Vacuum crucible adjusting mechanism, vacuum furnace source and vacuum processing system
The vacuum crucible adjustment mechanism composed of a ball head and a ball joint seat, combined with multiple adjustment bolts and elastic components, solves the problem of insufficient crucible adjustment freedom in existing furnace sources, and achieves the effects of flexible adjustment and simplified operation.
Patent Information
- Application Number
- CN202422954730.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-02
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2034-12-02
AI Technical Summary
The installation position of the crucible in the existing furnace source has a small degree of freedom in adjustment, a limited adjustment range, and the furnace source needs to be disassembled for adjustment after adjustment, which is cumbersome to operate.
The ball head and ball joint seat are matched, combined with multiple adjustment bolts and elastic components to achieve flexible swing angle adjustment of the crucible. It can be simply adjusted through the locking nut and cover to avoid major disassembly.
Flexible adjustment of the crucible is achieved, the debugging and maintenance process is simplified, and the convenience and stability of operation are improved.
Smart Images
Figure CN223422823U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum crucible adjustment mechanism, a vacuum furnace source, and a vacuum processing system. Background Art
[0002] During furnace installation, the crucible's correct positioning must be ensured, for example, ensuring it is coaxial with the heating element. Existing furnaces, including those used to crack raw materials like antimony, have a crucible fixing mechanism with limited adjustment freedom and a restricted range. Adjustments are best made before installation. If readjustment is required after installation, the furnace must be disassembled for this operation, which is cumbersome. Utility Model Content
[0003] The present disclosure provides a vacuum crucible adjustment mechanism, comprising:
[0004] Fixed seat;
[0005] The ball joint seat is arranged on the fixed seat, and the ball joint seat includes a spherical pit and a plurality of adjustment holes arranged on the periphery of the ball joint seat;
[0006] Ball seat, including:
[0007] The ball head is arranged in the spherical concave pit of the ball joint seat and can rotate along the spherical concave pit of the ball joint seat;
[0008] a ball head mounting seat, the proximal end of which is fixedly connected to the distal end of the ball head;
[0009] a crucible seat, disposed at the distal end of the ball head mounting seat, for supporting the crucible; and
[0010] A plurality of adjusting bolts respectively pass through the plurality of adjusting holes of the ball joint seat, and the distal ends of the plurality of adjusting bolts are connected to the proximal end surface of the crucible seat for adjusting the swing angle of the crucible.
[0011] In some embodiments of the present disclosure, the plurality of adjusting bolts include a plurality of adjusting bolts, the plurality of adjusting holes include a plurality of adjusting threaded holes, the fixing seat further includes a plurality of through holes, the plurality of adjusting bolts respectively pass through the plurality of through holes of the fixing seat and are respectively threadedly connected to the plurality of adjusting threaded holes of the ball joint seat; and / or
[0012] The vacuum crucible adjustment mechanism further includes a plurality of locking nuts, which are respectively connected to the plurality of adjustment bolts and are used to lock the plurality of adjustment bolts to fix the swing angle of the crucible.
[0013] In some embodiments of the present disclosure, the vacuum crucible adjustment mechanism further includes a plurality of sealing covers, which are respectively and sealingly mounted on the outside of the plurality of locking nuts to seal the fixing seat.
[0014] In some embodiments of the present disclosure, the vacuum crucible adjustment mechanism further includes an elastic component, and the elastic component includes:
[0015] an elastic component seat, disposed on the fixing seat; and
[0016] The plurality of elastic components have proximal ends connected to the elastic component seat and distal ends used to connect to the crucible so as to secure the crucible on the crucible seat through elastic force.
[0017] In some embodiments of the present disclosure, the vacuum crucible adjustment mechanism further includes an umbrella assembly, the umbrella assembly including:
[0018] An umbrella top ring, configured to be mounted on the distal end of the crucible; and
[0019] The distal ends of the plurality of pull rods are connected to the umbrella top ring, and the proximal ends are respectively used to connect to the plurality of elastic components, so as to stabilize the crucible on the crucible seat through elastic force.
[0020] In some embodiments of the present disclosure, the ball mount is circular;
[0021] The elastic component seat is annular, and the ball head mounting seat is concentrically arranged in the elastic component seat.
[0022] In some embodiments of the present disclosure, the vacuum crucible adjustment mechanism further includes a ball head seat pressure plate, which is fixed to the ball joint seat and cooperates with the ball head clearance of the ball head seat to control the axial movement of the ball head.
[0023] In some embodiments of the present disclosure, the proximal surface of the crucible seat is provided with a plurality of spherical grooves.
