Hydrofluorine cleaning tank

Abstract

The utility model relates to the technical field of hydrofluorine cleaning tanks, and discloses a hydrofluorine cleaning tank which comprises a bottom plate, a cleaning box is fixedly connected to the inner wall of the bottom plate, a filter plate is fixedly connected to the bottom side of the inner wall of the cleaning box, a plurality of limiting plates are fixedly connected to the left side of the inner wall of the cleaning box, and a supporting box is fixedly connected to the right side of the cleaning box. A driving assembly is fixedly connected to the right side of the inner wall of the supporting box, a circular plate is fixedly connected to the left side of the driving assembly, a plurality of supporting columns are fixedly connected to the left side of the circular plate, and a sliding frame is slidably connected to the left end of the supporting box. According to the automatic cleaning device, a large number of objects can be integrally cleaned, the phenomenon that the back faces of the objects are difficult to clean by a spray head is avoided, and the objects are swung up and down, so that the objects are always kept in a moving state, the objects are automatically cleaned, and the cleaning effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to hydrogen fluoride cleaning tank technical field especially relates to a kind of hydrogen fluoride cleaning tank. BACKGROUND

[0002] Hydrogen fluoride cleaning tank is a kind of equipment for cleaning and processing silicon wafer and other semiconductor manufacturing processes. These devices are usually used to remove residual impurities, organic matter, oxide and other silicon wafer surface, to ensure the purity and flatness of silicon wafer surface, so as to improve the manufacturing quality and performance of semiconductor devices.

[0003] Through retrieval, Chinese patent literature publication number: CN203891149U, discloses a cleaning sink, which comprises a sink body, the sink body is channel-shaped, and has a drain at the bottom; the bottom surface of the sink body is stepped, having a lower bottom surface and a workbench surface; the workbench surface is connected to the front wall of the sink body through an inclined wall; a spray pipe is provided on the front wall of the sink body, and the spray pipe has spray holes. The cleaning sink can conveniently place cleaned objects and make the water contained in the objects flow along the workbench surface to the lower bottom surface of the sink body, and then be smoothly discharged to the drain pipe, so that the workbench surface can be cleaned at any time to maintain its cleanliness.

[0004] For the related technology in the above, the inventor believes that the above patent mentions in the specific implementation mode: "the water column sprayed by the spray hole 22 covers the entire workbench surface, i.e. the area between the two dotted lines shown in the figure; its spray direction is downward, and its spray angle is determined by the size of the workbench surface and the installation distance of the spray pipe from the workbench surface", although the above patent cleans the object by the way of spray head, however, it is difficult to clean the back of the object during the specific operation process, and if the back needs to be cleaned, the object needs to be turned over manually, the cleaning effect is poor and the cleaning process is cumbersome, therefore, in view of the above shortcomings, a hydrogen fluoride cleaning tank is proposed. UTILITY MODEL CONTENT

[0005] The utility model aims at solving the shortcomings in the prior art, and provides a hydrogen fluoride cleaning tank, which aims at improving the problem that the object is cleaned by the spray head in the prior art, and it is difficult to clean the back of the object during the operation process, resulting in poor cleaning effect.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] A kind of hydrogen fluoride cleaning tank, the inner wall of bottom plate is fixedly connected with cleaning tank, the inner wall bottom side of cleaning tank is fixedly connected with filter plate, the left side of the inner wall of cleaning tank is fixedly connected with multiple limit plates, the right side of cleaning tank is fixedly connected with support box, the right side of the inner wall of support box is fixedly connected with drive assembly, the left side of drive assembly is fixedly connected with round plate, the left side of round plate is fixedly connected with multiple support columns, the left end of support box is slidably connected with sliding frame, the inner wall of sliding frame is fixedly connected with tooth block on both sides, the front and back of sliding frame are fixedly connected with link block, the far side of two link blocks is fixedly connected with sliding block, the top side of sliding frame is fixedly connected with square column, the top side of square column is fixedly connected with connecting block, the left end bottom side of connecting block is fixedly connected with square column, the bottom side of square column is fixedly connected with sliding plate.

