Quartz boat support with protective structure

Abstract

The utility model provides a quartz boat support with a protective structure, which comprises side plates and two middle plates, and the two middle plates are arranged between the two side plates in parallel; side plate supporting legs are arranged on the two sides of the bottom of each side plate respectively, and a supporting groove is formed between the two side plate supporting legs. A protective coating is arranged on at least part of the surface of the side plate at the bracket, and / or a protective sleeve is arranged at the bracket, and the protective sleeve is connected with the side plate. The protective structure (the protective coating and / or the protective sleeve) is additionally arranged at the bracket groove position of the quartz boat bracket, and when the quartz boat bracket is in contact with a silicon carbide paddle, the protective structure can protect the quartz boat bracket, so that the quartz boat bracket is prevented from being damaged due to collision, and the service life of the quartz boat bracket is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz product manufacturing, in particular to a quartz boat support with a protective structure. Background Art

[0002] In the manufacture of crystalline silicon solar cells, the diffusion process involves introducing doping gases into a high-temperature furnace containing silicon wafers to diffuse the dielectric into the wafers, forming a PN junction. A quartz boat is typically used in the diffusion furnace to support the silicon wafers. A quartz boat holder holds the boat, and a silicon carbide paddle enters horizontally into the holder's groove, lifting the holder from the bottom up and placing it into the process chamber. During this process, the paddle can collide with the holder, especially at high speeds. Because silicon carbide (Mohs hardness 9.5) is higher than quartz (Mohs hardness 7), and quartz itself is relatively brittle, this can damage the contact surface of the quartz, seriously affecting the proper function of the holder. Utility Model Content

[0003] The purpose of the utility model is to solve the shortcomings existing in the prior art and to propose a quartz boat support with a protective structure. The protective structure is added to the quartz boat support. When the quartz boat support comes into contact with the silicon carbide paddle, the protective structure can protect the quartz boat support to avoid the quartz boat support from being damaged by bumps and extend the service life of the quartz boat support.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quartz boat support with a protective structure includes side panels and a middle panel, wherein the two middle panels are arranged parallel to each other between the two side panels; side panel support feet are respectively provided on both sides of the bottom of the side panels, and a bracket is formed between the two side panel support feet; a protective structure is provided on the side panels at the bracket.

[0006] Preferably, the protective structure includes a protective coating applied to the surface of the side panel, and the protective coating at least covers a portion of the surface of the side panel at the bracket.

[0007] Preferably, a portion of the surface of the side panel supporting foot at the bracket is also provided with the protective coating.

[0008] Preferably, the protective structure includes a protective cover provided at the bracket, and the protective cover is connected to the side panel.

[0009] Preferably, the protective cover has a base and a first arm and a second arm arranged on both sides of the base. The protective cover is nested in the bottom of the side panel. The structure of the base matches the structure of the side panel and the side panel support foot. The first arm and the second arm are respectively fitted with the corresponding two side surfaces of the side panel.

[0010] Preferably, half-through holes are respectively provided on the two side surfaces of the side panel, and corresponding mounting holes are respectively provided on the first arm and the second arm. The protective cover is fixed to the bottom of the side panel by a first bolt, and the first bolt is passed through the corresponding mounting hole and half-through hole.

[0011] Preferably, a full-through hole is provided at the bottom of the side panel, and the first arm and the second arm are respectively provided with mounting holes. The protective cover is fixed to the bottom of the side panel by a second bolt, and the second bolt passes through the mounting hole on the second arm, the full-through hole and the mounting hole on the first arm in sequence.

[0012] Preferably, two mounting holes are respectively provided on the first support arm and the second support arm.

[0013] Preferably, a support column is provided between the two middle plates, the support column is parallel to the side plates, and auxiliary support feet are respectively provided on both sides of the bottom of the support column, and the auxiliary support feet correspond to the side plate support feet; an auxiliary groove is formed between the two auxiliary support feet, and the auxiliary groove corresponds to the bracket; the protective structure is provided on the support column at the auxiliary groove.