[0024] The distal ends of the plurality of adjusting pins are spherical surfaces, and the distal ends of the plurality of adjusting pins respectively abut against the plurality of spherical grooves of the crucible seat for adjusting the swing angle of the crucible.
[0025] The present disclosure provides a vacuum furnace source, comprising:
[0026] a crucible for holding a target; and
[0027] The vacuum crucible adjustment mechanism according to any one of the embodiments of the present disclosure is used to support the crucible and to adjust the swing angle of the crucible.
[0028] The present disclosure provides a vacuum processing system, comprising:
[0029] a vacuum chamber; and
[0030] According to the vacuum furnace source in any one of the embodiments of the present disclosure, the vacuum furnace source is vacuum-sealed and connected to the vacuum chamber, so that the crucible of the vacuum furnace source is disposed in the vacuum chamber.
[0031] According to some embodiments of the present disclosure, the vacuum crucible adjustment mechanism, vacuum furnace source, and vacuum processing system can bring beneficial technical effects. For example, the vacuum crucible adjustment mechanism, vacuum furnace source, and vacuum processing system of some embodiments of the present disclosure adopts a ball head and a ball joint seat to cooperate, so that the crucible has a large degree of freedom in the swing angle. In addition, the adjustment method of multiple adjustment bolts can simply achieve the adjustment of the crucible. For another example, after the furnace source is installed, the vacuum crucible adjustment mechanism, vacuum furnace source, and vacuum processing system of some embodiments of the present disclosure only needs to open the cover, loosen the locking nut, and adjust the tightness of the multiple adjustment bolts. There is no need to dismantle the entire furnace source, which is convenient for adjustment. For another example, the vacuum crucible adjustment mechanism, vacuum furnace source, and vacuum processing system of some embodiments of the present disclosure adopts an elastic component to stabilize the crucible on the crucible seat through elastic force. The deformation of the elastic component when subjected to external force enables the crucible to easily adjust its swing angle through the adjustment bolt, while maintaining a stable fixing effect, making the installation, debugging, and maintenance of the crucible more convenient and quick. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0033] Figure 1 A schematic diagram showing a planar exploded structure of a vacuum crucible adjustment mechanism according to some embodiments of the present disclosure is shown;
[0034] Figure 2 A schematic diagram showing a three-dimensional exploded structure of a vacuum crucible adjustment mechanism according to some embodiments of the present disclosure is shown;
[0035] Figure 3 A schematic diagram of a three-dimensional exploded structure of a vacuum furnace source according to some embodiments of the present disclosure is shown;
[0036] Figure 4 A schematic structural diagram of a vacuum furnace source according to some embodiments of the present disclosure is shown;
[0037] Figure 5 A schematic cross-sectional view of a vacuum furnace source according to some embodiments of the present disclosure is shown;
[0038] Figure 6 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;
[0039] In the above drawings, the reference numerals represent:
[0040] 10000 - vacuum processing system
[0041] 1000 - vacuum furnace source
[0042] 100 - vacuum crucible adjustment mechanism
[0043] 101 - fixed seat
[0044] 1011 - through hole
[0045] 102 - ball joint seat
[0046] 1021 - adjustment hole
[0047] 10211 - adjustment screw hole
[0048] 103 - ball head seat
[0049] 1031 - ball head
[0050] 1032 - ball head mounting seat
[0051] 104 - crucible seat
[0052] 105 - adjustment bolt
[0053] 1051 - adjustment bolt
[0054] 106 - locking nut
[0055] 107 - cover
[0056] 108 - elastic assembly
[0057] 1081 - elastic assembly seat
[0058] 1082 - elastic component
[0059] 109 - umbrella assembly
[0060] 1091 - umbrella top ring
[0061] 1092 - pull rod
[0062] 110 - ball head seat pressing plate
[0063] 200 - crucible
[0064] 300 - heating assembly
[0065] 2000 - vacuum cavity DETAILED DESCRIPTION
[0066] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, not all embodiments.
[0067] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom", "horizontal", "longitudinal" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or distal side refers to the end or side that extends into a vacuum environment (e.g., a vacuum chamber), and the proximal end or proximal side refers to the end or side opposite to the distal end or distal side (e.g., the end or side away from the vacuum chamber, or the end or side within the vacuum chamber close to the vacuum chamber wall, etc.). Alternatively, the end or side close to the driving device is the proximal end or proximal side, and the end or side away from the driving device is the distal end or distal side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.
[0068] Figure 1 A schematic planar exploded structural diagram of a vacuum crucible adjustment mechanism 100 according to some embodiments of the present disclosure is shown. Figure 2 A schematic diagram of a three-dimensional exploded structure of a vacuum crucible adjustment mechanism 100 according to some embodiments of the present disclosure is shown.
