Furnace bottom heat preservation structure for single crystal furnace

Abstract

The utility model discloses a furnace bottom thermal insulation structure for a single crystal furnace, which comprises a furnace bottom fixed felt and a lower thermal insulation cylinder which are positioned above a furnace bottom plate, a protective plate soft felt and a protective plate pressing sheet are arranged above the furnace bottom fixed felt positioned inside the lower thermal insulation cylinder, and the outer peripheral surface of the protective plate pressing sheet is connected with an annular pressing plate arranged on the inner peripheral surface of the lower thermal insulation cylinder. Gap heat insulation in the furnace bottom is reduced, and the bottom heat preservation performance of the single crystal furnace is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to monocrystal silicon manufacturing technical field, concretely relates to a furnace bottom heat preservation structure for single crystal furnace. BACKGROUND

[0002] Single crystal furnace is the key equipment for producing semiconductor materials such as monocrystal silicon, and its working principle is to melt silicon material by heating, then slowly pull crystal at constant temperature, and form monocrystal silicon. In this process, the thermal field distribution in the furnace has a crucial influence on the quality of monocrystal silicon. Therefore, the heat preservation performance of single crystal furnace is one of the key factors affecting production efficiency and crystal quality.

[0003] In the traditional furnace bottom structure, there may be heat leakage gaps between the furnace bottom and the furnace body, which will cause a large amount of heat loss, thereby increasing energy consumption; and there is the problem of poor heat preservation effect, which increases the production cost. UTILITY MODEL CONTENT

[0004] The utility model discloses a furnace bottom heat preservation structure for single crystal furnace, which blocks the gap between the heat preservation material below the disc pressing sheet and the lower heat preservation cylinder, and blocks the gap between the disc pressing sheet and the electrode sheath through hole two, reduces the gap heat insulation in the furnace bottom, improves the heat preservation performance of the single crystal furnace bottom, and solves the problems existing in the prior art.

[0005] To solve the above technical problems, the utility model adopts the following scheme:

[0006] A furnace bottom heat preservation structure for single crystal furnace, which comprises a furnace bottom felt located above a furnace bottom plate and a lower heat preservation cylinder, a disc soft felt and a disc pressing sheet are arranged above the furnace bottom felt in the lower heat preservation cylinder, and the outer peripheral surface of the disc pressing sheet is connected with an annular pressing plate arranged on the inner peripheral surface of the lower heat preservation cylinder.

[0007] Further, the bottom of the outer peripheral surface of the disc pressing sheet extends horizontally to form an assembly platform, the bottom surface of the annular pressing plate is in contact with the surface of the assembly platform, and the surface of the annular pressing plate is in the same horizontal line as the surface of the disc pressing sheet.

[0008] Further, the thickness of the annular pressing plate is 8mm, and the width is 25mm.

[0009] Further, a through hole one and a through hole two symmetrical to each other are arranged at the center of the disc pressing sheet, a supporting rod sheath is arranged in the through hole one, and an electrode sheath with a bottom end in contact with the furnace bottom plate is arranged in the through hole two.

[0010] Further, the through hole one is a constant-diameter hole, and the through hole two is a stepped hole.

[0011] Further, the top of the supporting rod sheath extends horizontally to form an extension part, and the supporting rod sheath is arranged on the surface of the heat preservation plate through the extension part.

[0012] Further, the upper hole diameter of the second through hole is smaller than the lower hole diameter.

[0013] Further, the top of the electrode sheath extends horizontally to form a protrusion, and the protrusion is arranged in the lower hole of the second through hole.

[0014] Further, the outer periphery of the lower heat preservation cylinder is provided with external heat preservation soft felt.

[0015] The utility model has the beneficial effect that:

[0016] In the utility model, the heat preservation plate is assembled with the annular pressing plate, the protrusion of the electrode sheath is crimped in the lower hole of the second through hole of the heat preservation plate, the bottom end of the extended electrode sheath contacts the furnace bottom plate, the heat leakage route of the extended heat preservation plate is connected with the lower heat preservation cylinder and the electrode sheath respectively, and the contact part of the heat preservation soft felt and the lower heat preservation cylinder is sealed through the assembly of the annular pressing plate and the heat preservation plate, so that the heat preservation effect of the heat preservation soft felt is improved, and the heat preservation soft felt is prevented from being corroded. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the utility model Figure 1 It is a local enlarged structural schematic diagram of the circle A;

[0019] Figure 3 It is a three-dimensional structural schematic diagram of the heat preservation plate of the utility model.

