Automatic seed crystal stabilizing device of single crystal furnace

Abstract

The utility model discloses an automatic seed crystal stabilizing device of a single crystal furnace, which relates to the field of czochralski single crystal and comprises a moving device, a mounting seat is rotatably connected to the center of the moving device, a positioning device is fixedly connected to the center of the top of the mounting seat, and positioning components are symmetrically and movably connected to the front side and the back side of an inner cavity of the positioning device. Supporting pads are movably connected to the bottoms of inner cavities of the positioning devices, and linear motors are electrically connected to the left sides of the moving devices. According to the automatic seed crystal stabilizing device of the single crystal furnace, the seed crystal can be stabilized in the process of straight pulling of the single crystal, so that the process of stabilizing the seed crystal is automatically carried out, the automatic stabilization of the seed crystal is realized, the labor intensity is reduced, the production efficiency is improved, the seed crystal can be automatically stabilized by adopting the automatic seed crystal stabilizing device, and the production efficiency is improved. The automatic stabilizing process of the seed crystal can be carried out in the process of turning back of the auxiliary chamber and replacing air in the auxiliary chamber with argon, so that the ineffective working time can be shortened, and the purpose of improving the output can be achieved.

Description

Technical Field

[0001] The utility model relates to the field of Czochralski single crystals, in particular to an automatic seed crystal stabilizing device for a single crystal furnace. Background Art

[0002] At present, competition in the industry is becoming increasingly fierce, and the degree of automation of single crystal production enterprises is gradually improving, from the Industrial 2.0 era to the Industrial 3.0 and 4.0 eras. During the single crystal pulling process, the equal diameter process has been automatically controlled. Before pulling the single crystal, the seed crystal needs to maintain a stable state to ensure that the seed crystal will not shake during the growth process and avoid the generation of stress.

[0003] Currently, seed crystal positioning is entirely done manually. This process requires lowering the seed crystal to a visible position in the auxiliary chamber of the single crystal furnace, using tools to stabilize the seed crystal to a stationary state, and then manually raising the seed crystal to the specified position. This process often takes three to five minutes, which wastes a lot of time and is an important reason affecting the automation process of the single crystal furnace. In addition, due to the relationship between skills and time, the stability and accuracy of the seed crystal is difficult to guarantee for some operations, which will lead to abnormal accidents such as single crystal shaking during the subsequent crystal pulling process.

[0004] Currently, seed crystal positioning is entirely done manually. This process requires lowering the seed crystal to a visible position in the auxiliary chamber of the single crystal furnace, stabilizing the seed crystal to a stationary state, and then manually raising the seed crystal to the specified position. This process often takes three to five minutes, which wastes a lot of time and is an important reason affecting the automation process of the single crystal furnace. In addition, due to the relationship between skills and time, the stability and accuracy of the seed crystal is difficult to guarantee for some operations, which will lead to abnormal accidents such as single crystal shaking during the subsequent crystal pulling process.

[0005] Therefore, it is necessary to propose an automatic seed crystal stabilization device for a single crystal furnace to solve the above problems. Utility Model Content

[0006] The main purpose of the utility model is to provide an automatic seed crystal stabilizing device for a single crystal furnace, which can effectively solve the problems in the background technology.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] A single crystal furnace automatic seed crystal stabilization device includes a moving device, the center of the moving device is rotatably connected to a mounting seat, the center of the top of the mounting seat is fixedly connected to a positioning device, the front and back sides of the inner cavity of the positioning device are symmetrically and movably connected to positioning components, the bottom of the inner cavity of the positioning device is movably connected to a support pad, and the left side of the moving device is electrically connected to a linear motor.

[0009] Preferably, a slider is installed on the back side of the right side of the moving device, a guide rod is movably connected in the inner cavity of the slider, an extension seat is installed in the center of the front of the moving device, and adapter blocks are installed on the top of the extension seat and the front of the positioning device, and cylinders are rotatably connected in the inner cavities of the two adapter blocks.

[0010] Preferably, the two positioning components are symmetrically provided with accommodating grooves on one side opposite to the other, and the two positioning components are symmetrically provided with limiting grooves in the middle of the opposite sides, and the inner cavities of the limiting grooves and the accommodating grooves are in communication.

[0011] Preferably, an extension plate is movably connected in the inner cavity of the accommodating groove, a limiting block is installed at the bottom of the outer wall of the extension plate, the limiting block is movably connected in the inner cavity of the limiting groove, the outer side of the limiting block is threadedly connected with a positioning bolt, the positioning bolt is fitted to the outer wall of the limiting groove, and the extension plate and the positioning assembly are both arc-shaped.

[0012] Preferably, adjustment grooves are symmetrically provided on the front and back sides of the bottom of the positioning device, the inner cavities of the two adjustment grooves are communicated, a bidirectional screw is rotatably connected in the inner cavity of the adjustment groove, a turning handle is installed on the front side of the bidirectional screw, and the turning handle is rotatably connected to the top of the front side of the positioning device, and the center of the bottom of the two positioning components is symmetrically connected in the inner cavities of the two adjustment grooves and symmetrically threadedly connected to the two ends of the outer wall of the bidirectional screw.