[0008] Further, the inner wall of the cleaning tank is slidably connected with a filter frame, the right side of the filter frame is fixedly connected with a connecting plate, the left side of the filter frame is fixedly connected with a limiting assembly, the outer portion of the limiting assembly is slidably connected inside the limiting plate, and the left top end of the cleaning tank is fixedly connected with a special-shaped plate.

[0009] Further, the drive assembly includes a motor, the right side of the motor is fixedly connected to the inner wall right side of the support box, and the driving end of the motor is fixedly connected with a rotating shaft.

[0010] Further, the limiting assembly includes a square slide plate, the right side of the square slide plate is fixedly connected to the left top end of the filter frame, and the bottom side of the square slide plate is fixedly connected with multiple sliding columns.

[0011] Further, the left side of the rotating shaft is fixedly connected to the right side of the round plate, and the outer portion of the support column is in contact with the outer portion of the tooth block.

[0012] Further, the outer portions of the two link blocks are slidably connected to the inner walls of the front and back ends of the support box, and the outer portions of the two sliding blocks are slidably connected to the inner walls of the front and back ends of the support box.

[0013] Further, the outer portion of the sliding column is slidably connected to the inner wall of the limiting plate, and the left side of the square slide plate is slidably connected to the left side of the inner wall of the cleaning tank.

[0014] Further, the top left end of the sliding plate is in contact with the inner wall of the connecting plate, and the right side of the square column is slidably connected to the right side of the inner wall of the cleaning tank.

[0015] The utility model has the following beneficial effects:

[0016] In the utility model, through the coordinated use of structures such as the motor, the rotating shaft, the circular plate, the supporting column, the sliding frame, the gear block, the connecting block, the sliding block, the square column, and the connecting block, a large number of objects can be cleaned as a whole, avoiding the problem that the nozzle has difficulty in cleaning the back of the object. At the same time, the object is swung up and down, so that the object is always kept in a moving state, and then the object is automatically cleaned and the cleaning effect is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional diagram of a hydrofluoric cleaning tank proposed in the present utility model;

[0018] Figure 2 This is a schematic diagram of the square slide structure of a hydrofluoric cleaning tank proposed in the utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of a support box of a hydrogen-fluorine cleaning tank proposed in the utility model.

[0020] Legend:

[0021] 1. Bottom plate; 2. Cleaning box; 3. Filter plate; 4. Limit plate; 5. Support box; 6. Motor; 7. Rotating shaft; 8. Circular plate; 9. Support column; 10. Sliding frame; 11. Gear block; 12. Connecting block; 13. Sliding block; 14. Square column; 15. Connecting block; 16. Square column; 17. Sliding plate; 18. Filter frame; 19. Connecting plate; 20. Square slide; 21. Sliding column; 22. Special-shaped plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] Reference Figure 1 The utility model provides an embodiment: a hydrofluoric cleaning tank, comprising a bottom plate 1, which provides a stable cleaning platform, a cleaning box 2 fixedly connected to the inner wall of the bottom plate 1, a filter plate 3 fixedly connected to the bottom side of the inner wall of the cleaning box 2, for filtering a mixture of water and impurities and fixing the filter plate 3 to the bottom plate 1 by bolts, a plurality of limit plates 4 fixedly connected to the left side of the inner wall of the cleaning box 2, for limiting the displacement of the sliding column 21, and a support box 5 fixedly connected to the right side of the cleaning box 2;