[0014] Preferably, there are multiple support columns, and the multiple support columns are arranged at intervals between the two middle plates, and the auxiliary support feet and the protective structure are provided on both sides of the bottom of at least one support column.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention adds a protective structure at the bracket position of the quartz boat support. When the quartz boat support contacts the silicon carbide paddle, the protective structure can protect the quartz boat support to prevent the quartz boat support from being damaged by bumps, thereby extending the service life of the quartz boat support. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of a quartz boat holder according to some embodiments of the present invention;

[0017] Figure 2 Schematic diagram of the structure of the side panels in some embodiments of the present invention;

[0018] Figure 3 Schematic diagram of the structure of the protective cover in some embodiments of the present invention;

[0019] Figure 4Connection structure schematic view of side plate and protective sleeve in some embodiments of the present utility model;

[0020] Figure 5 For Figure 4 Sectional view in A-A direction;

[0021] Figure 6 Sectional view of side plate and protective sleeve in some other embodiments of the present utility model;

[0022] Figure 7 Structure schematic view of quartz boat holder and silicon carbide paddle in some embodiments of the present utility model;

[0023] Figure 8 Structure schematic view of quartz boat holder in some other embodiments of the present utility model;

[0024] Figure 9 Structure schematic view of side plate and protective sleeve in some other embodiments of the present utility model.

[0025] In the figure, 100, 200-quartz boat holder, 300-silicon carbide paddle, 10-side plate, 11-side plate supporting leg, 12-holder groove, 13-protective coating, 14-semi-through hole, 15-full through hole, 20-intermediate plate, 21-supporting column, 22-assistant supporting leg, 23-assistant groove, 30-protective sleeve, 31-bottom support, 32-first supporting arm, 33-second supporting arm, 34-mounting hole, 40-first bolt, 50-second bolt, 60-third bolt. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the present utility model more clear, the technical scheme of the embodiments of the present utility model will be described clearly and completely below in combination with the drawings of the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all the embodiments. Based on the described embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present utility model. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0027] In the description of the present utility model, if there are terms "first", "second" and the like, they are only used to distinguish the described objects, and do not have any order or technical meaning. Therefore, the objects defined with "first", "second" and the like can include one or more objects explicitly or implicitly. And, "one" or "an" and the like similar words do not represent quantity limitation, but represent the existence of at least one, and "multiple" represents no less than two.

[0028] In the description of the utility model, reference is made to "one embodiment" or "some embodiments" and the like, which means that in one or more embodiments of the utility model, the specific features, structures or characteristics described in connection with the embodiment are included. Therefore, the phrases "in one embodiment", "in some embodiments", "in other some embodiments", "in further some embodiments" and the like appearing in the specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized.

[0029] Please refer to Figure 1 The utility model provides a quartz boat holder 100 with protection structure, it includes side plate 10 and intermediate plate 20, two intermediate plates 20 are parallelly arranged between two side plates 10. The bottom both sides of side plate 10 are equipped with side plate support foot 11 respectively, and the holding groove 12 is formed between two side plate support feet 11. Among them, side plate 10 and intermediate plate 20 can be connected correspondingly by welding, and side plate support foot 11 can be integrally arranged with side plate 10 or connected correspondingly by welding. Side plate 10 can be provided with a structure such as a handle to facilitate the handling of the quartz boat holder 100, and the intermediate plate 20 can be provided with a structure such as a clamping groove and a uniform flow hole according to requirements. The side plate 10 at the holding groove 12 is provided with a protection structure to protect the quartz boat holder 100.

[0030] Refer to Figure 7 In the diffusion process, the silicon carbide paddle 300 is arranged along the length direction of the quartz boat holder 100, and the silicon carbide paddle 300 enters the holding groove 12 and lifts the quartz boat holder 100 from bottom to top. When the quartz boat holder 100 contacts the silicon carbide paddle 300, the protection structure can protect the quartz boat holder 100, avoiding damage to the quartz boat holder 100 due to bumps, thereby prolonging the service life of the quartz boat holder 100.

[0031] In different embodiments, the protection structure can include a protective coating 13 coated on the surface of the side plate 10, and the protective coating 13 covers at least part of the surface of the side plate 10 at the holding groove 12; and / or, the protection structure includes a protection sleeve 30 arranged at the holding groove 12, and the protection sleeve 30 is connected with the side plate 10.

