Auxiliary positioning mechanism for automatic unboxing of mask

By designing an auxiliary positioning mechanism for automatic unpacking of photomasks, the problems of difficult movement and inaccurate positioning during the unpacking process of large-size photomasks were solved, achieving convenient movement and precise positioning, reducing costs and improving safety.

CN223457263UActive Publication Date: 2025-10-21CHENGDU ROADWAY OPTOELECTRONICS CO LTD
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Patent Information

Application Number
CN202422756738.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-12
Publication Date
2025-10-21
Estimated Expiration
2034-11-12

AI Technical Summary

Technical Problem

Large-size photomasks are difficult to move during the unpacking process, and the unpacking platform cannot be used to position raw material boxes of different sizes, resulting in high development costs and easy wear and tear on the boxes.

Method used

An auxiliary positioning mechanism was designed, comprising an unpacking platform, a sliding component, and a positioning component. The sliding component reduces friction through rollers and a support base, while the positioning component achieves precise centering through lateral and longitudinal positioning parts, making it suitable for raw material boxes of different sizes.

Benefits of technology

It enables convenient movement and precise positioning of raw material boxes, reduces development costs, minimizes box wear, and improves the safety of robotic arm handling.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an auxiliary positioning mechanism for automatic unboxing of a mask plate, which relates to the field of mask plate manufacturing and comprises an unboxing platform, a sliding component, a positioning component, a positioning component, a positioning component, a positioning component, a positioning component and a positioning component, and is characterized in that the sliding component is arranged on the unboxing platform and used for driving a raw material box to slide on the unboxing platform; and the positioning assembly comprises a transverse positioning part and a longitudinal positioning part and is used for carrying out center positioning on the four sides of the raw material box. According to the unboxing platform, the problems that an existing large-size mask is difficult to move in the unboxing process, and the unboxing platform cannot be suitable for positioning raw material boxes of different sizes are solved, by arranging the sliding assemblies, the raw material boxes can be conveniently moved after being placed on the unboxing platform, and abrasion to the bottom of the box body is reduced. By arranging the positioning assembly, the raw material boxes of different sizes are centered and positioned only through one unboxing platform, on one hand, the cost is saved, on the other hand, the positioning assembly accurately positions the raw material boxes, the safety of subsequent mechanical arm taking and placing is facilitated, and the plate collision risk is reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the mask manufacturing field, concretely relates to a kind of auxiliary positioning mechanism for mask automatic unpacking. BACKGROUND

[0002] In the mask manufacturing field, the particles in the environment have a pivotal influence on the whole process technology and product yield, and the particles falling on the raw material in the photoetching process link will finally appear chromium residue on the product, which needs to spend a lot of time and effort to repair by laser ZAP, and even lead to product scrap seriously. In order to improve product quality, the control of particles in the whole process link is particularly important, among which, the risk of manual loading and unloading link in the process of up and down mask of each station is the largest. With the progress of science and technology, each mask manufacturer starts to use automatic handling trolley (AGV) for automatic taking and placing and transportation for large-size mask, instead of manual up and down mask handling to reduce particle pollution.

[0003] However, there is a constraint factor in the process of AGV taking and placing, that is, the program of grabbing mechanical arm is fixed, and the position of the object to be grabbed is relatively fixed, and there is no large deviation each time, otherwise there is the risk of colliding mask in mechanical hand taking and placing. For each process station, the shape and position of the raw material box are fixed, and the mechanical hand has no difficulty in grabbing. However, for the mask of raw material state, it is loaded by raw material box after being delivered to the factory, and it is necessary to unpack the mask of raw material from the box to the fixed raw material box loading by AGV loading. This process is generally called unpacking. The unpacking link operation process is as follows: placing raw material box on unpacking platform→adjusting the position of raw material box to center up and down and left and right→opening the upper cover of raw material box→setting different size grabbing plate for mechanical hand.

[0004] In the unpacking process, there are the following shortcomings:

[0005] 1. It is difficult to realize the center positioning of raw material box of different sizes. The conventional method is to independently develop a set of auxiliary positioning and placing platform mechanism for different sizes, and fixed buckle is used to limit the position of raw material box. The disadvantage is that multiple placing platforms need to be developed, and the development cost is high.

