Apparatus for manufacturing display device

Abstract

There is provided an apparatus for manufacturing a display device, the apparatus including: a stage on which a display substrate is disposed; an inspection portion disposed on the stage to inspect the display substrate; and a first horizontal moving portion configured to linearly move the stage in a first direction, where the first horizontal moving portion includes a lower module and an upper frame that linearly moves in the first direction relative to the lower module.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority from Korean Patent Application No. 10-2023-0115273 filed on August 31, 2023, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] One or more embodiments relate to an apparatus, and more particularly, to an apparatus for manufacturing a display device. Background Art

[0004] Typically, display devices can be used in mobile devices such as smart phones, laptop computers, digital cameras, camcorders, portable information terminals, laptop computers and tablet personal computers, or electronic devices such as desktop computers, televisions (TVs), outdoor billboards, exhibition display devices, automobile dashboards and head-up displays (HUDs).

[0005] In a display device, multiple functional layers are formed on a substrate through various manufacturing processes. During the manufacturing process, defects may exist in the multiple functional layers stacked on the substrate. Various inspection systems can be used to inspect these defects. Utility Model Content

[0006] One or more embodiments provide an apparatus for manufacturing a display device, in which durability of the apparatus is improved and lubricant can be easily supplied to the apparatus.

[0007] However, these features are exemplary, and the present disclosure is not limited thereto.

[0008] Additional aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the presented embodiments of the disclosure.

[0009] According to aspects of the present disclosure, an apparatus for manufacturing a display device includes a stage on which a display substrate is disposed, an inspection part disposed on the stage to inspect the display substrate, and a first horizontal moving part configured to linearly move the stage in a first direction. The first horizontal moving part includes a lower module and an upper frame configured to linearly move in the first direction with respect to the lower module. The lower module includes a frame part providing a frame space, a ball screw part of which at least a portion is disposed in the frame space and includes a screw shaft extending in the first direction and a nut part coupled to the screw shaft, a pair of rail parts extending in the first direction and fixed to the frame part to be spaced apart from each other in a second direction crossing the first direction, a pair of first supports connected to the pair of rail parts so as to linearly move in the first direction, and a driving part connected to the screw shaft to rotate the screw shaft about an axis extending in the first direction. The upper frame includes a supply flow path that supplies a lubricant to the nut part and each of the pair of first supports at the same time, and is detachably connected to the nut part and each of the pair of first supports.

[0010] The nut part can linearly move in the first direction as the driving part rotates the screw shaft.

[0011] Power of the driving part can be transmitted in an order of the screw shaft, the nut part, the upper frame, and the pair of first supports.

[0012] The supply flow path can include a first flow path, a second flow path branched from the first flow path and connected to the nut part, and a third flow path branched from the first flow path and connected to each of the pair of first supports.

[0013] The first flow path can extend in the first direction, and the second flow path can extend in a third direction crossing the first and second directions to communicate with the first flow path. The third flow path can include a 3-1 flow path extending in the second direction to communicate with the first flow path, and a pair of 3-2 flow paths each extending in the third direction from an end of the 3-1 flow path.

[0014] An intersection angle of the first flow path and the 3-1 flow path can be a right angle.

[0015] The nut part can include a nut opening communicating with the second flow path, and the lubricant is contained in the nut opening to be in contact with the screw shaft.

[0016] The pair of first supports can include a 1-1 opening in which the pair of rail portions are accommodated, and a 1-2 opening disposed on the 1-1 opening and in which the lubricant is accommodated to be in contact with the pair of rail portions.

[0017] The lower module can further include a pair of second supports spaced apart from the pair of first supports in the first direction and connected to the pair of rail portions to be linearly movable in the first direction.

[0018] The supply flow path can include a first flow path, a second flow path branched from the first flow path and connected to the nut portion, a third flow path branched from the first flow path and connected to each of the pair of first supports, and a fourth flow path branched from the first flow path and connected to each of the pair of second supports.

[0019] The fourth flow path can include a 4-1 flow path extending in the second direction to communicate with the first flow path, and a pair of 4-2 flow paths extending in the third direction from an end of the 4-1 flow path.

[0020] An intersection angle of the first flow path and the 4-1 flow path can be a right angle.

