Splash-proof device

Abstract

The utility model provides a splash-proof device which is applied to a chemical mechanical grinding machine table, the splash-proof device is used for blocking liquid splashed out of the grinding table, the splash-proof device comprises a splash-proof baffle, the splash-proof baffle is arranged around the grinding table, the splash-proof baffle comprises a plurality of baffle parts which are connected end to end, and every two adjacent baffle parts are detachably connected; the baffle components are detachably connected to the fixing assemblies, and at least part of the baffle components correspond to the fixing assemblies. By changing the internal structure and the fixing mode of the splash-proof baffle, the splash-proof baffle is more flexible to disassemble and assemble, the cost is reduced, meanwhile, deformation of the splash-proof baffle caused by manual installation errors can be prevented, internal interference between a grinding pad of the chemical mechanical grinding machine table and the splash-proof baffle is avoided, and the efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a splash-proof device. BACKGROUND

[0002] In the production process of large-scale integrated circuits, the removal and planarization of substances on the surface of a wafer is a necessary and frequently used process. At present, the chemical mechanical polishing (CMP) process is the most mainstream global planarization technology, which is used to reduce the roughness of the wafer surface or to thin the wafer.

[0003] The CMP machine includes a polishing liquid arm, a rotating and swinging polishing head, a trimmer, a rotating polishing platform, a polishing pad, and an up-and-down splash-proof baffle. The splash-proof baffle is arranged around the polishing platform to block the polishing liquid splashed from the polishing platform, so that the residual polishing liquid will stick to the inner wall of the splash-proof baffle. The splash-proof baffle needs to be cleaned frequently, otherwise there is a risk of foreign matter splashing onto the platform to scratch the wafer, or even causing chipping.

[0004] Therefore, improvements are needed to at least partially solve the above problems. SUMMARY

[0005] A series of simplified concepts are introduced in the summary section, which will be further described in detail in the detailed description section. The summary section of the present application does not mean to attempt to limit the key features and necessary technical features of the claimed technical solutions, nor to attempt to determine the protection scope of the claimed technical solutions.

[0006] In order to at least partially solve the above problems, the present application provides a splash-proof device applied to a chemical mechanical polishing machine, the splash-proof device is used to block the liquid splashed from the polishing table, characterized in that it comprises: a splash-proof baffle, the splash-proof baffle is arranged around the polishing table, the splash-proof baffle comprises a plurality of first and last connected baffle components, and adjacent two baffle components are detachably connected; a plurality of fixed assemblies, the baffle components are detachably connected to the fixed assemblies, and at least part of the baffle components correspond to the fixed assemblies.

[0007] Exemplarily, the fixed assembly comprises a fixed part and a support part, the baffle component is detachably connected to the fixed part, and the fixed part is detachably connected to the support part.

[0008] Exemplarily, the splicing interface of each baffle component is a multi-section mortise and tenon structure, and the mortise and tenon structures of the splicing interfaces of adjacent baffle components are nested with each other.

[0009] Exemplarily, the mortise and tenon structure comprises a first part and / or a second part distributed along a vertical direction, the first part nested with each other is detachably connected through a first fastener penetrating through the first part, and the second part nested with each other is fixedly connected through a protrusion outside the convex part and a groove in the corresponding concave part.

[0010] Exemplarily, the baffle part comprises a first side for facing the grinding table and a second side away from the grinding table, the splash-proof device further comprises a second fastener and a connecting piece integrally formed with the baffle part, the connecting piece is connected to the second side, the connecting piece is provided with a first hole, and the baffle part is detachably connected to the fixing piece through the second fastener penetrating the first hole.

[0011] Exemplarily, the fixing piece is provided with a second hole corresponding to the first hole, and the second fastener is partially accommodated in the second hole.

[0012] Exemplarily, the fixing piece is provided with at least two third holes, and the fixing piece is detachably connected to the support through a third fastener penetrating the third hole.

[0013] Exemplarily, the support is provided with a fourth hole corresponding to the third hole, and the third fastener is partially accommodated in the fourth hole.