[0006] 2. In the unpacking process, after placing raw material box on unpacking platform, due to the gravity of large-size mask of more than one hundred kilograms and the friction between raw material box and platform, it is difficult to move, and the bottom of box body is easy to scratch, which affects the appearance of box body. INVENTION CONTENTS

[0007] The utility model wants to solve the technical problem that large size mask dismounts the box process and moves difficultly, and the dismounting platform cannot be applicable to the positioning of different size raw material box, aims at providing a kind of auxiliary positioning mechanism for mask automatic dismounting, solves the problem that large size mask dismounts the box process and moves difficultly, and the dismounting platform cannot be applicable to the positioning of different size raw material box.

[0008] The utility model realizes by following technical scheme:

[0009] A kind of auxiliary positioning mechanism for mask automatic dismounting, comprising:

[0010] Dismounting platform,

[0011] Sliding assembly is set on dismounting platform, for driving raw material box to slide on dismounting platform;

[0012] Positioning assembly includes horizontal positioning part and longitudinal positioning part, for the center positioning of four sides of raw material box.

[0013] Further optimization, the horizontal positioning part includes horizontal moving block, horizontal positioning pad and first driving piece,

[0014] The number of horizontal moving block is two, and two horizontal moving blocks are symmetrically arranged on the two sides of dismounting platform;

[0015] The number of horizontal positioning pad is multiple, and multiple horizontal positioning pads are respectively installed on two horizontal moving blocks.

[0016] The first driving piece is connected with two horizontal moving blocks, for driving two horizontal moving blocks to move towards or away from each other.

[0017] Further optimization, the longitudinal positioning part includes longitudinal moving block, longitudinal positioning pad and second driving piece,

[0018] The number of longitudinal moving block is two, and two longitudinal moving blocks are symmetrically arranged on the two sides of dismounting platform;

[0019] The number of longitudinal positioning pad is multiple, and multiple longitudinal positioning pads are respectively installed on two longitudinal moving blocks.

[0020] The second driving piece is connected with two longitudinal moving blocks, for driving two longitudinal moving blocks to move towards or away from each other.

[0021] Further optimization, the horizontal positioning pad and longitudinal positioning pad are both L-shaped structure.

[0022] Further optimization, one of the horizontal moving block and corresponding horizontal positioning pad is detachably connected.

[0023] Further optimization, the sliding assembly comprises a plurality of sliding parts, each sliding part comprises a roller and two support seats,

[0024] Two support seats are fixedly arranged on the unpacking platform,

[0025] The roller is arranged perpendicular to the feeding direction of the raw material box, and the roller is rotationally arranged between the two support seats.

[0026] Further optimization, a plurality of sliding parts are symmetrically arranged on both sides of the unpacking platform.

[0027] Further optimization, the bottom of the unpacking platform is provided with universal wheels.

[0028] Further optimization, the transverse positioning pad, the longitudinal positioning pad and the roller are all made of Teflon material.

[0029] Further optimization, one side of the unpacking platform is provided with a handrail.

[0030] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0031] 1. By setting the sliding assembly, the raw material box can be conveniently moved after being placed on the unpacking platform, which is beneficial to subsequent positioning of the raw material box to the center position and reduces the abrasion of the box bottom.

[0032] 2. By setting the positioning assembly, different sizes of raw material boxes can be centered and positioned by only one unpacking platform, which saves cost on the one hand, and on the other hand, the positioning assembly precisely positions the raw material box, which is beneficial to the safety of subsequent mechanical hand picking and placing and reduces the risk of collision. DETAILED DESCRIPTION

[0033] The drawings described herein are used to provide further understanding of the embodiments of the utility model, constitute a part of this application, and do not constitute a limitation to the embodiments of the utility model. In the drawings:

[0034] Figure 1 It is a structural schematic view of the embodiments of the utility model;

[0035] Figure 2 It is a structural schematic view of the connection relationship between the first driving member and the second driving member.

[0036] Markings in the drawings and corresponding names of parts:

[0037] 1 - unpacking platform, 2 - sliding part, 21 - roller, 22 - support seat, 3 - transverse positioning part, 31 - transverse moving block, 32 - transverse positioning pad, 4 - longitudinal positioning part, 41 - longitudinal moving block, 42 - longitudinal positioning pad, 5 - universal wheel, 6 - handrail, 71 - first bidirectional screw rod, 72 - rotating rod, 73 - first manual rocker arm, 74 - driving bevel gear, 75 - driven bevel gear, 76 - transverse support frame, 77 - first connecting block, 81 - second bidirectional screw rod, 82 - second manual rocker arm, 83 - longitudinal support frame, 84 - second connecting block. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the utility model is further described in detail below in combination with examples and drawings. The illustrative embodiment of the utility model and its description are only used to explain the utility model, and do not limit the utility model.

