Front filtering device applied to N-methyl pyrrolidone circulation pipeline

By designing a cavity with a larger upper section and a smaller lower section, along with a multi-stage filter structure, in the N-methylpyrrolidone circulation pipeline, the problem of incomplete photoresist recovery in existing filtration devices is solved, achieving efficient filtration and convenient operation.

CN223453856UActive Publication Date: 2025-10-21江苏凯迪微技术股份有限公司
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Patent Information

Application Number
CN202423002131.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-05
Publication Date
2025-10-21
Estimated Expiration
2034-12-05

AI Technical Summary

Technical Problem

Existing pre-filtration devices suffer from incomplete recovery and inconvenient operation during the photoresist filtration and recycling process, resulting in photoresist waste and cleaning difficulties.

Method used

A design was created with a larger upper chamber and a smaller lower chamber inside the barrel. Three filters of different sizes are installed inside, and the filters are fixed by a horizontal trapezoidal surface. A glass plate is installed on the cover to observe the filtration process, which enables stable installation and removal of the filters and timely cleaning.

Benefits of technology

It improves the filtration effect of photoresist and membrane, reduces the retention of chemical solution, simplifies the operation process, and improves filtration efficiency and ease of cleaning.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a preposed filtering device applied to an N-methyl pyrrolidone circulating pipeline in the field of wet cleaning, which comprises a barrel body and a cover body detachably arranged at the top of the barrel body, a containing cavity with an opening at the top is arranged in the barrel body, the size of the containing cavity is gradually reduced along the vertical direction, and the cover body is arranged in the containing cavity. A containing cavity is formed in the cover body, at least two horizontal ladder surfaces are formed in the inner wall of the containing cavity in the vertical direction, at least two filter screens different in size are installed in the containing cavity and fixed through the horizontal ladder surfaces at the corresponding positions, and a glass sheet which can be seen into the containing cavity is installed in the middle of the cover body. Three filter screens with different sizes are arranged in the big-end-up accommodating cavity for filtering in sequence, so that the filtering effect is improved, and the organic medicine liquid is prevented from staying in the accommodating cavity; the filter screen is fixed through the horizontal ladder surface on the inner wall of the accommodating cavity, so that the filter screen is convenient to mount and dismount; and the cover body is provided with the glass sheet for directly viewing the interior of the accommodating cavity, so that the accumulation condition of photoresist and a film layer on the filter screen can be conveniently observed, and timely cleaning is realized.
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Description

TECHNICAL FIELD

[0001] The utility model relates to wet cleaning technical field, concretely is a front filter device for N-methyl pyrrolidone circulation pipeline. BACKGROUND

[0002] The stripping process in the photoetching is used to make electrode, and N-methyl pyrrolidone is used in the whole stripping process, and the N-methyl pyrrolidone is used to soak and dissolve the metal layer on the photoresist and the adhesive film, wherein the soaking process temperature is generally 82 DEG C, the heating ring overflow is added with ultrasonic vibration to accelerate the photoresist stripping, and the photoresist film and the metal film are mixed into the N-methyl pyrrolidone after stripping, since the circulation pipeline liquid circulation is powered by the air pump, the N-methyl pyrrolidone completes the circulation action through the air pump diaphragm, therefore, the photoresist and the metal film layer are often blocked in the air pump or the air pump diaphragm is punctured, furthermore, the metal layer after stripping is mostly precious metal and needs to be recycled, therefore, a front filter device is installed in front of the air pump in the circulation pipeline.

[0003] The prior art front filter device is separated by filter core when in use, but there is a large space between the filter cylinder inner wall and the filter core, which causes a certain amount of recycled glue to exist between the two and cannot be completely discharged when the photoresist is filtered and recycled, resulting in a certain waste, and the small size of the filter device also makes the cleaning work more troublesome, and the whole operation is very inconvenient, affecting the efficiency. UTILITY MODEL CONTENTS

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a front filter device for N-methyl pyrrolidone circulation pipeline, which can effectively solve the technical problem of inconvenient operation of the current front filter device.

[0005] The utility model solves the technical problems by adopting the following technical scheme:

[0006] A front filter device for N-methyl pyrrolidone circulation pipeline, comprising a barrel body and a cover body detachably installed on the top of the barrel body, the barrel body is internally provided with a cavity with an open top, the size of the cavity gradually decreases along the vertical direction, and at least two horizontal steps are formed on the inner wall of the cavity along the vertical direction, at least two filter screens with different sizes are installed in the cavity, the filter screens are fixed through the corresponding horizontal steps, one side of the barrel body is provided with an injection port for injecting organic liquid into the cavity, the injection port is arranged above the top filter screen, a drain port for discharging the organic liquid in the cavity is arranged at the bottom of the barrel body, and a glass sheet for transparently viewing the inside of the cavity is installed in the middle of the cover body.

