Conveying device and working equipment

Abstract

The utility model relates to a conveying device and operation equipment. The conveying device is suitable for conveying an object to be operated and is provided with a track mechanism and an electrostatic detector. The rail mechanism is provided with a first rail frame, a second rail frame and a conveying unit, wherein the first rail frame and the second rail frame are spaced from each other and matched to define a conveying flow path, and the conveying unit conveys the object to be operated along the conveying flow path. The electrostatic detector is arranged on the conveying flow path. Due to the fact that the electrostatic detector is arranged on the conveying flow path, the electrostatic state of the to-be-operated object can be known, whether the to-be-operated object carries static electricity or not can be confirmed, and the to-be-operated object is prevented from being damaged due to the static electricity.

Description

TECHNICAL FIELD

[0001] The utility model relates to an electronic component production device, in particular to a conveying device and an operation device. BACKGROUND

[0002] In the production process of electronic components such as integrated circuits, electronic components need to be transported between different workstations to facilitate different operation stages. With the miniaturization and precision of electronic components, the electrostatic discharge (ESD) phenomenon caused by weak static electricity is becoming more and more powerful. In order to avoid the destruction of electronic components by static electricity, the current method is to apply a static electricity elimination procedure to electronic components by a static electricity eliminator during transportation. However, after the static electricity elimination procedure is implemented, electronic components may continue to accumulate static electricity during transportation or operation, or the static electricity eliminator may malfunction and not eliminate static electricity normally. As a result, since the static electricity of electronic components is not effectively eliminated or the static electricity eliminator does not work normally, there is no further mechanism to confirm whether the static electricity is effectively eliminated, which may still cause the destruction of electronic components by static electricity due to improper elimination of static electricity, which needs to be improved. SUMMARY

[0003] The utility model aims at: improve at least one shortcoming of prior art.

[0004] The conveying device of the utility model is suitable for conveying a workpiece, and is provided with a track mechanism and a static electricity detector.

[0005] The track mechanism is provided with a first track frame and a second track frame which are spaced apart and cooperated to define a conveying flow path, and a conveying unit for conveying the workpiece along the conveying flow path. The static electricity detector is arranged on the conveying flow path.

[0006] The utility model has the advantages that: since the static electricity detector is arranged on the conveying flow path, the static state of the workpiece can be known, so that it can be confirmed whether the static electricity is eliminated.

[0007] The utility model aims at: improve at least one shortcoming of prior art.

[0008] The operation device of the utility model is provided with the conveying device and an operation device on a machine table. The operation device is provided with an operation head for performing a preset operation on the workpiece, and a moving mechanism for driving the operation head to move in multiple directions relative to the conveying device.

[0009] The utility model discloses a conveying device and operation equipment, and the utility model discloses a static electricity detector is arranged to the conveying device of operation equipment, and the static electricity state of the object to be operated is confirmed before the preset operation is executed to the object to be operated by the operation head, and the subsequent judgment whether the preset operation is carried out is provided. BRIEF DESCRIPTION OF DRAWINGS

[0010] The other features and advantages of the utility model will be clearly presented in the embodiments with reference to the drawings, wherein:

[0011] Figure 1 It is a first embodiment block diagram of the conveying device and operation equipment of the utility model;

[0012] Figure 2 It is a conveying device in the first embodiment of the utility model and the perspective view of the object to be operated that the conveying device is suitable for conveying;

[0013] Figure 3 It is the plan view of the conveying device and the object to be operated of the utility model;

[0014] Figure 4 It is the incomplete perspective view of the static electricity detector of the conveying device of the utility model, and the detection surface of the static electricity detector is upwards;

[0015] Figure 5 It is the perspective view of a second embodiment of the conveying device and operation equipment of the utility model;

[0016] Figure 6 It is the plan view of the conveying device and the object to be operated in the second embodiment of the utility model;

[0017] Figure 7 It is the block diagram of a third embodiment of the conveying device and operation equipment of the utility model;

[0018] Figure 8 It is the schematic diagram of the relative relationship of the static electricity eliminator, the static electricity detector, an ion monitoring element and the object to be operated in the third embodiment of the utility model;

