Photomask box carrying device and semiconductor equipment

Abstract

The utility model provides a photomask box carrying device and semiconductor equipment. The photomask box carrying device is provided with a carrying box and a plurality of carrying seats for carrying photomask boxes; a storage space is arranged in the carrying box, and the carrying base is installed in the storage space. At least one carrying seat is provided with a position-adjustable limiting piece, and the limiting piece is used for limiting the photomask box carried on the carrying seat; an opening communicated with the storage space is formed in the side face of the object carrying box and used for storing and taking the photomask box. According to the carrying box, the multiple photomask boxes can be carried at a time, the production efficiency is improved, abrasion of the photomask boxes can be reduced, in the carrying process, the limiting pieces can limit the photomask boxes on the carrying bases, and the stability of the photomask boxes is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor equipment especially relates to a reticle box carrying device and semiconductor equipment. BACKGROUND

[0002] In the highly precise and technology-intensive semiconductor manufacturing industry, the reticle as a key production tool, its management, storage and handling process has a crucial influence on the quality and production efficiency of the final product. The reticle SIMF box as an important tool for storing reticles is used to ensure the cleanliness, safety and accuracy of the reticle.

[0003] In the actual semiconductor production process, many semiconductor factories need to borrow reticles across the factory, mainly relying on manual handling of reticle boxes storing reticles. Although this handling method is simple and direct, the traditional reticle box can only carry one to two reticles. This low-capacity handling method is not enough when faced with large-scale production demands, limiting the flexibility and efficiency of the production line. In addition, long-term manual handling of reticle boxes for reticle transportation not only causes wear and tear to the reticle box itself, but also may cause damage to the reticle in the reticle box due to improper operation, vibration, collision and other factors, affecting the service life of the reticle and negatively affecting the quality and yield of semiconductor products.

[0004] Therefore, there is an urgent need for a reticle box carrying device and semiconductor equipment to improve the above problems. SUMMARY

[0005] The utility model aims at providing a reticle box carrying device and semiconductor equipment, which can improve the carrying efficiency while ensuring the stability of the reticle box during carrying.

[0006] In a first aspect, the utility model provides a reticle box carrying device, including a carrier box and a plurality of seats for carrying reticle boxes.

[0007] The carrier box has a built-in storage space, and the seats are installed in the storage space.

[0008] At least one seat is provided with a position-adjustable limiting piece, which is used to limit the reticle box carried on the seat.

[0009] The side of the carrier box is provided with an opening communicating with the storage space, and the opening is used for storing and taking the reticle box.

[0010] The utility model discloses a beneficial effect for: through set up the carrier and a plurality of be used for bearing mask box carrier seat, the carrier is built -in storage space, carrier seat is installed in the storage space, at least one carrier seat is installed with the position adjustable stop piece, the stop piece is used for the mask box that bears on the carrier seat is positioned, the side of carrier is equipped with the opening that is linked with the storage space, the opening is used for the access of mask box. The carrier can not only realize the carrying of a plurality of mask boxes once, improve production efficiency, can also reduce the wear and tear of mask box, and in the carrying process, the stop piece can position the mask box on the carrier, guarantee the stability of mask box.

[0011] Optionally, the stop piece is provided with a plurality of and is distributed around the mask box for forming the enclosure space. Its beneficial effect lies in that the stability of the mask box during carrying can be further ensured.

[0012] Optionally, the stop piece includes an enclosure baffle, and the bottom of the enclosure baffle is rotatably connected to the upper surface of the carrier. Its beneficial effect lies in that the rotatable enclosure baffle can not only protect the mask box during carrying, but also facilitate the taking and placing of the mask box from the carrier.

[0013] Optionally, the utility model further includes a driving mechanism, a driving switch and a slide rail arranged in the storage space.

[0014] The slide rail is arranged on the side wall of the carrier.

[0015] The carrier is installed on the slide rail and is slidable relative to the slide rail.

[0016] The driving switch is arranged on one side of the carrier close to the opening.

[0017] The driving mechanism is used to drive the carrier to slide along the slide rail, so as to drive the mask box on the carrier to pass through the opening and access the mask box. Its beneficial effect lies in that the slide rail can improve the stability of the carrier during movement, and the driving switch on the carrier facilitates the individual operation of the corresponding carrier by the driving mechanism.

[0018] Optionally, the utility model further includes a sensor for detecting the position of the mask box.

[0019] The sensor is arranged on the upper surface of the carrier. Its beneficial effect lies in that the sensor arranged on the upper surface of the carrier can not only detect whether the mask box exists on the carrier, but also detect whether the mask box is offset, so as to ensure the stability during carrying.

[0020] Optionally, the utility model further includes an outward opening door and a control switch.

[0021] The outer opening door is arranged at the opening of the object carrying box and is movable relative to the object carrying box.