[0014] Exemplarily, the material of the baffle part comprises acrylic.

[0015] Exemplarily, the inner wall of the splash-proof baffle is coated with an anti-splash coating.

[0016] The splash-proof device for a chemical mechanical grinding table according to the utility model can change the internal structure of the splash-proof baffle and the fixing mode, so that the splash-proof baffle is more flexible to disassemble and assemble, the cost is reduced, the splash-proof baffle can be prevented from being deformed due to manual installation errors, the internal interference between the grinding pad of the chemical mechanical grinding table and the splash-proof baffle is avoided, and the efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] The following drawings of the utility model are used as a part of the utility model for understanding the utility model. The drawings of the utility model show the embodiments of the utility model and the description thereof, and are used to explain the principle of the utility model.

[0018] In the drawings:

[0019] Figure 1 The structure of the splash-proof device in one specific embodiment of the utility model is shown in the drawings;

[0020] Figure 2The structural diagram of the baffle component of one specific embodiment of the utility model is shown;

[0021] Figure 3 The schematic diagram of the mortise-tenon structure of the splicing interface of the baffle component of one specific embodiment of the utility model is shown;

[0022] Figure 4 The splicing side view of the mortise-tenon structure of the splicing interface of the baffle component of one specific embodiment of the utility model is shown;

[0023] Figure 5 The schematic diagram of the anti-back-splashing coating of the inside of the anti-splashing baffle of one specific embodiment of the utility model is shown;

[0024] Figure 6 The schematic diagram of the anti-splashing baffle fixing structure of one specific embodiment of the utility model is shown;

[0025] Figure 7 The side view of the anti-splashing baffle fixing structure of one specific embodiment of the utility model is shown;

[0026] Figure 8 The top view of the anti-splashing baffle fixing structure of one specific embodiment of the utility model is shown.

[0027] In the drawings:

[0028] 100 anti-splashing device;

[0029] 110 anti-splashing baffle;

[0030] 101 baffle component;

[0031] 1010 mortise-tenon structure;

[0032] 1011 first part;

[0033] 1012 second part;

[0034] 111 anti-back-splashing coating;

[0035] 102 connecting piece;

[0036] 1021 first hole;

[0037] 103 first fastener;

[0038] 120 fixing assembly;

[0039] 1201 first fixing part;

[0040] 1202 second fixing part;

[0041] 1203 third hole;

[0042] 121 fastener;

[0043] 130 support. DETAILED DESCRIPTION

[0044] In the following description, numerous specific details are set forth to provide a more thorough understanding of the present application. However, it will be apparent to one of skill in the art upon

[0045] It will be understood that the present application can be put into effect in different ways, and is not to be confined to the specific embodiments set forth herein. Rather, these embodiments are provided to give a thorough and enabling disclosure of the present application, and to convey the full scope of the present application to those skilled in the art. In the drawings, the size and relative sizes of layers and regions can be exaggerated for clarity. Identical reference numerals have been used, where applicable, to designate corresponding elements throughout the figures.

[0046] It will be understood that when an element or layer is referred to as being "on", "adjacent", "connected" or "coupled" to another element or layer, it can be directly on, adjacent, connected or coupled to the other element or layer, or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on", "directly adjacent", "directly connected" or "directly coupled" to another element or layer, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application.

[0047] Spatially relative terms, such as "beneath", "below", "lower", "under", "above", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is inverted, then a dependent element or feature described as "below" or "beneath" another element or feature is oriented "above" or "over" the other element or feature. Thus, the exemplary term "below" or "beneath" can encompass both an orientation of above and below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptions used herein interpreted accordingly.

