Deposition furnace heating device based on silicon controlled rectifier

Abstract

The utility model discloses a silicon controlled rectifier-based deposition furnace heating device, and belongs to the field of carbon-based material production equipment. The problems that in an existing deposition furnace system, the electric heating power control effect is poor, the power factor of a power system is low, and the harmonic content index of current injected into a power grid is poor are solved. According to the technical scheme, the device comprises a silicon controlled rectifier voltage regulating module, the control end of the silicon controlled rectifier voltage regulating module is connected to a PLC, the input end of the silicon controlled rectifier voltage regulating module is connected to a power source, the output end of the silicon controlled rectifier voltage regulating module is connected to the input end of a three-phase transformer, the output end of the three-phase transformer is electrically connected with a heating coil, and the heating coil is further electrically connected with a temperature measuring device. The temperature measuring device is electrically connected with the PLC, the PLC is further electrically connected with a control panel, and the silicon controlled rectifier voltage regulating module comprises a first silicon controlled rectifier circuit, a second silicon controlled rectifier circuit and a third silicon controlled rectifier circuit. The utility model is applied to the deposition furnace heating coil.

Description

Technical Field

[0001] The utility model provides a deposition furnace heating device based on a thyristor, belonging to the technical field of carbon-based material production equipment. Background Art

[0002] Traditional deposition furnace electric heating control basically uses relays to control the electric heating, or divides the electric heating into two sections and uses two relays to control the power. This mechanical switch control is very simple to control the electric heating, but it cannot effectively control the power of the electric heating.

[0003] Although controlling the thyristor turn-on phase angle can easily adjust the effective value of the output voltage and achieve effective control of the electric heating power, when the deposition furnace is heated to high temperatures, the output power during the heating phase is much greater than the output power during the constant temperature phase. Therefore, it is necessary to increase the turn-on phase angle to perform AC voltage regulation. Under this control method, when the thyristor is turned on, the current and voltage waveforms of the load are both waveforms adjusted by the thyristor phase shift. Therefore, this thyristor triggering method will cause harmonic pollution to the power grid. The deeper the power supply phase shift depth (the larger the control angle α), the worse the power factor of the power supply system, and accordingly, the harmonic content of the current injected into the power grid will also deteriorate. Utility Model Content

[0004] In order to solve the technical problems of poor control of electric heating power, low power factor of the power supply system and poor index of harmonic content of current injected into the power grid in the existing deposition furnace system, the utility model proposes a deposition furnace heating device based on thyristor. The purpose is to enhance the control effect of electric heating power, improve the power factor of the power supply system and improve the power quality of the power grid by improving the circuit structure of the deposition furnace heating coil.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows: a thyristor-based deposition furnace heating device, comprising a thyristor voltage regulating module, wherein the control end of the thyristor voltage regulating module is connected to a PLC controller, the input end of the thyristor voltage regulating module is connected to a power supply, the output end of the thyristor voltage regulating module is connected to the input end of a three-phase transformer, the output end of the three-phase transformer is electrically connected to a heating coil, the heating coil is also electrically connected to a temperature measuring device, and the temperature measuring device is electrically connected to the PLC controller;

[0006] The PLC controller is also electrically connected to a control panel;

[0007] The thyristor voltage regulating module includes a first thyristor circuit, a second thyristor circuit and a third thyristor circuit, wherein the first thyristor circuit, the second thyristor circuit and the third thyristor circuit are each composed of a plurality of groups of positive and negative thyristor circuits;

[0008] The first thyristor circuit, the second thyristor circuit and the third thyristor circuit are all connected to the input end of the three-phase transformer.

[0009] Furthermore, the first thyristor circuit, the second thyristor circuit and the third thyristor circuit are each composed of two groups of positive and negative thyristor circuits connected in parallel, and the positive and negative thyristor circuit is composed of two thyristors connected in anti-parallel.

[0010] Furthermore, the input end of the three-phase transformer has at least two taps, and each tap is electrically connected to a group of positive and negative thyristor circuits.