[0022] The control switch is used for controlling the movement of the outer opening door to control the opening and closing of the opening. The beneficial effect is that the outer opening door and the control switch are arranged to improve safety and facilitate user operation.

[0023] Optionally, the display screen for displaying the parameter information of the reticle box in the storage space is further included.

[0024] The display screen is installed on the side of the carrier seat close to the outer opening door, and the outer opening door is made of transparent material; or the display screen is installed on the outer opening door. The beneficial effect is that the display screen for displaying the parameter information of the reticle box is arranged to facilitate understanding of the number, ID, state and type of the reticle box and the reticle in the object carrying box.

[0025] Optionally, the material of the reticle box carrying device is an anti-static material; and / or the top of the object carrying box is provided with a crown block hook. The beneficial effect is that the reticle box carrying device made of an anti-static material can prevent damage caused by static accumulation during transportation and storage, and the crown block hook is added to the top of the object carrying box, which is conducive to the transmission of the reticle box carrying device by the crown block system and improves the carrying efficiency.

[0026] In the second aspect, the utility model also provides a semiconductor equipment, including the reticle box carrying device and the crown block system of any possible combination;

[0027] The crown block system is used for transmitting the reticle box carrying device.

[0028] The beneficial effects of the above-mentioned second aspect can be referred to the description of the first aspect. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a top view of the internal structure of the reticle box carrying device provided by the embodiment of the utility model;

[0030] Figure 2 It is a front view of the reticle box carrying device provided by the embodiment of the utility model;

[0031] Figure 3 It is a side view of the internal structure of the reticle box carrying device provided by the embodiment of the utility model;

[0032] Figure 4 It is a schematic view of the reticle box carrying device when the door is closed provided by the embodiment of the utility model;

[0033] Figure 5 It is a schematic view of the reticle box carrying device when the door is opened provided by the embodiment of the utility model;

[0034] Figure 6 A schematic view of the light mask box carrying device provided by the embodiment of the utility model when the carrier seat is moved out of the storage space in idle state;

[0035] Figure 7 A schematic view of the light mask box carrying device provided by the embodiment of the utility model when the carrier seat carrying the light mask box is moved into the storage space;

[0036] Figure 8 A schematic view of the light mask box carrying device provided by the embodiment of the utility model after the carrier seat carrying the light mask box is moved into the storage space;

[0037] Figure 9 A working schematic view of the display of the light mask box carrying device provided by the embodiment of the utility model after the outer door is opened and closed;

[0038] Figure 10 A principle schematic view of the light mask box carrying device provided by the embodiment of the utility model;

[0039] Figure 11 A schematic view of the display and the carrier seat of the light mask box carrying device provided by the embodiment of the utility model.

[0040] Explanation of reference signs:

[0041] 1, object carrying box; 2, carrier seat; 3, enclosure baffle; 4, driving mechanism; 5, driving switch; 6, slide rail; 7, inductor; 8, opening; 9, crown block hook; 10, outer door; 11, control switch; 12, display screen; 13, light mask box. Specific implementation

[0042] In order to make the purpose, technical scheme and advantages of the utility model clearer, the technical scheme in the utility model embodiment will be clearly and completely described below in combination with the drawings of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning by those skilled in the art. The technical scheme in the utility model embodiments will be described below in combination with the drawings of the utility model embodiments. In the description of the utility model embodiments, the terms used in the following embodiments are only for the purpose of describing the specific embodiments, and are not intended to be limiting to the utility model. As used in the specification and the appended claims of the utility model, the singular expressions "a", "the", "said", "the", "the" and "this" are intended to also include expressions such as "one or more", unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of the utility model, "at least one", "one or more" means one or more than two (including two). The term "and / or" is used to describe the association between the associated objects, which means that there can be three relationships; for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone, where A and B can be singular or plural. The character " / " generally represents a "or" relationship between the associated objects.

[0043] In the present specification, the reference to "one embodiment" or "some embodiments" means that the specific features, structures or characteristics described in connection with the embodiment are included in one or more embodiments of the utility model. Therefore, the statements "in one embodiment", "in some embodiments", "in other some embodiments", "in some other embodiments" appearing in different places in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized. The terms "include", "contain", "have" and their variants mean "include but are not limited to", unless otherwise specifically emphasized. The term "connection" includes direct connection and indirect connection, unless otherwise specified. "First", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features.

[0044] In the embodiments of the present application, "exemplarily" or "for example" is used to represent as an example, illustration or description. Any embodiment or design scheme described as "exemplarily" or "for example" in the embodiments of the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the use of "exemplarily" or "for example" is intended to present the relevant concept in a specific manner.

