Welding equipment for inner container of PFA (Polyfluoroalkoxy) filter

Abstract

The utility model relates to the technical field of hot melting welding, and discloses a PFA filter inner container welding device which comprises a rack, a shell clamping tool, an end cover clamping tool and a hot plate assembly, the shell clamping tool, the end cover clamping tool and the hot plate assembly are arranged on the rack, and the shell clamping tool is used for bearing and clamping a shell to be welded and making the shell in a flat state; the two end cover clamping tools are located on the two sides of the shell clamping tool, and the end cover clamping tools are used for clamping an end cover to be welded and driving the end cover to be close to or away from the end of the shell; the hot plate assemblies are used for heating the ends and the end covers of the shell, and the two hot plate assemblies are arranged between the two end cover clamping tools and the shell clamping tool in a one-to-one mode and can enter and retreat from the positions between the end covers and the shell. The shell clamping tool and the end cover clamping tool of the PFA filter inner container welding equipment are simple, the requirement for cleanliness of the welding environment is met, the positioning precision is guaranteed, the movable hot plate assembly is matched, the tool can be rapidly moved away after heating is completed, and the welding forming requirement is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to hot melting welding technical field especially relates to a PFA filter inner container welding equipment. BACKGROUND

[0002] In the semiconductor manufacturing process, dust-free environment is crucial, in order to ensure the cleanliness in the production process, various filtering equipment becomes an indispensable component. Among them, PFA filter inner container (i. e. PFA filter core) with its unique performance and wide application, becomes an important filtering technology in semiconductor manufacturing.

[0003] PFA filter inner container is made of high purity PFA material shell, neutral column, end cover and filter membrane by high temperature hot melting technology welding, and the filtering capacity of the inner container is the core of the filter, so the high temperature hot melting welding technology for welding shell, neutral column, end cover and filter membrane is particularly important.

[0004] The conventional hot melting welding equipment on the market all use contact heating or lamp heating to weld PFA filter inner container, which has the disadvantages of low cleanliness, poor heat source temperature uniformity control, etc., resulting in poor mechanical properties, low chemical cleanliness and low yield of the final product. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a PFA filter inner container welding equipment to solve the problems in the above background technology.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme:

[0007] A PFA filter inner container welding equipment is used for welding and fixing the shell of the filter inner container and the end cover at both ends, and the PFA filter inner container welding equipment comprises a rack, a shell clamping tool, an end cover clamping tool and a hot plate assembly arranged on the rack, wherein:

[0008] The shell clamping tool is used for bearing and clamping the shell to be welded, and makes the shell in a flat state;

[0009] The two end cover clamping tools are located on the two sides of the shell clamping tool, and the end cover clamping tool is used for clamping the end cover to be welded and driving the end cover to approach or move away from the end of the shell;

[0010] The hot plate assembly is used for heating the end of the shell and the end cover, and two hot plate assemblies are arranged between the two end cover clamping tools and the shell clamping tool, and can enter and exit between the end cover and the shell.

[0011] As an optional scheme, the shell clamping tool comprises a bearing table, a pressing block and a first driving member, wherein:

[0012] The carrying table is used for placing the shell, one side of the carrying table is provided with a stand, and the stand is provided with vertically arranged first guide rails;

[0013] The pressing block is located directly above the carrying table, and the pressing block is provided with a sliding block that slides in cooperation with the first guide rails;

[0014] The driving end of the first driving member is connected to the pressing block, and the first driving member is used for driving the pressing block to descend or ascend along the first guide rails, so that the pressing block cooperates with the carrying table to compress or release the shell.

[0015] As an optional solution, the end cap clamping tool comprises a feeding seat, a pneumatic suction cup and a second driving member, wherein:

[0016] The two sides of the shell clamping tool are provided with horizontally arranged second guide rails, and the feeding seats of the two end cap clamping tools are respectively slidably arranged on the second guide rails on the two sides;

[0017] The pneumatic suction cup is rotationally arranged on the surface of the feeding seat that faces the shell clamping tool, and the pneumatic suction cup is used for positioning and adsorbing the end cap;

[0018] The driving end of the second driving member is connected to the feeding seat, and the second driving member is used for driving the feeding seat to reciprocate along the second guide rails.