[0019] Figure 9 It is the state perspective view that the static electricity detector and the ion monitoring element are combined together of the utility model;

[0020] Figure 10 It is the perspective exploded view of the assembly relationship of the static electricity detector and the ion monitoring element of the utility model;

[0021] Figure 11is a fourth embodiment of the conveying device and the working equipment of the utility model, the relative relation of the static electricity eliminator, the static electricity detector, the ion monitoring element and the to-be-worked object is shown in the diagram;

[0022] Figure 12 is a state perspective view of the static electricity detector and the ion monitoring element combined together of the utility model;

[0023] Figure 13 is the assembly relation of the static electricity detector and the ion monitoring element, and the detection surface of the static electricity detector is downward in the perspective exploded view;

[0024] Figure 14 is the schematic diagram of the plurality of conveying devices connected in series with each other of the utility model;

[0025] Figure 15 is the schematic diagram of the plurality of conveying devices connected in parallel with each other of the utility model; and

[0026] Figure 16 is the schematic diagram of the plurality of conveying devices connected in series and in parallel with each other of the utility model.

[0027] Mark explanation:

[0028] 1: working equipment

[0029] 10: machine table

[0030] 11: conveying device

[0031] 12: working device

[0032] 121: working head

[0033] 122: moving mechanism

[0034] 13: control device

[0035] 14: alarm device

[0036] 15: static electricity eliminator

[0037] 2: to-be-worked object

[0038] 21: carrier disc

[0039] 211: disc rim

[0040] 22: workpiece

[0041] 221: base plate

[0042] 222: wafer

[0043] 3: track mechanism

[0044] 31: first track frame

[0045] 32: second rail

[0046] 33: conveying unit

[0047] 331: pulley set

[0048] 331a: pulley

[0049] 332: transmission belt set

[0050] 332a: transmission belt

[0051] 333: coupling

[0052] 34: cross rail

[0053] 35: support

[0054] 41: electrostatic detector

[0055] 411: detection surface

[0056] 42: ion monitoring element

[0057] 5: drive mechanism

[0058] 51: drive motor

[0059] 52: first drive pulley

[0060] 53: second drive pulley

[0061] 54: drive belt

[0062] 6: stop mechanism

[0063] 61: drive source

[0064] 62: stop member

[0065] 7: side push mechanism

[0066] 71: power source

[0067] 72: side push member

[0068] D11: conveying direction

[0069] H11: conveying height

[0070] H12: set height

[0071] P1: conveying flow path

[0072] P11: infeed area

[0073] P12: outfeed area

[0074] P13: work area DETAILED DESCRIPTION

[0075] In the following description, similar or identical elements will be denoted by the same reference numerals.

[0076] Referring to Figure 1 , 2 , in a first embodiment of the conveying device and the work equipment of the present application, a work equipment 1 is adapted to process a workpiece 2 (see Figure 2 ).

[0077] The workpiece 2 is provided with a rectangular carrier plate 21, and a workpiece 22 disposed on the carrier plate 21. The carrier plate 21 comprises two plate rims 211 spaced apart left and right and extending longitudinally forward and backward. The workpiece 22 is provided with a substrate 221, and a wafer 222 disposed on the substrate 221.

[0078] In other embodiments of the present application, the workpiece 2 can also be provided with a plurality of the workpieces 22 located on the carrier plate 21, and the workpiece 22 can also be provided with a plurality of the wafers 222 located on the substrate 221.

[0079] The work equipment 1 is provided on a machine table 10 with a conveying device 11 capable of conveying the workpiece 2, a work device 12 capable of performing a predetermined work on the workpiece 2, a control device 13 signal-connected to the conveying device 11 and the work device 12, and an alarm device 14 signal-connected to the control device 13.

[0080] Referring to Figure 1 , 2 , 3, the conveying device 11 is provided with a track mechanism 3 capable of conveying the workpiece 2 along a conveying flow path P1, an electrostatic detector 41 located in the conveying flow path P1, a driving mechanism 5 capable of driving the track mechanism 3 to convey the workpiece 2, and a stop mechanism 6 and a side pushing mechanism 7 capable of stopping or pushing the workpiece 2 located on the conveying flow path P1, respectively.

