Exhaust control switch device

Abstract

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to an exhaust control switch device which comprises an exhaust pipe body, a piston A, a piston B, a linear driving piece and a linear transmission structure. The exhaust pipe body is provided with an air inlet and an air outlet, and the piston A and the piston B are located in the exhaust pipe body. The linear driving piece is used for driving the piston A and adjusting the position of the piston A in the exhaust pipe body. The linear transmission structure is used for driving the piston B and adjusting the position of the piston B in the exhaust pipe body. On the basis of normally achieving the function of opening and closing air exhaust, the effect of adjusting the size of a gap between the piston A and the piston B can be achieved, namely the size of a ventilation cross section where air passes and the air outlet amount of exhausted air can be changed, adjustment can be conducted at will according to different process scenes, applicability is better, the overall structure is simple, and cost is low. Machining and manufacturing are easy, and assembling and maintaining are convenient.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor equipment, concretely is a kind of exhaust control switch device. BACKGROUND

[0002] The structure of exhaust control switch device (Autodamper) is used for the independent control of the exhaust of process unit of semiconductor equipment.The existing exhaust control switch device as shown in Figure Figure 3 When the piston connected to the driving end of cylinder 001 is in retracted position, air inlet 002 is communicated with air outlet 003, and exhaust is normal;When the piston connected to the driving end of cylinder 001 is in extended position, air inlet 002 is cut off with air outlet 003, and exhaust is closed.By means of this device, the opening and closing function of the exhaust of process unit can be basically controlled.

[0003] But the existing exhaust control switch device structure when air inlet 002 is communicated with air outlet 003, the air outlet capacity of air outlet 003 generally cannot be adjusted arbitrarily according to different process situations, and the applicability is poor. INVENTION CONTENTS

[0004] In view of the above problems, the utility model aims at providing an exhaust control switch device.

[0005] The utility model aims at realizing by the following technical scheme:

[0006] An exhaust control switch device, comprising exhaust pipe main body, piston A, piston B, linear drive, linear transmission structure;

[0007] The exhaust pipe main body has air inlet and air outlet, and the piston A and the piston B are located in the interior of the exhaust pipe main body respectively;

[0008] The driving end of the linear drive extends to the interior of the exhaust pipe main body and is connected with the piston A, and the linear drive is used to drive the piston A and adjust the position of piston A in the exhaust pipe main body;

[0009] The linear transmission structure is arranged on the exhaust pipe main body, and the linear transmission structure has operating end and driving end, the driving end of the linear transmission structure extends to the interior of the exhaust pipe main body and is connected with the piston B, and the operating end of the linear transmission structure is located on the outside of the exhaust pipe main body, and the linear transmission structure is used to drive the piston B and adjust the position of piston B in the exhaust pipe main body;

[0010] When the exhaust is normal, the piston A and the piston B are in a separated state, so that there is a gap between the piston A and the piston B, gas from a process unit enters into the inside of the exhaust pipe body from the air inlet of the exhaust pipe body, then passes through the gap between the piston A and the piston B in the exhaust pipe body, and is discharged from the air outlet of the exhaust pipe body; when the exhaust is closed, the piston A and the piston B are in a closely abutting state.

[0011] The moving direction of the piston A in the exhaust pipe body is parallel to the moving direction of the piston B in the exhaust pipe body.

[0012] The exhaust pipe body is divided into an exhaust pipe A section and an exhaust pipe B section connected together, the linear driving member is installed on the exhaust pipe A section, and the linear transmission structure is arranged on the exhaust pipe B section.