[0019] As an optional solution, the interior of the pneumatic suction cup is provided with a liquid cooling circuit to reduce the deformation of the non-heat melting surface of the end cap during the heating process.

[0020] As an optional solution, the hot plate assembly comprises a translation seat, a third driving member and a mounting bracket, wherein:

[0021] The third guide rails extending outwardly are arranged between the shell clamping tool and the end cap clamping tool, and the translation seat is slidably arranged on the third guide rails;

[0022] The driving end of the third driving member is connected to the translation seat, and the third driving member is used for driving the translation seat to move into or out of the space between the shell clamping tool and the end cap clamping tool along the third guide rails;

[0023] The mounting bracket is mounted on the translation seat, and the mounting bracket is provided with two rotating heating plates, one rotating heating plate performs non-contact far infrared heat radiation on the end of the shell, and the other rotating heating plate performs non-contact far infrared heat radiation on the end cap.

[0024] As an optional solution, the fourth guide rails perpendicular to the third guide rails are further arranged on the translation seat, the mounting bracket is slidably arranged on the fourth guide rails and driven by a fourth driving member to reciprocate along the fourth guide rails, so that the distance between the hot plate assembly and the shell clamping tool and the distance between the hot plate assembly and the end cap clamping tool are both adjustable.

[0025] As an alternative, limit switches are arranged at both ends of the stroke of the translation seat on the third guide rail, when the translation seat triggers one limit switch, the hot plate assembly, the shell clamping tool and the end cover clamping tool are located on the same axis, and when the translation seat triggers the other limit switch, the hot plate assembly is completely withdrawn from between the shell clamping tool and the end cover clamping tool.

[0026] As an alternative, a cover is arranged on the rack, which covers the shell clamping tool, the end cover clamping tool and the hot plate assembly, and a lifting observation window is arranged on the cover corresponding to the position of the shell clamping tool.

[0027] The beneficial effects of the utility model are as follows:

[0028] The PFA filter inner container welding equipment has high automation degree, high control and operation precision and stable structure, the shell clamping tool and the end cover clamping tool are simple, the welding environment cleanliness requirement is met, the positioning precision is ensured, the movable hot plate assembly is further matched, the hot plate assembly can be quickly removed after heating, the end cover and the shell are not affected by welding and fixing, and the welding forming needs are met. BRIEF DESCRIPTION OF DRAWINGS

[0029] Fig. 1 is the appearance drawing of the PFA filter inner container welding equipment provided by the utility model embodiment;

[0030] Fig. 2 is the internal structure front view of the PFA filter inner container welding equipment provided by the utility model embodiment;

[0031] Fig. 3 is the internal structure plan view of the PFA filter inner container welding equipment provided by the utility model embodiment.

[0032] IN THE DRAWINGS:

[0033] 1, rack; 11, cover; 12, lifting observation window;

[0034] 2, shell clamping tool; 21, bearing table; 22, pressing block; 23, first driving part; 24, stand column; 25, first guide rail;

[0035] 3, end cover clamping tool; 31, feeding seat; 32, pneumatic suction cup; 33, second driving part; 34, second guide rail;

[0036] 4, hot plate assembly; 41, translation seat; 42, mounting frame; 43, third guide rail; 44, rotary heating plate; 45, fourth guide rail; 46, limit switch. DETAILED DESCRIPTION

[0037] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are merely intended to explain the utility model and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description, not all the structures.

[0038] In the description of the utility model, unless explicitly defined and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0039] In the utility model, unless explicitly defined and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] In the description of the embodiment, the terms "up", "down", "left", "right" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, therefore it cannot be understood as a limitation of the utility model.

[0041] In addition, the terms "first", "second" and the like are only used to distinguish in description and have no special meaning.