[0039] In the prior art, due to the oversize mask, an automatic guided vehicle (AGV) is needed to automatically take, place and transport, instead of manual up and down mask handling to reduce particle pollution. However, there is a constraint factor in the AGV taking and placing process, that is, the program of the grabbing mechanical arm is fixed, and the position of the grabbing object needs to be relatively fixed. However, in the unpacking process, the following disadvantages exist: in the unpacking process, after the raw material box is placed on the unpacking platform 1, due to the gravity of the oversize mask reaching hundreds of kilograms and the friction between the raw material box and the platform, it is difficult to move, and the bottom of the box is easy to scratch, affecting the appearance of the box.

[0040] The embodiment provides an auxiliary positioning mechanism for automatic unpacking of a mask, as shown in Figures 1-2 The auxiliary positioning mechanism comprises a unpacking platform 1, a sliding assembly and a handrail 6.

[0041] The unpacking platform 1 is used for supporting and placing a raw material box, and the raw material box is positioned and fixed on the unpacking platform 1 to be moved to a mechanical hand position for accurate grabbing.

[0042] The sliding assembly is arranged on the unpacking platform 1 and is used for driving the raw material box to slide on the unpacking platform 1. Since the gravity of the oversize mask reaches hundreds of kilograms and the friction between the raw material box and the unpacking platform 1 is large, it is difficult to move. The sliding assembly in the embodiment comprises a plurality of sliding parts 2, each sliding part 2 comprises a roller 21 and two support seats 22,

[0043] The two support seats 22 are fixedly arranged on the unpacking platform 1.

[0044] The roller 21 is arranged perpendicular to the feeding direction of the raw material box, and the roller 21 is rotationally arranged between the two support seats 22.

[0045] Specifically, the arrangement of the rollers 21 reduces the friction between the raw material box and the unpacking platform 1, and the gaps between the rollers 21 are arranged to ensure the stable movement of the raw material box while reducing the number of rollers 21 and saving costs. In addition, due to the large size of the raw material box, a plurality of sliding parts 2 are symmetrically arranged on both sides of the unpacking platform 1 to facilitate the stable movement of the raw material box. In the embodiment, the number of sliding parts 2 is 10, that is, there are 5 sliding parts 2 arranged on each side of the unpacking platform 1. It can be known that the number of sliding parts 2 can be arranged according to the specific size of the unpacking platform 1 and the raw material box.

[0046] The positioning assembly includes a transverse positioning part 3 and a longitudinal positioning part 4 for center positioning of the four sides of the raw material box. Specifically, the transverse positioning part 3 positions the left and right sides of the raw material box, and the longitudinal positioning part 4 positions the front and rear sides of the raw material box.

[0047] Further, the unpacking platform 1 is provided with universal wheels 5 at the bottom. During unpacking, the channel for grabbing by the mechanical hand is narrow, and the raw material box needs to be placed in a relatively spacious area before being transferred to the unpacking platform 1, and then transferred to the position to be grabbed. To this end, the embodiment ensures the convenient transportation of the device by providing universal wheels 5 at the bottom of the unpacking platform 1, thereby facilitating the operator to load the raw material box to the transfer channel of the mechanical hand to solve the existing problem.

[0048] Further, the transverse positioning pad 32, the longitudinal positioning pad 42 and the roller 21 are all made of Teflon material. Teflon material has excellent wear resistance under high load and can withstand high-strength wear and impact to avoid scratching of the box body.

[0049] Further, the unpacking platform 1 is provided with a handrail 6 on one side. In the embodiment, the handrail 6 is arranged on the left side of the unpacking platform 1, and the handrail 6 has a certain height to facilitate the operator to hold and push.

[0050] Embodiment 2

[0051] In the prior art, it is difficult to center the raw material box of different sizes. The conventional method is to independently develop a set of auxiliary positioning and placing platform mechanism for different sizes, and fixed buckles are used to limit the position of the raw material box. The disadvantage is that multiple placing platforms need to be developed, which has high development cost.

[0052] To solve the above-mentioned defects, the embodiment is provided with a transverse positioning part 3 and a longitudinal positioning part 4.

