Silicon carbide crystal ingot slicing and double-sided polishing device

Abstract

The utility model provides a silicon carbide crystal ingot slicing and double-sided polishing device. The silicon carbide crystal ingot slicing and double-face polishing device comprises a fixing base, a supporting base and a clamping mechanism, the supporting base is arranged above the top of the fixing base, and the clamping mechanism is arranged on the supporting base; the clamping mechanism comprises a first mounting frame and a second mounting frame, the first mounting frame and the second mounting frame are both fixedly mounted on the top of the supporting seat, two first inner threaded sleeves are rotatably mounted on the first mounting frame, and first threaded rods are both mounted on the two first inner threaded sleeves in a threaded mode; two mounting blocks and a double-shaft motor are mounted at the top of the first mounting frame. According to the silicon carbide crystal ingot slicing and double-face polishing device, the clamping mechanism is arranged, so that the two ends of the silicon carbide crystal ingot slicing can be clamped, the clamping and stabilizing effect can be improved, and the situation that the polishing effect is affected due to shaking caused by unstable clamping can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model belongs to silicon carbide crystal ingot slicing processing device technical field, especially relates to a silicon carbide crystal ingot slicing and double -sided polishing device. BACKGROUND

[0002] The silicon carbide crystal ingot slicing refers to the semiconductor silicon wafer, and silicon is the main component in building materials cement, brick and glass, and is also the main raw material of most semiconductors and microelectronic chips, and interestingly, the conductivity of silicon itself is not very good, however, the resistivity can be accurately controlled by adding appropriate dopants, and before manufacturing semiconductors, silicon must be converted into wafer.

[0003] The silicon carbide crystal ingot slicing needs to be sliced when processing, and then the silicon carbide crystal ingot slicing after slicing is polished to ensure that the surface of the silicon carbide crystal ingot slicing does not have burrs or other surface quality defects.

[0004] In the utility model discloses a kind of silicon carbide crystal ingot slicing and double -sided polishing device with the announcement No.CN 219212560 U, including fixed seat, the upper of fixed seat is provided with support frame, the middle of Hu support frame is provided with rotating positioning frame, the inner side of rotating positioning frame is provided with four symmetrical distribution clamping pieces, four The inner wall middle of clamping piece and rotating positioning frame is provided with clamping telescopic rod, the both ends middle of rotating positioning frame and support frame is provided with rotating shaft, the outer surface of one end of rotating shaft is inserted in support frame, one The outer surface of rotating shaft is provided with rotating transmission gear.The utility model can quickly clamp and fix the silicon carbide crystal ingot slicing by rotating positioning frame and clamping piece, and the silicon carbide crystal ingot slicing can be rotated by rotating shaft, and the silicon carbide crystal ingot slicing is polished by polishing piece after rotating, and the processing efficiency of the silicon carbide crystal ingot slicing is effectively provided.

[0005] For the related technology in the above, the utility model person thinks that there is the following defect:

[0006] 1, the structure in the above is through four clamping telescopic rods to be clamped and fixed to the silicon carbide crystal ingot slicing, but clamping telescopic rod needs to be manually adjusted, and because of the telescopic structure characteristics of telescopic rod, clamping articles can not be stable, and is easy to sway, and will affect polishing effect.

[0007] Therefore, it is necessary to provide a new silicon carbide crystal ingot slicing and double -sided polishing device to solve the above technical problems. Utility model content

[0008] The utility model solves the technical problem to provide a kind of through setting clamping mechanism, so that the silicon carbide ingot slice can be clamped at both ends, and then the clamping stable effect can be improved, and then the unstable clamping and shaking can be avoided to affect the polishing effect of the silicon carbide ingot slice and double-sided polishing device.

[0009] To solve the above technical problems, the utility model provides a silicon carbide ingot slice and double-sided polishing device, which comprises a fixing seat, a supporting seat and a clamping mechanism.

[0010] The clamping mechanism comprises a mounting bracket one and a mounting bracket two, which are fixedly installed on the top of the supporting seat, two inner threaded sleeves one are rotatably installed on the mounting bracket one, a threaded rod one is threadedly installed on each of the two inner threaded sleeves one, two mounting blocks and a double-shaft motor are installed on the top of the mounting bracket one, the double-shaft motor is located between the two mounting blocks, a rotating rod is rotatably installed on each of the two mounting blocks, the two rotating rods are fixedly connected to the two output shafts of the double-shaft motor at their ends close to each other, a belt pulley one is fixedly sleeved on the end of each of the two rotating rods away from each other, a belt pulley two is fixedly sleeved on each of the two inner threaded sleeves one, and the two belt pulley ones and the two belt pulley twos are connected by two connecting belts.