[0013] The linear transmission structure comprises an adjusting screw and a fixing screw, the middle part of the adjusting screw is provided with external threads, the exhaust pipe body is provided with a threaded connecting seat protruding therefrom, the threaded connecting seat is provided with a threaded hole, the external threads of the adjusting screw are connected with the threaded hole of the threaded connecting seat in a matched mode, one end of the adjusting screw in the length direction is located outside the exhaust pipe body and serves as an operation end of the linear transmission structure, the other end of the adjusting screw in the length direction extends into the inside of the exhaust pipe body, the fixing screw is divided into a screw head part and a threaded part connected together, the outer contour size of the screw head part of the fixing screw is larger than the outer contour size of the threaded part of the fixing screw, the threaded part of the fixing screw passes through the piston B and is connected with the other end of the adjusting screw in the length direction through threads, the whole formed by the connection of the fixing screw and the other end of the adjusting screw in the length direction serves as a driving end of the linear transmission structure, there is a gap between the outer peripheral surface of the threaded part of the fixing screw and the piston B, so that the whole formed by the connection of the fixing screw and the other end of the adjusting screw in the length direction has a degree of freedom of rotation relative to the piston B, the end face of the other end of the adjusting screw and the screw head part of the fixing screw jointly limit the piston B in the axial direction of the adjusting screw.

[0014] The length direction of the adjusting screw is parallel to the length direction of the linear driving member.

[0015] A handle is arranged on one end of the adjusting screw outside the exhaust pipe body in the length direction.

[0016] A fastening nut is further connected to the external threads of the middle part of the adjusting screw outside the exhaust pipe body in the length direction.

[0017] A stepped hole for passing the fixing screw is provided in the middle of the piston B. The stepped hole cooperates with the end face of the other end of the adjusting screw in the longitudinal direction and the screw head of the fixing screw to achieve positioning along the axial direction of the fixing screw.

[0018] The outer circumferential surface of the piston A and the outer circumferential surface of the piston B are respectively in close contact with the inner circumferential surface of the adjacent exhaust pipe body, and the inner circumferential surface of the exhaust pipe body respectively prevents the closely contacted pistons A and B from rotating circumferentially.

[0019] The end face of the piston A close to the piston B is inclined, and the end face of the piston B close to the piston A is also inclined. The end face of the piston A close to the piston B is matched with the end face of the piston B close to the piston A.

[0020] The advantages and positive effects of this utility model are:

[0021] On the basis of being able to normally realize the function of opening and closing exhaust, the utility model can also realize the effect of adjusting the size of the gap between piston A and piston B, that is, it can change the size of the ventilation cross-section through which gas passes and the air volume discharged by gas. It can be adjusted arbitrarily according to different process scenarios, has better applicability, is relatively simple in overall structure, is easy to process and manufacture, and is convenient to assemble and maintain. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the external structure of the utility model;

[0023] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;

[0024] Figure 3 It is a structural diagram of the exhaust control switch device in the prior art.

[0025] In the figure: 1 is the exhaust duct body, 101 is the exhaust duct section A, 102 is the exhaust duct section B, 103 is the threaded connection seat, 104 is the air inlet, 105 is the air outlet, 2 is the piston A, 3 is the piston B, 301 is the stepped channel, 4 is the linear drive component, 5 is the adjusting screw, 6 is the fixing screw, 7 is the handle, and 8 is the fastening nut;

[0026] 001 is the cylinder of the existing exhaust control switch device, 002 is the air inlet of the existing exhaust control switch device, and 003 is the air outlet of the existing exhaust control switch device. DETAILED DESCRIPTION

[0027] The following is combined with Figures 1-2 The utility model is further described in detail.

[0028] An exhaust control switch device, as shown in the figure, the embodiment includes exhaust pipe body 1, piston A 2, piston B 3, linear drive 4, linear transmission structure. Figures 1-2

[0029] Exhaust pipe body 1 has air inlet 104 and air outlet 105, piston A 2 and piston B 3 are located in the inside of exhaust pipe body 1. In this embodiment, piston A 2 is located opposite to the air outlet 105, piston B 3 is located opposite to the air inlet 104, and it can also be used in reverse; the specific setting position and quantity of air inlet 104 and air outlet 105 can also be adjusted according to actual needs.

[0030] The driving end of linear drive 4 extends to the inside of exhaust pipe body 1 and is connected with piston A 2, linear drive 4 is used to drive piston A 2 and adjust the position of piston A 2 in exhaust pipe body 1.