[0081] The track mechanism 3 is capable of conveying the workpiece 2 along a conveying direction D11. The track mechanism 3 is provided with a first rail frame 31 and a second rail frame 32 spaced apart left and right from each other and extending along the conveying direction D11, and a conveying unit 33 capable of conveying the workpiece 2 along the conveying flow path P1.

[0082] The first rail frame 31 and the second rail frame 32 cooperatively define the conveying flow path P1 extending along the conveying direction D11. The conveying flow path P1 is like Figure 3As shown, an inlet area P11 and an outlet area P12 are provided, which are spaced apart from each other and allow the workpiece 2 to enter and exit, and a work area P13 is provided between the inlet area P11 and the outlet area P12. With reference to the conveying direction D11, the inlet area P11, the work area P13, and the outlet area P12 are located upstream, in the middle, and downstream, respectively.

[0083] Each of the first rail frame 31 and the second rail frame 32 is provided with a cross frame 34 extending transversely along the conveying direction D11, and two supports 35 extending upright and spaced apart from each other and cooperating to support the cross frame 34.

[0084] The conveying unit 33 is provided with a pulley set 331 located on the first rail frame 31 and the second rail frame 32, a transmission belt set 332 provided on the pulley set 331, and a connecting shaft 333 extending left and right between the first rail frame 31 and the second rail frame 32.

[0085] The pulley set 331 is provided with a plurality of pulleys 331a located on the cross frame 34 of the first rail frame 31 and the cross frame 34 of the second rail frame 32. Each of the pulleys 331a is arranged on the cross frame 34 in an axial left-right manner.

[0086] The transmission belt set 332 is provided with two transmission belts 332a annularly arranged on the pulleys 331a and spaced apart from each other left and right. The transmission belts 332a cooperatively carry the carrier disc 21 of the workpiece 2, and carry the workpiece 2 at a conveying height H11 (see Figure 2 ). Specifically, the disc rims 211 of the carrier disc 21 spaced apart left and right are arranged on the transmission belts 332a spaced apart left and right, respectively. Each of the transmission belts 332a can be driven by the pulleys 331a on the respective cross frame 34 to convey the workpiece 2 along the conveying direction D11 together with the other transmission belt 332a.

[0087] The connecting shaft 333 is inserted into two of the pulleys 331a spaced apart left and right and opposite to each other (due to the viewing angle, Figure 2 only one of the pulleys 331a is shown), so that the pulleys 331a rotate synchronously with each other, thereby making the transmission belts 332a drive the carrier disc 21 to move forward at a consistent speed along the conveying direction D11.

[0088] Referring to Figure 2 , 3 , 4, the electrostatic detector 41 is arranged on the cross frame 34 of the second rail frame 32 and is provided with a detection surface 411 facing upward.

[0089] A setting height H12 (see Figure 2) less than the conveying height H11 of the workpiece 2 being conveyed (see Figure 2 ). That is, the electrostatic detector 41 is lower than the workpiece 2. In addition, the electrostatic detector 41 is also lower than the drive belt 332a. In the first embodiment, the electrostatic detector 41 is disposed in the infeed area P11 of the conveying flow path P1, and since the disposition height H12 of the electrostatic detector 41 is less than the conveying height H11 of the workpiece 2 being conveyed, and since the detection surface 411 of the electrostatic detector 41 faces upward, the electrostatic detector 41 can detect an electrostatic state of the workpiece 2 upwardly.

[0090] When the electrostatic detector 41 is used alone, if the workpiece 2 has static electricity, the electrostatic detector 41 can measure an electrostatic value of the static electricity carried by the workpiece 2, and if the workpiece 2 does not have static electricity, the electrostatic value measured by the electrostatic detector 41 will be zero. That is, the electrostatic detector 41 can detect whether the workpiece 2 is in a state of having static electricity or not having static electricity. In addition, since static electricity can be controlled within an allowable range to avoid electrostatic damage to the workpiece 22, in other embodiments of the present application, the measured electrostatic value can be transmitted to the control device 13 for the control device 13 to determine whether it meets a preset electrostatic value.