[0007] Further, the bottom of the cover is provided with a downward protruding protruding part, the protruding part is inserted into the top of the barrel body and fixed, and the connecting part of the cover and the barrel body is provided with a clamp which is fixed on the outside.

[0008] Further, the edge of the filter screen is provided with an annular part, the bottom of the annular part is provided with a clamping head which is fixed with a horizontal ladder surface, and the horizontal ladder surface is provided with a clamping groove which corresponds to the number and position of the clamping head.

[0009] Further, the filter screen is provided with a hand-held part which is fixed at both ends.

[0010] Further, the injection port is provided with a straight-through part, and the liquid outlet is provided with a bend part.

[0011] Further, the barrel body is composed of a filter shell and a bottom cover, the liquid outlet is arranged in the middle of the bottom cover, and the bottom cover is connected with a base for fixation.

[0012] Compared with the prior art, the beneficial effects of the present application are:

[0013] The present application sets three filter screens with different sizes in the upper large and lower small cavity to filter in sequence, improves the effect of photoresist and film layer filtration, and avoids organic liquid from staying in the cavity; the filter screen is fixed through the horizontal ladder surface of the inner wall of the cavity, facilitating the installation and dismounting of the filter screen; the glass sheet is arranged on the cover to directly observe the inside of the cavity, facilitating the observation of the photoresist and film layer accumulation of the filter screen and timely cleaning. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is an overall structure explosion schematic view of the embodiment of the present application;

[0015] Fig. 2 It is a filter shell cross-section structure schematic view of the embodiment of the present application;

[0016] Fig. 3 It is a filter screen bottom structure schematic view of the embodiment of the present application;

[0017] REFERENCE NUMERALS IN DRAWINGS

[0018] 1-barrel body, 2-cover, 3-cavity, 4-horizontal ladder surface, 5-filter screen, 6-injection port, 7-liquid outlet, 8-glass sheet, 9-straight-through part, 10-bend part, 11-base;

[0019] 101-filter shell, 102-bottom cover;

[0020] 201-protruding part;

[0021] 401-clamping groove;

[0022] 501-ring part, 502-chuck, 503-handle part. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] like Figs. 1-3 As shown, the present invention provides a pre-filter device for use in an N-methylpyrrolidone circulation pipeline, primarily for filtering corresponding organic liquids. The pre-filter mechanism comprises a barrel 1 and a cover 2 detachably mounted on the top of the barrel 1. The barrel 1 is provided with a structure for filtering the organic liquid, while the cover 2 is provided with a structure that secures the barrel 1 and facilitates user inspection of the filtering status within the barrel 1.

[0025] The barrel 1 houses a chamber 3 with an open top. The dimensions of the chamber 3 taper vertically, forming a structure that is larger at the top and smaller at the bottom. This is primarily to prevent excess organic liquid from accumulating between the outer side of the filter 5 and the inner wall of the chamber 3 after the filter 5 is later installed. Therefore, three horizontal stepped surfaces 4 are vertically formed on the inner wall of the chamber 3, each parallel to the other. Three filters 5 are also installed within the chamber 3 to gradually filter the organic liquid. Because the chamber 3 has a larger-at-top, smaller-at-the-bottom structure, the horizontal stepped surfaces 4 and the filters 5 also adopt a structure that tapers downwards, with the filters 5 secured by corresponding horizontal stepped surfaces 4. During filtration, the organic liquid enters the chamber 3 and undergoes three successive filtration steps, filtering out impurities of varying sizes and thus improving the purity of the filtered liquid. The pore sizes of the three filters 5, from the top to the bottom, are 1.5 mm, 1.0 mm, and 0.5 mm, respectively.

[0026] To facilitate installation of the filter 5 on the horizontal step 4, an annular portion 501 is provided at the edge of the filter 5, which clings tightly to the horizontal step 4. During the filtration process, it is necessary to ensure that the filter 5 does not loosen or shift, thus enhancing the stability of the filter 5 on the horizontal step 4. The bottom of the annular portion 501 is provided with a clamping head 502 that secures it to the horizontal step 4. The horizontal step 4 is provided with a corresponding number and position of the clamping heads 502, and the two are fixed together by a clamping connection.

[0027] In addition, the filter screen 5 is provided with a hand-held part 503 fixed at both ends, which is arranged across the opening to facilitate the user to hold the filter screen 5 and install it on the horizontal ladder surface 4 of the cavity 3 or remove it from the cavity 3.

[0028] In order to facilitate the injection of organic liquid and the discharge of filtered organic liquid, an injection port 6 for injecting organic liquid into the cavity 3 is formed on the side of the barrel 1, and a discharge port 7 for discharging the organic liquid in the cavity 3 is formed on the bottom of the barrel 1. At this time, it should be noted that the height of the injection port 6 should be above the top filter screen 5, so that the injected organic liquid is gradually filtered from the top filter screen 5. In order to further facilitate the user operation or facilitate the connection of the pipeline, a straight-through part 9 is installed on the injection port 6, and an elbow part 10 is installed on the discharge port 7.