[0048] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising", when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0049] In the related art, a splash-proof baffle is arranged on the periphery of the polishing platform of a CMP machine to prevent the polishing liquid from splashing onto the components around the platform, and the cover body is made of Teflon material, and the splash-proof baffle is driven to move up and down by a column structure fixed by three screws. However, the following problems exist:

[0050] Firstly, the cover body is made of Teflon material, and although Teflon has good acid and alkali resistance, the material itself has insufficient strength and is prone to deformation under stress. If the splash-proof baffle is deformed or the installation position is offset, it will affect the pasting accuracy of the polishing pad during machine maintenance, and even if the polishing pad is pasted crookedly, it is easy to cause internal interference between the polishing pad and the splash-proof baffle.

[0051] Secondly, the splash-proof baffle needs to be removed during CMP machine maintenance, and since the adjustment range of the fixed position of the screw is relatively wide, there is a problem of human installation error. The position of the screw is not fixed, causing the splash-proof baffle to be easily deformed by hard pulling, affecting the pasting accuracy of the polishing pad and causing internal interference between the polishing pad and the splash-proof baffle, which may cause a large amount of foreign matter to contaminate the machine, affecting product quality, or the splash-proof baffle may be further deformed or even broken, causing damage to the overall polishing components.

[0052] Third, the splash-proof baffle is an integral annular structure, and the splash-proof baffle needs to be removed as a whole for cleaning. The grinding structure is very crowded, and the splash-proof baffle needs to be removed first by removing other structures such as the grinding liquid arm and the trimmer. The removal is complicated and high in cost, and seriously affects the efficiency.

[0053] To solve at least one of the above technical problems, the present application provides a splash-proof device applied to a chemical mechanical grinding machine table, the splash-proof device being used for blocking liquid splashed from the grinding table, and comprising: a splash-proof baffle, the splash-proof baffle being arranged around the grinding table, the splash-proof baffle comprising a plurality of baffle components connected in a head-to-tail manner, and adjacent two baffle components being detachably connected; and a plurality of fixing assemblies, the baffle components being detachably connected to the fixing assemblies, and at least part of the baffle components corresponding to the fixing assemblies.

[0054] According to the splash-proof device for the chemical mechanical grinding machine table of the present application, by changing the internal structure and fixing mode of the splash-proof baffle, the splash-proof baffle is more flexible in disassembly and assembly, the cost is reduced, the splash-proof baffle is prevented from being deformed due to manual installation errors, the internal interference between the grinding pad of the chemical mechanical grinding machine table and the splash-proof baffle is avoided, and the efficiency is improved.

[0055] In order to thoroughly understand the present application, detailed steps and structures will be proposed in the following description in order to explain the technical solutions proposed by the present application. The preferred embodiments of the present application are described in detail as follows, however, in addition to these detailed descriptions, the present application can have other implementation manners.

[0056] The following description will be made with reference to the drawings Figures 1-8 The splash-proof device 100 according to an embodiment of the present application is described, which is applied to a chemical mechanical grinding machine table, as shown in Figure 1 As shown in the figure, the splash-proof device 100 is used for blocking liquid splashed from the grinding table, and comprises: a splash-proof baffle 110, the splash-proof baffle 110 being arranged around the grinding table, the splash-proof baffle comprising a plurality of baffle components 101 connected in a head-to-tail manner, and adjacent two baffle components 101 being detachably connected; and a plurality of fixing assemblies 120, the baffle components 101 being detachably connected to the fixing assemblies 120, and at least part of the baffle components 101 corresponding to the fixing assemblies 120.

[0057] Specifically, the splash guard 110 is composed of a plurality of guard components 101 and is arranged around the polishing table of the CMP machine to block the liquid splashed from the polishing table during the operation of the CMP machine. The splash guard 110 is designed to be composed of a plurality of guard components 101, so that when the splash guard 110 is deformed or damaged, only the damaged guard components 101 need to be replaced instead of the entire splash guard 110, which makes the splash guard 110 more convenient to disassemble and assemble and also releases the internal stress of the material of the splash guard 110, making the structure more stable. The guard components 101 are detachably connected to the fixing assembly 120, and at least part of the guard components 101 correspond to a fixing assembly 120. The splash guard 110 is fixed around the polishing table of the CMP machine by this fixing mode, which can ensure that the splash guard 110 will not be deviated during disassembly and assembly, and when the splash guard 110 needs to be cleaned after the CMP machine is used for many times, the splash guard 110 will not be deformed due to manual installation errors, which will cause the internal interference between the polishing pad on the CMP machine and the splash guard 110, thereby improving the quality of the product.