[0031] Linear transmission structure is arranged on the exhaust pipe body 1, linear transmission structure has operation end and driving end, the driving end of linear transmission structure extends to the inside of exhaust pipe body 1 and is connected with piston B 3, the operation end of linear transmission structure is located outside the exhaust pipe body 1, linear transmission structure is used to drive piston B 3 and adjust the position of piston B 3 in exhaust pipe body 1. In this embodiment, the moving direction of piston A 2 in exhaust pipe body 1 is parallel to the moving direction of piston B 3 in exhaust pipe body 1, that is, the axis direction of piston A 2 is parallel to the axis direction of piston B 3.

[0032] Specifically, in this embodiment, the exhaust pipe body 1 is divided into exhaust pipe A section 101 and exhaust pipe B section 102 which are welded together by flange, to ensure the sealing effect of exhaust pipe body 1. In this embodiment, linear drive 4 adopts commercially available cylinder products, which is controlled by external controller. Linear drive 4 is installed on exhaust pipe A section 101, and linear transmission structure is arranged on exhaust pipe B section 102.

[0033] Specifically, as shown in the figure, Figure 2 ​As shown, the linear transmission structure in the embodiment includes an adjusting screw 5 and a fixing screw 6. The middle part of the adjusting screw 5 is externally threaded. The exhaust pipe B section 102 of the exhaust pipe body 1 is provided with a threaded connecting seat 103. The threaded connecting seat 103 can also be fixed to the exhaust pipe body 1 by welding. The threaded connecting seat 103 is provided with a threaded hole. The external thread of the adjusting screw 5 is connected to the threaded hole of the threaded connecting seat 103 in a matched manner. The length direction of the adjusting screw 5 is parallel to the length direction of the linear driving part 4. One end of the length direction of the adjusting screw 5 is located outside the exhaust pipe body 1 and serves as an operation end of the linear transmission structure. The other end of the length direction of the adjusting screw 5 extends to the inside of the exhaust pipe body 1. The fixing screw 6 is divided into a screw head part and a threaded part which are connected together. The outer contour of the screw head part of the fixing screw 6 is larger than the outer contour of the threaded part of the fixing screw 6. The threaded part of the fixing screw 6 penetrates the piston B 3 and is connected to the other end of the length direction of the adjusting screw 5 in a threaded manner. The axis of the fixing screw 6 is collinear with the axis of the adjusting screw 5. The whole formed by the connection of the fixing screw 6 and the other end of the length direction of the adjusting screw 5 serves as a driving end of the linear transmission structure. There is a gap between the outer periphery of the threaded part of the fixing screw 6 and the piston B 3, so that the whole formed by the connection of the fixing screw 6 and the other end of the length direction of the adjusting screw 5 has a degree of freedom of rotation relative to the piston B 3. The end face of the other end of the length direction of the adjusting screw 5 and the screw head part of the fixing screw 6 jointly limit the piston B 3 in the axial direction of the adjusting screw 5. Rotating the adjusting screw 5 on the threaded connecting seat 103 enables the whole adjusting screw 5 to move in the axial direction of the adjusting screw 5, thereby driving the connected piston B 3 to move in the axial direction of the adjusting screw 5.

[0034] Specifically, in the embodiment, the outer periphery of the piston A 2 and the outer periphery of the piston B 3 are respectively in close contact with the inner periphery of the exhaust pipe body 1 adjacent thereto. The inner periphery of the exhaust pipe body 1 plays a circumferential anti-rotation role for the piston A 2 and the piston B 3 in close contact therewith, and also plays a role of avoiding gas leakage from the outer periphery of the piston A 2 and the piston B 3. The shapes of the outer periphery of the piston A 2, the outer periphery of the piston B 3 and the inner periphery of the exhaust pipe body 1 can be adjusted arbitrarily according to the use requirements. In addition, in the embodiment, the axis of the adjusting screw 5 can be parallel to and not collinear with the axis of the piston B 3, thereby further preventing the piston B 3 from rotating circumferentially.