[0045] In view of the problems existing in the prior art, such as Figures 1-3 As shown in the utility model discloses a light mask box carrying device, including the carrier box 1 and three for bearing the light mask box 13 (not shown) carrier seat 2 (the quantity of carrier seat 2 can be adjusted according to actual needs), the carrier box 1 built-in storage space, carrier seat 2 install in (such as fixed connection mode such as welding or integrated molding, adopt detachable connection mode such as screw thread, engagement) storage space, three carrier seats 2 all are installed with the position adjustable (such as through the pivot, the hinge can rotate relative to the horizontal plane of carrier seat 2) limiting piece (such as enclosure baffle 3), the limiting piece is used for limiting the light mask box 13 carried on carrier seat 2, the side of carrier box 1 is equipped with the opening 8 that communicates with storage space, the opening 8 is used for the access of light mask box 13, the working principle of the utility model is: when using, the light mask box 13 that is equipped with the light mask is put into corresponding carrier seat 2 in turn through the opening 8, then the position of limiting piece is adjusted, the light mask box 13 on each carrier seat 2 is limited, then carrying is carried out, not only realizes the one-time carrying of multiple light masks, and the carrier box 1 can also protect the light mask box 13 to reduce the abrasion of light mask box 13, the limiting piece guarantees the stability of light mask box 13 during carrying, avoids the light mask in light mask box 13 from being damaged by factors such as vibration, collision, influences the service life of light mask, has the negative influence to the quality and yield of semiconductor product. It is worth mentioning that when carrier seat 2 is fixed in carrier box 1, light mask box 13 can be placed in the storage space of carrier box 1 by using mechanical hand;When carrier seat 2 is detachably arranged in carrier box 1, such as using slide rail 6 to move carrier seat 2 out of the storage space, and then light mask box 13 is placed on carrier seat 2. It is worth mentioning that the operation logic of the light mask box carrying device can be set according to actual needs, so it has reference significance for different types of light mask boxes. At the same time, in addition to the transmission part of the part needing customization, the remaining parts can preferably adopt replaceable connection mode, which is convenient for subsequent maintenance and use.

[0046] In some embodiments, in order to further ensure the stability of the light mask box 13 during carrying, the limiting piece is provided with a plurality of limiting pieces, which are distributed around the light mask box 13 to form an enclosure space.

[0047] In some embodiments, in order to protect the light mask box 13 during carrying and facilitate the taking and placing of the light mask box 13 from the carrier seat 2, such asFigure 1 As shown, the limiting member comprises a surrounding baffle 3, and the bottom of the surrounding baffle 3 is rotationally connected with the upper surface of the carrier 2 (e.g. connected through a rotating shaft or a hinge). For example, Figure 10 As shown, the surrounding baffle 3 is arranged on each side of the mask box 13 as the limiting member, so as to protect the mask box 13 in all directions.

[0048] In some embodiments, in order to improve the stability of the movement of the carrier 2, as shown in the drawings, Figure 1 As shown, the mask box carrying device further comprises a driving mechanism 4 (e.g. a motor) arranged in the storage space, a driving switch 5, and a slide rail 6; the slide rail 6 is arranged on the side wall of the carrier box 1; the carrier 2 is installed on the slide rail 6 and is slidable relative to the slide rail 6; the driving switch 5 is arranged on the side of the carrier 2 close to the opening 8; the driving mechanism 4 is used to drive the carrier 2 to slide along the slide rail 6 according to the set number of rotation or pulses, so as to drive the mask box 13 on the carrier 2 to pass through the opening 8, so as to access the mask box 13. It is worth noting that the transmission part between two adjacent carriers 2 is not less than the height of the mask box 13.

[0049] In some embodiments, in order to detect whether the mask box 13 exists on the carrier 2 and whether the mask box 13 is offset, so as to ensure the stability during the carrying process, as shown in the drawings, Figure 1 and 10 As shown, the mask box carrying device further comprises a sensor 7 for detecting the position of the mask box 13; the sensor 7 is arranged on the upper surface of the carrier 2. It is worth noting that preferably, three sensors 7 which are not on the same straight line are arranged, so as to improve the accuracy of the detection of the position of the mask box 13. For example, when the carrier 2 is empty, the surrounding baffle 3 around the mask box 13 is in the shape of a petal and expands outward, the sensor 7 automatically identifies the mask box 13 after the mask box 13 is put in, the surrounding baffle 3 is tightened inward after the identification is successful, and the mask box 13 is clamped through buckling; the identification error will be displayed on the display screen 12 to display a warning, and the surrounding baffle is opened.

[0050] In some embodiments, in order to improve the safety and facilitate the operation of the user, as shown in the drawings, Figure 1 and Figure 2 As shown, the mask box carrying device further comprises an outer opening door 10 and a control switch 11; the outer opening door 10 is arranged at the opening 8 of the carrier box 1 and is movable relative to the carrier box 1; the control switch 11 is used to control the movement of the outer opening door 10 to control the opening and closing of the opening 8. Preferably, the control switch 11 is a touch switch.