[0032] It should be noted that in different embodiments, the protective coating and the protection sleeve 30 can be provided simultaneously or only one of them can be provided. Refer to Figures 1 to 5 In some preferred embodiments, the protective coating 13 and the protection sleeve 30 are provided simultaneously, that is, the protective coating 13 is first coated on part of the surface of the side plate 10 at the holding groove 12, and then the protection sleeve 30 is arranged at the holding groove 12, and the protection sleeve 30 is connected with the side plate 10. In this way, the protective coating 13 and the protection sleeve 30 form a double protection structure, which can effectively protect the quartz boat holder 100. In some preferred embodiments, the protective coating 13 and the protection sleeve 30 are provided simultaneously, that is, the protective coating 13 is first coated on part of the surface of the side plate 10 at the holding groove 12, and then the protection sleeve 30 is arranged at the holding groove 12, and the protection sleeve 30 is connected with the side plate 10. In this way, the protective coating 13 and the protection sleeve 30 form a double protection structure, which can effectively protect the quartz boat holder 100.

[0033] Referring to Figure 7 , in the diffusion process, the silicon carbide paddle 300 is arranged along the length direction of the quartz boat holder 100, and the silicon carbide paddle 300 enters the holder slot 12 from the lower side of the quartz boat holder 100 and holds up the quartz boat holder 100. When the side plate 10 of the quartz boat holder 100 contacts the silicon carbide paddle 300, the protective coating 13 and / or the protective sleeve 30 can protect the quartz boat holder 100 (mainly the side plate 10 region between the two side plate support feet 11) from being damaged by collision, thereby prolonging the service life of the quartz boat holder 100.

[0034] In some embodiments, the protective coating 13 can be coated with a commercially available high-temperature-resistant and high-strength ceramic coating. The coating process of the protective coating 13 can use spraying, brushing or other processes. The coating area of the protective coating 13 can be reasonably set according to actual needs, but the protective coating 13 should at least cover the contact area of the side plate 10 and the silicon carbide paddle 300. Similarly, the thickness of the protective coating 13 can be reasonably set according to actual needs, for example, in some embodiments, the thickness of the protective coating 13 is set to 0.1mm-3.0mm.

[0035] Further, referring to Figure 2 , part of the surface of the side plate support foot 11 at the holder slot 12 can also be provided with a protective coating 13 to avoid damage to the side plate support foot 11 caused by collision with the silicon carbide paddle 300.

[0036] In application, the specific structure and size of the protective sleeve 30 can be reasonably set according to actual needs. Referring to Figure 3 , in some embodiments, the protective sleeve 30 has a U-shaped structure, and the protective sleeve 30 has a bottom support 31 and first and second branch arms 32, 33 arranged on both sides of the bottom support 31. The protective sleeve 30 is nested at the bottom of the side plate 10, the bottom support 31 is attached to the bottom surface of the side plate 10, and the first and second branch arms 32, 33 are respectively attached to the corresponding two side surfaces of the side plate. The protective sleeve 30 is nested at the bottom of the side plate 10, which can buffer the collision when the silicon carbide paddle 300 holds up the quartz boat holder 100, thereby protecting the quartz boat holder 100 and prolonging the service life of the quartz boat holder 100.

[0037] Further, the protective sleeve 30 and the side plate 10 can be connected by bolts or the like, for example, a half-hole or a full-hole can be provided on the side plate 10, and mounting holes are correspondingly provided on the two side arms of the protective sleeve 30, and the protective sleeve 30 and the side plate 10 are connected and fixed by bolts. Among them, the half-hole means that the half-hole does not penetrate the side plate 10, that is, when drilling holes on both sides of the side plate 10, the holes do not penetrate the side plate 10; while the full-hole penetrates the side plate 10.

[0038] Specifically, referring to Figure 1 ,Figure 4 and Figure 5 In some embodiments, half-through holes 14 are respectively provided on both sides of the side panel 10, and mounting holes 34 are respectively provided on the first arm 32 and the second arm 33. The mounting holes 34 are coaxially arranged with the corresponding half-through holes 14. The protective cover 30 is fixed to the bottom of the side panel 10 by first bolts 40, and the first bolts 40 are passed through the corresponding mounting holes 34 and half-through holes 14. The number of half-through holes 14 and mounting holes 34 can be set accordingly according to actual needs. For example, two half-through holes 14 are provided on each side of the side panel 10, and two mounting holes 34 are respectively provided on the first arm 32 and the second arm 33. During installation, the U-shaped protective cover 30 is first nested in the corresponding position at the bottom of the side panel 10, and then each first bolt 40 is tightened into the corresponding mounting hole 34 and half-through hole 14, thereby fixing the protective cover 30 to the side panel 10.