[0058] In some embodiments, as shown in Figure 1 , the overall shape of the splash guard 110 is adapted to the shape of the edge of the CMP machine. In this embodiment, the splash guard 110 is a ring structure and is composed of a plurality of guard components 101, as shown in Figure 2 . The diameter of the splash guard is generally 770mm-820mm, which is relatively large. By changing the splash guard 110 from an integrated design to a plurality of guard components 101, the problem of inconvenient disassembly and assembly of the integrated splash guard due to the large size is solved. Secondly, when the splash guard 110 is deformed or damaged, only the deformed or damaged guard components 101 need to be replaced instead of the entire splash guard 110, which reduces the replacement cost. Finally, the splash guard 110 is designed to be composed of a plurality of guard components 101, which releases the internal stress of the material of the splash guard 110, making the splash guard 110 not easy to deform and the structure more stable. In this embodiment, as shown in Figure 1 , the splash guard 110 is designed to be composed of three guard components 101, which solves the problem of inconvenient disassembly and assembly and reduces the cost. In other examples, the splash guard 110 can also be composed of four, five or six guard components 101, which is not specifically limited.

[0059] In some embodiments, as shown in Figure 2 and Figure 3As shown, the splicing interface of each baffle part 101 is a multi-section mortise and tenon structure 1010, and the mortise and tenon structures 1010 of the splicing interfaces of adjacent baffle parts 101 are nested with each other. As an example, the mortise and tenon structure 1010 is multi-section, and the concave-convex parts are engaged with each other, so that the connection position is more stable and not easy to loosen, can effectively resist vibration and impact, and is easy to disassemble and assemble. In this embodiment, as shown in Figure 2 and Figure 3 As shown, the mortise and tenon structure 1010 is a five-section nested structure. In other examples, the mortise and tenon structure 1010 can also be a six-section or seven-section nested mortise and tenon structure, which is not specifically limited.

[0060] In some embodiments, the mortise and tenon structure 1010 includes a first part 1011 and / or a second part 1012 distributed in the vertical direction, the first parts 1011 nested with each other are detachably connected by the first fasteners 103 passing through the first parts 1011, and the second parts 1012 nested with each other are fixedly connected by the protrusions 1013 located outside the convex parts and the grooves 1014 located in the corresponding concave parts. As an example, the first part 1011 is located at the upper part, and the second part 1012 is located at the lower part, or the second part 1012 is located at the upper part, and the first part 1011 is located at the lower part, which is not specifically limited. In this embodiment, as shown in Figure 4 As shown, the first part 1011 is located at the upper part, and the second part 1012 is located at the lower part. As an example, the first fastener 103 can be a screw or a rivet, which is not specifically limited. By detachably connecting the first part 1011 by the first fastener 103 passing through the first part 1011 and fixedly connecting the second part 1012 by the protrusions 1013 located outside the convex parts and the grooves 1014 located in the corresponding concave parts, the protrusions 1013 and the grooves 1014 are nested with each other and connected together. Each baffle part 101 is connected to each other in the above-mentioned manner to form the splash-proof baffle 110, and the overall shape of the splash-proof baffle 110 is adapted to the edge shape of the workbench. The splash-proof baffle 110 formed by the nested mortise and tenon structure is more stable and not easy to fall off.

[0061] In some embodiments, the material of the baffle part 101 includes acrylic. Specifically, acrylic is an important plastic polymer material developed earlier, which has good transparency and chemical stability. The acrylic plate has excellent weather resistance, high surface hardness and surface gloss, the tensile strength can reach 50 MPa to 77 MPa level, and the bending strength can reach 90 MPa to 130 MPa. Compared with the traditional Teflon material with a bending strength of 20.7 MPa and a tensile strength of 27.6 MPa, the baffle part 101 made of acrylic material is not easy to deform and will not affect the product safety and process.