[0011] Furthermore, the first thyristor circuit includes a forward and reverse thyristor circuit U1 and a forward and reverse thyristor circuit U2, the second thyristor circuit includes a forward and reverse thyristor circuit V1 and a forward and reverse thyristor circuit V2, and the third thyristor circuit includes a forward and reverse thyristor circuit W1 and a forward and reverse thyristor circuit W2.

[0012] Furthermore, the temperature measuring device includes a temperature sensor, and the temperature sensor is installed on the outer wall of the deposition furnace.

[0013] Furthermore, the heating coil is a three-phase resistance heating coil.

[0014] Furthermore, the temperature sensor is a thermocouple thermometer.

[0015] Furthermore, the model of the PLC controller is Siemens S7-1200PLC.

[0016] The beneficial effects of the present invention compared to the prior art are as follows:

[0017] 1. The heating coil of the utility model is electrically connected to the PLC controller through a temperature measuring device, which can monitor the temperature of the heating coil in real time. Then, by controlling the on and off of the positive and negative thyristor circuits, the input voltage of the three-phase transformer is adjusted, and the transformation ratio of the three-phase transformer is controlled, the power of the heating coil is effectively controlled, which greatly improves the control effect of the heating coil power.

[0018] 2. When the heating coil of the present invention needs to be applied with high voltage and high power, the PLC controller can be used to control the shutdown of the positive and negative thyristor circuit U2, the positive and negative thyristor circuit V2 and the positive and negative thyristor circuit W2, and the positive and negative thyristor circuit U1, the positive and negative thyristor circuit V1 and the positive and negative thyristor circuit W1 are normally turned on. When the waveform output by the positive and negative thyristor circuit U1, the positive and negative thyristor circuit V1 and the positive and negative thyristor circuit W1 is a complete sine wave, the heating rated power is reached; when the heating coil of the present invention needs to be applied with low voltage and low power, the PLC controller can be used to control the shutdown of the positive and negative thyristor circuit U1, the positive and negative thyristor circuit V1 and the positive and negative thyristor circuit W1, and the positive and negative thyristor circuit U2, the positive and negative thyristor circuit V2 and the positive and negative thyristor circuit W2 are normally turned on to reach the constant temperature rated power; the power factor can be improved and the harmonic content can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings:

[0020] Figure 1 This is a working principle diagram of the utility model;

[0021] Figure 2 This is a circuit diagram of the utility model. DETAILED DESCRIPTION

[0022] In the present invention, unless otherwise specified, directional words such as "up, down, top, bottom" are usually used with reference to the directions shown in the drawings, or with reference to the components themselves in the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0023] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this invention based on specific circumstances.

[0024] like Figures 1 to 2As shown, the utility model provides a deposition furnace heating device based on thyristor, including a thyristor voltage regulating module, the control end of the thyristor voltage regulating module is connected to a PLC controller, and the model of the PLC controller is Siemens S7-1200PLC. The input end of the thyristor voltage regulating module is connected to a power supply, and the output end of the thyristor voltage regulating module is connected to the input end of a three-phase transformer. The output end of the three-phase transformer is electrically connected to a heating coil, and the heating coil is a three-phase resistive heating coil. The heating coil is also electrically connected to a temperature measuring device, and the temperature measuring device is connected to the PLC controller. The PLC controller is also electrically connected to a control panel, and the PLC controller transmits the temperature value detected by the temperature measuring device to the control panel. The operator can understand the status of the furnace in real time and adjust the input voltage of the three-phase transformer by controlling the on and off of the thyristor voltage regulating module according to actual needs. The temperature measuring device includes a temperature sensor, and the temperature sensor is installed on the outer wall of the deposition furnace. The temperature sensor is specifically a thermocouple thermometer.

[0025] Specifically, the thyristor voltage regulating module includes a first thyristor circuit, a second thyristor circuit and a third thyristor circuit, and the first thyristor circuit, the second thyristor circuit and the third thyristor circuit are electrically connected to the three-phase branch of the input end of the three-phase transformer in a one-to-one correspondence.

