High-throughput sample table for EBSD (electron back scattered diffraction) test

Abstract

The utility model relates to a high-throughput sample table for EBSD (electron back-scattered diffraction) testing, and belongs to the technical field of research and characterization of metal material organization structures in the metallurgical industry. According to the technical scheme, the objective table comprises a base (1) and an objective table body (2), the objective table body (2) is fixed to the base (1), the lower half portion of the objective table body (2) is a cuboid, the four vertical faces of the cuboid are objective table vertical faces (3), the upper half portion of the objective table body (2) is in a rectangular pyramid shape, the inclination angle of the four pyramid faces of the rectangular pyramid shape is 70 degrees, and the four pyramid faces of the rectangular pyramid shape are objective table 70-degree inclined faces (5). The top surface of the rectangular pyramid platform is an objective table horizontal plane (4); the base (1) is a cylinder, and the objective table (2) and the base (1) are fixed into an integrated structure. The device has the advantages that the angle of the sample table does not need to be adjusted repeatedly, a plurality of samples can be measured at the same time, the sample changing process is reduced as much as possible, and the testing efficiency of EBSD is improved.

Description

Technical Field

[0001] The utility model relates to a high-throughput sample stage for EBSD testing, belonging to the technical field of metal material organizational structure research and characterization in the metallurgical industry. Background Art

[0002] In the electron backscatter diffraction (EBSD) testing technology, the conventional operation is to stick the sample on the sample stage, then put it into the vacuum chamber and evacuate it to 2×10 -5 After that, increase the voltage, find the sample position, rotate it to the appropriate angle and adjust the focus for detection.

[0003] When the sample is tilted at 70°, the diffraction angle formed between the incident electron beam and the crystal lattice points on the sample surface is moderate, allowing scattered electrons to return at a larger angle. This increases the intensity of the diffraction signal, improves the resolution and signal-to-noise ratio of the diffraction pattern, and forms a clear diffraction pattern, thereby obtaining more accurate crystal orientation information. However, the currently used sample stage requires manual adjustment of the tilt angle to 70° during EBSD testing. This step is cumbersome and easily missed, affecting subsequent testing.

[0004] In addition, the vacuuming phase after sample placement usually requires a long wait time. Conventional EBSD sample stages are typically designed to accommodate a small number of samples. When testing a large number of samples, frequent sample changes are required, which reduces time utilization and significantly reduces experimental efficiency. Therefore, a high-throughput sample stage for EBSD testing is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a high-throughput sample stage for EBSD testing, which does not require repeated adjustment of the sample stage angle, can measure multiple samples at the same time, minimizes the sample change process, improves the EBSD testing efficiency, and solves the problems existing in the background technology.

[0006] The technical solution of the utility model is:

[0007] A high-throughput sample stage for EBSD testing comprises a base and a stage, wherein the stage is fixed on the base, wherein the lower half of the stage is a rectangular parallelepiped, and the four vertical surfaces of the rectangular parallelepiped are the vertical surfaces of the stage, and the upper half of the stage is a quadrangular pyramid, wherein the inclination angle of the four pyramidal surfaces of the quadrangular pyramid is 70°, the four pyramidal surfaces of the quadrangular pyramid are the 70° inclined surfaces of the stage, and the top surface of the quadrangular pyramid is the horizontal surface of the stage.

[0008] The base is a cylinder, and the loading platform and the base are fixed into an integrated structure.

[0009] A portion of the base is eliminated along its axial direction to form a plane.

[0010] A card slot is provided under the base.

[0011] The card slot under the base matches the card buckle in the EBSD test vacuum chamber.

[0012] Different EBSD samples are respectively pasted on the vertical surface of the stage, the horizontal surface of the stage and the 70° inclined surface of the stage.

[0013] The beneficial effects of the utility model are: multiple samples can be measured simultaneously without repeatedly rotating and adjusting the angle of the sample stage, thus reducing the sample replacement process and improving the EBSD test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is the main view of the utility model;

[0015] Figure 2 This is a top view of the utility model;

[0016] Figure 3 This is a top view of the card slot of the utility model;

[0017] Figure 4 This is the front view of the card slot of the utility model;

[0018] In the figure: base 1, loading platform 2, loading platform vertical surface 3, loading platform horizontal surface 4, loading platform 70° inclined surface 5, slot 6, bolt 7, flat surface 8. DETAILED DESCRIPTION

[0019] The present invention will be further described below with reference to the accompanying drawings and examples.