[0039] Reference Figure 6 In other embodiments, the bottom of the side panel 10 is provided with a full through hole 15 that extends through the side panel 10. The first and second arms 32 and 33 are each provided with a corresponding mounting hole 34 that is coaxially disposed with the corresponding full through hole 15. The protective sleeve 30 is secured to the bottom of the side panel 10 via a second bolt 50 that passes sequentially through the mounting hole in the second arm 33, the corresponding full through hole 45, and the corresponding mounting hole 34 in the first arm 32. The number of full through holes 15 and mounting holes 34 can be adjusted based on actual needs. For example, two full through holes 15 may be provided on the side panel 10, and two mounting holes 34 may be provided on the first and second arms 32 and 33, respectively. During installation, first nest the protective cover 30 in the corresponding position at the bottom of the side panel 10, then pass the second bolt 50 through the mounting hole on the second arm 33, the full-through hole 45 on the side panel 10, and the mounting hole 34 on the first arm 32 in sequence and tighten them, thereby fixing the protective cover 30 on the side panel 10.

[0040] Reference Figure 9 In some other embodiments, the protective cover 30 is nested in the bottom of the side panel 10, and the protective cover 30 covers the bottom surface and part of the side surface of the side panel 10 and the side panel support feet ( Figure 9The protective cover 30 has a bottom bracket 31 and a first arm 32 and a second arm 33 provided on both sides of the bottom bracket 31. The structure of the bottom bracket 31 matches the bottom surface structure of the side panel support foot and the bottom surface structure of the side panel 10. The structures of the first arm 32 and the second arm 33 match the side surface structures of the side panel 10 and the side panel support foot, respectively. The protective cover 30 is fixed to the side panel 10 by a third bolt 60, and the third bolt 60 is provided at intervals on both sides of the bottom of the side panel 10. The protective cover 30 with this structure is easy to process and reduces the possibility of the strength of the quartz material being reduced due to dense openings on the side panel 10. The protective cover 30 can achieve a more effective protection effect, not only reducing the damage caused by the silicon carbide paddle to the side panel 10 and the side panel support foot, but also reducing the damage caused by the side panel support foot during transportation or use in the furnace.

[0041] However, the present invention is not limited thereto. In other embodiments, the protective sleeve 30 may also adopt other reasonable structures and connection methods.

[0042] In some embodiments, the protective cover 30 may be made of a material such as silicon carbide, which has a high structural strength and can better withstand the impact force brought by the silicon carbide paddle 300 .

[0043] Reference Figure 8 , and in some other embodiments, a support column 21 is provided between the two middle plates 20, the support column 21 is parallel to the side plate 10, and auxiliary support feet 22 are respectively provided on both sides of the bottom of the support column 21, the auxiliary support feet 22 correspond to the side plate support feet 11, and an auxiliary groove 23 is formed between the two auxiliary support feet 22, and the auxiliary groove 23 corresponds to the bracket 12. Among them, the support column 21 can be connected between the two middle plates 20 by welding or other processes, and the auxiliary support feet 22 can be integrally formed with the support column 21, or connected to the support column 21 and the middle plate 20 by welding. The support column 21 and the auxiliary support feet 22 can not only enhance the structural strength of the quartz boat support 200, but also increase the contact area between the quartz boat support 200 and the silicon carbide paddle, thereby enhancing the stability of the quartz boat support 200 during the diffusion process.

[0044] A protective structure is also provided on the support column 21 at the auxiliary slot 23. This protective structure can be similar to the protective structure on the side panel 10 at the bracket 12. That is, the protective structure includes a protective coating applied to the surface of the support column 21, the protective coating covering at least a portion of the surface of the support column 21 at the auxiliary slot 23; and / or the protective structure includes a protective sleeve 30 provided at the auxiliary slot 23, the protective sleeve 30 being connected to the support column 21. Furthermore, the connection structure between the protective sleeve 30 and the support column 21 at the auxiliary slot 23 can be the same as the connection structure between the protective sleeve 30 and the side panel 10 at the bracket 12 described above, and will not be further described here.