[0021] The pair of second supports can include a 2-1 opening in which the pair of rail portions are accommodated, and a 2-2 opening disposed on the 2-1 opening and in which the lubricant is accommodated to be in contact with the pair of rail portions.

[0022] The lower module can further include a plurality of stoppers fixed to the pair of rail portions to limit movement of the pair of first supports.

[0023] The plurality of stoppers can include a urethane material.

[0024] The ball screw portion can include a plurality of balls between the screw shaft and the nut portion.

[0025] The inspection portion can include an optical portion configured to inspect an optical characteristic of the display substrate.

[0026] The inspection portion can include a probe portion configured to inspect an electrical characteristic of the display substrate.

[0027] The apparatus can further include a second horizontal moving part configured to linearly move the stage in the second direction.

[0028] The apparatus can further include a rotational moving part configured to rotate the stage about an axis extending in a third direction intersecting the first direction and the second direction.

[0029] Further aspects, features, and advantages will be apparent in light of the details, claims, and specifications set forth herein. BRIEF DESCRIPTION OF DRAWINGS

[0030] The above and other aspects, features, and advantages of certain embodiments of the present disclosure will be more apparent from the following description taken in conjunction with the following drawings, in which:

[0031] Figure 1 is a perspective view schematically illustrating an apparatus for manufacturing a display device according to an embodiment.

[0032] Figure 2 is a perspective view schematically illustrating a first horizontal moving part according to an embodiment.

[0033] Figure 3 is a plan view schematically illustrating a lower module according to an embodiment.

[0034] Figure 4 、 Figure 5 and Figure 6 is a cross-sectional view schematically illustrating an apparatus for manufacturing a display device according to an embodiment.

[0035] Figure 7 is a top plan view of an upper frame according to an embodiment.

[0036] Figure 8 is a side plan view of an upper frame according to an embodiment.

[0037] Figure 9 is a plan view schematically illustrating a display device according to an embodiment.

[0038] Figure 10 is a cross-sectional view schematically illustrating a display device according to an embodiment.

[0039] Figure 11 is an equivalent circuit diagram of a pixel of a display device according to an embodiment. DETAILED DESCRIPTION

[0040] Reference will now be made in detail embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the present embodiments can have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are merely described below, by referring to the drawings, to explain aspects of the present description. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Throughout the disclosure, the expression "at least one of a, b and c" indicates only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or variations thereof.

[0041] Because various modifications and various embodiments of the present disclosure are possible, specific embodiments are illustrated in the drawings and are described in detail in the detailed description. The effects and features of the present disclosure and methods of achieving them will be apparent by referring to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed herein, but can be implemented in various forms.

[0042] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings, and the same or corresponding components are denoted by the same reference numerals and are assigned the same reference numerals, and redundant explanations will be omitted.

[0043] In the following embodiments, the terms first and second, etc. are used for the purpose of distinguishing one element from other elements, not a limiting sense.

[0044] In the following embodiments, the singular expression includes the plural expression, unless the context clearly differs.

[0045] In the following embodiments, terms such as include or have mean a feature described in the specification or the presence of an element, and do not preclude the possibility of adding one or more other features or elements in advance.

[0046] In the following embodiments, when a part (such as a layer, a region, an element, etc.) is on another part, this is not only when the part is on the other part, but also when other elements are interposed therebetween.

[0047] In the drawings, the size of the elements can be exaggerated or reduced for convenience of explanation. For example, since the size and thickness of each component shown in the drawings are arbitrarily represented for convenience of explanation, the present disclosure is not necessarily limited to the illustration.

[0048] In the following embodiments, the x-axis, the y-axis, and the z-axis are not limited to three axes on a Cartesian coordinate system, and can be interpreted in a broad sense including them. For example, the x-axis, the y-axis, and the z-axis can be perpendicular to each other, and can also refer to different directions that are not orthogonal to each other.

[0049] In the present specification, in cases where a certain process sequence can be implemented in the present specification differently from the described order, the different order can be employed. For example, two processes described in succession can be basically executed simultaneously, or in the reverse order that is described.

[0050] Figure 1 is a perspective view schematically illustrating an apparatus 1 for manufacturing a display device according to an embodiment.