[0062] In some embodiments, as shown in Figure 5 The inner wall of the splash guard 110 is coated with an anti-reflective splash coating 111. Exemplarily, the anti-reflective splash coating 111 is prepared by using aramid nanofiber (ANF) as a micro-nano building unit, polydopamine (PDA) wrapped on the surface of ANF as a platform for secondary reaction, in-situ generation of nano-SiO2 on the surface of ANF-PDA, low surface energy modification of the nano-SiO2 using heptadecafluorodecyltriethoxysilane (PFTOS) to obtain a "grape" structure of super-hydrophobic filler, and the anti-reflective splash coating 111 is prepared by a "adhesive-super-hydrophobic particle" spraying method. The prepared anti-reflective splash coating 111 has good mechanical properties, and can still maintain good super-hydrophobic properties after 240 times of abrasion of a 200g weight on a 25μm sandpaper and 400g sand impact experiments, respectively. By coating the inner wall of the splash guard 110 with the anti-reflective splash coating 111, the abrasion liquid is prevented from sticking to the inner wall of the splash guard 110, and the risk of scratches caused by crystallization is reduced.

[0063] In some embodiments, as shown in Figure 6 The splash guard device 100 further comprises a connecting piece 102 integrally formed with the splash guard component 101, the connecting piece 102 being connected to the second side of the splash guard component 101, and the connecting piece 102 facilitating the fixed connection of the splash guard component 101 and the fixing assembly 120. Exemplarily, the connecting piece 102 is provided with at least two first holes 1021. Exemplarily, the first holes 1021 can be through holes or other suitable holes, which are not limited herein. Each first hole 1021 is arranged on the connecting piece 102 in a spaced manner, and the position of the first hole 1021 is fixed. The splash guard component 101 is detachably connected to the fixing assembly 120 by penetrating the second fastener through the first hole 1021, wherein the second fastener can be a screw or a rivet, which are not limited herein. The connecting piece 102 and the splash guard component 101 are integrally formed, which can ensure that the splash guard 110 needs to be cleaned in the future, and the position of the splash guard 110 will not be deviated when the splash guard 110 is disassembled.

[0064] Exemplarily, the material of the connecting piece 102 is the same as that of the splash guard component 101, and the material of the connecting piece 102 is acrylic material to prevent deformation. In addition, the connecting piece 102 can have any suitable shape, such as a column, which is not limited herein.

[0065] In some embodiments, as shown in Figure 6 and Figure 7As shown, the splash-proof device 100 further comprises a plurality of fixing assemblies 120, the baffle member 101 is detachably connected to the fixing assemblies 120, and at least part of the baffle member 101 and the fixing assemblies 120 correspond. Exemplarily, the fixing assembly 120 comprises a fixing member 121 and a support member 130, the baffle member 101 is detachably connected to the fixing member 121, and the fixing member 121 is detachably connected to the support member 130. The fixing member 121 can be composed of a plurality of fixing portions, each fixing portion is integrally formed. In the embodiment, as shown in the figure, the fixing member 121 can comprise a first fixing portion 1201 and a second fixing portion 1202, and the first fixing portion 1201 and the second fixing portion 1202 are integrally formed to prevent positional deviation. In other examples, the fixing member 121 can also be composed of three, four or more fixing portions, which are not limited herein. In addition, the fixing member 121 can be of any suitable shape, for example, the first fixing portion 1201 is a column structure, and the second fixing portion 1202 is an arch structure, which are not limited herein. Specifically, the fixing member 121 can be a hard plastic member formed by casting, and can also be formed by other means, which are not limited herein. Figure 6 As shown, the fixing member 121 can comprise a first fixing portion 1201 and a second fixing portion 1202, and the first fixing portion 1201 and the second fixing portion 1202 are integrally formed to prevent positional deviation. In other examples, the fixing member 121 can also be composed of three, four or more fixing portions, which are not limited herein. In addition, the fixing member 121 can be of any suitable shape, for example, the first fixing portion 1201 is a column structure, and the second fixing portion 1202 is an arch structure, which are not limited herein. Specifically, the fixing member 121 can be a hard plastic member formed by casting, and can also be formed by other means, which are not limited herein.

