Stable semiconductor vacuum equipment furnace cover lifting mechanism

Abstract

The utility model discloses a stable semiconductor vacuum equipment furnace cover lifting mechanism which comprises fixed bases arranged symmetrically, the fixed bases are connected with a servo push rod structure, the servo push rod structure is connected with a sliding assembly, the sliding assembly is connected with a floating structure, the floating structure is connected with a carrying block, and the carrying block is connected with a lifting mechanism. The carrying blocks are connected with the furnace cover mechanism, the floating structure comprises symmetrically-arranged L-shaped blocks, the two L-shaped blocks are provided with a circular hole and a square hole respectively, the circular hole blocks are movably connected with circular cone blocks in a clamped mode, the square hole is movably connected with square cone blocks in a clamped mode, and the circular cone blocks and the square cone blocks are connected with the carrying blocks respectively. According to the utility model, the problems that the lifting mechanism for lifting and butting the furnace cover of the semiconductor vacuum equipment is often tedious and unstable in performance, the phenomena of blockage and suffocation possibly occur in the lifting and butting process, and the sealing of the opening and closing of the furnace cover is incomplete and non-uniform are effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment bodies, in particular to a stable semiconductor vacuum equipment furnace cover lifting mechanism. Background Art

[0002] The lifting and docking of the semiconductor vacuum equipment furnace cover is a key step in the operation of semiconductor equipment, involving a variety of technologies and mechanisms. The dust cover opening and closing linkage mechanism is set on the outside of the sealing ring at the edge of the lifting furnace door. The dust cover plate, rotating shaft, dust cover bracket and other components are used to achieve linkage opening and closing, ensuring the dustproofness of the sealing ring and improving production efficiency.

[0003] The existing semiconductor vacuum equipment furnace cover lifting and docking has the following problems: the lifting mechanism of the related semiconductor vacuum equipment furnace cover lifting and docking on the market is often cumbersome and has unstable performance. The lifting and docking process may cause jamming and suffocation, and the furnace cover switch may be incompletely and unevenly sealed.

[0004] Therefore, a stable semiconductor vacuum equipment furnace cover lifting mechanism is needed to solve the above problems. Utility Model Content

[0005] The purpose of the present utility model is to provide a stable semiconductor vacuum equipment furnace cover lifting mechanism to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a stable semiconductor vacuum equipment furnace cover lifting mechanism, comprising a symmetrically arranged fixed base, the fixed base is connected to a servo push rod structure, the servo push rod structure is connected to a sliding assembly, the sliding assembly is connected to a floating structure, the floating structure is connected to a carrying block, and the carrying block is connected to the furnace cover mechanism.

[0007] Furthermore, the floating structure includes symmetrically arranged L-shaped blocks, two of the L-shaped blocks respectively having a circular hole and a square hole, the circular hole block is movably connected to the circular cone block, the square hole is movably connected to the square cone block, and the circular cone block and the square cone block are respectively connected to a carrying block.

[0008] Furthermore, the sliding assembly includes symmetrically arranged sliding blocks, the sliding blocks are connected to the servo push rod structure, and the two sliding blocks are connected to both ends of the connecting plate.

[0009] Furthermore, the servo push rod structure includes a servo motor, which is transmission-connected to a threaded sleeve, the inner ring of the threaded sleeve is threadedly connected to a threaded rod, a threaded hole is opened on the top of the threaded rod, the threaded hole is threadedly connected to a connecting rod, and the connecting rod is threadedly connected to a sliding block.

[0010] Furthermore, a protective sleeve is provided at the transmission connection between the servo motor and the threaded sleeve.

[0011] Furthermore, the servo motor and the threaded sleeve are connected via two bevel gears, one of which is connected to the output end of the servo motor, and the other is connected to the lower end of the threaded sleeve.

[0012] Furthermore, the threaded sleeve is transmission-connected to a linkage structure, and the linkage structure includes a drive motor, the drive motor is transmission-connected to a first gear, the first gear is meshed with a second gear, the second gear is transmission-connected to a middle position of a transmission rod, both ends of the transmission rod are transmission-connected to one of the bevel gears, one of the bevel gears is transmission-connected to another bevel gear, and the other bevel gear is connected to the lower end of the threaded sleeve.