[0020] The figure mark: 1 - lower heat preservation cylinder, 10 - annular pressing plate, 2 - furnace bottom plate, 3 - heat preservation plate, 30 - assembly platform, 31 - first through hole, 32 - second through hole, 4 - electrode sheath, 40 - protrusion, 5 - supporting rod sheath, 50 - extension part, 6 - furnace bottom felt, 7 - heat preservation soft felt, 8 - external heat preservation soft felt. DETAILED DESCRIPTION

[0021] The utility model will be further explained in detail in connection with the embodiment and the drawings, but the embodiment of the utility model is not limited to this.

[0022] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "internal", "external", "front", "back", "top", "bottom" and so on indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawing, or the orientation or positional relationship of the utility model product when it is usually placed, only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0023] In the description of the utility model, it also needs to explain that, unless otherwise specified and limited, the terms "set", "open", "install", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0024] Embodiment 1

[0025] The utility model discloses an embodiment 1 for a single crystal furnace bottom heat preservation structure, including the furnace bottom felt 6 of furnace bottom disc 2 top and lower heat preservation cylinder 1, the furnace bottom felt 6 top inside lower heat preservation cylinder 1 is equipped with the soft felt 7 of guard plate and the guard plate pressing sheet 3, the outer periphery of guard plate pressing sheet 3 is connected with the annular pressing plate 10 of the inner periphery of lower heat preservation cylinder 1.

[0026] In the application, by changing the assembly relationship between the guard plate pressing sheet 3 and the lower heat preservation cylinder 1, the heat preservation material in the furnace, i.e. the soft felt 7 of the guard plate and part of the furnace bottom felt 6 located at the bottom of the furnace, is blocked, the assembly gap is reduced, the heat leakage path is prolonged, and the heat preservation performance of the furnace bottom is improved.

[0027] Among them, referring to Figures 1 to 3 The inner periphery of the lower heat preservation cylinder 1 is provided with an annular pressing plate 10, the annular pressing plate 10 is assembled with the outer periphery of the guard plate pressing sheet 3, and the bottom outer periphery of the guard plate pressing sheet 3 is provided with a heat insulation effect, which improves and reduces the downward transmission of heat in the furnace, thereby strengthening the heat preservation of the furnace bottom and reducing the thermal corrosion of the soft felt 7 of the guard plate, thereby prolonging the service life of the soft felt 7 of the guard plate.

[0028] In some preferred embodiments, the bottom of the outer periphery of the guard plate pressing sheet 3 extends horizontally to form an assembly platform 30, the bottom surface of the annular pressing plate 10 is in contact with the surface of the assembly platform 30, and the surface of the annular pressing plate 10 is in the same horizontal line as the surface of the guard plate pressing sheet 3.

[0029] Specifically, the assembly relationship between the annular pressing plate 10 and the guard plate pressing piece 3 is that the annular pressing plate 10 is above the assembly platform 30 and in contact with each other. The outer periphery of the original guard plate pressing piece 3 is changed to be in direct contact with the inner wall of the lower heat preservation cylinder 1, thereby prolonging the heat leakage route of the guard plate pressing piece 3 and the lower heat preservation cylinder 1. Meanwhile, the contact part of the guard plate soft felt 7 and the lower heat preservation cylinder 1 is sealed by the assembly of the annular pressing plate 10 and the guard plate pressing piece 3, thereby improving the heat preservation effect of the guard plate soft felt 7 and preventing the guard plate soft felt 7 from being corroded.

[0030] In some preferred embodiments, the thickness of the annular pressing plate 10 is 8 mm, and the width is 25 mm. Meanwhile, the outer diameter of the top outer periphery of the guard plate pressing piece 3 is consistent with the inner diameter of the annular pressing plate 10, thereby reducing the heat leakage gap between the two.

[0031] In some preferred embodiments, the center of the guard plate pressing piece 3 is provided with a through hole one 31 and a through hole two 32 which are symmetrical to each other. The through hole one 31 is provided with a supporting rod sheath 5, and the through hole two 32 is provided with an electrode sheath 4 which is in contact with the furnace bottom plate 2 at the bottom end. The through hole one 31 is a constant diameter hole, and the through hole two 32 is a stepped hole. The top of the supporting rod sheath 5 extends horizontally to form an extension 50, and the supporting rod sheath 5 is arranged on the surface of the guard plate pressing piece 3 through the extension 50.

[0032] Specifically, the assembly of the supporting rod sheath 5 in the guard plate pressing piece 3 is mainly that the main body of the supporting rod sheath 5 penetrates the through hole one 31, and the extension 50 at the upper part of the supporting rod sheath 5 is arranged on the surface of the guard plate pressing piece 3. The extension 50 is equivalent to an annular plate structure, which seals the connection between the supporting rod sheath 5 and the guard plate pressing piece 3, thereby further reducing the heat leakage gap and improving the heat preservation effect.

