a nozzle has an abutment block and an abutment rod arranged in the filter box. When the filter plate is in the filter box, the abutment block contacts the abutment groove to limit the abutment of the filter plate, thereby improving the stability of the filter plate and making it difficult for the filter plate to shake at will, thereby improving the filtering effect of the filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 It is a cross-sectional schematic diagram of the overall structure of the utility model, mainly showing the recovery chamber;

[0025] Figure 3 It is a partial structural diagram of the utility model, mainly showing the transmission rod;

[0026] Figure 4 This is an exploded schematic diagram of a part of the structure of the present invention, mainly showing the abutment parts.

[0027] In the figure: 1. Machine body; 11. Working chamber; 12. Recovery chamber; 13. Support plate; 2. Transmission plate; 21. Ball; 22. Cylinder; 23. Transmission rod; 3. Filter box; 31. Vertical hole; 32. Cover plate; 34. Filter plate; 35. Abutment groove; 4. Adsorption mechanism; 41. Adsorption tube; 42. Connecting tube; 43. Vacuum pump; 5. Driving member; 51. Driving motor; 52. Screw; 53. Cross bar; 6. Cross plate; 7. Abutment member; 71. Abutment block; 72. Abutment rod. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is the orientation or positional relationship shown based on the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0030] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is the orientation or positional relationship shown based on the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0031] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "several" is two or more than two, unless otherwise explicitly specified.

[0032] Please refer to Figure 1-4 The utility model provides a kind of semiconductor ceramic sand blasting machine with nozzle technical scheme provided by the utility model:

[0033] A kind of semiconductor ceramic sand blasting machine with nozzle, including body 1, working cavity 11 and recovery cavity 12 are set up in body 1, worker processes workpiece in working cavity 11, recovery cavity 12 is located at the bottom of working cavity 11 and is communicated with working cavity 11.

[0034] Supporting plate 13, driving element 5, transmission plate 2, filter box 3 and adsorption mechanism 4 are installed in recovery cavity 12, driving element 5 includes driving motor 51, screw rod 52 and cross bar 53, adsorption mechanism 4 includes adsorption pipe 41, connecting pipe 42 and vacuum pump 43.

[0035] The drive motor 51 is located on the inner wall of the recovery chamber 12 and is fixedly connected to the inner wall of the recovery chamber 12. The output shaft of the drive motor 51 is coaxially connected to the screw 52. The horizontally arranged screw 52 is away from the drive motor 51 and one end is threaded through the support plate 13 and then rotatably connected to the inner wall of the recovery chamber 12. The cross bar 53 is located on one side of the screw 52, ​​and one end of the cross bar 53 is fixedly connected to the inner wall of the recovery chamber 12. The other side of the cross bar 53 passes through the support plate 13 and is slidably connected to the support plate 13. The length direction of the horizontally arranged support plate 13 is perpendicular to the axial direction of the screw 52, ​​and the side wall of the support plate 13 is slidably connected to the inner side wall of the recovery chamber 12. The horizontally arranged transmission plate 2 is located on the support plate 13, and the length direction of the transmission plate 2 is consistent with the length direction of the support plate 13. A plurality of balls 21 are installed at the bottom of the transmission plate 2. The first ball 21 is evenly distributed along the length direction of the transmission plate 2. One side of each ball 21 is rotationally connected to the bottom of the transmission plate 2, and the other side of each ball 21 contacts the top of the support plate 13, thereby reducing wear and extending the service life of the transmission plate 2. A cylinder 22 and a transmission rod 23 for driving the transmission plate 2 to move are installed on the support plate 13. The cylinder body of the cylinder 22 is fixedly connected to the top of the transmission plate 2. The axial direction of the piston rod of the cylinder 22 is consistent with the length direction of the transmission plate 2. The piston rod of the cylinder 22 is coaxially fixedly connected to the transmission rod 23. The end of the horizontally arranged transmission rod 23 away from the cylinder 22 is fixedly connected to the transmission plate 2.