[0069] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may include a fixed seat 101, a ball joint seat 102, a ball head seat 103, a crucible seat 104 and a plurality of adjustment bolts 105. The ball joint seat 102 is arranged on the fixed seat 101, and the ball joint seat 102 may include a spherical recess 1022 and a plurality of adjustment holes 1021 arranged around the ball joint seat 102. The ball head seat 103 may include a ball head 1031 and a ball head mounting seat 1032. The ball head 1031 is arranged in the spherical recess 1022 of the ball joint seat 102 and can rotate along the spherical recess 1022 of the ball joint seat 102. The proximal end of the ball head mounting seat 1032 is fixedly connected to the distal end of the ball head 1031. The crucible seat 104 is arranged at the distal end of the ball head mounting seat 1032 for supporting the crucible (for example, Figure 3 、 Figure 4 、 Figure 5、 Figure 6 The plurality of adjusting bolts 105 pass through the plurality of adjusting holes 1021 of the ball joint base 102 respectively, and the distal ends of the plurality of adjusting bolts 105 are connected (e.g., abut, etc.) with the proximal end surface of the crucible base 104, for adjusting the swing angle of the crucible 200.
[0070] Those skilled in the art can understand that, although Figure 2 Four adjusting bolts 105 are shown, but this is only exemplary, and the vacuum crucible adjusting mechanism 100 can also include other numbers of adjusting bolts 105, such as two, three, or five or more adjusting bolts 105, etc. Those skilled in the art can understand that the number of adjusting holes 1021 can be adapted to the number of adjusting bolts 105, so that the plurality of adjusting bolts 105 pass through the plurality of adjusting holes 1021 of the ball joint base 102 respectively.
[0071] In some embodiments of the present disclosure, the ball head 1031 and the ball joint base 102 are matched in this way, and the swing angle of the crucible 200 has a large degree of freedom. Moreover, the plurality of adjusting bolts 105 are adjusted in this way, and the adjustment of the crucible 200 can be easily achieved.
[0072] As shown in Figure 1 and Figure 2 In some embodiments of the present disclosure, the plurality of adjusting bolts 105 can include a plurality of adjusting bolts 1051. The plurality of adjusting holes 1021 can include a plurality of adjusting threaded holes 10211. The fixing base 101 can also include a plurality of through holes 1011. The plurality of adjusting bolts 1051 pass through the plurality of through holes 1011 of the fixing base 101 respectively, and are threadedly connected with the plurality of adjusting threaded holes 10211 of the ball joint base 102 respectively.
[0073] In some embodiments of the present disclosure, the plurality of adjusting bolts 1051 are connected with the plurality of adjusting threaded holes 10211 of the ball joint base 102 respectively, facilitating the adjustment and fixation of the adjusting bolts 1051.
[0074] As shown in Figure 1 and Figure 2 In some embodiments of the present disclosure, the vacuum crucible adjusting mechanism 100 can also include a plurality of locking nuts 106 connected with the plurality of adjusting bolts 105 respectively, for locking the plurality of adjusting bolts 105, so as to fix the swing angle of the crucible (e.g., Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The plurality of adjusting bolts 105 pass through the plurality of adjusting holes 1021 of the ball joint base 102 respectively, and the distal ends of the plurality of adjusting bolts 105 are connected (e.g., abut, etc.) with the proximal end surface of the crucible base 104, for adjusting the swing angle of the crucible 200.
[0075] Those skilled in the art can understand that, although Figure 2Four locking nuts 106 are shown for locking four adjusting bolts 105 respectively, but this is only exemplary. The number of locking nuts 106 can be adjusted according to the number of adjusting bolts 105 to lock multiple adjusting bolts 105 respectively.
[0076] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may further include a plurality of sealing covers 107 . The plurality of sealing covers 107 are used to be respectively and hermetically mounted on the exterior of the plurality of locking nuts 106 to seal the fixing seat 101 .
[0077] In some embodiments of the present disclosure, the cover 107 may include a blind flange.
[0078] like Figure 2 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may include four covers 107 to be sealed and installed on the outside of the four locking nuts 106 respectively. Those skilled in the art will understand that Figure 2 It is merely exemplary, and the number of the sealing covers 107 can be adjusted according to the number of the locking nuts 106 so as to be sealed and installed on the outside of the plurality of locking nuts respectively.
[0079] In some embodiments of the present disclosure, when the furnace source needs to be adjusted after installation, the cover 107 can be opened, the locking nut 106 can be loosened, and the tightness of the multiple adjustment bolts 105 can be adjusted without dismantling the entire vacuum furnace source, making adjustment convenient.