[0029] As for the structure of the cover 2, in order to facilitate the installation of the cover 2 and the barrel 1, a protruding part 201 is arranged on the bottom of the cover 2, which protrudes downward and is directly inserted into the opening of the cavity 3, so that the cover 2 and the barrel 1 form a structure of plug-in connection for closing. At the same time, in order to prevent the cover 2 and the barrel 1 from loosening after installation, a clamp 8 is arranged at the connection between the cover 2 and the barrel 1, which is jointly sleeved on the outside and fixed, and can be disassembled and installed by adjusting the tightness.

[0030] A glass sheet 8 is arranged on the middle part of the cover 2, which can be seen through the inside of the cavity 3. Through the structure of the glass sheet 8, the user can observe the situation of the filter screen 5 in the cavity 3 in real time, and clean and recycle the photoresist and film layer on the filter screen 5 in time. In order to prevent the glass sheet 8 from breaking, the glass sheet 8 is made of high-strength tempered glass, or transparent acrylic is used instead.

[0031] It should be noted that the barrel 1 can be composed of a detachable filter shell 101 and a bottom cover 102. The filter shell 101 forms a structure of up-down communication. When the filter shell 101 is connected with the bottom cover 102, a sealing ring can be added at the connection to prevent water leakage. At this time, the discharge port 7 is arranged in the middle part of the bottom cover 102, and a base 11 for fixation is connected to the bottom of the bottom cover 102 to fix the position of the barrel 1. At this time, the elbow part 10 installed on the bottom of the barrel 1 is led out from the middle part of the base 11.

[0032] Compared with the conventional technology, the technical scheme sets three filter screens 5 of different sizes in the cavity 3 with large top and small bottom to filter in turn, improves the filtering effect of photoresist and film layer, and avoids the organic liquid from staying in the cavity 3. The filter screen 5 is fixed through the horizontal ladder surface 4 of the inner wall of the cavity 3, which facilitates the installation and disassembly of the filter screen 5. The glass sheet 8 is arranged on the cover 2 to directly observe the inside of the cavity 3, which facilitates the observation of the accumulation of photoresist and film layer on the filter screen 5 and timely cleaning.

[0033] It is apparent for a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the basic characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and not restrictive, the scope of the present application being defined by the appended claims rather than the above description, and all changes falling within the meaning and range of equivalency of the claims' elements are therefore intended to be embraced therein, any reference signs in the claims not being regarded as limiting the claims concerned.

Claims

1. A pre-filter device applied to N-methylpyrrolidone circulating pipeline, comprising a barrel body and a cover body detachably installed on the top of the barrel body, characterized in that: The barrel body is internally provided with a top-opened containing cavity, the size of the containing cavity gradually decreases along the vertical direction, at least two horizontal steps are formed on the inner wall of the containing cavity along the vertical direction, at least two filter screens with different sizes are installed in the containing cavity, the filter screens are fixed through the horizontal steps at corresponding positions, one side of the barrel body is provided with an injection port for injecting organic liquid into the containing cavity, the injection port is arranged above the top filter screen, a liquid discharge port for discharging the organic liquid in the containing cavity is arranged at the bottom of the barrel body, a glass sheet for seeing through the inside of the containing cavity is installed in the middle of the cover body.

2. A pre-filter device for use in N-methylpyrrolidone recycle piping according to claim 1, characterized in that: The bottom of the cover body is provided with a downwardly protruding protruding portion, the protruding portion is inserted into the top of the barrel body and is fixed, the joint of the cover body and the barrel body is provided with a clamp which is jointly sleeved on the outside and is fixed.

3. A pre-filter device for use in N-methylpyrrolidone recycle piping according to claim 1, characterized in that: The edge of the filter screen is provided with an annular portion, the bottom of the annular portion is provided with a clamping head which is fixed with the horizontal step, the horizontal step is provided with a clamping groove which corresponds to the number and position of the clamping head.

4. A pre-filter device for use in N-methylpyrrolidone recycle piping according to claim 1, characterized in that: The filter screen is provided with a hand-held portion which is fixed at both ends.

5. A pre-filter device for use in N-methylpyrrolidone recycle piping according to claim 1, characterized in that: The injection port is provided with a straight-through piece, and the liquid discharge port is provided with an elbow piece.

6. The pre-filter device for N-methylpyrrolidone circulation pipeline according to any one of claims 1-5, characterized in that: The barrel body is composed of a detachable filter shell and a bottom cover, the liquid discharge port is arranged in the middle of the bottom cover, and the bottom cover is connected with a base for fixation.