[0042] Please refer to Figs. 1 to 3 As shown in the drawings, the embodiment provides a PFA filter inner container welding equipment for welding and fixing the shell of the filter inner container and the end cover at both ends, which comprises a rack 1, a shell clamping tool 2, an end cover clamping tool 3 and a hot plate assembly 4 arranged on the rack 1, wherein:

[0043] The shell clamping tool 2 is used for carrying and clamping the shell to be welded, and makes the shell in a flat state;

[0044] Two end cover clamping tools 3 are located on both sides of the shell clamping tool 2, and the end cover clamping tool 3 is used for clamping the end cover to be welded and driving the end cover to move close to or away from the end of the shell.

[0045] The hot plate assembly 4 is used for heating the end of the shell and the end cover, and two hot plate assemblies 4 are arranged between the two end cover clamping tools 3 and the shell clamping tool 2 and can enter and exit between the end cover and the shell.

[0046] Therefore, the PFA filter inner container welding equipment has high automation degree, high control and operation precision, and stable structure, the shell clamping tool 2 and the end cover clamping tool 3 are simple, meet the clean degree requirement of the welding environment, ensure the positioning precision, and cooperate with the movable hot plate assembly 4, so that the hot plate assembly 4 can be quickly moved away after heating, does not affect the welding and fixing of the end cover and the shell, and meets the welding forming requirement.

[0047] Optionally, the shell clamping tool 2 comprises a bearing table 21, a pressing block 22 and a first driving member 23, wherein:

[0048] The bearing table 21 is used for placing the shell, and one side of the bearing table 21 is provided with a stand column 24, and the stand column 24 is provided with a vertical first guide rail 25;

[0049] The pressing block 22 is located directly above the bearing table 21, and the pressing block 22 is provided with a sliding block which is matched with the first guide rail 25 for sliding;

[0050] The driving end of the first driving member 23 is connected with the pressing block 22, and the first driving member 23 is used for driving the pressing block 22 to descend or ascend along the first guide rail 25, so that the pressing block 22 cooperates with the bearing table 21 to press the shell or release the shell.

[0051] The first driving member 23 is preferably a pneumatic cylinder, which reliably fixes the shell by pushing the pressing block 22 to press the shell downward, but is not limited to the pneumatic cylinder, and can also be other pressure applying mechanisms.

[0052] In addition, the bearing table 21 should have a limiting part matched with the shell to ensure the position precision of the shell, and the contact part of the pressing block 22 and the shell is preferably made of stainless steel to improve the cleanliness of the production process.

[0053] Optionally, the end cover clamping tool 3 comprises a feeding seat 31, a pneumatic suction cup 32 and a second driving member 33, wherein:

[0054] The two sides of the shell clamping tool 2 are provided with horizontally arranged second guide rails 34, and the feeding seats 31 of the two end cover clamping tools 3 are respectively slidably arranged on the second guide rails 34 on the two sides;

[0055] The pneumatic suction cup 32 is rotationally arranged on the surface of the feeding seat 31 which faces the shell clamping tool 2, and the pneumatic suction cup 32 is used for positioning and adsorbing the end cover.

[0056] The driving end of the second driving member 33 is connected to the feeding seat 31, and the second driving member 33 is used to drive the feeding seat 31 to reciprocate along the second guide rail 34.

[0057] Specifically, the pneumatic suction cup 32 fixes the end cover in a stepped positioning and negative pressure adsorption manner, and the contact part of the pneumatic suction cup 32 and the end cover is also preferably made of stainless steel; the second driving member 33 preferably adopts a fully-closed high-precision servo module for feeding control, and the movement process is clean and dust-free, so that the distance of the end cover to the hot plate assembly 4 can be accurately controlled, the welding port heating is uniform, the welding requirements are met, the welding depth can be accurately controlled, and the size requirements after the shell welding are met.

[0058] Further, the pneumatic suction cup 32 is internally provided with a liquid cooling circuit, so as to reduce the deformation of the non-hot melting surface of the end cover during the heating process, improve the welding quality, reduce the temperature of the end cover clamping tool 3 when heated, and avoid scalding the operator when replacing the end cover.