[0080] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may further include an elastic assembly 108. The elastic assembly 108 may include an elastic assembly seat 1081 and a plurality of elastic components 1082. The elastic assembly seat 1081 is disposed on the fixed base 101. The proximal ends of the plurality of elastic components 1082 are connected to the elastic assembly seat 1081, and the distal ends are used to connect to the crucible 200, thereby securing the crucible 200 on the crucible base 104 through elastic force.
[0081] In some embodiments of the present disclosure, the proximal ends of the plurality of elastic components 1082 may be evenly distributed on the elastic component seat 1081 .
[0082] Those skilled in the art will appreciate that the plurality of elastic components 1082 may include two or more elastic components, such as 3-20 elastic components.
[0083] In some embodiments of the present disclosure, the elastic assembly 108 is used to stably fix the crucible 200 on the crucible seat 104 by elastic force. When the plurality of elastic components 1082 are deformed under external force, the crucible (for example, Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The crucible 200 shown) can be easily adjusted in swing angle by the plurality of adjusting bolts 105, while maintaining stable fixing effect, so that the installation, debugging, maintenance, etc. of the crucible (for example, Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The crucible 200 shown) is more convenient and fast.
[0084] As shown in Figure 1 and Figure 2 , in some embodiments of the present disclosure, the vacuum crucible adjusting mechanism 100 can further include an umbrella assembly 109. The umbrella assembly 109 can include an umbrella top ring 1091 and a plurality of pull rods 1092. The umbrella top ring 1091 is used to be sleeved on the distal end of the crucible 200. The distal ends of the plurality of pull rods 1092 are connected with the umbrella top ring 1091, and the proximal ends are respectively used to be connected with the plurality of elastic components 1082, so as to stably fix the crucible (for example, Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The crucible 200 shown) on the crucible seat 104 by elastic force.
[0085] As shown in Figure 1 and Figure 2 , in some embodiments of the present disclosure, the plurality of elastic components 1082 can be grouped in two, for example, the plurality of elastic components 1082 includes 20 elastic components 1082, which are grouped into 10 groups of elastic components, and one pull rod 1092 is connected with one group of elastic components 1082, so as to further improve the stability and balance of the crucible.
[0086] In some embodiments of the present disclosure, the crucible 200 is fixed by the umbrella assembly 109 and the elastic component 1082, which occupies small space, has stable fixing effect, and can maintain flexible adjustment of the crucible 200.
[0087] As shown in Figure 1 and Figure 2 , in some embodiments of the present disclosure, the ball head mounting seat 1032 is circular. The elastic assembly seat 1081 is a circular ring, and the ball head mounting seat 1032 is concentrically arranged in the elastic assembly seat 1081. This design can save space and make the structure of the whole vacuum crucible adjusting mechanism 100 more compact.
[0088] As Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may further include a ball joint pressure plate 110. The ball joint pressure plate 110 is fixed to the ball joint seat 102 and is clearance-matched with the ball 1031 of the ball joint seat 103 to control the axial movement of the ball 1031.
[0089] In some embodiments of the present disclosure, the ball head seat pressure plate 110 can press the ball head 1031 to prevent the axial movement of the ball head 1031 without affecting the free swing of the ball head 1031.
[0090] like Figure 2 As shown, in some embodiments of the present disclosure, the proximal surface of the crucible seat 104 is provided with a plurality of spherical grooves (not shown in the figure). The distal ends of the plurality of adjusting pins 105 are spherical, and the distal ends of the plurality of adjusting pins 105 respectively abut against the plurality of spherical grooves of the crucible seat 104 for adjusting the crucible (for example, Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The crucible 200 is shown in FIG.
[0091] In some embodiments of the present disclosure, the spherical groove design can reduce stress distribution at the bolt connection with the adjustment bolt 105, reduce stress concentration, and improve the service life and reliability of the vacuum crucible adjustment mechanism 100.
[0092] Figure 3 A schematic diagram of a three-dimensional exploded structure of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown. Figure 4 FIG. 1 is a schematic structural diagram of a vacuum furnace source 1000 according to some embodiments of the present disclosure. Figure 5 A cross-sectional schematic diagram of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown.
[0093] like Figure 3 、 Figure 4 and Figure 5 As shown, in some embodiments of the present disclosure, a vacuum furnace source 1000 may include a crucible 200 and a vacuum crucible adjustment mechanism 100 according to any embodiment of the present disclosure. The crucible 200 is used to carry a target. The vacuum crucible adjustment mechanism 100 is used to support the crucible 200 and to adjust the swing angle of the crucible 200.