[0053] The transverse positioning part 3 includes a transverse moving block 31, a transverse positioning pad 32 and a first driving member,

[0054] There are two lateral moving blocks 31, which are symmetrically arranged on both sides of the unpacking platform 1;

[0055] There are multiple lateral positioning pads 32, and the multiple lateral positioning pads 32 are respectively installed on the two lateral moving blocks 31. Specifically, two lateral positioning pads 32 are installed on the top of each lateral moving block 31.

[0056] The first driving member is connected to the two lateral moving blocks 31 and is used to drive the two lateral moving blocks 31 to move toward or away from each other.

[0057] Specifically, after the material box is placed on the unpacking platform 1, the first drive member is activated, and the two lateral movement blocks 31 begin to move toward each other, driving the lateral positioning pads 32 to move and contact the material box, pushing the material box to move and adjust to the center position. It can be seen that because the two lateral movement blocks 31 are symmetrically arranged, the two lateral movement blocks 31 always move symmetrically with the center position of the unpacking platform 1 as the symmetrical point, thereby ensuring the center positioning of the material box.

[0058] In addition, the first driving member includes a first bidirectional screw rod 71, a rotating rod 72, a transverse support frame 76 and a first manual rocker arm 73.

[0059] The rotating rod 72 and the first bidirectional screw rod 71 are arranged vertically, with the rotating rod 72 located above the first bidirectional screw rod 71. One end of the rotating rod 72 is connected to the first manual rocker arm 73. The rotating rod 72 and the first bidirectional screw rod 71 are transmission-connected in the following manner: the rotating rod 72 is provided with a driving bevel gear 74, and the first bidirectional screw rod 71 is provided with a driven bevel gear 75 that meshes with the driving bevel gear 74. The two transverse moving blocks 31 both slide on a transverse support frame 76, which is arranged on the unpacking platform 1.

[0060] In addition, the first bidirectional screw rod 71 is rotatably set at the bottom of the transverse support frame 76. The transverse support frame 76 is provided with a working hole. The first bidirectional screw rod 71 is transmission-connected to the rotating rod 72 through the working hole. The threads on both sides of the first bidirectional screw rod 71 have opposite rotation directions and are respectively threadedly connected to the two transverse moving blocks 31. Specifically, a first connecting block 77 is provided on one side of the two transverse moving blocks 31. The two first connecting blocks 77 are both threadedly connected to the first bidirectional screw rod 71 across the transverse support frame 76.

[0061] Thus, when the first bidirectional screw rod 71 rotates, the two transverse moving blocks 31 move toward each other. Conversely, when the first bidirectional screw rod 71 rotates in the opposite direction, the two transverse moving blocks 31 move away from each other.

[0062] Furthermore, the longitudinal positioning portion 4 includes a longitudinal moving block 41, a longitudinal positioning pad 42 and a second driving member.

[0063] The number of the longitudinal moving blocks 41 is two, and the two longitudinal moving blocks 41 are symmetrically arranged on both sides of the unpacking platform 1.

[0064] The number of the longitudinal positioning pads 42 is multiple, and the multiple longitudinal positioning pads 42 are respectively installed on the two longitudinal moving blocks 41.

[0065] The second driving member is connected with the two longitudinal moving blocks 41, and is used for driving the two longitudinal moving blocks 41 to move towards or away from each other.

[0066] Specifically, after the raw material box is placed on the unpacking platform 1, the second driving member is started, and the two longitudinal moving blocks start to move towards each other, drive the longitudinal positioning pads 42 to move and abut against the raw material box and push the raw material box to move and adjust to the central position. It can be known that, since the two longitudinal moving blocks 41 are symmetrically arranged, the two longitudinal moving blocks 41 always align with the central position of the unpacking platform 1 as the symmetric point, so as to ensure the central positioning of the front and rear positions of the raw material box.

[0067] In addition, the second driving member includes a second bidirectional screw rod 81, a longitudinal supporting frame 83 and a second manual rocker arm 82,

[0068] Specifically, the second bidirectional screw rod 81 is arranged in parallel with the rotating rod 72, the rotating rod 72 and the second bidirectional screw rod 81 are rotationally arranged in the longitudinal supporting frame 83, the longitudinal supporting frame 83 penetrates through the central frame and the longitudinal supporting frame 83 is located above the transverse supporting frame 76, and in addition, the second manual rocker arm 82 is arranged at one end of the second bidirectional screw rod 81.

