Standard tool for alignment of coordinate axis of scanning electron microscope

Abstract

The utility model relates to the technical field of electronic imaging detection, and discloses a standard tool for alignment of a coordinate axis of a scanning electron microscope, which comprises a base and a module fixedly arranged on the base, the periphery of the module is sleeved with a fixing device, the module forms four equally divided bearing units around the vertical central axis of the base, and the fixing device is arranged on the base. The four equally-divided bearing units are respectively made of different conductive materials, so that the edges of the four equally-divided bearing units present different colors when the electron microscope is used for imaging, an X axis and a Y axis which are vertically crossed are formed, and the X axis and the Y axis which are vertically crossed form a rectangular plane coordinate system. According to the utility model, the coordinate axis is visually presented through material characteristics, compared with the traditional method of positioning the coordinate axis by other indirect means, the positioning accuracy of the coordinate axis is greatly improved, and the technical problems of low positioning effect precision and poor result repeatability and reproducibility in the prior art can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic imaging detection, and more particularly to a standard tool for aligning the coordinate axes of a scanning electron microscope. Background Art

[0002] A scanning electron microscope (SEM) is a high-resolution microscope that uses a focused electron beam to scan the surface of a sample and obtain information about the surface morphology and composition of the sample through the signals generated by the interaction between the sample and the electron beam.

[0003] Scanning electron microscopes are widely used in many fields such as materials science, physics, chemistry, and biology. They can provide high-resolution images of sample surfaces with resolutions down to the nanometer level. SEM can observe both conductive and non-conductive samples and has relatively low requirements for sample preparation.

[0004] SEM uses thermionic emission or field emission technology to generate an electron beam. The electron beam is focused into a very fine probe through an electromagnetic lens system. The electron beam is then raster-scanned across the sample surface, typically on a line-by-line basis. The electron beam interacts with the sample, generating signals such as secondary electrons, backscattered electrons, and X-rays. These signals are detected by corresponding detectors and converted into electrical signals. After amplification and processing, the electrical signals form an image of the sample surface.

[0005] During scanning electron microscopy (SEM) inspection, samples are typically fixed to a sample stage with conductive adhesive before being loaded into the inspection chamber for observation. For most samples, the precise location of the sample is not of paramount concern; instead, the area of ​​interest can be observed at varying magnifications. However, for samples requiring microscopic size or position measurement, determining their exact location within the entire inspection field of view coordinate system becomes crucial.

[0006] Currently, SEM positioning relies primarily on two methods: one is to maintain the sample stage perpendicular or horizontal to the inspection chamber when loading the sample, and the other is to adjust the inspection position by rotating the imaging system's detector. Both methods rely primarily on subjective judgment to determine position or align with coordinate axes, resulting in low positioning accuracy and consistency, which in turn affects the repeatability and reproducibility of inspection results. Utility Model Content

[0007] In view of this, the utility model provides a standard tool for aligning the coordinate axes of a scanning electron microscope, which can solve the technical problems of low positioning accuracy and poor repeatability and reproducibility of results in the prior art.

[0008] In order to achieve the above object, the utility model provides a standard tool for scanning electron microscope coordinate axis alignment, including base and the module of being fixed on the base, the outer periphery of module is equipped with fixing device, 4 equal division bearing units are formed around the vertical central axis of base to module, 4 equal division bearing units are respectively used different conductive material to constitute, so that the edge of 4 equal division bearing units presents different color when electron microscope imaging, thereby forming vertical intersection X axis and Y axis, vertical intersection X axis and Y axis constitute plane rectangular coordinate system.

[0009] Preferably, the fixing device fixes the four equal division bearing units together, and the upper surface of the fixing device is provided with a plurality of scale lines in the circumferential direction, and the plurality of scale lines are all aligned with the origin of the plane rectangular coordinate system in the radial direction of the module.

[0010] Preferably, the four equal division bearing units are composed of iron, copper, aluminum or aluminum alloy material.

[0011] Preferably, the geometric body of the module is a cylinder, a square, a cuboid or a prism.