[0035] The end face of the piston A 2 near the piston B 3 is beveled, the end face of the piston B 3 near the piston A 2 is also beveled, and the end face of the piston A 2 near the piston B 3 is matched with the end face of the piston B 3 near the piston A 2. When the exhaust is closed, the beveled end face of the piston A 2 and the beveled end face of the piston B 3 can effectively ensure the fitting effect and ensure the reliable exhaust closing effect.

[0036] Specifically, in this embodiment, the middle part of the piston B 3 is provided with a stepped hole 301 for passing and fixing the screw 6, and the stepped hole 301 cooperates with the end face of the other end of the length direction of the adjusting screw 5 and the screw head of the fixing screw 6 to realize the limiting along the axis direction of the fixing screw 6. The stepped hole 301 is provided to facilitate the disassembly and connection of the fixing screw 6, the piston B 3 and the adjusting screw 5. The specific shape and size of the stepped hole 301 can be adjusted according to actual needs and existing technology.

[0037] Specifically, in this embodiment, the length direction of the adjusting screw 5 located on the outside of the exhaust pipe body 1 is provided with a handle 7 to facilitate the rotation of the adjusting screw 5 by the maintenance personnel. The outer thread of the middle part of the adjusting screw 5 located on the outside of the exhaust pipe body 1 is also connected with a fastening nut 8. After adjusting the moving position of the adjusting screw 5, the fastening nut 8 on the adjusting screw 5 is tightened to keep the position of the adjusting screw 5, thereby ensuring the stability of the position of the piston B 3.

[0038] Working principle:

[0039] When the exhaust is normally discharged, the driving end of the linear driving part 4 is in a retracted state, the piston A 2 and the piston B 3 are in a separated state to have a gap between the piston A 2 and the piston B 3, the gas from the process unit enters the inside of the exhaust pipe body 1 from the air inlet 104 of the exhaust pipe body 1, and then passes through the gap between the piston A 2 and the piston B 3 in the exhaust pipe body 1, and then is discharged from the air outlet 105 of the exhaust pipe body 1; when the exhaust is closed, the driving end of the linear driving part 4 is controlled to be extended, so that the piston A 2 and the piston B 3 are in a closely abutting state to eliminate the gap through which the gas can pass, thereby achieving the effect of closing the exhaust; when the air outlet quantity needs to be adjusted, the driving end of the linear driving part 4 is ensured to be in a retracted state, the fastening nut 8 is loosened, and then the adjusting screw 5 is rotated to drive the piston B 3 to move along the axis direction of the adjusting screw 5, thereby adjusting the size of the gap between the piston A 2 and the piston B 3, that is, changing the size of the ventilation section through which the gas passes and the air outlet quantity of the gas, and after the adjustment is completed, the fastening nut 8 is locked again to ensure that the adjusting screw 5 does not rotate during normal work.

Claims

1. An exhaust control switch device, characterized in that: It comprises an exhaust pipe body (1), a piston A (2), a piston B (3), a linear drive member (4), and a linear transmission structure; The exhaust pipe body (1) has an air inlet (104) and an air outlet (105), and the piston A (2) and the piston B (3) are respectively located inside the exhaust pipe body (1); The driving end of the linear driving member (4) extends to the interior of the exhaust pipe body (1) and is connected to the piston A (2), and the linear driving member (4) is used to drive the piston A (2) and adjust the position of the piston A (2) in the exhaust pipe body (1); The linear transmission structure is arranged on the exhaust pipe body (1), and has an operating end and a driving end. The driving end of the linear transmission structure extends into the interior of the exhaust pipe body (1) and is connected to the piston B (3). The operating end of the linear transmission structure is located outside the exhaust pipe body (1). The linear transmission structure is used to drive the piston B (3) and adjust the position of the piston B (3) in the exhaust pipe body (1). During normal exhaust, the piston A (2) and the piston B (3) are in a separated state so that there is a gap between the piston A (2) and the piston B (3). The gas from the process unit enters the interior of the exhaust pipe body (1) from the air inlet (104) of the exhaust pipe body (1), then passes through the gap between the piston A (2) and the piston B (3) in the exhaust pipe body (1), and is then discharged from the air outlet (105) of the exhaust pipe body (1); when the exhaust is closed, the piston A (2) and the piston B (3) are in a tightly abutted state.