[0036] Both the adsorption tube 41 and the connecting tube 42 are retractable hoses. One end of the adsorption tube 41 is fixedly connected to the top of the transmission plate 2, and the other end of the adsorption tube 41 is connected to the filter box 3. The connecting tube 42 is connected to the end of the filter box 3 away from the adsorption tube 41, and the other end of the connecting tube 42 is connected to the vacuum pump 43.

[0037] The staff starts the vacuum pump 43. Driven by the vacuum pump 43, the dust in the recovery chamber 12 is transmitted to the filter box 3 after passing through the adsorption tube 41. Through the filtering effect of the filter box 3, the dust remains in the ideal state, thereby reducing the dust in the connecting pipe 42. At the same time, the staff starts the drive motor 51 and the cylinder 22. The output shaft of the drive motor 51 rotates to drive the screw 52 to rotate synchronously. Through the limiting effect of the cross bar 53, the support plate 13 moves along the axial direction of the cross bar 53, thereby driving the pipe mouth of the adsorption tube 41 to move synchronously, thereby expanding the adsorption range of the adsorption tube 41. At the same time, driven by the piston rod of the cylinder 22, the transmission rod 23 moves along the length direction of the support plate 13, thereby driving the pipe mouth of the adsorption tube 41 on the transmission plate 2 to move synchronously, thereby further expanding the adsorption range of the adsorption tube 41, further reducing the dust in the recovery chamber 12, so that the air in the recovery chamber 12 meets the emission requirements and reduces pollution.

[0038] A filter plate 34, a horizontal plate 6, and an abutment 7 are installed within the filter box 3. The bottom of the vertically arranged filter plate 34 contacts the bottom wall of the filter box 3. Abutment grooves 35 are horizontally provided on the side walls of the filter plate 34. A vertical hole 31 is provided at the top of the filter box 3 for the filter plate 34 to pass through. A cover plate 32 is installed on the top of the filter box 3. The horizontal cover plate 32 is detachably connected to the filter box 3 via bolts. The cover plate 32 is used to cover the vertical hole 31, making it easier for staff to remove the cover plate 32. The horizontal plate 6 is L-shaped, with the bottom of the horizontal plate 6 fixedly connected to the bottom wall of the filter box 3 and the side walls of the horizontal plate 6 slidingly connected to the filter plate 34. The abutment rod 72 is located on the side of the filter plate 34 away from the horizontal plate 6. One end of the abutment rod 72 is fixedly connected to the abutment block 71, and the other end of the abutment rod 72 extends outside the filter box 3. The vertically arranged abutment block 71 is used to contact the abutment groove 35 on the filter plate 34, thereby abutting and limiting the filter plate 34, making it difficult for the filter plate 34 to move at will, thereby improving the filtering effect of the filter plate 34.

[0039] The working principle of this utility model is as follows:

[0040] When the semiconductor ceramic sandblasting machine with a nozzle of this embodiment is in use, the staff starts the vacuum pump 43. The dust in the recovery chamber 12 is driven by the vacuum pump 43 and is transmitted to the filter box 3 after passing through the adsorption tube 41. After being adsorbed by the filter plate 34 in the filter box 3, the air in the recovery chamber 12 finally meets the emission standard, thereby reducing the pollution of dust to the environment and protecting the environment.

[0041] The staff then starts the drive motor 51 and the cylinder 22. The output shaft of the drive motor 51 rotates to drive the screw 52 to rotate synchronously. Through the limiting effect of the cross bar 53, the support plate 13 moves synchronously along the axial direction of the cross bar 53, thereby driving the transmission plate 2 on the support plate 13 and the pipe mouth of the adsorption tube 41 to move synchronously. At the same time, the cylinder 22 is started, and the piston rod of the cylinder 22 is extended and retracted to drive one end of the transmission rod 23, thereby driving the adsorption tube 41 to move synchronously, thereby expanding the adsorption range of the adsorption tube 41 and thereby improving the cleaning range.

[0042] When dust accumulates on the filter plate 34, the staff removes the cover plate 32, adjusts the abutment rod 72 to disengage the abutment block 71 from the abutment groove 35, and then takes out the filter plate 34, thereby replacing the new filter plate 34 to continue filtering the dust.