[0069] In addition, the two sides of the second bidirectional screw rod 81 are oppositely threaded, and are respectively threadedly connected with the two longitudinal moving blocks 41. Specifically, the two sides of the two transverse moving blocks 31 are provided with second connecting blocks, and one of the second connecting blocks penetrates through the transverse supporting frame 76 and is threadedly connected with the first bidirectional screw rod 71. Thus, when the second bidirectional screw rod 81 rotates, the two longitudinal moving blocks move towards each other. Conversely, when the second bidirectional screw rod 81 reversely rotates, the two longitudinal moving blocks 41 move away from each other.

[0070] It can be known that, through the transmission of the rotating rod 72 and the first bidirectional screw rod 71, the first manual rocker arm 73 and the second manual rocker arm 82 are in the same direction, which ensures the convenience of the operation of the worker.

[0071] In addition, in order to ensure that the transverse positioning pad 32 can abut against the raw material box and push the raw material box to move after moving, the transverse positioning pad 32 and the longitudinal positioning pad 42 in the embodiment are both L-shaped structures.

[0072] Further, one of the lateral moving blocks 31 is detachably connected with the corresponding lateral positioning pad 32. Since the raw material box needs to enter from one side of the unpacking platform 1, in order to facilitate the safe entry of the raw material box, in the embodiment, as shown in the drawings, the lateral positioning pad 32 on the lateral moving block 31 on the right side is removed before the raw material box is placed in, and after the raw material box is placed in, the lateral positioning pad 32 is reinstalled. Specifically, the detachable connection can be clamping, bonding, threaded connection and the like. Figure 1

[0073] The above specific embodiments further specifically describe the purpose, technical scheme and beneficial effects of the utility model, and it should be understood that the above description is only a specific embodiment of the utility model and is not used to limit the protection scope of the utility model. Any modification, equivalent replacement, improvement and the like within the spirit and principle of the utility model should be included in the protection scope of the utility model.​

Claims

1. An auxiliary positioning mechanism for automatic unpacking of a mask, characterized in that, The utility model relates to a box unloading platform, which comprises a box unloading platform, a sliding assembly arranged on the box unloading platform and used to drive a raw material box to slide on the box unloading platform, and a positioning assembly comprising a transverse positioning part and a longitudinal positioning part and used to center-position four sides of the raw material box. The transverse positioning part comprises a transverse moving block, a plurality of transverse positioning pads and a first driving member, The two transverse moving blocks are symmetrically arranged on both sides of the box unloading platform. The plurality of transverse positioning pads are respectively arranged on the two transverse moving blocks.

2. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 1, characterized in that, The first driving member is connected with the two transverse moving blocks and used to drive the two transverse moving blocks to move towards or away from each other. The longitudinal positioning part comprises a longitudinal moving block, a plurality of longitudinal positioning pads and a second driving member, The two longitudinal moving blocks are symmetrically arranged on both sides of the box unloading platform. The plurality of longitudinal positioning pads are respectively arranged on the two longitudinal moving blocks.

3. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 2, characterized in that, The second driving member is connected with the two longitudinal moving blocks and used to drive the two longitudinal moving blocks to move towards or away from each other. The transverse positioning pads and the longitudinal positioning pads are both in L-shaped structure. One of the transverse moving blocks is detachably connected with the corresponding transverse positioning pad. The sliding assembly comprises a plurality of sliding parts, and the sliding parts are symmetrically arranged on both sides of the box unloading platform.

4. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 3, characterized in that, Each sliding part comprises a roller and two support seats, 5. The auxiliary positioning mechanism for automatic unpacking of mask plates according to claim 2 or 4, characterized in that, The two support seats are fixedly arranged on the box unloading platform.

6. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 4, characterized in that, The roller is arranged perpendicularly to the feeding direction of the raw material box, and the roller is rotatably arranged between the two support seats.

7. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 6, characterized in that, The box unloading platform is provided with universal wheels at the bottom. The transverse positioning pads, the longitudinal positioning pads and the rollers are all made of Teflon material. The box unloading platform is provided with a handrail on one side.

8. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 1, characterized in that, ​ 9. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 6, characterized in that, ​ 10. The auxiliary positioning mechanism for automatic unpacking of mask version according to claim 1, characterized in that, ​