2. The exhaust control switch device according to claim 1, characterized in that: The moving direction of the piston A (2) in the exhaust pipe body (1) and the moving direction of the piston B (3) in the exhaust pipe body (1) are parallel to each other.

3. The exhaust control switch device according to claim 1, characterized in that: The exhaust duct body (1) is divided into an exhaust duct section A (101) and an exhaust duct section B (102) connected together, the linear drive component (4) is installed on the exhaust duct section A (101), and the linear transmission structure is arranged on the exhaust duct section B (102).

4. The exhaust control switch device according to claim 1, characterized in that: The linear transmission structure includes an adjusting screw (5) and a fixing screw (6), the middle portion of the adjusting screw (5) has an external thread, a threaded connection seat (103) is convexly provided on the exhaust duct body (1), and a threaded hole is provided on the threaded connection seat (103), the external thread of the adjusting screw (5) is matched with the threaded hole of the threaded connection seat (103) for connection, one end of the adjusting screw (5) in the longitudinal direction is located outside the exhaust duct body (1) and serves as the operating end of the linear transmission structure, and the other end of the adjusting screw (5) in the longitudinal direction extends to the interior of the exhaust duct body (1), and the fixing screw (6) is divided into a screw head and a threaded portion connected together, and the outer contour size of the screw head of the fixing screw (6) is larger than the outer contour size of the fixing screw (6). The outer contour size of the threaded portion, the threaded portion of the fixing screw (6) passes through the piston B (3) and is connected to the other end of the adjusting screw (5) in the longitudinal direction through a thread, the fixing screw (6) and the other end of the adjusting screw (5) in the longitudinal direction are connected to form a whole that serves as the driving end of the linear transmission structure, there is a gap between the outer peripheral surface of the threaded portion of the fixing screw (6) and the piston B (3), so that the fixing screw (6) and the other end of the adjusting screw (5) in the longitudinal direction form a whole that has the freedom to rotate relative to the piston B (3), and the end surface of the other end of the adjusting screw (5) in the longitudinal direction and the screw head of the fixing screw (6) jointly limit the piston B (3) along the axial direction of the adjusting screw (5).

5. The exhaust control switch device according to claim 4, characterized in that: The length direction of the adjusting screw (5) is parallel to the length direction of the linear driving member (4).

6. The exhaust control switch device according to claim 4, characterized in that: A handle (7) is provided on one end of the adjusting screw rod (5) in the length direction located outside the exhaust pipe body (1).

7. The exhaust control switch device according to claim 4, characterized in that: A fastening nut (8) is also connected to the external thread in the middle of the adjusting screw (5) located outside the exhaust pipe body (1).

8. The exhaust control switch device according to claim 4, characterized in that: The middle part of the piston B (3) is provided with a stepped hole (301) for passing the fixing screw (6). The stepped hole (301) cooperates with the end face of the other end of the adjusting screw (5) in the longitudinal direction and the screw head of the fixing screw (6) to achieve positioning along the axial direction of the fixing screw (6).

9. The exhaust control switch device according to claim 1, characterized in that: The outer peripheral surface of the piston A (2) and the outer peripheral surface of the piston B (3) are respectively in close contact with the inner peripheral surface of the adjacent exhaust pipe body (1), and the inner peripheral surface of the exhaust pipe body (1) plays a circumferential anti-rotation role for the closely contacted pistons A (2) and B (3).

10. The exhaust control switch device according to claim 1, characterized in that: The end face of the piston A (2) close to the piston B (3) is in the shape of an inclined surface, and the end face of the piston B (3) close to the piston A (2) is also in the shape of an inclined surface. The end face of the piston A (2) close to the piston B (3) is in the shape of an inclined surface, and the end face of the piston B (3) close to the piston A (2) is in the shape of an inclined surface.

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