Automatic suction head replacing device

Abstract

The utility model discloses an automatic sucker replacing device, which comprises a first direction and a second direction which are perpendicular to each other, and comprises a fixed plate, a carrier plate, a movable plate, a translation driving part and a lifting driving part, the carrier plate is arranged on one side of the fixed plate in the first direction, and the carrier plate is fixedly connected with the fixed plate; a plurality of containing grooves are formed in the side, away from the fixed plate, of the carrier plate, first through holes are formed in the containing grooves, the movable plate is arranged on the side, away from the fixed plate, of the carrier plate, a plurality of second through holes are formed in the movable plate and correspond to the containing grooves, and each second through hole comprises a first hole part and a second hole part in the second direction; the size of the second hole part is smaller than that of the containing groove, the translation driving part can drive the movable plate to move relative to the carrier plate in the second direction, and the lifting driving part can drive the fixed plate to move in the first direction. The automatic suction head replacing device is simple in structure and capable of meeting the requirement for multi-chip and multi-variety chip mounting scenes and improving the production efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor chip mounting technical field especially, relates to a kind of automatic replacement suction head device. BACKGROUND

[0002] In the field of semiconductor chip mounting, the trend of multi-chip and multi-variety is becoming an important development direction of the industry. It can effectively improve the integration of the whole system, better performance and lower cost. Different chips require different specifications of suction heads for adsorption and transfer. Single nozzle will also wear out after a certain number of uses and needs to be replaced regularly. However, manual switching or replacing the nozzle is very inefficient and the replacement process is complicated, which can seriously affect the pace and stability of the equipment. Therefore, it is necessary to make new innovations. SUMMARY

[0003] The utility model is to solve at least one of the deficiencies in the prior art, and proposes an automatic replacement suction head device that can automatically replace and switch suction heads with a linear rotary actuator. The specific scheme is as follows:

[0004] An automatic replacement suction head device includes a first direction and a second direction perpendicular to each other. The automatic replacement suction head device includes a fixed plate, a carrier plate, a moving plate, a translation driving component, and a lifting driving component. The carrier plate is arranged on one side of the fixed plate in the first direction, and the carrier plate is fixedly connected to the fixed plate. The side of the carrier plate facing away from the fixed plate is provided with a plurality of accommodation grooves, and the accommodation grooves are provided with first through holes. The moving plate is arranged on the side of the carrier plate facing away from the fixed plate, and the moving plate is provided with a plurality of second through holes. The second through holes are correspondingly arranged with the accommodation grooves, and the second through holes include a first hole part and a second hole part along the second direction. The size of the second hole part is smaller than the size of the accommodation groove. The translation driving component can drive the moving plate to move relative to the carrier plate in the second direction. The lifting driving component can drive the fixed plate to move in the first direction.

[0005] Further, it further includes a position detection device, and the position detection device is configured to detect the position of the moving plate in the second direction.

[0006] Further, the position detection device includes a first position sensor and a second position sensor, and the first position sensor and the second position sensor are respectively arranged on the carrier plate. The first position sensor and the second position sensor are spaced apart along the second direction, and the moving plate is driven to move between the first position sensor and the second position sensor.

[0007] Furthermore, the translation driving component is a cylinder, the body of the translation driving component is arranged on a side of the fixing plate away from the carrier plate, and the axial direction of the driving shaft of the translation driving component is consistent with the second direction;

[0008] A connecting block is provided at one end of the movable plate, and the connecting block extends toward the driving shaft and is connected to the driving shaft.

[0009] Furthermore, it also includes a base and a driving block, the lifting driving component is a cylinder, the body of the lifting driving component is arranged on the base, the driving shaft of the lifting driving component faces upward, and the driving block is arranged on the driving shaft and connected to the fixed plate.

[0010] Furthermore, a third through hole is provided on the fixing plate corresponding to the first through hole.

[0011] Furthermore, a positioning pin structure is provided at the bottom of the accommodating groove.