[0091] Referring to Figure 1 , 2 , 3, the drive mechanism 5 can drive the pulley set 331 to rotate to drive the drive belt set 332 to convey the workpiece 2 in the conveying direction D11. The drive mechanism 5 includes a drive motor 51, a first drive pulley 52 (see Figure 5 , a second drive pulley 53 that moves together with one of the pulleys 331a, and a drive belt 54 that is disposed around the first drive pulley 52 and the second drive pulley 53.

[0092] The second drive pulley 53 can drive one of the pulleys 331a located on one side of the coupling shaft 333 to rotate. In this way, the power of the drive motor 51 can be transmitted to the pulley 331a on the other side of the coupling shaft 333 through the coupling shaft 333.

[0093] The stop mechanism 6 can selectively stop the workpiece 2 in the work area P13 or allow the workpiece 2 to pass through the work area P13. The stop mechanism 6 is provided with a drive source 61 (see Figure 2), and a stopper 62 that can be driven by the driving source 61 to move up and down. The stopper 62 is located beside one of the transmission belts 332a corresponding to the stopper 62 without affecting the operation of the transmission belt 332a.

[0094] The stopper 62 can be switched between a first standby position and a stop position. In the first standby position, the top end of the stopper 62 is lower than the workpiece 2 located at the conveying height H11, so as not to block the workpiece 2 from being conveyed in the conveying direction D11, allowing the workpiece 2 to pass through the work area P13. In the stop position, the stopper 62 is moved upward to protrude above the workpiece 2 located at the conveying height H11, so as to stop the workpiece 2 in the work area P13.

[0095] The side pushing mechanism 7 is arranged on the second rail frame 32 and can push the workpiece 2 against the first rail frame 31, so that the workpiece 2 abuts against the cross frame 34 of the first rail frame 31. In other embodiments of the present application, the side pushing mechanism 7 can also be arranged on the first rail frame 31 and push the workpiece 2 against the second rail frame 32. The side pushing mechanism 7 is provided with a power source 71 arranged on the cross frame 34 of the second rail frame 32, and a side pushing piece 72 that can be driven by the power source 71 to move left and right.

[0096] The side pushing piece 72 can be switched between a second standby position and a side pushing position. In the second standby position, the side pushing piece 72 does not protrude to the left of the second rail frame 32. In the side pushing position, the side pushing piece 72 protrudes to the left towards the first rail frame 31 and pushes the workpiece 2 against the first rail frame 31.

[0097] Referring to Figure 1 The work device 12 is provided with a work head 121 that can perform the preset work on the workpiece 22 of the workpiece 2, and a moving mechanism 122 that can drive the work head 121 to move in multiple directions relative to the conveying device 11.

[0098] The work head 121 can be a liquid material coating head, a cover mounting head, or a thermal interface material mounting head. Therefore, the preset work can be a work of coating liquid material on the workpiece 22, a work of extracting a heat dissipation cover and mounting it on the workpiece 22, or a work of attaching a piece of thermal interface material on the workpiece 22. The moving mechanism 122 can be a three-axis sliding table / gantry sliding rail, for example.

[0099] The control device 13 can control the work device 12 to perform the preset work or control the alarm device 14 to issue an alarm according to the detection result (the electrostatic state) detected by the electrostatic detector 41.

[0100] For example, when the static electricity detector 41 detects that the static electricity value of the object 2 meets a preset value (e.g., no static electricity (static electricity value = 0) or the static electricity value is less than the static electricity preset value), the control device 13 can control the operation device 12 to perform the preset operation on the object 2. For another example, when the static electricity detector 41 detects that the static electricity value of the object 2 does not meet the preset value (e.g., static electricity (static electricity value ≠ 0) or the static electricity value is greater than the static electricity preset value), the control device 13 can control the alarm device 14 to sound an alarm. The alarm can be a warning sound (e.g., a buzzer or beep) or a warning message displayed on a display.