[0066] In some embodiments, as shown in the figure, Figure 8 The fixing member 121 comprises a second hole (not shown in the figure) corresponding to the first hole 1021, and the splash-proof baffle 110 is detachably connected to the fixing member 121 through the first hole 1021 and the second hole. In the embodiment, the fixing member 121 can comprise a first fixing portion 1201 and a second fixing portion 1202, the first fixing portion 1201 is provided with a second hole corresponding to the first hole 1021 on the connecting member 102, and the fixing member 121 is fixedly connected to the baffle member 101 by using a second fastener to pass through the first hole 1021 and the second hole, and the second fastener is partially accommodated in the second hole, wherein the second hole can be a screw hole or other suitable hole, which are not limited herein. This fixing method can ensure that the splash-proof baffle 110 will not deviate during disassembly, avoiding the interference between the polishing pad of the CMP machine and the interior of the splash-proof baffle 110.

[0067] In some embodiments, as shown in the figure, Figure 8As shown, the fixing member 121 is further provided with at least two third holes 1203, and the fixing member 121 is detachably connected to the support member 130 by penetrating the third holes 1203 with third fasteners. In the embodiment, the fixing member 121 can include a first fixing portion 1201 and a second fixing portion 1202, and the second fixing portion 1202 is provided with two third holes 1203, and the fixing member 121 is detachably connected to the support member 130 by penetrating the third holes 1203 with third fasteners. The third fasteners can be screws or rivets, and the third holes 1203 can be through holes or other suitable holes.

[0068] In some embodiments, as shown in Figure 1 and Figure 6 The fixing assembly 120 includes support members 130, and the fixing member 121 is detachably connected to the support member 130, and each support member 130 corresponds to each fixing member 121. As an example, the support member 130 is provided with fourth holes (not shown in the figure) corresponding to the third holes 1203, and the support member 130 and the fixing member 121 are detachably connected by penetrating the third holes 1203 and the fourth holes with third fasteners by corresponding the third holes 1203 and the fourth holes. The third fasteners are partially accommodated in the fourth holes, and the fourth holes can be screw holes or other suitable holes.

[0069] As an example, the support member 130 can be any suitable shape structure, such as a column structure, and the like, and the like, and the like.

[0070] As an example, each corresponding fixing member 121 and support member 130 constitute a fixing assembly 120 of the splash-proof baffle 110, and each fixing assembly 120 is arranged at the middle position of each baffle component 101 and can drive the splash-proof baffle 110 to move in the vertical direction. Compared with the traditional column structure fixed by screws, the fixing position of the screws has a wide adjustment range and is not fixed, which can easily cause the splash-proof baffle 110 to be easily deformed by hard pulling, affect the attachment accuracy of the polishing pad, and further affect the product quality. The fixing method of the splash-proof baffle 110 of the present application has a fixed hole position, which can avoid the deformation of the splash-proof baffle 110 caused by manual installation errors and improve the quality of the product.

[0071] In summary, the splash-proof device for a chemical mechanical polishing machine according to the embodiments of the present application changes the internal structure of the splash-proof baffle and the fixing method, so that the splash-proof baffle is more flexible to disassemble and assemble, the cost is reduced, and the splash-proof baffle can be prevented from being deformed due to manual installation errors, the internal interference between the polishing pad of the chemical mechanical polishing machine and the splash-proof baffle is avoided, and the efficiency is improved.

[0072] While example embodiments have been described herein with reference to the accompanying drawings, it is to be understood that the example embodiments are intended to be illustrative only and not limiting of the scope of the application. Numerous variations and modifications will become apparent to those skilled in the art once the examples embodiments have been described. Such variations and modifications are intended to fall within the scope of the applications. Any feature in the foregoing description and / or accompanying drawings that has a counterpart in one or more patent applications owned by the assignee herein is not duplicated herein for the purpose of limitation and / or expansion of the claims.