[0033] Meanwhile, the bottom end of the electrode sheath 4 is in contact with the furnace bottom plate 2, thereby reducing the gap between the two and achieving the isolation of the hot air flow and preventing the corrosion of the guard plate soft felt 7 caused by the contact between the hot air flow and the guard plate soft felt 7.

[0034] In some preferred embodiments, the upper hole diameter of the through hole two 32 is smaller than the lower hole diameter. The top of the electrode sheath 4 extends horizontally to form a protrusion 40, and the protrusion 40 is located in the lower hole of the through hole two 32. The top of the electrode sheath 4 is located in the lower hole of the through hole two 32, so that the protrusion 40 at the top end of the electrode sheath 4 is crimped in the through hole two 32 and is mainly crimped by the upper hole of the through hole two 32, thereby reducing the heat leakage.

[0035] In some preferred embodiments, the outer periphery of the lower heat preservation cylinder 1 is provided with an external heat preservation soft felt 8. The external heat preservation soft felt 8 is used to provide the heat preservation performance of the entire furnace structure.

[0036] The utility model discloses a working principle is: the assembly of the guard disc wafer 3 and annular pressing plate 10, the protruding 40 of electrode sheath 4 is pressed in the lower hole of guard disc wafer 3 through -hole no. 2 32, and the bottom end of elongated electrode sheath 4 contacts with furnace bottom disc 2, and the heat leakage route of elongated guard disc wafer 3 is respectively with lower heat -preserving cylinder 1, electrode sheath 4, and the contact part of guard disc soft felt 7 and lower heat -preserving cylinder 1 is sealed through the assembly of annular pressing plate 10 and guard disc wafer 3, thereby improving the heat -preserving effect of guard disc soft felt 7, prevent guard disc soft felt 7 from being corroded.

[0037] The above is only the preferred embodiment of the utility model, and does not limit the utility model in any form, and according to the technical essence of the utility model, any simple modification, equivalent replacement and improvement of the above embodiment still belong to the protection scope of the utility model technical scheme within the spirit and principle of the utility model.

Claims

1. A furnace bottom insulation structure for a single crystal furnace, characterized in that: The invention comprises a furnace bottom solid felt (6) and a lower heat-insulating tube (1) located above the furnace bottom plate (2); a disk-protecting soft felt (7) and a disk-protecting pressing sheet (3) are provided above the furnace bottom solid felt (6) located inside the lower heat-insulating tube (1); the outer peripheral surface of the disk-protecting pressing sheet (3) is connected to the annular pressing plate (10) provided on the inner peripheral surface of the lower heat-insulating tube (1); the top of the electrode sheath (4) extends horizontally to form a protrusion (40); and the protrusion (40) is located in the lower hole of the second through hole (32).

2. The bottom insulation structure for a single crystal furnace according to claim 1, characterized in that: The bottom of the outer peripheral surface of the disc protection pressing piece (3) extends horizontally to form an assembly platform (30), the bottom surface of the annular pressing plate (10) contacts the surface of the assembly platform (30), and the surface of the annular pressing plate (10) and the surface of the disc protection pressing piece (3) are on the same horizontal line.

3. The bottom insulation structure for a single crystal furnace according to claim 2, characterized in that: The annular pressing plate (10) has a thickness of 8 mm and a width of 25 mm.

4. The bottom insulation structure for a single crystal furnace according to claim 2, characterized in that: A through hole 1 (31) and a through hole 2 (32) symmetrical to each other are provided at the center of the protective disc pressing plate (3); a supporting rod sheath (5) is provided in the through hole 1 (31); and an electrode sheath (4) whose bottom end contacts the furnace bottom plate (2) is provided in the through hole 2 (32).

5. The single crystal furnace bottom insulation structure according to claim 4, characterized in that: The through hole 1 (31) is a hole of equal diameter, and the through hole 2 (32) is a stepped hole.

6. The single crystal furnace bottom insulation structure according to claim 4, characterized in that: The top of the support rod sheath (5) extends horizontally to form an extension portion (50), and the support rod sheath (5) is placed on the surface of the disc protection pressing sheet (3) through the extension portion (50).

7. The single crystal furnace bottom insulation structure according to claim 4, characterized in that: The upper aperture of the second through hole (32) is smaller than the lower aperture.

8. The single crystal furnace bottom insulation structure according to claim 4, characterized in that: The outer periphery of the lower heat-insulating cylinder (1) is provided with an external heat-insulating soft felt (8).

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