[0043] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor ceramic sandblasting machine with a nozzle, comprising a machine body (1), a working chamber (11) being provided in the machine body (1), and characterized in that: A recovery chamber (12) is provided in the machine body (1), the recovery chamber (12) is communicated with the working chamber (11), the working chamber (11) is provided with a transmission plate (2), a filter box (3) and an adsorption mechanism (4), the transmission plate (2) is slidably connected to the inner side wall of the recovery chamber (12), the filter box (3) is connected to the machine body (1), and a filter plate (34) is provided in the filter box (3); The adsorption mechanism (4) includes: an adsorption tube (41), one end of the adsorption tube (41) being connected to the transmission plate (2) with the tube opening facing the working chamber (11), and the other end of the adsorption tube (41) being in communication with the filter box (3); a connecting pipe (42), the connecting pipe (42) being in communication with a side of the filter box (3) away from the adsorption tube (41); A vacuum pump (43) is located on one side of the filter box (3) and is in communication with the connecting pipe (42).

2. A semiconductor ceramic sandblasting machine with a nozzle according to claim 1, characterized in that: A support plate (13) is provided at the bottom of the transmission plate (2), and a side wall of the support plate (13) is slidably connected to the side wall of the recovery chamber (12). A driving motor (51), a screw (52) and a cross bar (53) are provided at the bottom of the support plate (13). The driving motor (51) is connected to the inner side wall of the recovery chamber (12), and the output shaft of the driving motor (51) is coaxially connected to the screw (52). The axial direction of the screw (52) is perpendicular to the length direction of the support plate (13). One end of the screw (52) away from the driving motor (51) is threadedly penetrated through the support plate (13) and then connected to the inner side wall of the recovery chamber (12). The cross bar (53) is located on one side of the screw (52), one end of the cross bar (53) is connected to the inner side wall of the recovery chamber (12), and the other end of the cross bar (53) passes through the support plate (13) and is slidably connected to the support plate (13).

3. A semiconductor ceramic sandblasting machine with a nozzle according to claim 2, characterized in that: A cylinder (22) and a transmission rod (23) are provided on the support plate (13); the cylinder body of the cylinder (22) is connected to the top of the transmission plate (2); the axial direction of the piston rod of the cylinder (22) is consistent with the length direction of the transmission plate (2); the piston rod of the cylinder (22) is coaxially connected to the transmission plate (2); and the end of the transmission rod (23) away from the cylinder (22) is connected to the transmission plate (2).

4. A semiconductor ceramic sandblasting machine with a nozzle according to claim 1, characterized in that: A vertical hole (31) is provided on the top of the filter box (3) for the filter plate (34) to pass through, and a cover plate (32) is provided on the top of the filter box (3). The cover plate (32) is detachably connected to the filter box (3), and the cover plate (32) is used to cover the vertical hole (31).

5. The semiconductor ceramic sandblasting machine with a nozzle according to claim 1, characterized in that: A transverse plate (6) and an abutment member (7) are provided in the filter box (3), the bottom of the transverse plate (6) is connected to the bottom wall of the filter box (3), the side wall of the transverse plate (6) is slidably connected to the filter plate (34), and the abutment member (7) is located on a side of the filter plate (34) away from the transverse plate (6). The abutment member (7) is connected to the filter plate (34) and is used to abut and limit the filter plate (34).

6. A semiconductor ceramic sandblasting machine with a nozzle according to claim 5, characterized in that: An abutment groove (35) is horizontally provided on the side wall of the filter plate (34), and the abutment member (7) includes: an abutment block (71), the abutment block (71) being located on a side of the filter plate (34) away from the transverse plate (6), the abutment block (71) being used to contact the abutment groove (35); An abutting rod (72), one end of which is connected to the abutting block (71), and the other end of which extends outside the filter box (3).

7. A semiconductor ceramic sandblasting machine with a nozzle according to claim 2, characterized in that: A plurality of balls (21) are provided at the bottom of the transmission plate (2), and the plurality of balls (21) are evenly distributed along the length direction of the transmission plate (2). One side of each ball (21) is connected to the transmission plate (2), and the other side of each ball (21) is slidably connected to the support plate (13).

Images