[0101] The characteristic of the first embodiment is that the static electricity detector 41 is provided in the feeding area P11 of the conveying flow path P1, which can confirm whether the object 2 to be processed conveyed from other workstations has static electricity or whether the static electricity value of the object 2 to be processed meets the preset value, so as to further determine whether the control device 13 controls the operating device 12 to perform the preset operation in the operating area P13, or controls the alarm device 14 to sound an alarm.

[0102] See Figure 5 、 6 In a second embodiment of the present invention, the work equipment 1 is similar to the work equipment 1 of the first embodiment, except that the conveying device 11 is different. Specifically, the coupling 333 of the conveying unit 33 of the track mechanism 3 and the drive mechanism 5 are disposed in the inlet area P11 of the conveying flow path P1, while the static electricity detector 41 is disposed in the outlet area P12 of the conveying flow path P1. After the preset operation is completed, this second embodiment can confirm whether the workpiece 2 is charged or whether the static electricity value of the workpiece 2 meets the preset static electricity value. If it is charged or does not meet the preset static electricity value, the workpiece 2 can be stopped from being transported to the next workstation.

[0103] See Figures 7 to 10 In a third embodiment of the present utility model, the difference from the first embodiment is that: in the third embodiment, the operation equipment 1 is further provided with a device capable of eliminating the object to be operated 2 (see Figure 2 ) is provided with an electrostatic eliminator 15, and the conveying device 11 is further provided with an ion monitoring element 42 used in conjunction with the electrostatic detector 41.

[0104] The static eliminator 15 can be arranged on the frame of the working equipment 1 or on the moving mechanism 122. Figure 8The interval position is above the conveying path P1 and above the electrostatic detector 41 and the ion monitoring element 42. In this way, the electrostatic eliminator 15 can be used to eliminate the static electricity of the object 2 passing below the electrostatic eliminator 15.

[0105] The ion monitoring element 42 is a metal plate in the shape of an L-shaped plate. When the ion monitoring element 42 is used in combination with the electrostatic detector 41, the electrostatic detector 41 and the ion monitoring element 42 can be used to cooperatively detect whether the electrostatic eliminator 15 is normally operating. For example, when the electrostatic eliminator 15 is in a state of continuously eliminating static electricity, the electrostatic detector 41 located below the electrostatic eliminator 15 will measure the static electricity value of the ion monitoring element 42 to be 0 or less than the static electricity preset value, and when the electrostatic eliminator 15 is out of action, the electrostatic detector 41 will measure the static electricity value of the ion monitoring element 42 to be not 0 or greater than the static electricity preset value. Whether the electrostatic eliminator 15 is normally operating will affect the static electricity state of the object 2. At this time, the control device 13 can control the alarm device 14 to issue an alarm.

[0106] Referring to Figures 11 to 13 , a fourth embodiment of the present application is similar to the third embodiment, except that the electrostatic eliminator 15 is arranged on the table top of the work equipment 1 or on the track mechanism 3 below the position where the object 2 will pass, and the electrostatic detector 41 and the ion monitoring element 42 are located between the position where the object 2 will pass and the electrostatic eliminator 15. In addition, in the fourth embodiment, the detection surface 411 of the electrostatic detector 41 faces downward toward the ion monitoring element 42. Since in the fourth embodiment, the detection surface 411 faces the electrostatic eliminator 15, and the ion monitoring element 42 is also located between the detection surface 411 and the electrostatic eliminator 15, the electrostatic detector 41 and the ion monitoring element 42 can also cooperatively detect whether the electrostatic eliminator 15 is normally operating.

[0107] Referring to Figure 14 , 15 , 16, in the implementation of the present application, the work equipment 1 can include a plurality of the conveying devices 11. As shown in the rectangular blocks, the positions of the conveying devices 11 are schematically shown. In the implementation, the conveying devices 11 can be arranged in series with each other as shown in Figure 14 , or can be arranged in parallel with each other or side by side as shown in Figure 15 , or can be arranged as shown in Figure 16The shown series connection and parallel connection (side by side) are provided. In addition, the conveying devices 11 connected in series and / or in parallel with each other are not limited to the same conveying devices 11. That is, different conveying devices 11 of the aforementioned different embodiments can be connected in series and / or in parallel with each other.