[0012] Through the above technical scheme, compared with the prior art, the utility model discloses a standard tool for scanning electron microscope coordinate axis alignment, which has the following beneficial effects:

[0013] 1, the four equal division bearing units divided by the module around the vertical central axis of the base are composed of different conductive materials, and when the electron microscope imaging, the edges of different conductive materials will present different colors, thereby clearly forming vertical intersection X axis and Y axis, and constituting a plane rectangular coordinate system. Compared with the traditional method of positioning the coordinate axis by relying on other indirect means, this method of intuitively presenting the coordinate axis through material properties greatly improves the accuracy of the coordinate axis positioning and effectively solves the problem of low positioning accuracy in the prior art. For example, in the prior art, the coordinate axis positioning is prone to deviation due to the lack of clear visual reference. However, the coordinate axis identified by different colors can accurately determine its position, so that the subsequent operation of the scanning electron microscope can be based on the accurate coordinate system. In addition, since the four bearing units are fixed on the module and divided into a specific layout, as long as the structure of the tool itself is stable and does not change, the corresponding color and fixed coordinate axis form will be presented according to the established material every time the electron microscope imaging. Different operators can obtain a basically consistent plane rectangular coordinate system when using the standard tool to align the coordinate axis at different times, which overcomes the drawbacks of poor repeatability and reproducibility in the prior art and provides a reliable and stable coordinate reference for related experiments, detection and other work.

[0014] 2. The fixing device fixes the four bearing units together, making the structure of the entire module more stable and preventing the bearing units from moving or loosening during use, which may affect the accuracy of the coordinate axis. Without a stable fixing device, once the position of the bearing unit changes, the accuracy of the X-axis and Y-axis formed by it will be greatly reduced. The fixing device ensures that the coordinate axes are in a state of precise correspondence for a long time, further guaranteeing the positioning accuracy.

[0015] 3. Several scale lines are arranged along the circumference of the upper surface of the fixture, and are all aligned with the origin of the plane rectangular coordinate system along the radial direction of the module. These scale lines provide users with additional precise reference. For example, when performing operations that require precise positioning or measurement of specific positions based on the coordinate origin, operators can use the scale lines to accurately determine the positional relationship from the origin, achieving more microscopic and precise operations, further improving the overall positioning accuracy as well as the accuracy and repeatability of the operation results.

[0016] 4. The four supporting units are made of iron, copper, aluminum, or aluminum alloy. These different metal materials have distinct imaging characteristics and color expressions under electron microscope imaging, making it easy to clearly distinguish different coordinate axes. Compared with materials with similar imaging characteristics, this diverse and distinct material selection allows users to accurately distinguish the X and Y axes at a glance, reducing positioning errors caused by unclear identification, and helping to improve positioning accuracy and operational efficiency.

[0017] 5. Modules can be designed into a variety of geometric shapes, including cylinders, cubes, cuboids, or prisms. This diverse selection of shapes allows the standard tool to better adapt to the internal installation spaces and specific usage requirements of scanning electron microscopes of different models and structural characteristics. Whether the microscope's interior is a relatively regular square space or an area more suitable for cylindrical objects, a module of the appropriate shape can be found for installation and use. This ensures the versatility of the standard tool and indirectly guarantees that coordinate axis alignment work can be carried out smoothly in different application scenarios, maintaining high-precision positioning results. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the overall structure of the standard tool for aligning the coordinate axes of a scanning electron microscope according to the present invention;

[0020] Figure 2 The utility model discloses a detection surface structure schematic diagram of standard tool for scanning electron microscope coordinate axis alignment.

[0021] Figure 3 The utility model discloses a top view of fixing device.

[0022] Figure 4 The utility model discloses a schematic diagram when detecting sample for standard tool for scanning electron microscope coordinate axis alignment, wherein A is the top view when detecting sample is placed on the surface of standard tool, and B is the position diagram of detecting sample in XY coordinate axis.

[0023] Mark explanation: 1-fixing device;2-module;3-base;4-Y axis;5-X axis;6-0 degree scale line;7-45 degree scale line;8-detection area image;9-detecting sample;X1-the edge of detecting sample is in the position of X axis direction, Y1-the edge of detecting sample is in the position of Y axis direction. DETAILED DESCRIPTION

[0024] The technical scheme in the embodiments of the utility model will be apparently and completely described in connection with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the range of protection of the utility model.

[0025] Please refer to the drawings of the embodiments in the utility model Figure 1-4 The utility model discloses a kind of standard tools for scanning electron microscope coordinate axis alignment.

[0026] The utility model provides a standard tool for scanning electron microscope coordinate axis alignment, including base 3, module 2 and fixing device 1.

[0027] As Figure 1 Indicated, base 3 is fixed with different size module 2 and nesting in the outer periphery of module 2 fixing device 1, module 2 is formed 4 equal division load cells around the vertical center axis of base 3, 4 equal division load cells are respectively formed with different conductive materials, so that when electron microscope imaging, the edge of 4 equal division load cells presents different colors, to form vertical intersection X axis 5 and Y axis 4, that is, when electron microscope imaging, the upper surface of module 2 constitutes plane rectangular coordinate system.