[0013] Compared with the prior art, the beneficial effects of the present invention are: the stable semiconductor vacuum equipment furnace cover lifting mechanism is reasonable and has the following advantages:

[0014] (1) When the servo push rod structure is lifted, the circular hole block and the circular cone block are clamped and lifted, and at the same time, the square hole and the square cone block are clamped and lifted. When the servo push rod structure is lowered, the circular hole block and the circular cone block will be disengaged, and at the same time, the square hole and the square cone block will be disengaged, so that the furnace cover can be freely pressed without restriction, thereby enhancing the sealing and achieving the positioning effect at the same time.

[0015] (2) The transmission between the bevel gears can ensure that the number of rotations of the two threaded rods is consistent, thereby improving the accuracy, and the connecting plate can ensure that the sliding blocks on both sides move up and down in a consistent manner, thereby achieving a synchronous and stable effect, thereby ensuring that the furnace cover will not tilt. The protective cover can prevent the entry of dust and impurities, which may cause transmission problems between the internal bevel gears.

[0016] (3) The linkage effect can be further achieved through the linkage structure. The two threaded sleeves are driven to rotate by a set of drive motors and their linkage structure components, thereby reducing costs and energy consumption. This method can further improve the coordination and consistency of the rotation of the two threaded sleeves and improve the lifting stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 This is a schematic structural diagram of the servo push rod structure in the present utility model;

[0019] Figure 3 This is a schematic structural diagram of the sliding assembly in the present utility model;

[0020] Figure 4This is a structural diagram of the floating structure in the utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the protective cover in the present utility model;

[0022] Figure 6 This is a structural diagram of the linkage structure for changing equipment in the present utility model;

[0023] Figure 7 It is a structural diagram of the linkage structure in the utility model.

[0024] In the figure: 1-fixed base, 2-servo push rod structure, 21-servo motor, 22-threaded sleeve, 221-protective cover, 23-threaded rod, 24-connecting rod, 3-floating structure, 31-L-shaped block, 32-circular cone block, 33-square cone block, 4-sliding assembly, 41-sliding block, 42-connecting plate, 5-carrying block, 6-linkage structure, 61-drive motor, 62-first gear, 63-second gear, 64-transmission rod. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] See also Figure 1-5 The technical solution provided by the utility model is: a stable semiconductor vacuum equipment furnace cover lifting mechanism, including a symmetrically arranged fixed base 1, the fixed base 1 is connected to the servo push rod structure 2, the servo push rod structure 2 is connected to a sliding component 4, the sliding component 4 is connected to the floating structure 3, the floating structure 3 is connected to the carrying block 5, and the carrying block 5 is connected to the furnace cover mechanism.

[0027] The floating structure 3 includes symmetrically arranged L-shaped blocks 31, and the two L-shaped blocks 31 respectively have a circular hole and a square hole. The circular hole block is movably connected to the circular cone block 32, and the square hole is movably connected to the square cone block 33. The circular cone block 32 and the square cone block 33 are respectively connected to a carrying block 5. When the servo push rod structure 2 is lifted, the circular hole block and the circular cone block 32 are clamped and raised, and at the same time, the square hole and the square cone block 33 are clamped and raised. When descending, the circular hole block and the circular cone block 32 will be disengaged, and at the same time, the square hole and the square cone block 33 will also be disengaged, so that the furnace cover can be freely pressed without restriction, thereby enhancing the sealing and achieving the positioning effect at the same time.

[0028] The sliding assembly 4 includes symmetrically arranged sliding blocks 41, which are connected to the servo push rod structure 2. The two sliding blocks 41 are connected to the two ends of the connecting plate 42. The connecting plate 42 can ensure that the sliding blocks 41 on both sides move up and down in a consistent manner, thereby achieving a synchronous and stable effect.