[0051] In some embodiments, in order to facilitate understanding the number, ID, state and type of the reticle boxes 13 and reticles in the reticle box 1, the reticle box carrying device further comprises a display screen 12 for displaying the parameter information of the reticle boxes 13 in the storage space; as shown in Figure 11 , the display screen 12 is installed on the side of the carrier seat 2 close to the outer opening door 10, and the outer opening door 10 is made of transparent material; or as shown in Figure 9 , the display screen 12 is installed on the outer opening door 10.

[0052] In some embodiments, in order to prevent damage caused by static electricity accumulation during transportation and storage and improve carrying efficiency, the material of the reticle box carrying device is an anti-static material; and / or as shown in Figure 3 , the top of the reticle box 1 is provided with a crown block hook 9. Specifically, the anti-static material includes but is not limited to plastic, carbon fiber, PVC anti-static plate, anti-static polyester and the like.

[0053] Based on the above-mentioned reticle box carrying device, the utility model further provides a semiconductor equipment, which comprises Figures 1-3The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figures 4-9 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 4 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 5 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 6 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 10 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 11 The utility model discloses a light shield box carrying device and a crane system, the crane system is used for conveying the light shield box carrying device, and the light shield box carrying device includes a carrying box 1 with built-in storage space, three bearing seats 2 for bearing the light shield box 13 in the storage space (the number of bearing seat 2 can be adjusted according to actual demand), a driving mechanism 4 arranged in the storage space, a driving switch 5 and a slide rail 6, an outer opening door 10 and a control switch 11, a display screen 12 arranged on the switch door and used for displaying the parameter information of the light shield box 13 in the storage space, and three inductors 7 not on the same straight line arranged on the upper surface of the bearing seat 2 and used for detecting the position of the light shield box 13. Figure 7The driving switch 5 shown starts the driving mechanism 4, the driving mechanism 4 works to push the carrier 2 along the slide rail 6 to move into the storage space through the opening 8, and then is in the state shown Figure 8 The above operation can be repeated, after all the reticle boxes 13 are put into the carriers 2, until the reticle box 1 is full, the outer door 10 is closed by controlling the switch 11, and then the crane system carries out fast and safe transfer of the reticle box 1 through the crane hook 9, not only realizing one-time carrying of multiple reticle boxes, but also protecting the reticle boxes 13 by the reticle box 1 so as to reduce the abrasion of the reticle boxes 13, the limiting piece ensures the stability of the reticle boxes 13 in the carrying process, avoiding damage of the reticle in the reticle box 13 caused by factors such as vibration and collision, affecting the service life of the reticle, and negatively affecting the quality and yield of the semiconductor products.

[0054] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present application described in the claims. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A mask box carrying device, characterized in that: It includes a carrying box and several carriers for carrying the mask box; The carrying box has a built-in storage space, and the carrier is installed in the storage space; A position-adjustable limiting member is installed on at least one carrier, and the limiting member is used to limit the position of the mask box carried by the carrier; An opening communicating with the storage space is provided on the side of the object carrying box, and the opening is used for storing and accessing the mask box.

2. The device according to claim 1, characterized in that There are multiple limiting members distributed around the mask box to form an enclosure space.

3. The device according to claim 1, characterized in that The limiting component includes a protective baffle, and the bottom of the protective baffle is rotatably connected to the upper surface of the carrier.

4. The device according to claim 1, characterized in that Also included are a drive mechanism, a drive switch, and a slide rail disposed within the storage space; The slide rail is arranged on the side wall of the carrying box; The carrier is mounted on the slide rail and is slidable relative to the slide rail; The driving switch is arranged on a surface of the carrier close to the opening; The driving mechanism is used to drive the carrier to slide along the slide rail, so as to drive the mask box on the carrier to pass through the opening, so as to access the mask box.

5. The device according to claim 1, characterized in that Also included is a sensor for detecting the position of the reticle box; The sensor is arranged on the upper surface of the carrier.

6. The device according to claim 1, characterized in that Also includes outward opening doors and control switches; The outward-opening door is arranged at the opening of the carrying box and is movable relative to the carrying box; The control switch is used to control the movement of the outward-opening door to control the opening and closing of the opening.

7. The device according to claim 6, characterized in that Also included is a display screen for displaying parameter information of the reticle box in the storage space; The display screen is installed on the side of the carrier close to the outward-opening door, and the outward-opening door is made of a transparent material; or the display screen is installed on the outward-opening door.

8. The device according to claim 1, characterized in that The material of the mask box carrying device is anti-static material; and / or a crane hook is provided on the top of the carrying box.

9. A semiconductor device, characterized in that: comprising a reticle box carrying device and an overhead crane system according to any one of claims 1 to 8; The overhead crane system is used to transport the mask box carrying device.

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