[0028] Specifically, in the embodiment, as Figure 2As shown, the module 2 is a cylinder, thereby forming four equally divided sector-shaped cylinders. The four equally divided sector-shaped cylinders form four equally divided carrying units around the vertical center axis of the base 3. The components of the four modules 2 are different. When imaging with an electron microscope, the edges of each module 2 will appear in a different color. At this time, the upper surface of the standard tool presents a vertically intersecting X-axis 5 and Y-axis 4, thereby forming a plane rectangular coordinate system.

[0029] like Figure 3 As shown, the fixing device 1 on the periphery of the module 2 can, on the one hand, fix the four equally divided carrying units together to form a stable module 2; on the other hand, scale lines representing different angle values ​​can be marked on the fixing device 1, thereby realizing alignment of different angles or division of the coordinate system.

[0030] Specifically, the upper surface of the fixing device 1 is provided with a number of scale lines along the circumferential direction, such as Figure 3 As shown, the 0 degree scale line 6 and the 45 degree scale line 7 are all aligned with the origin of the plane rectangular coordinate system along the radial direction of the module 2 .

[0031] It should be noted that the material of module 2 can be a single metal, alloy, composite metal or other conductive material. Preferably, the four equally divided bearing units are respectively composed of materials such as iron, copper, aluminum or aluminum alloy. It is sufficient to ensure that the materials of the two adjacent bearing units are different so that the edges of the two can be clearly distinguished during electron microscope imaging. The geometric body of module 2 can be a cylinder, a cube, a cuboid or a prism, etc., as long as it is a geometric body that can form four equally divided bearing units around the vertical center axis of the base 3. Each bearing unit in module 2 can be further divided into more small units to improve the accuracy of the scale line marking on the fixing device 1 and the accuracy of the detection. The number, size, angle, etc. can be adjusted according to the actual test requirements, as long as it can ensure that the module 2 as a whole forms four equally divided bearing units. No specific limitation is made here. The size, angle, etc. of module 2 can be measured by high-precision measuring tools after dismantling, so as to achieve traceability and transmission of measurement values.

[0032] The principle of use of the standard tool for scanning electron microscope coordinate axis alignment of the utility model is:

[0033] Installation of standard tools: 4 equally divided load-bearing units made of four materials, namely iron, copper, aluminum and aluminum alloy, are assembled into a module 2 and fixed on a base 3. A fixing device 1 is sleeved around the periphery of the module 2, and a scale line representing the angle value is set on the upper surface of the fixing device 1.

[0034] Use of the standard tool: Place the standard tool on the sample stage of the scanning electron microscope, then adjust the magnification and focal length of the SEM until the upper surface of the standard tool is clearly visible on the display of the detection imaging system. Through the microscope's sample stage adjustment system or detector adjustment system, fine-tune the vertical and horizontal center line positions displayed in the imaging system so that they accurately coincide with the intersection lines of module 2 (i.e., X-axis 5 and Y-axis 4), thereby completing the coordinate axis alignment of the scanning electron microscope. After completing the coordinate axis alignment, remove the standard tool from the scanning electron microscope, and stick the sample to be inspected to the upper surface of the standard tool. Subsequently, place the standard tool and the sample back on the sample stage of the SEM, and start the detector and imaging system. Then, the position or shape of the inspection sample 9 can be measured on the inspection area image 8 on the upper surface of the standard tool, as shown in FIG. Figure 4 As shown, the size of the sample can be accurately measured by the position coordinates of the sample on the coordinate axis (X1, Y1), where X1 is the position of the edge of the sample in the X-axis direction and Y1 is the position of the edge of the sample in the Y-axis direction.

[0035] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A standard tool for aligning the coordinate axes of a scanning electron microscope, characterized in that: The invention comprises a base (3) and a module (2) fixed on the base (3), wherein the outer periphery of the module (2) is provided with a fixing device (1), and the module (2) forms four equally divided bearing units around the vertical center axis of the base (3), and the four equally divided bearing units are respectively made of different conductive materials, so that when an electron microscope is used for imaging, the edges of the four equally divided bearing units present different colors, thereby forming a vertically intersecting X-axis (5) and Y-axis (4), and the vertically intersecting X-axis (5) and Y-axis (4) constitute a plane rectangular coordinate system.

2. The standard tool for scanning electron microscope coordinate axis alignment according to claim 1, characterized in that: The fixing device (1) fixes the four equally divided bearing units together, and the upper surface of the fixing device (1) is provided with a plurality of scale lines along the circumferential direction, and the plurality of scale lines are all aligned with the origin of the plane rectangular coordinate system along the radial direction of the module (2).

3. The standard tool for scanning electron microscope coordinate axis alignment according to claim 1, characterized in that: The four equally divided bearing units are made of iron, copper, aluminum or aluminum alloy material.

4. The standard tool for scanning electron microscope coordinate axis alignment according to claim 1, characterized in that: The geometric body of the module (2) is a cylinder or a prism.

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