[0012] Compared with the prior art, the automatic tip replacement device of the present application has at least one or more of the following beneficial effects:

[0013] The automatic tip replacement device of the present application is provided with multiple accommodating slots that can accommodate multiple or more types of tips, which can meet the needs of multi-chip and multi-variety patch scenarios; a positioning pin structure is provided in the accommodating slots, which can play a positioning role, making the placement of the tip more accurate; it cooperates with the linear rotary actuator to realize automatic replacement and switching of the tip, which can improve the overall rhythm of equipment operation and improve production efficiency, while also avoiding the instability caused by excessive manual intervention; its structure is simple, and the tip connection has no electrical components, which is easy to maintain. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic diagram of the three-dimensional structure of the automatic tip replacement device provided in an embodiment of the present application;

[0015] Figure 2 This is a schematic diagram of the main structure of the automatic tip replacement device provided in an embodiment of the present application;

[0016] Figure 3 A schematic top view of the automatic tip replacement device provided in an embodiment of the present application;

[0017] Figure 4 A schematic side view of the automatic tip replacement device provided in an embodiment of the present application;

[0018] Figure 5 A schematic diagram of a three-dimensional exploded structure of the automatic tip replacement device provided in an embodiment of the present application;

[0019] Figure 6 This is a schematic diagram of the exploded structure of the automatic tip replacement device provided in an embodiment of the present application;

[0020] Figure 7 A schematic diagram of the partial structure of the suction head provided in an embodiment of the present application when it is installed in conjunction with the actuator shaft of the linear rotary actuator.

[0021] Among them, 1-fixed plate, 11-third through hole, 2-carrying plate, 21-accommodating groove, 22-first through hole, 23-positioning pin structure, 3-movable plate, 31-second through hole, 311-first hole portion, 312-second hole portion, 32-connecting block, 4-translational drive component, 41-clamp, 5-lifting drive component, 51-drive block, 52-base, 6-detection device, 61-first position sensor, 62-second position sensor, 7-cross roller guide, 8-suction head, 9-linear rotary actuator, 10-magnetic block, X-first direction, Y-second direction. DETAILED DESCRIPTION

[0022] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the specific implementation method, structure, characteristics and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0023] Example

[0024] This embodiment provides an automatic tip replacement device, which includes a first direction X and a second direction Y perpendicular to each other. Figure 1 As shown. The automatic suction head replacement device includes a fixed plate 1, a carrier plate 2, a movable plate 3, a translation drive component 4 and a lifting drive component 5. The carrier plate 2 is arranged on one side of the fixed plate 1 in the first direction X, and the carrier plate 2 is fixedly connected to the fixed plate 1. The carrier plate 2 is provided with a plurality of accommodating grooves 21 on the side away from the fixed plate 1, such as Figure 1 and Figure 3 There are two rows of 6 plates in total, and the first through hole 22 is provided in the receiving groove 21. The movable plate 3 is movably provided on the side of the carrier plate 2 away from the fixed plate 1. There are many ways to connect the movable plate 2 with the carrier plate 2, such as Figure 4The cross roller guide 7 shown in the figure may also adopt other guide rail structures such as linear guide rails. The movable plate 3 is provided with a plurality of second through holes 31, and the second through holes 31 are arranged corresponding to the accommodating groove 21. The second through holes 31 include a first hole portion 311 and a second hole portion 312 along the second direction Y, and the size of the second hole portion 312 is smaller than the size of the accommodating groove 21. The translation drive component 4 is capable of driving the movable plate 3 to move relative to the carrier plate 2 in the second direction Y, and the lifting drive component 5 is capable of driving the fixed plate 1 to move in the first direction X.

[0025] The automatic tip replacement device further comprises a base 52, and the lifting drive component 5 is arranged on the base 52. Figures 1 to 6 As shown. Preferably, the lifting drive component 5 is a pneumatic cylinder, the main body of which is fixedly mounted on the base 52, with the drive shaft of the lifting drive component 5 facing upward. A drive block 51 is fixedly mounted on the end of the drive shaft, and the drive block 51 is fixedly connected to the fixed plate 1. In a specific implementation, the base 52 can be fixed to a specific location, such as a device rack.