[0020] Refer to the attached Figure 1-4 A high-throughput sample stage for EBSD testing comprises a base 1 and a stage 2, the stage 2 is fixed on the base 1, the lower half of the stage 2 is a rectangular parallelepiped, the four vertical surfaces of the rectangular parallelepiped are the vertical surfaces 3 of the stage, the upper half of the stage 2 is a quadrangular pyramid, the inclination angle of the four pyramidal surfaces of the quadrangular pyramid is 70°, the four pyramidal surfaces of the quadrangular pyramid are the 70° inclined surface 5 of the stage, and the top surface of the quadrangular pyramid is the horizontal surface 4 of the stage.

[0021] In this embodiment, refer to the attached Figure 1-4 The sample stage comprises a base 1 and a stage 2, wherein:

[0022] The base 1 is a cylinder with a diameter of 4.5 mm and a height of 6 mm. A portion of the side is removed to form a plane 8 of 10 mm×6 mm, which is convenient for determining the direction of the sample stage.

[0023] An arc-shaped slot 6 is provided under the base 1 . The arc-shaped slot 6 has a width of 2 mm and a thickness of 3 mm. The arc-shaped slot 6 is fixed to the base 1 by bolts 7 . The arc-shaped slot 6 matches the buckle in the EBSD test vacuum chamber.

[0024] The lower half of the loading platform 2 is a rectangular parallelepiped, and the four vertical surfaces of the rectangular parallelepiped are the vertical surfaces 3 of the loading platform. The upper half of the loading platform 2 is a quadrangular pyramid, and the inclination angle of the four pyramidal surfaces of the quadrangular pyramid is 70°. The four pyramidal surfaces of the quadrangular pyramid are the 70° inclined surfaces 5 of the loading platform, and the top surface of the quadrangular pyramid is the horizontal surface 4 of the loading platform.

[0025] The base 1 and the stage 2 of the sample stage are both made of aluminum alloy. Compared with the stainless steel used in traditional sample stages, aluminum alloy is light in weight, has good conductivity and is low in cost.

[0026] Samples are glued to different planes according to different needs. Samples with higher height, curved bottom or uneven bottom can be glued to the vertical surface 3 of the stage, ordinary samples can be glued to the horizontal surface 4 of the stage, and samples that need to be done on EBSD can be directly glued to the 70° inclined surface 5 of the stage. After gluing the sample, push the sample stage into the vacuum chamber in the direction of the arc-shaped slot 6, close the chamber door, and then proceed with subsequent experiments.

[0027] This utility model focuses on solving the problem of high-throughput sample loading and testing of multiple samples, saving more time spent on vacuuming and reducing the angle adjustment operation during EBSD testing. The sample stage is low-cost, easy to manufacture, simple to operate, and has strong applicability.

Claims

1. A high-throughput sample stage for EBSD testing, characterized by: The present invention comprises a base (1) and a loading platform (2), wherein the loading platform (2) is fixed on the base (1), wherein the lower half of the loading platform (2) is a rectangular parallelepiped, and the four vertical surfaces of the rectangular parallelepiped are the vertical surfaces (3) of the loading platform, and the upper half of the loading platform (2) is a quadrangular pyramid, wherein the inclination angle of the four pyramidal surfaces of the quadrangular pyramid is 70°, the four pyramidal surfaces of the quadrangular pyramid are the 70° inclined surfaces (5) of the loading platform, and the top surface of the quadrangular pyramid is the horizontal surface (4) of the loading platform.

2. A high-throughput sample stage for EBSD testing according to claim 1, characterized in that: The base (1) is a cylinder, and the loading platform (2) and the base (1) are fixed into an integrated structure.

3. A high-throughput sample stage for EBSD testing according to claim 2, characterized in that: The base (1) is partially removed along its axial direction to form a plane (8).

4. A high-throughput sample stage for EBSD testing according to claim 3, characterized in that: A card slot (6) is provided below the base (1).

5. A high-throughput sample stage for EBSD testing according to claim 4, characterized in that: The card slot (6) below the base (1) matches the card buckle in the EBSD test vacuum chamber.

6. The high-throughput sample stage for EBSD testing according to claim 1, characterized in that: Different EBSD samples are respectively pasted on the stage vertical surface (3), the stage horizontal surface (4) and the stage 70° inclined surface (5).

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