[0073] Similarly, it is to be understood that the various features of the application described herein are sometimes grouped together in a single embodiment, figure or description of a related aspect of the application for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various aspects of the application. This method of disclosure, however, is not to be interpreted as reflecting an intention that the application requires more features than are explicitly recited in each claim. Rather, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim acting as a separate embodiment of the application.

[0074] Furthermore, those skilled in the art will recognize that boundaries between the functionality of the above described embodiments are merely illustrative and that the functionality of each can be combined in a single embodiment and / or distributed in additional embodiments. Accordingly, it should be understood that the application has been described in the context of specific examples for purposes of illustration only and that it is not intended to be limited to the specific examples described. The scope of the application includes other embodiments that are apparent from the disclosure and that can be practiced or carried out in various ways.

[0075] It is to be understood that the above description is intended to be illustrative, and not restrictive. Many other embodiments will be apparent to those of skill in the art upon reviewing the above description. The scope of the application should, therefore, be determined not with reference to the above description, but instead with reference to the appended claims, along with their full scope of equivalents. In the claims, means-plus-function clauses are used where function-words have been omitted for purposes of clarity. It will be understood that such function words are incorporated by reference as if they were in the claims. The word "comprising" is used herein to mean including the following elements, not excluding others. The word "comprising" is not used to mean "consisting only of." The word "comprising" is used to mean "consisting only of" in the claims where the use of such phrasing indicates the presence of the word "limiting" prior to the phrase "consisting of."

Claims

1. A splash guard for use in a chemical mechanical polishing machine, the splash guard for blocking liquid splashed from a polishing table, characterized in that, The application relates to a splash-proof baffle plate for a grinding table, comprising: a splash-proof baffle plate arranged around the grinding table, the splash-proof baffle plate comprising a plurality of baffle plate components connected end to end, two adjacent baffle plate components being detachably connected; a plurality of fixing assemblies, the baffle plate components being detachably connected to the fixing assemblies, at least part of the baffle plate components corresponding to the fixing assemblies.

2. The splash guard of claim 1, wherein The fixing assembly comprises a fixing member and a supporting member, the baffle plate components being detachably connected to the fixing member, and the fixing member being detachably connected to the supporting member.

3. The splash guard of claim 1, wherein, The joint of each baffle plate component is a multi-section mortise and tenon structure, the mortise and tenon structures of the joints of two adjacent baffle plate components being nested with each other.

4. The splash guard of claim 3, wherein The mortise and tenon structure comprises a first section and / or a second section distributed along a vertical direction, the first sections nested with each other being detachably connected through first fasteners penetrating through the first sections, and the second sections nested with each other being fixedly connected through protrusions outside convex sections and recesses in corresponding recesses.

5. The splash guard of claim 2, wherein, The baffle plate component comprises a first side for facing the grinding table and a second side away from the grinding table, the splash-proof device further comprising a second fastener and a connecting member integrally formed with the baffle plate component, the connecting member being connected to the second side, the connecting member being provided with a first hole, and the baffle plate component being detachably connected to the fixing member through the second fastener penetrating through the first hole.

6. The splash guard of claim 5, wherein, The fixing member is provided with a second hole corresponding to the first hole, and the second fastener is partially accommodated in the second hole.

7. The splash guard of claim 2, wherein, The fixing member is provided with at least two third holes, and the fixing member is detachably connected to the supporting member through a third fastener penetrating through the third holes.

8. The splash guard of claim 7, wherein, The supporting member is provided with fourth holes corresponding to the third holes, and the third fastener is partially accommodated in the fourth holes.

9. The splash guard of claim 1, wherein, The material of the baffle plate component comprises acrylic.

10. The splash guard of claim 1, wherein, The inner wall of the splash-proof baffle plate is coated with an anti-splashing coating.

Images