[0026] The automatic suction head replacement device further comprises a position detection device 6, which is configured to detect the position of the movable plate 3 in the second direction Y. Figure 1 or Figure 5 In the preferred embodiment schematically shown in FIG, the position detection device 6 includes a first position sensor 61 and a second position sensor 62, each of which is disposed on the carrier plate 2. The first position sensor 61 and the second position sensor 62 are spaced apart along the second direction Y, and the movable plate 3 is driven to move between the first position sensor 61 and the second position sensor 62. The position sensor is preferably a proximity sensor. When the first position sensor 61 or the second position sensor 62 detects the movable plate 3, it sends a detection signal to the device control unit. Upon receiving the detection signal, the control unit controls the translation drive component 4 to stop operating.

[0027] The translation drive component 4 is preferably a cylinder. The body of the translation drive component 4 is fixedly arranged on the side of the fixed plate 1 away from the carrier plate 2. The axial direction of the drive shaft of the translation drive component 4 is consistent with the second direction Y. A connecting block 32 is provided at one end of the movable plate 3, and the connecting block 32 extends in the direction of the drive shaft and is connected to the drive shaft. For example Figure 2 、 Figures 4 to 6In the preferred embodiment schematically shown in the figure, a clamping member 41 is sleeved on the driving shaft, and a clamping slot is provided on the clamping member 41. The end of the connecting block 32 is clamped in the clamping slot. Then, when the translation driving component 4 is working, the driving shaft moves along the second direction Y to drive the movable plate 3 to move relative to the carrier plate 2 in the second direction Y.

[0028] In a further embodiment, the fixing plate 1 is further provided with a third through hole 11 corresponding to the first through hole 22. Figure 5 As shown, it can be used for the suction head 8 to pass through to avoid interference.

[0029] In a further embodiment, a positioning pin structure 23 may be further provided at the bottom of the accommodating groove 21. Figure 1 or Figure 3 As shown, it can cooperate with the positioning notch on the suction head 8, making the placement of the suction head 8 more accurate. A magnetic block 10 is embedded in the upper end of the suction head 8, and a magnetic block 10 is also embedded in the end of the actuator shaft of the linear rotary actuator 9. The suction head 8 is installed in conjunction with the actuator shaft by magnetic attraction.

[0030] Next, combine Figure 1 The working process of the automatic tip replacement device of this embodiment is briefly described as follows:

[0031] When the suction head 8 needs to be replaced, the linear rotary actuator 9 moves to the top of the corresponding empty accommodating groove 21 on the carrier plate 2, and then the lifting drive component 5 drives the fixed plate 1 to move the suction head 8 upward until the suction head 8 carried by the linear rotary actuator 9 is placed in the empty accommodating groove 21; then the translation drive component 4 drives the movable plate 3 to move along the second direction Y, that is, to the direction of the first hole portion 311; when the first position sensor 61 detects the movable plate 3, the translation drive component 4 stops working. At this time, the second hole portion 312 is opposite to the first through hole 22. Since the size of the second hole portion 312 is smaller than the flange size of the outer peripheral wall of the suction head 8, the movable plate 3 will clamp the suction head 8;

[0032] Then, the lifting drive component 5 drives the fixed plate 1 to move downward until the suction head 8 carried by the linear rotary actuator 9 is separated from the linear rotary actuator 9;

[0033] Then, the linear rotary actuator 9 moves to above the suction head 8 to be replaced on the carrier plate 2, and the translation drive component 4 drives the movable plate 3 to move along the second direction Y, that is, toward the direction of the second hole portion 312, until the second position sensor 62 detects the movable plate 3, and the translation drive component 4 stops working.

[0034] Afterwards, the lifting drive component 5 drives the fixing plate 1 to move the suction head 8 upward to complete the replacement of the suction head 8.