[0108] In summary, the beneficial effects of the conveying device and the working equipment of the present application are that the electrostatic detector 41 is arranged on the conveying flow path P1, so that the electrostatic state of the object to be worked 2 can be known, and it can be confirmed whether the electrostatic is indeed eliminated, and the yield of the overall process is improved.

[0109] The above is only an embodiment of the present application, and cannot limit the patent application range of the present application. The simple equivalent changes and modifications of the patent application range and the patent specification of the present application should also be covered by the patent application range of the present application.

Claims

1. A conveyor device adapted to convey an object to be worked, characterized in that, The application includes: a track mechanism, provided with a first track frame and a second track frame which are spaced apart and cooperatively define a conveying flow path, and a conveying unit for conveying the workpiece along the conveying flow path; and an electrostatic detector arranged on the conveying flow path.

2. The delivery device of claim 1, wherein, The conveying unit is provided with a pulley set arranged on the first track frame and the second track frame, and a transmission belt set arranged on the pulley set. The conveying device is further provided with a driving mechanism capable of driving the pulley set to rotate and drive the transmission belt set to convey the workpiece along the conveying flow path.

3. The delivery device of claim 1, wherein, The conveying unit carries the workpiece at a conveying height, and the electrostatic detector is arranged at a height lower than the conveying height.

4. The delivery device of claim 1, wherein, The conveying flow path is provided with an inlet area and an outlet area for the workpiece to enter and exit, and the electrostatic detector is arranged in the inlet area or the outlet area.

5. The delivery device of claim 4, wherein, The conveying flow path is further provided with a work area between the inlet area and the outlet area, and the conveying device is further provided with a blocking mechanism which selectively blocks the workpiece in the work area or allows the workpiece to pass through the work area.

6. The delivery device of claim 5, wherein, One of the first track frame and the second track frame is provided with a side pushing mechanism which pushes the workpiece in the work area towards the other one of the first track frame and the second track frame.

7. The delivery device of claim 1, wherein, The electrostatic detector is provided with a detection surface facing upward, so that the electrostatic detector detects the electrostatic state of the workpiece.

8. The delivery device of claim 1, wherein, The conveying device is further provided with an ion monitoring element, and the electrostatic detector is provided with a detection surface facing the ion monitoring element, the detection surface facing upward and detecting the electrostatic state of the ion monitoring element.

9. The delivery device of claim 1, wherein, The conveying device is further provided with an ion monitoring element, and the electrostatic detector is provided with a detection surface facing the ion monitoring element, the detection surface facing downward and detecting the electrostatic state of the ion monitoring element.

10. A work apparatus characterized by comprising: The application includes: a machine table; at least one conveying device as claimed in any one of claims 1 to 9 arranged on the machine table; a work device arranged on the machine table and provided with a work head for performing a predetermined work on the workpiece, and a moving mechanism for moving the work head relative to the at least one conveying device in multiple directions.

11. The work apparatus according to claim 10, characterized by The application further includes: a control device provided with signal connections to the at least one conveying device and the work device, and an alarm device signal connected to the control device, wherein the control device controls the work device to perform the predetermined work or controls the alarm device to issue an alarm according to the detection result of the electrostatic detector.

12. The work apparatus according to claim 10, characterized by The application further includes: a plurality of the conveying devices arranged in at least one of a series connection and a parallel connection.

13. The work apparatus according to claim 10, characterized by The work head is a liquid material coating head, a cap placement head, or a thermal interface material pressing head.

14. The work apparatus according to claim 10, characterized by The workpiece is provided with a carrier plate, and at least one workpiece arranged on the carrier plate, and the at least one workpiece is provided with a substrate and at least one wafer arranged on the substrate.

15. The work apparatus according to claim 10, characterized by The work device is further provided with an electrostatic eliminator for eliminating the electrostatic charge on the workpiece.

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