[0059] Optionally, the hot plate assembly 4 comprises a translation seat 41, a third driving member, and a mounting rack 42, wherein:

[0060] The third guide rail 43 extending outward is arranged between the shell clamping tool 2 and the end cover clamping tool 3, and the translation seat 41 is slidingly arranged on the third guide rail 43;

[0061] The driving end of the third driving member is connected to the translation seat 41, and the third driving member is used to drive the translation seat 41 to move into or out of the space between the shell clamping tool 2 and the end cover clamping tool 3 along the third guide rail 43;

[0062] The mounting rack 42 is mounted on the translation seat 41, and two rotating heating plates 44 are arranged on the mounting rack 42, one of which performs non-contact far-infrared heat radiation on the end of the shell, and the other of which performs non-contact far-infrared heat radiation on the end cover.

[0063] Therefore, the two independently movable hot plate assemblies 4 serve as heat sources and are controlled by the third driving member to quickly switch in and out, reduce heat dissipation, and accurately control the distance of the shell to the rotating heating plate 44, so as to ensure that the welding port is accurately controllable and meets the welding requirements.

[0064] In particular, the third driving member can adopt a linear driver such as a motor screw nut pair to meet the driving requirements of moving in and out; the rotating heating plate 44 adopts a non-contact far-infrared heat radiation form to ensure that the welding port is not polluted, and adopts a rotating heating mode to ensure that the welding port is uniformly heated; and the two rotating heating plates 44 can independently control the temperature to meet different welding temperature requirements.

[0065] Further, the translation seat 41 is further provided with a fourth guide rail 45 arranged perpendicularly to the third guide rail 43, and the mounting frame 42 is slidingly arranged on the fourth guide rail 45 and is driven by a fourth driving member to reciprocate along the fourth guide rail 45, so that the distance between the hot plate assembly 4 and the shell clamping tool 2 and the distance between the hot plate assembly 4 and the end cover clamping tool 3 can be adjusted.

[0066] In particular, the fourth driving member can also be a linear driver such as a motor screw-nut pair, which adjusts the distance between the rotating hot plate 44 and the end face of the shell, ensures uniform heating of the welding opening, and meets the welding requirements.

[0067] Further, the translation seat 41 is further provided with a fourth guide rail 45 arranged perpendicularly to the third guide rail 43, and the mounting frame 42 is slidingly arranged on the fourth guide rail 45 and is driven by a fourth driving member to reciprocate along the fourth guide rail 45, so that the distance between the hot plate assembly 4 and the shell clamping tool 2 and the distance between the hot plate assembly 4 and the end cover clamping tool 3 can be adjusted.

[0068] Optionally, the rack 1 is provided with a cover 11 in which the shell clamping tool 2, the end cover clamping tool 3 and the hot plate assembly 4 are covered, and the cover 11 is provided with a lifting observation window 12 corresponding to the position of the shell clamping tool 2.

[0069] The rack 1 is made of a cast base and a square steel tube by welding processing, and is subjected to multiple tempering treatment and multiple precision machining processes, so as to improve the precision and stability of the base, and ensure that the equipment can work stably in a constant-temperature clean workshop for a long time.

[0070] In addition, based on the full-automatic control system, the operator only needs to select the welding process after clamping the shell of the PFA filter inner container, and the full-automatic welding process can be realized without personnel intervention, and the welding efficiency is greatly improved.

[0071] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not a limitation on the embodiments of the utility model. For ordinary skilled persons in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the utility model. Here, it is unnecessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement made within the spirit and principle of the utility model shall be included in the protection scope of the utility model claim.

Claims

1. PFA filter liner welding equipment, used to weld the outer shell of the filter liner to the end caps at both ends, characterized by: The PFA filter liner welding equipment comprises a frame (1), and a shell clamping tool (2), an end cover clamping tool (3), and a hot plate assembly (4) arranged on the frame (1), wherein: The shell clamping tool (2) is used to carry and clamp the shell to be welded, and to keep the shell in a flat state; The two end cover clamping fixtures (3) are located on both sides of the shell clamping fixture (2), and the end cover clamping fixtures (3) are used to clamp the end cover to be welded and drive the end cover to approach or move away from the end of the shell; The hot plate assembly (4) is used to heat the end of the shell and the end cover. The two hot plate assemblies (4) are arranged one by one between the two end cover clamping fixtures (3) and the shell clamping fixture (2), and can enter and exit between the end cover and the shell.