[0094] like Figure 4 and Figure 5As shown, in some embodiments of the present disclosure, the vacuum furnace source 1000 may further include a heating assembly 300. The vacuum crucible adjustment mechanism 100 is used to support the crucible 200 and to adjust the swing angle of the crucible 200 to ensure that the central axis of the crucible 200 is substantially consistent with or completely coincides with the central axis of the heating assembly 300. Those skilled in the art will appreciate that this is merely exemplary, and the vacuum crucible adjustment mechanism 100 may be used to adjust the swing angle of the crucible 200 according to other purposes and needs.
[0095] Figure 6 FIG. 1 is a schematic structural diagram of a vacuum processing system 10000 according to some embodiments of the present disclosure.
[0096] like Figure 6 As shown, in some embodiments of the present disclosure, a vacuum processing system 10000 may include a vacuum chamber 2000 and a vacuum furnace source 1000 according to any embodiment of the present disclosure. The vacuum furnace source 1000 is vacuum-tightly connected to the vacuum chamber 2000, such that the crucible 200 of the vacuum furnace source 1000 is disposed within the vacuum chamber 2000.
[0097] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.
Claims
1. A vacuum crucible adjustment mechanism, characterized in that: include: Fixed seat; A ball joint seat is arranged on the fixing seat, and the ball joint seat includes a spherical pit and a plurality of adjustment holes arranged on the periphery of the ball joint seat; Ball seat, including: A ball head, the ball head is arranged in the spherical concave pit of the ball joint seat and can rotate along the spherical concave pit of the ball joint seat; a ball head mounting seat, the proximal end of which is fixedly connected to the distal end of the ball head; a crucible seat, disposed at the distal end of the ball head mounting seat, for supporting the crucible; and A plurality of adjusting bolts respectively pass through the plurality of adjusting holes of the ball joint seat, and the distal ends of the plurality of adjusting bolts are connected to the proximal surface of the crucible seat for adjusting the swing angle of the crucible.
2. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: The plurality of adjustment bolts include a plurality of adjustment bolts, the plurality of adjustment holes include a plurality of adjustment threaded holes, the fixing seat further includes a plurality of through holes, the plurality of adjustment bolts respectively pass through the plurality of through holes of the fixing seat, and are respectively threadedly connected with the plurality of adjustment threaded holes of the ball joint seat; and / or The vacuum crucible adjustment mechanism further includes a plurality of locking nuts, which are respectively connected to the plurality of adjustment bolts and are used to lock the plurality of adjustment bolts to fix the swing angle of the crucible.
3. The vacuum crucible adjustment mechanism according to claim 2, characterized in that: It also includes a plurality of sealing covers, which are respectively and sealingly mounted on the exterior of the plurality of locking nuts to seal the fixing seat.
4. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: Also included is an elastic component, the elastic component comprising: an elastic component seat, disposed on the fixing seat; and A plurality of elastic components have proximal ends connected to the elastic component seat and distal ends used to connect to the crucible, so as to secure the crucible on the crucible seat through elastic force.
5. The vacuum crucible adjustment mechanism according to claim 4, characterized in that: Also included is an umbrella assembly, the umbrella assembly comprising: an umbrella top ring, configured to be sleeved on the distal end of the crucible; and A plurality of pull rods have distal ends connected to the umbrella top ring and proximal ends respectively used to connect to the plurality of elastic components, so as to stabilize the crucible on the crucible seat through elastic force.
6. The vacuum crucible adjustment mechanism according to claim 4, characterized in that: The ball head mounting seat is circular; The elastic component seat is annular, and the ball head mounting seat is concentrically arranged in the elastic component seat.
7. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: It also includes a ball head seat pressure plate, which is fixed on the ball joint seat and cooperates with the ball head clearance of the ball head seat to control the axial movement of the ball head.
8. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: The proximal surface of the crucible seat is provided with a plurality of spherical grooves. The distal ends of the plurality of adjusting pins are spherical surfaces, and the distal ends of the plurality of adjusting pins respectively abut against the plurality of spherical grooves of the crucible seat to adjust the swing angle of the crucible.
9. A vacuum furnace source, characterized in that: include: Crucible, used to hold the target; as well as The vacuum crucible adjustment mechanism according to any one of claims 1 to 8 is used to support the crucible and to adjust the swing angle of the crucible.
10. A vacuum processing system, characterized in that: include: Vacuum chamber; as well as The vacuum furnace source according to claim 9, wherein the vacuum furnace source is vacuum-tightly connected to the vacuum chamber, so that the crucible of the vacuum furnace source is arranged in the vacuum chamber.