[0029] The servo push rod structure 2 includes a servo motor 21, which is connected to a threaded sleeve 22. The inner ring of the threaded sleeve 22 is threadedly connected to a threaded rod 23. A threaded hole is defined at the top of the threaded rod 23, which is threadedly connected to a connecting rod 24. The connecting rod 24 is threadedly connected to a sliding block 41. The servo motor 21 and the threaded sleeve 22 are connected via two bevel gears. One bevel gear is connected to the output end of the servo motor 21, and the other bevel gear is connected to the lower end of the threaded sleeve 22. The transmission between the bevel gears ensures that the two threaded rods 23 rotate the same number of times, thereby improving accuracy.

[0030] A protective sleeve 221 is provided at the transmission connection between the servo motor 21 and the threaded sleeve 22. The protective sleeve 221 can prevent dust and impurities from entering and causing transmission problems between the internal bevel gears.

[0031] See also Figure 6-7 , further improvement: According to the above two servo motors 21 and the threaded sleeve 22 through the bevel gear transmission, the linkage structure 6 can be optimized, the specific structure is as follows:

[0032] The linkage structure 6 includes a drive motor 61, which is connected to the base 1. The drive motor 61 is in transmission connection with a first gear 62, which meshes with a second gear 63, and the second gear 63 is in transmission connection with the middle position of a transmission rod 64. The ends of the transmission rod 64 are in transmission connection with one of the bevel gears, which is connected to another bevel gear, and the other bevel gear is connected to the lower end of the threaded sleeve 22. The above structure can further achieve a linkage effect, and the rotation of the two threaded sleeves 22 is driven by a set of drive motors 61, thereby reducing costs and energy consumption. This method can also further improve the coordinated rotation of the two threaded sleeves 22 and enhance lifting stability.

[0033] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A stable semiconductor vacuum equipment furnace cover lifting mechanism, comprising a symmetrically arranged fixed base (1), characterized in that: The fixed base (1) is connected to a servo push rod structure (2), the servo push rod structure (2) is connected to a sliding assembly (4), the sliding assembly (4) is connected to a floating structure (3), the floating structure (3) is connected to a carrying block (5), and the carrying block (5) is connected to a furnace cover mechanism.

2. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 1, characterized in that: The floating structure (3) comprises symmetrically arranged L-shaped blocks (31), wherein two L-shaped blocks (31) are respectively provided with a circular hole and a square hole, wherein the circular hole block is movably engaged with the circular cone block (32), and the square hole is movably engaged with the square cone block (33), and the circular cone block (32) and the square cone block (33) are respectively connected to a carrying block (5).

3. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 1, characterized in that: The sliding assembly (4) comprises symmetrically arranged sliding blocks (41), the sliding blocks (41) being connected to the servo push rod structure (2), and the two sliding blocks (41) being connected to both ends of a connecting plate (42).

4. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 1, characterized in that: The servo push rod structure (2) includes a servo motor (21), the servo motor (21) is connected to the threaded sleeve (22) in a transmission manner, the inner ring of the threaded sleeve (22) is threadedly connected to the threaded rod (23), the top of the threaded rod (23) is provided with a threaded hole, the threaded hole is threadedly connected to the connecting rod (24), and the connecting rod (24) is threadedly connected to the sliding block (41).

5. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 4, characterized in that: A protective sleeve (221) is provided at the transmission connection between the servo motor (21) and the threaded sleeve (22).

6. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 5, characterized in that: The servo motor (21) and the threaded sleeve (22) are connected to each other through two bevel gears, one of which is connected to the output end of the servo motor (21) and the other is connected to the lower end of the threaded sleeve (22).

7. The stable semiconductor vacuum equipment furnace cover lifting mechanism according to claim 6, characterized in that: The threaded sleeve (22) is transmission-connected to the linkage structure (6), and the linkage structure (6) includes a drive motor (61), the drive motor (61) is transmission-connected to the first gear (62), the first gear (62) is meshed with the second gear (63), the second gear (63) is transmission-connected to the middle position of the transmission rod (64), the two ends of the transmission rod (64) are transmission-connected to one of the bevel gears, one of the bevel gears is transmission-connected to the other bevel gear, and the other bevel gear is connected to the lower end of the threaded sleeve (22).

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