[0045] It should be noted that, in different embodiments, the protective coating and the protective sleeve 30 may be provided simultaneously on the support column 21 at the auxiliary groove 23, or only one of them may be provided. In some preferred embodiments, a portion of the surface of the support column 21 at the auxiliary groove 23 is coated with the protective coating, and the protective sleeve 30 is provided at the auxiliary groove 23, and the protective sleeve 30 is connected to the support column 21.

[0046] Furthermore, multiple support columns 22 can be provided, spaced apart between the two intermediate plates 20, and auxiliary support legs 23 are provided on both sides of the bottom of at least one support column 22. During the diffusion process, the silicon carbide paddle enters the bracket 12 and the auxiliary groove 23 and lifts the quartz boat support 200 from the bottom up. The multiple protective sleeves 30 protect the quartz boat support 200 (the side plates 10 and the support columns 21) from damage and collisions, thereby extending the service life of the quartz boat support 200.

[0047] To sum up, the utility model provides a quartz boat support with a protective structure, and adds a protective structure (protective coating and / or protective cover) at the bracket position of the quartz boat support. When the quartz boat support contacts the silicon carbide paddle, the protective structure can protect the quartz boat support to prevent the quartz boat support from being damaged by bumps, thereby extending the service life of the quartz boat support.

[0048] The present invention has been described with reference to the above embodiments. However, these embodiments are merely exemplary embodiments of the present invention. It should be noted that the disclosed embodiments do not limit the scope of the present invention. On the contrary, modifications and improvements made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. A quartz boat holder with a protective structure, characterized by: The quartz boat support with a protective structure includes side panels and a middle panel, and the two middle panels are arranged parallel to each other between the two side panels; side panel support feet are respectively provided on both sides of the bottom of the side panels, and a bracket is formed between the two side panel support feet; a protective structure is provided on the side panel at the bracket.

2. The quartz boat holder with a protective structure according to claim 1, wherein: The protective structure includes a protective coating applied to the surface of the side plate, and the protective coating at least covers a portion of the surface of the side plate at the bracket.

3. The quartz boat holder with a protective structure according to claim 2, characterized in that: Part of the surface of the side panel support foot at the bracket is also provided with the protective coating.

4. The quartz boat holder with a protective structure according to claim 1, wherein: The protective structure includes a protective sleeve arranged at the bracket, and the protective sleeve is connected to the side plate.

5. The quartz boat holder with a protective structure according to claim 4, characterized in that: The protective cover has a base and a first arm and a second arm arranged on both sides of the base. The protective cover is nested in the bottom of the side panel. The structure of the base matches the structure of the side panel and the side panel support foot. The first arm and the second arm are respectively fitted with the corresponding two side surfaces of the side panel.

6. The quartz boat holder with a protective structure according to claim 5, characterized in that: The two side surfaces of the side plate are respectively provided with semi-through holes, and the first arm and the second arm are respectively provided with mounting holes. The protective cover is fixed to the bottom of the side plate by a first bolt, and the first bolt is passed through the corresponding mounting hole and semi-through hole.

7. The quartz boat holder with a protective structure according to claim 5, wherein: A full-through hole is provided at the bottom of the side panel, and the first arm and the second arm are respectively provided with mounting holes. The protective cover is fixed to the bottom of the side panel by a second bolt, and the second bolt passes through the mounting hole on the second arm, the full-through hole and the mounting hole on the first arm in sequence.

8. The quartz boat holder with a protective structure according to claim 6 or 7, characterized in that: Two mounting holes are respectively provided on the first supporting arm and the second supporting arm.

9. The quartz boat holder with a protective structure according to claim 1, wherein: A support column is arranged between the two middle plates, and the support column is parallel to the side plates. Auxiliary support feet are respectively provided on both sides of the bottom of the support column, and the auxiliary support feet correspond to the side plate support feet; an auxiliary groove is formed between the two auxiliary support feet, and the auxiliary groove corresponds to the bracket; the protective structure is provided on the support column at the auxiliary groove.

10. The quartz boat holder with a protective structure according to claim 9, characterized in that: There are multiple support columns, which are spaced apart between the two middle plates, and the auxiliary support legs and the protective structure are provided on both sides of the bottom of at least one support column.

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