[0011] As a further scheme of the utility model, two inner threaded sleeves two are rotatably installed on each of the two mounting bracket twos, a belt pulley three is fixedly sleeved on each of the two inner threaded sleeves two, a belt pulley four is fixedly sleeved on each of the two inner threaded sleeves one, and the two belt pulley threes and the two belt pulley fours are connected by two connecting belts.

[0012] As a further scheme of the utility model, a threaded rod two is threadedly installed on each of the two inner threaded sleeves two, and a clamping block is fixedly installed on the end of each of the two threaded rod ones and the two threaded rod twos close to each other.

[0013] As a further scheme of the utility model, two limiting sliding rods are slidably installed on each of the mounting bracket one and the mounting bracket two, and the four limiting sliding rods are connected to the four clamping blocks at their ends close to each other.

[0014] As a further scheme of the utility model, a supporting column is rotatably installed on the top of the fixing seat, the top of the supporting column is fixedly connected to the bottom of the supporting seat, a servo motor two is installed on the bottom of the fixing seat, and the bottom of the supporting column extends to below the bottom of the fixing seat and is fixedly connected to the output shaft of the servo motor two.

[0015] As a further scheme of the utility model, the top of the fixing base is fixedly installed with an installation plate, the installation plate is fixedly installed with a gas cylinder, the output shaft of the gas cylinder is fixedly installed with a connecting block, the connecting block is fixedly installed with a servo motor three, the output shaft of the servo motor three is fixedly installed with a polishing piece.

[0016] Compared with the related art, the silicon carbide ingot slice and double-sided polishing device has the following beneficial effects:

[0017] 1、The utility model discloses a clamping mechanism is set up, can be to the carbonization silicon carbide ingot slice two end clamping can improve the clamping stable effect can avoid the clamping unstable and sway influence polishing effect. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to facilitate the person skilled in the art understanding, the utility model is further explained below in combination with the drawings.

[0019] Figure 1 For the structure of the utility model Figure One ;

[0020] Figure 2 For the structure of the utility model Figure Two ;

[0021] Figure 3 For the structure of the utility model Figure Three .

[0022] In the drawing: 1, fixed seat, 2, support seat, 3, mounting frame one, 4, mounting frame two, 5, internal thread sleeve one, 6, threaded rod one, 7, mounting block, 8, double-shaft motor, 9, rotating rod, 10, pulley one, 11, pulley two, 12, connecting belt one, 13, internal thread sleeve two, 14, pulley three, 141, pulley four, 15, connecting belt two, 151, clamping block, 16, support column, 17, servo motor two, 18, installation plate, 19, gas cylinder, 20, connecting block, 21, servo motor three, 22, polishing piece. SPECIFIC EMBODIMENTS

[0023] Please refer to Figure 1 、 Figure 2 And Figure 3 Among them, Figure 1 For the structure of the utility model Figure One ; Figure 2 For the structure of the utility model Figure Two ; Figure 3 For the structure of the utility model Figure ThreeThe silicon carbide ingot slicing and double-sided polishing device comprises a fixed seat 1, a support seat 2 and a clamping mechanism, the support seat 2 is arranged above the top of the fixed seat 1, and the clamping mechanism is arranged on the support seat 2;

[0024] The clamping mechanism comprises mounting frame one 3 and mounting frame two 4, both of which are fixedly installed on the top of the support seat 2, two inner threaded sleeves one 5 are rotatably installed on the mounting frame one 3, threaded rods one 6 are threadedly installed on the two inner threaded sleeves one 5, two mounting blocks 7 and a double-shaft motor 8 are installed on the top of the mounting frame one 3, the double-shaft motor 8 is located between the two mounting blocks 7, rotating rods 9 are rotatably installed on the two mounting blocks 7, the ends of the two rotating rods 9 close to each other are fixedly connected with the two output shafts of the double-shaft motor 8, belt pulleys one 10 are fixedly sleeved on the ends of the two rotating rods 9 away from each other, belt pulleys two 11 are fixedly sleeved on the two inner threaded sleeves one 5, and the two belt pulleys one 10 and the two belt pulleys two 11 are connected through two connecting belts one 12.

[0025] Two inner threaded sleeves two 13 are rotatably installed on the two mounting frame two 4, belt pulleys three 14 are fixedly sleeved on the two inner threaded sleeves two 13, belt pulleys four 141 are fixedly sleeved on the two inner threaded sleeves one 5, and the two belt pulleys three 14 and the two belt pulleys four 141 are connected through two connecting belts two 15.

[0026] Threaded rods two are threadedly installed on the two inner threaded sleeves two 13, and the ends of the two threaded rods one 6 and the two threaded rods two close to each other are fixedly installed with clamping blocks 151.