[0013] Preferably, a spring is installed in the center of the bottom of the support pad, and the bottom of the spring is installed at the bottom of the inner cavity of the positioning device.

[0014] Beneficial effects

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The automatic seed crystal stabilization device of the single crystal furnace can stabilize the seed crystal during the process of pulling the single crystal, so that the seed crystal stabilization process can be carried out automatically, thereby realizing automatic stabilization of the seed crystal, reducing labor intensity and improving production efficiency. The device can automatically stabilize the seed crystal. The automatic stabilization process of the seed crystal can be carried out during the rotation of the auxiliary chamber and the replacement of the auxiliary chamber air with argon gas. It is completed during the process of the rotation and purification of the auxiliary chamber, thereby shortening the ineffective working hours and achieving the purpose of increasing output.

[0017] 2. The automatic seed crystal stabilizing device of the single crystal furnace rotates the bidirectional screw so that the bottom of the positioning assembly can be threadedly connected to the bidirectional screw. At this time, the two positioning assemblies can be driven to move to the opposite side, so that the seed crystal can be positioned according to its size. The limit blocks and positioning bolts can be used to adjust the distance between the extension plate and the positioning assembly according to the size of the seed crystal, so as to further improve the stability of the seed crystal after positioning.

[0018] 3. The automatic seed crystal stabilizing device of the single crystal furnace can always bounce the support pad to the top through the set spring, so as to support the bottom of the seed crystal. By starting the set cylinder, the positioning device can be driven to flip, and by starting the set linear motor, the positioning device can be driven to move, so as to facilitate the storage of the positioning device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of the front side of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the inner cavity of the positioning device of the utility model;

[0021] Figure 3 It is a structural diagram of the positioning assembly of the utility model;

[0022] Figure 4 This utility model Figure 2 Enlarged view of point A in the middle.

[0023] In the figure: 1. Moving device; 2. Linear motor; 3. Slider; 4. Guide rod; 5. Mounting seat; 6. Extension seat; 7. Adapter block; 8. Cylinder; 9. Positioning device; 10. Limiting groove; 11. Extension plate; 12. Limiting block; 13. Spring; 14. Adjusting groove; 15. Bidirectional screw; 16. Support pad; 17. Positioning assembly. DETAILED DESCRIPTION

[0024] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0025] like Figures 1-4As shown, an automatic seed crystal stabilization device for a single crystal furnace includes a moving device 1, a mounting seat 5 is rotatably connected to the center of the moving device 1, a positioning device 9 is fixedly connected to the center of the top of the mounting seat 5, the front and back of the inner cavity of the positioning device 9 are symmetrically and movably connected to the positioning assembly 17, the bottom of the inner cavity of the positioning device 9 is movably connected to the support pad 16, the left side of the moving device 1 is electrically connected to the linear motor 2, a slider 3 is installed on the back of the right side of the moving device 1, and a guide rod 4 is movably connected to the inner cavity of the slider 3, an extension seat 6 is installed in the center of the front of the moving device 1, and an adapter block 7 is installed on the top of the extension seat 6 and the front of the positioning device 9, and a cylinder 8 is rotatably connected to the inner cavity of the two adapter blocks 7, and the two positioning assemblies 17 are symmetrically provided with a receiving groove on the opposite side, and the limiting groove 10 is symmetrically provided in the center of the opposite side. The limiting groove 10 is communicated with the inner cavity of the receiving groove, An extension plate 11 is movably connected to the inner cavity of the groove, and a limit block 12 is installed at the bottom of the outer wall of the extension plate 11. The limit block 12 is movably connected to the inner cavity of the limit groove 10, and the outer side of the limit block 12 is threadedly connected to a positioning bolt, which fits the outer wall of the limit groove 10. The extension plate 11 and the positioning assembly 17 are both arc-shaped, and an adjustment groove 14 is symmetrically provided on the front and back of the bottom of the positioning device 9. The inner cavities of the two adjusting grooves 14 are communicated, and a bidirectional screw rod 15 is rotatably connected in the inner cavity of the adjusting groove 14. A turning handle is installed on the front of the bidirectional screw rod 15, and the turning handle is rotatably connected to the top of the front face of the positioning device 9. The center of the bottom of the two positioning assemblies 17 is symmetrically movably connected in the inner cavity of the two adjusting grooves 14 and is symmetrically threaded at the two ends of the outer wall of the bidirectional screw rod 15. A spring 13 is installed in the center of the bottom of the support pad 16, and the bottom of the spring 13 is installed at the bottom of the inner cavity of the positioning device 9.

