Automatic cleaning device for exposure machine mask

Abstract

The utility model discloses an automatic cleaning device for a mask plate of an exposure machine, the mask plate is arranged at a mask table in the exposure machine, and the automatic cleaning device comprises a driving mechanism, a telescopic rod, a connecting rod and a cleaning roller, the driving mechanism is installed at the exposure machine, the driving mechanism is connected with one end of the telescopic rod, the other end of the telescopic rod is detachably connected with the cleaning roller through the connecting rod, the surface of the cleaning roller can be attached to a mask plate, the cleaning roller is a PET flexible cleaning roller, and the cleaning roller is connected with the cleaning roller through the connecting rod. A composite coating of synthetic resin and rubber is arranged on the outer surface of the cleaning roller; the mask cleaning device can solve the problems of low operation efficiency, unstable cleaning effect and possible damage to the mask in the prior art. Through the automatic cleaning device, rapid and effective cleaning of the mask is achieved, the production efficiency and the product quality are improved, and the production cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of mask automatic cleaning device, especially to a kind of automatic cleaning device of mask of exposure machine. BACKGROUND

[0002] In photovoltaic copper interconnection process, it is crucial to keep the mask of exposure machine clean. The traditional cleaning method is manual operation, which is not only inefficient, but also difficult to ensure the consistency and stability of cleaning effect. In addition, manual cleaning may damage the mask, affecting product quality and production progress. Therefore, an efficient, automatic and reliable mask cleaning device for exposure machine is needed. SUMMARY

[0003] The utility model aims at solving the deficiency in prior art, provides a kind of automatic cleaning device of mask of exposure machine, solves the problem of low operation efficiency, unstable cleaning effect and possible damage to mask existing in prior art. Through automatic cleaning device, the mask is quickly and effectively cleaned, the production efficiency and product quality are improved, and the production cost is reduced.

[0004] To achieve the above object, the technical scheme provided by the utility model is as follows: an automatic cleaning device for mask of exposure machine, the mask is arranged at mask table in exposure machine, the automatic cleaning device is arranged on both sides of the mask, the automatic cleaning device includes driving mechanism, telescopic rod, connecting rod and cleaning roller; the driving mechanism is installed in exposure machine, one end of the driving mechanism is connected with telescopic rod, the other end of the telescopic rod is connected with cleaning roller through connecting rod in a detachable manner, and the surface of the cleaning roller can be attached to the mask, wherein the cleaning roller is PET flexible cleaning roller, and the outer surface of the cleaning roller is provided with composite coating of synthetic resin and rubber.

[0005] Further, the driving mechanism is connected with driving source.

[0006] Further, the driving mechanism is cylinder.

[0007] Compared with prior art, the utility model has the following advantages and beneficial effects:

[0008] 1. The cleaning roller of the utility model adopts the combination of flexible material and composite coating, has strong adsorption capacity, can quickly and effectively adsorb dust, dirt, silicon chip slag and other types of dirt on the surface of the mask, and at the same time, ensures gentle cleaning of the mask, reduces damage to the mask, and prolongs the service life of the mask.

[0009] 2, the utility model discloses can promote mask yield, to mask automatic cleaning, need not manual operation cleaning, improve work efficiency, and guarantee mask exposure yield. BRIEF DESCRIPTION OF DRAWINGS

[0010] Fig. 1 It is the structure schematic view of the utility model.

[0011] Fig. 2 It is the structure side view of the utility model. DETAILED DESCRIPTION

[0012] The utility model will be further explained in connection with specific embodiment.

[0013] Refer to Figs. 1-2 As shown, the automatic cleaning device of mask of exposure machine provided by this embodiment, including drive mechanism 1, telescopic link 2, connecting rod 3 and cleaning cylinder 4;

[0014] Mask 5 is arranged at the mask table in the exposure machine, the automatic cleaning device has two symmetrical settings at the both sides of mask 5, the drive mechanism 1 is air cylinder, and air cylinder is connected with drive source, is used to drive air cylinder to start, the air cylinder is installed at the exposure machine and is close to mask table, the air cylinder is connected with one end of telescopic link 2, and telescopic link 2 is driven by air cylinder to stretch out and retract, the other end of telescopic link 2 is connected with cleaning cylinder 4 through connecting rod 3 and forms detachable connection, makes cleaning cylinder 4 reciprocating with the telescoping of connecting rod 3 on the surface of mask 5, and can be replaced according to actual use demand, can be regularly maintained and maintained, and the cleaning cylinder 4 and telescopic link 2 of replacement wear and tear, the surface of cleaning cylinder 4 can be attached with mask 5, wherein the cleaning cylinder 4 is PET flexible cleaning cylinder, and PET flexible cleaning cylinder can be attached with the surface shape of mask 5 and then guarantee cleaning dead angle, the outer surface of cleaning cylinder 4 is equipped with the composite coating of synthetic resin and rubber, has strong adsorption capacity, can quickly and effectively adsorb the dust, dirt, silicon chip slag and various dirt on the surface of mask 5.

[0015] The above-mentioned embodiment is only the preferred embodiment of the utility model, and is not limited to the scope of the utility model, so any change made according to the shape and principle of the utility model should be covered in the protection scope of the utility model.

Claims

1. An automatic cleaning device for a mask of an exposure machine, wherein the mask is arranged at a mask stage in the exposure machine, characterized in that: The automatic cleaning device is correspondingly arranged on both sides of the mask, and the automatic cleaning device includes a driving mechanism, a telescopic rod, a connecting rod and a cleaning roller; the driving mechanism is installed at the exposure machine, the driving mechanism is connected to one end of the telescopic rod, and the other end of the telescopic rod is detachably connected to the cleaning roller through the connecting rod, and the surface of the cleaning roller can fit the mask, wherein the cleaning roller is a PET flexible cleaning roller, and the outer surface of the cleaning roller is provided with a composite coating of synthetic resin and rubber.

2. The automatic cleaning device for a mask of an exposure machine according to claim 1, characterized in that: The driving mechanism is connected to a driving source.

3. The automatic cleaning device for a mask of an exposure machine according to claim 2, characterized in that: The driving mechanism is a cylinder.

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