[0026] The first thyristor circuit, the second thyristor circuit, and the third thyristor circuit are each composed of several groups of positive and negative thyristor circuits connected in parallel. A single-phase branch at the input end of a three-phase transformer has at least two taps, each of which is electrically connected to a group of positive and negative thyristor circuits. In this embodiment, the first thyristor circuit, the second thyristor circuit, and the third thyristor circuit are each composed of two groups of positive and negative thyristor circuits connected in parallel, and the positive and negative thyristor circuits are composed of two thyristors connected in anti-parallel. Specifically, the first thyristor circuit includes a positive and negative thyristor circuit U1 and a positive and negative thyristor circuit U2, the second thyristor circuit includes a positive and negative thyristor circuit V1 and a positive and negative thyristor circuit V2, and the third thyristor circuit includes a positive and negative thyristor circuit W1 and a positive and negative thyristor circuit W2.

[0027] When the deposition furnace needs to be heated, the voltage and power required at both ends of the heating coil are high. The PLC controller controls the positive and negative thyristor circuits U2, V2, and W2 to be in the off state. When the output waveforms of the positive and negative thyristor circuits U1, V1, and W1 are complete sine waves, the rated heating power is achieved. At this time, the power factor is high and the harmonics are small. When the deposition furnace needs to be kept at a constant temperature, the voltage and power required at both ends of the heating coil are low. The PLC controller controls the positive and negative thyristor circuits U1, V1, and W1 to be in the off state. When the output waveforms of the positive and negative thyristor circuits U2, V2, and W2 are complete sine waves, the rated heating power is achieved. At this time, the fundamental harmonic content is low and the power factor is high.

[0028] Regarding the specific structure of the present invention, it should be noted that the connection relationship between the various component modules adopted in the present invention is definite and feasible. Except for the special instructions in the embodiments, the specific connection relationship can bring about corresponding technical effects and solve the technical problems raised by the present invention without relying on the execution of the corresponding software program. The components, modules, models of specific components appearing in the present invention, the connection methods between each other, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, except for the specific instructions, all belong to the disclosed contents in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by technical personnel in this field before the application date, or belong to the existing technologies such as conventional technology and common knowledge in this field, and there is no need to elaborate, so that the technical solution provided in this case is clear, complete, and feasible, and the corresponding physical products can be reproduced or obtained based on this technical means.

[0029] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A deposition furnace heating device based on thyristor, characterized in that: It includes a thyristor voltage regulating module, wherein the control end of the thyristor voltage regulating module is connected to a PLC controller, the input end of the thyristor voltage regulating module is connected to a power supply, the output end of the thyristor voltage regulating module is connected to the input end of a three-phase transformer, the output end of the three-phase transformer is electrically connected to a heating coil, the heating coil is also electrically connected to a temperature measuring device, and the temperature measuring device is electrically connected to the PLC controller; The PLC controller is also electrically connected to a control panel; The thyristor voltage regulating module includes a first thyristor circuit, a second thyristor circuit and a third thyristor circuit, wherein the first thyristor circuit, the second thyristor circuit and the third thyristor circuit are each composed of a plurality of groups of positive and negative thyristor circuits; The first thyristor circuit, the second thyristor circuit and the third thyristor circuit are all connected to the input end of the three-phase transformer.

2. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The first thyristor circuit, the second thyristor circuit and the third thyristor circuit are each composed of two groups of positive and negative thyristor circuits connected in parallel, and the positive and negative thyristor circuit is composed of two thyristors connected in anti-parallel.

3. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The input end of the three-phase transformer has at least two taps, and each tap is electrically connected to a group of positive and negative thyristor circuits.

4. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The first thyristor circuit includes a forward and reverse thyristor circuit U1 and a forward and reverse thyristor circuit U2, the second thyristor circuit includes a forward and reverse thyristor circuit V1 and a forward and reverse thyristor circuit V2, and the third thyristor circuit includes a forward and reverse thyristor circuit W1 and a forward and reverse thyristor circuit W2.

5. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The temperature measuring device includes a temperature sensor, and the temperature sensor is installed on the outer wall of the deposition furnace.

6. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The heating coil is a three-phase resistance heating coil.

7. The thyristor-based deposition furnace heating device according to claim 5, characterized in that: The temperature sensor is a thermocouple thermometer.

8. The thyristor-based deposition furnace heating device according to claim 1, characterized in that: The model of the PLC controller is Siemens S7-1200PLC.

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