[0027] The two mounting frame one 3 and the two mounting frame two 4 are slidably installed with two limiting sliding rods, and the four limiting sliding rods close to each other are connected with the four clamping blocks 151.

[0028] A support column 16 is rotatably installed on the top of the fixed seat 1, the top of the support column 16 is fixedly connected with the bottom of the support seat 2, a servo motor two 17 is installed on the bottom of the fixed seat 1, and the bottom of the support column 16 extends to below the bottom of the fixed seat 1 and is fixedly connected with the output shaft of the servo motor two 17.

[0029] The servo motor two 17 can drive the mounting plate 18 and the support seat 2 to rotate, so as to drive the clamping mechanism to turn.

[0030] An installation plate 18 is fixedly installed on the top of the fixed seat 1, a pneumatic cylinder 19 is fixedly installed on the installation plate 18, a connecting block 20 is fixedly installed on the output shaft of the pneumatic cylinder 19, a servo motor three 21 is fixedly installed on the connecting block 20, and a polishing piece 22 is fixedly installed on the output shaft of the servo motor three 21.

[0031] The connecting block 20 / servo motor three 21 and the polishing piece 22 can be driven to move by the air cylinder 19, the polishing piece 22 can be driven to rotate by the servo motor three 21, and the silicon carbide ingot slice is polished

[0032] The working principle of the silicon carbide ingot slice and the double-sided polishing device is as follows:

[0033] First step: when in use, the double-shaft motor 8 is started, the two output shafts of the double-shaft motor 8 drive the two rotating rods 9 to rotate, the two rotating rods 9 drive the two belt pulleys one 10 to rotate, and under the cooperation of the two connecting belts one 12 and the two belt pulleys two 11, the two internally threaded sleeves one 5 can rotate, under the action of the limiting slide rod and the thread, the two threaded rods one 6 drive the corresponding two clamping blocks 151 to move close to each other to clamp the front half of the silicon carbide ingot slice, and under the cooperation of the two belt pulleys four 141, the two belt pulleys three 14 and the two connecting belts two 15, the two internally threaded sleeves two 13 can rotate, under the action of the thread and the limiting slide rod, the two threaded rods two drive the corresponding two clamping blocks 151 to move close to each other to clamp the rear half of the silicon carbide ingot slice, and by clamping the front half and the rear half of the silicon carbide ingot slice, the clamping and fixing effect can be improved, and the unstable clamping and shaking that affect the polishing effect can be avoided.

[0034] It should be noted that the device structure and the drawings of the utility model mainly describe the principle of the utility model, and the setting of the power mechanism, the power supply system and the control system of the device is not completely described in the design principle technology, and under the premise that the above-mentioned principle of the utility model is understood by the person skilled in the art, the specific power mechanism, power supply system and control system can be clearly known, and the control mode of the application file is automatically controlled by the controller, and the control circuit of the controller can be realized by simple programming of the person skilled in the art;

[0035] The standard parts used can be purchased from the market, and can be ordered according to the description and drawings, the specific connection mode of each part adopts the conventional bolt, rivet, welding and other conventional means in the prior art, the mechanical parts and equipment adopt the conventional type in the prior art, and the components known by the person skilled in the art, the structure and principle are known by the person skilled in the art through the technical manual or through the conventional experimental method.

[0036] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations or direct or indirect application can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents, and the same is true for the patent protection scope of the utility model.

Claims

1. A silicon carbide ingot slicing and double-sided polishing device, characterized in that: Include: Fixed seat, support seat and clamping mechanism, the support seat is arranged on the top of the fixed seat, the clamping mechanism is arranged on the support seat; The clamping mechanism includes mounting frame one and mounting frame two, both of which are fixedly installed on the top of the support seat, two inner threaded sleeves one are rotatably installed on the mounting frame one, two threaded rods one are threadedly installed on the two inner threaded sleeves one, two mounting blocks and a double-shaft motor are installed on the top of the mounting frame one, the double-shaft motor is located between the two mounting blocks, two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two mounting blocks, the two rotating rods are rotatably installed on the two 2. The silicon carbide ingot slicing and double-disc polishing apparatus according to claim 1, characterized by: ​ 3. The silicon carbide ingot slicing and double-disc lapping apparatus of claim 1, wherein: ​ 4. The silicon carbide ingot slicing and double-disc polishing apparatus according to claim 3, characterized by: ​ 5. The silicon carbide ingot slicing and double-disc lapping apparatus of claim 1, wherein: ​ 6. The silicon carbide ingot slicing and double-disc lapping apparatus of claim 1, wherein: ​

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