[0026] The device can stabilize the seed crystal during the process of pulling the single crystal, so that the process of seed crystal stabilization can be automatically carried out, the automatic stabilization of the seed crystal is realized, the labor intensity is reduced, and the production efficiency is improved. The device can automatically stabilize the seed crystal, and the automatic stabilization process of the seed crystal can be carried out during the rotation of the sub-chamber and the replacement of the sub-chamber air with argon gas. The process time of the sub-chamber rotation and the sub-chamber purification is used to complete the process, which shortens the invalid working hours and achieves the purpose of increasing output. By rotating the bidirectional screw rod 15, the bottom of the positioning component 17 can be threadedly connected to the bidirectional screw rod 15, and the two positioning components 1 can be driven at this time. 7 moves to the opposite side, so that it can be positioned according to the size of the seed crystal. By setting the limit block 12 and the positioning bolt, the distance between the extension plate 11 and the positioning component 17 can be adjusted according to the size of the seed crystal, so as to further improve the stability of the seed crystal after positioning. By setting the spring 13, the support pad 16 can be bounced to the top at any time, so as to support the bottom of the seed crystal. By starting the set cylinder 8, the positioning device 9 can be driven to flip over, and by starting the set linear motor 2, the positioning device 9 can be driven to move, so as to facilitate the storage of the positioning device 9.

[0027] It should be noted that the utility model is an automatic seed crystal stabilizing device for a single crystal furnace. When in use, the extension plate 11 is adjusted according to the size of the seed crystal, and the extension plate 11 is moved so that the limit block 12 can move in the inner cavity of the limit groove 10. After the adjustment is completed, the positioning bolts are installed to fix the position of the extension plate 11, and the linear motor 2 is set above the isolation valve in the single crystal furnace and connected to the isolation valve. The seed crystal is driven into the inner cavity of the positioning device 9 through the pulling head of the single crystal furnace, and the bidirectional screw rod 15 is rotated so that the bottom of the positioning assembly 17 can be threadedly connected to the bidirectional screw rod 15. At this time, the two positioning assemblies 17 can move to the opposite side, and the extension plate 11 set in conjunction with the setting can have a positioning effect on the seed crystal, thereby ensuring its stability. At the same time, the slider 3 will drive the support pad 16 to bounce to the top, so that it can fit on the bottom of the seed crystal. When the positioning device 9 needs to be stored, start the linear motor 2, move the positioning device 9 to a suitable position, start the cylinder 8, and flip the positioning device 9. At this time, the positioning device 9 can be stored.

[0028] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. An automatic seed crystal stabilization device for a single crystal furnace, comprising a moving device (1), characterized in that: The center of the moving device (1) is rotatably connected to a mounting seat (5), the center of the top of the mounting seat (5) is fixedly connected to a positioning device (9), the front and back sides of the inner cavity of the positioning device (9) are symmetrically and movably connected to positioning components (17), the bottom of the inner cavity of the positioning device (9) is movably connected to a support pad (16), and the left side of the moving device (1) is electrically connected to a linear motor (2).

2. The automatic seed crystal stabilization device for a single crystal furnace according to claim 1, characterized in that: A slider (3) is installed on the back of the right side of the moving device (1), and a guide rod (4) is movably connected in the inner cavity of the slider (3). An extension seat (6) is installed in the center of the front of the moving device (1), and an adapter block (7) is installed on the top of the extension seat (6) and the front of the positioning device (9). Cylinders (8) are rotatably connected in the inner cavities of the two adapter blocks (7).

3. The automatic seed crystal stabilization device for a single crystal furnace according to claim 1, characterized in that: The two positioning components (17) are symmetrically provided with receiving grooves on opposite sides, and the limiting grooves (10) are symmetrically provided in the middle of the opposite sides of the two positioning components (17), and the inner cavities of the limiting grooves (10) and the receiving grooves are in communication.

4. The automatic seed crystal stabilization device for a single crystal furnace according to claim 3, characterized in that: An extension plate (11) is movably connected in the inner cavity of the accommodating groove. A limiting block (12) is installed at the bottom of the outer wall of the extension plate (11). The limiting block (12) is movably connected in the inner cavity of the limiting groove (10). The outer side of the limiting block (12) is threadedly connected to a positioning bolt. The positioning bolt is fitted on the outer wall of the limiting groove (10). The extension plate (11) and the positioning assembly (17) are both arc-shaped.

5. The automatic seed crystal stabilization device for a single crystal furnace according to claim 1, characterized in that: The front and back sides of the bottom of the positioning device (9) are symmetrically provided with adjustment grooves (14), the inner cavities of the two adjustment grooves (14) are communicated, a bidirectional screw rod (15) is rotatably connected in the inner cavities of the adjustment grooves (14), a rotating handle is installed on the front side of the bidirectional screw rod (15), and the rotating handle is rotatably connected to the top of the front side of the positioning device (9), and the center of the bottom of the two positioning components (17) is symmetrically connected in the inner cavities of the two adjustment grooves (14) and symmetrically threadedly connected to the two ends of the outer wall of the bidirectional screw rod (15).

6. The automatic seed crystal stabilization device for a single crystal furnace according to claim 1, characterized in that: A spring (13) is installed in the middle of the bottom of the support pad (16), and the bottom of the spring (13) is installed at the bottom of the inner cavity of the positioning device (9).

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