[0035] Compared with the prior art, the automatic tip replacement device of the present application has at least one or more of the following beneficial effects:

[0036] The automatic tip replacement device of the present application is provided with multiple accommodating grooves 21 that can accommodate multiple or more numbers of tips 8, which can meet the needs of multi-chip and multi-variety patch scenarios; a positioning pin structure 23 is provided in the accommodating groove 21, which can play a positioning role, so that the placement position of the tip 8 is more accurate; it cooperates with the linear rotary actuator 9 to realize automatic replacement and switching of the tip 8, which can improve the overall rhythm of equipment operation and improve production efficiency, while also avoiding the instability caused by excessive manual intervention; its structure is simple, and the tip 8 is connected without electrical components, which is easy to maintain.

[0037] As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion of elements other than the listed elements and may also include additional elements not specifically listed.

[0038] In this document, directional terms such as front, back, top, and bottom are defined based on the positions of components in the accompanying drawings and relative to each other, and are intended only for clarity and convenience in describing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed in this application.

[0039] In the absence of conflict, the above embodiments and features in the embodiments may be combined with each other.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An automatic tip replacement device, characterized in that: The invention comprises a first direction (X) and a second direction (Y) perpendicular to each other, and the automatic suction head replacement device comprises a fixed plate (1), a carrier plate (2), a movable plate (3), a translation drive component (4), and a lifting drive component (5). The carrier plate (2) is arranged on one side of the fixed plate (1) in the first direction (X), the carrier plate (2) is fixedly connected to the fixed plate (1), a plurality of accommodating grooves (21) are arranged on the side of the carrier plate (2) away from the fixed plate (1), and a first through hole (22) is arranged in the accommodating groove (21), and the movable plate (3) is arranged on the side of the carrier plate (2) away from the fixed plate ( 1), a plurality of second through holes (31) are provided on the movable plate (3), the second through holes (31) are arranged corresponding to the accommodating groove (21), the second through holes (31) include a first hole portion (311) and a second hole portion (312) along the second direction (Y), the size of the second hole portion (312) is smaller than the size of the accommodating groove (21), the translation driving component (4) can drive the movable plate (3) to move relative to the carrier plate (2) in the second direction (Y), and the lifting driving component (5) can drive the fixed plate (1) to move in the first direction (X).

2. The automatic tip replacement device according to claim 1, characterized in that: It also includes a position detection device (6), which is configured to detect the position of the movable plate (3) in the second direction (Y).

3. The automatic tip replacement device according to claim 2, characterized in that: The position detection device (6) includes a first position sensor (61) and a second position sensor (62), wherein the first position sensor (61) and the second position sensor (62) are respectively arranged on the carrier plate (2), the first position sensor (61) and the second position sensor (62) are spaced apart along the second direction (Y), and the movable plate (3) is driven to move between the first position sensor (61) and the second position sensor (62).

4. The automatic tip replacement device according to claim 1, characterized in that: The translation drive component (4) is a cylinder, the body of the translation drive component (4) is arranged on a side of the fixed plate (1) away from the carrier plate (2), and the axial direction of the driving shaft of the translation drive component (4) is consistent with the second direction (Y); A connecting block (32) is provided at one end of the movable plate (3), and the connecting block (32) extends in the direction of the driving shaft and is connected to the driving shaft.

5. The automatic tip replacement device according to claim 1, characterized in that: It also includes a base (52) and a driving block (51), the lifting driving component (5) is a cylinder, the body of the lifting driving component (5) is arranged on the base (52), the driving shaft of the lifting driving component (5) faces upward, and the driving block (51) is arranged on the driving shaft and connected to the fixed plate (1).

6. The automatic tip replacement device according to claim 1, characterized in that: The fixing plate (1) is provided with a third through hole (11) corresponding to the first through hole (22).

7. The automatic tip replacement device according to claim 1, characterized in that: A positioning pin structure (23) is provided at the bottom of the accommodating groove (21).

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