[0024] Reference Figure 1 - Figure 3The right side of the inner wall of the support box 5 is fixedly connected with a driving assembly, the driving assembly comprises a motor 6, a driving source, the right side of the motor 6 is fixedly connected to the right side of the inner wall of the support box 5, so that the motor 6 can stably operate, the driving end of the motor 6 is fixedly connected with a rotating shaft 7, the rotating shaft 7 is driven to rotate by the driving motor 6, the left side of the driving assembly is fixedly connected with a circular plate 8, the circular plate 8 is driven to rotate by the driving assembly, the left side of the rotating shaft 7 is fixedly connected to the right side of the circular plate 8, the circular plate 8 is driven to rotate by the rotating shaft 7, the left side of the circular plate 8 is fixedly connected with a plurality of support columns 9, so as to drive the support columns 9 to rotate, the left end of the support box 5 is slidably connected with a sliding frame 10, the sliding frame 10 can vertically slide by the limitation of the support box 5, the inner wall of the sliding frame 10 is fixedly connected with a tooth block 11 on the front and rear sides, the sliding frame 10 is driven to reciprocate up and down by the tooth block 11;

[0025] The outer part of the support column 9 is in contact with the outer part of the tooth block 11, the front and rear sides of the sliding frame 10 are fixedly connected with a link block 12, the link block 12 is driven to reciprocate up and down by the sliding frame 10, the outer parts of the two link blocks 12 are slidably connected to the inner walls of the front and rear ends of the support box 5, the link block 12 can vertically slide by the limitation of the support box 5, the far sides of the two link blocks 12 are fixedly connected with a sliding block 13, the sliding block 13 is driven to slide up and down by the link block 12, the outer parts of the two sliding blocks 13 are slidably connected to the inner walls of the front and rear ends of the support box 5, the sliding block 13 can vertically slide by the limitation of the support box 5, the top side of the sliding frame 10 is fixedly connected with a square column 14, the square column 14 is driven to move by the sliding frame 10, the top side of the square column 14 is fixedly connected with a connecting block 15, the connecting block 15 is driven to slide;

[0026] The left end bottom side of the connecting block 15 is fixedly connected with a square column 16, so as to drive the connecting block 15 to slide up and down, the right side of the square column 16 is slidably connected to the inner wall right side of the cleaning box 2, the square column 16 can vertically slide by the limitation of the cleaning box 2, the bottom side of the square column 16 is fixedly connected with a sliding plate 17, the sliding plate 17 is driven to slide up and down by the square column 16, the inner wall of the cleaning box 2 is slidably connected with a filter frame 18, the filter frame 18 can vertically slide by the limitation of the cleaning box 2, the right side of the filter frame 18 is fixedly connected with a connecting plate 19, the filter frame 18 is driven to slide up and down by the connecting plate 19, the top side left end of the sliding plate 17 is in contact with the inner wall of the connecting plate 19;

[0027] The left side of the filtering frame 18 is fixedly connected with a limiting assembly, the limiting assembly comprises a square slide plate 20, the left side of the square slide plate 20 is slidably connected with the inner wall of the left side of the cleaning box 2, the square slide plate 20 can vertically slide through the limitation of the cleaning box 2, the right side of the square slide plate 20 is fixedly connected with the left side top end of the filtering frame 18, the square slide plate 20 is connected with the filtering frame 18 through bolts, the bottom side of the square slide plate 20 is fixedly connected with a plurality of slide columns 21, the outer sides of the slide columns 21 are slidably connected with the inner wall of the limiting plate 4, the slide columns 21 can vertically slide through the limitation of the limiting plate 4, the outer side of the limiting assembly is slidably connected with the inner side of the limiting plate 4, and the left side top end of the cleaning box 2 is fixedly connected with a special-shaped plate 22.