2. The PFA filter liner welding equipment according to claim 1, characterized in that: The housing clamping fixture (2) comprises a bearing platform (21), a pressing block (22) and a first driving member (23), wherein: The carrying platform (21) is used to place the shell, and a column (24) is provided on one side of the carrying platform (21), and a first guide rail (25) arranged vertically is provided on the column (24); The pressing block (22) is located directly above the bearing platform (21), and a slider is provided on the pressing block (22) for sliding in cooperation with the first guide rail (25); The driving end of the first driving member (23) is connected to the pressing block (22), and the first driving member (23) is used to drive the pressing block (22) to descend or ascend along the first guide rail (25), so that the pressing block (22) cooperates with the supporting platform (21) to press the shell or release the shell.

3. The PFA filter liner welding equipment according to claim 1, characterized in that: The end cap clamping fixture (3) comprises a feed seat (31), a pneumatic suction cup (32) and a second driving member (33), wherein: Horizontally arranged second guide rails (34) are provided on both sides of the shell clamping fixture (2), and the feed seats (31) of the two end cover clamping fixtures (3) are respectively slidably provided on the second guide rails (34) on both sides; The pneumatic suction cup (32) is rotatably arranged on the surface of the feed seat (31) facing the shell clamping fixture (2), and the pneumatic suction cup (32) is used to position and absorb the end cover; The driving end of the second driving member (33) is connected to the feed seat (31), and the second driving member (33) is used to drive the feed seat (31) to move back and forth along the second guide rail (34).

4. The PFA filter liner welding equipment according to claim 3, characterized in that: A liquid cooling circuit is provided inside the pneumatic suction cup (32) to reduce deformation of the non-thermal melting surface of the end cover during heating.

5. The PFA filter liner welding equipment according to claim 1, characterized in that: The hot plate assembly (4) comprises a translation seat (41), a third driving member and a mounting frame (42), wherein: A third guide rail (43) extending outward is provided between the shell clamping fixture (2) and the end cover clamping fixture (3), and the translation seat (41) is slidably provided on the third guide rail (43); The driving end of the third driving member is connected to the translation seat (41), and the third driving member is used to drive the translation seat (41) to move along the third guide rail (43) into or out of between the housing clamping fixture (2) and the end cover clamping fixture (3); The mounting frame (42) is mounted on the translation seat (41), and two rotating heating plates (44) are provided on the mounting frame (42), one of the rotating heating plates (44) performs non-contact far-infrared heat radiation on the end of the shell, and the other rotating heating plate (44) performs non-contact far-infrared heat radiation on the end cover.

6. The PFA filter liner welding equipment according to claim 5, characterized in that: The translation seat (41) is further provided with a fourth guide rail (45) arranged perpendicularly to the third guide rail (43); the mounting frame (42) is slidably arranged on the fourth guide rail (45) and driven by a fourth driving member to reciprocate along the fourth guide rail (45), so that the spacing between the hot plate assembly (4) and the shell clamping fixture (2) and the spacing between the hot plate assembly (4) and the end cover clamping fixture (3) are adjustable.

7. The PFA filter liner welding equipment according to claim 5, characterized in that: The translation seat (41) is provided with limit switches (46) at both ends of the travel on the third guide rail (43). When the translation seat (41) triggers one limit switch (46), the hot plate assembly (4), the shell clamping fixture (2) and the end cover clamping fixture (3) are all located on the same axis; when the translation seat (41) triggers another limit switch (46), the hot plate assembly (4) completely withdraws from between the shell clamping fixture (2) and the end cover clamping fixture (3).

8. The PFA filter liner welding equipment according to claim 1, characterized in that: The frame (1) is provided with a cover (11) in which the shell clamping tool (2), the end cover clamping tool (3) and the hot plate assembly (4) are all covered. A lifting observation window (12) is provided on the cover (11) at a position corresponding to the shell clamping tool (2).

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