[0028] Working principle: we place the objects to be cleaned in the filtering frame 18, then put the filtering frame 18 into the cleaning box 2, the square slide plate 20 fixed on the left side of the filtering frame 18 drives the slide columns 21 fixed at the bottom to slide in the limiting plate 4, and the connecting plate 19 fixed on the right side is clamped on the outer side of the sliding plate 17, at this time, the motor 6 drives the rotating shaft 7 to rotate, thereby driving the circular plate 8 to rotate, then the two groups of tooth blocks 11 fixed on the left side rotate, the two support columns 9 are engaged with the two tooth blocks 11, the far ends of the two support columns 9 are larger than the other support columns 9 to prevent the support columns 9 from being disengaged from the tooth blocks 11, so that the two support columns 9 can drive the sliding frame 10 to reciprocate up and down, the connecting block 12 and the sliding block 13 fixed with the connecting block 12 slide in the inner wall of the supporting box 5 to limit, then the square column 14 is driven, the connecting block 15 at the top of the square column 14 slides up and down, thereby driving the square column 16 and the sliding plate 17 fixed with the square column 16 to reciprocate up and down, the connecting plate 19 is driven to slide up and down, thereby driving the filtering frame 18 to slide up and down and driving the objects to be cleaned to shake, so that the cleaning effect is improved.

[0029] Finally, it should be noted that: the above only for preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application, for the person skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the protection scope of the present application.

Claims

1. A hydrofluoric cleaning tank comprising a floor (1), characterised in that: The inner wall of the bottom plate (1) is fixedly connected with a cleaning box (2), the inner wall bottom side of the cleaning box (2) is fixedly connected with a filter plate (3), the inner wall left side of the cleaning box (2) is fixedly connected with a plurality of limiting plates (4), the right side of the cleaning box (2) is fixedly connected with a support box (5), the inner wall right side of the support box (5) is fixedly connected with a driving assembly, the left side of the driving assembly is fixedly connected with a round plate (8), the left side of the round plate (8) is fixedly connected with a plurality of support columns (9), the left end of the support box (5) is slidably connected with a sliding frame (10), the inner wall front and back sides of the sliding frame (10) are fixedly connected with a tooth block (11), the front and back sides of the sliding frame (10) are fixedly connected with a link block (12), the far sides of the two link blocks (12) are fixedly connected with a sliding block (13), the top side of the sliding frame (10) is fixedly connected with a square column (14), the top side of the square column (14) is fixedly connected with a connecting block (15), the left end bottom side of the connecting block (15) is fixedly connected with a square column (16), and the bottom side of the square column (16) is fixedly connected with a sliding plate (17).

2. A hydrofluoric cleaning tank as defined in claim 1, wherein: The inner wall of the cleaning box (2) is slidably connected with a filter frame (18), the right side of the filter frame (18) is fixedly connected with a connecting plate (19), and the left side of the filter frame (18) is fixedly connected with a limiting assembly.

3. A hydrofluoric cleaning tank as defined in claim 1, wherein: The driving assembly comprises a motor (6), and the right side of the motor (6) is fixedly connected to the inner wall right side of the support box (5).

4. A hydrofluoric cleaning tank as defined in claim 2, wherein: The limiting assembly comprises a square sliding plate (20), and the right side of the square sliding plate (20) is fixedly connected to the left side top end of the filter frame (18).

5. A hydrofluoric cleaning tank as defined in claim 3, wherein: The left side of the rotating shaft (7) is fixedly connected to the right side of the round plate (8), and the outer part of the support column (9) is in contact with the outer part of the tooth block (11).

6. A hydrofluoric cleaning tank as defined in claim 3, wherein: The outer parts of the two link blocks (12) are slidably connected to the inner walls of the front and back ends of the support box (5), and the outer parts of the two sliding blocks (13) are slidably connected to the inner walls of the front and back ends of the support box (5).

7. A hydrofluoric cleaning tank as defined in claim 4, wherein: The outer part of the sliding column (21) is slidably connected to the inner wall of the limiting plate (4), and the left side of the square sliding plate (20) is slidably connected to the inner wall left side of the cleaning box (2).

8. A hydrofluoric cleaning tank as defined in claim 2, wherein: The top side left end of the sliding plate (17) is in contact with the inner wall of the connecting plate (19), and the right side of the square column (16) is slidably connected to the inner wall right side of the cleaning box (2).

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