[0051] Referring to Figure 1 The apparatus 1 for manufacturing a display device can include a stage 11, an inspection part 120, a first horizontal moving part 13, a second horizontal moving part 14, and a rotational moving part 15.

[0052] The display substrate DS can be disposed on the stage 11. The stage 11 can include a flat surface and can support a lower surface of the display substrate DS. In Figure 1 In an embodiment, the stage 11 and the display substrate DS have a rectangular shape. However, this is only one example, and the shape of the stage 11 and the display substrate DS is not limited thereto.

[0053] The inspection part 120 can be disposed on the stage 11 to inspect the display substrate DS. The inspection part 120 and the stage 11 can relatively move with respect to each other. For example, the stage 11 can be moved by the first horizontal moving part 13, the second horizontal moving part 14, and the rotational moving part 15, so that the inspection part 120 and the stage 11 can relatively move with respect to each other. In an embodiment, the inspection part 120 can be moved by another moving device, so that the inspection part 120 and the stage 11 can relatively move with respect to each other. The inspection part 120 can include an optical part 121 and a probe part 122.

[0054] The optical part 121 can inspect an optical characteristic of the display substrate DS. For example, the optical part 121 can irradiate light toward the display substrate DS. For example, the optical part 121 can include at least one of a monitor, a backlight unit, and a flash. For example, the light can include at least one of visible light, infrared rays, and ultraviolet rays. In an embodiment, the optical part 121 can detect light reflected from the display substrate DS. For example, the optical part 121 can include a light field camera. As a result, the optical part 121 can determine the quality of the display device by obtaining four-dimensional information about the display device.

[0055] The probe part 122 can inspect an electrical characteristic of the display substrate DS. The probe part 122 can move toward the display substrate DS disposed on the stage 11 to directly contact the display substrate DS. The probe part 122 can inspect the electrical characteristic of the display substrate DS by flowing a current through the display substrate DS. As a result, the probe part 122 can determine the quality of the display device.

[0056] The first horizontal moving part 13 can linearly move the stage 11 in a first direction (e.g., an x direction and / or an -x direction). The first horizontal moving part 13 can include a lower part 13D and an upper part 13U. The upper part 13U can be disposed on the lower part 13D. The lower part 13D can linearly move the upper part 13U in the first direction (e.g., the x direction and / or the -x direction).

[0057] The second horizontal moving part 14 can linearly move the stage 11 in a second direction (e.g., a y direction and / or a -y direction). The second direction (e.g., the y direction and / or the -y direction) can be a direction crossing the first direction (e.g., the x direction and / or the -x direction). The second horizontal moving part 14 can include a lower part 14D and an upper part 14U. The upper part 14U can be disposed on the lower part 14D. The lower part 14D can linearly move the upper part 14U in the second direction (e.g., the y direction and / or the -y direction).

[0058] The rotational moving part 15 can rotate the stage 11 about an axis extending in a third direction (e.g., a z direction and / or a -z direction). The third direction (e.g., the z direction and / or the -z direction) can be a direction crossing the first direction (e.g., the x direction and / or the -x direction) and the second direction (e.g., the y direction and / or the -y direction). The rotational moving part 15 can include a lower part 15D and an upper part 15U. The upper part 15U can be disposed on the lower part 15D. The lower part 15D can rotate the upper part 15U clockwise and counterclockwise about the axis extending in the third direction (e.g., the z direction and / or the -z direction).

[0059] The first horizontal moving part 13, the second horizontal moving part 14, the rotational moving part 15, and the stage 11 can be detachably fixed to each other. For example, the second horizontal moving part 14 can be disposed on the first horizontal moving part 13, and the rotational moving part 15 can be disposed on the second horizontal moving part 14. The lower part 13D of the first horizontal moving part 13 can be fixed to the ground, the upper part 13U of the first horizontal moving part 13 and the lower part 14D of the second horizontal moving part 14 can be fixed to each other, the upper part 14U of the second horizontal moving part 14 and the lower part 15D of the rotational moving part 15 can be fixed to each other, and the upper part 15U of the rotational moving part 15 and the stage 11 can be fixed to each other. Accordingly, the stage 11 can be movable with respect to the ground in the first direction (e.g., the x direction and / or the -x direction) and the second direction (e.g., the y direction and / or the -y direction), and can be rotated clockwise and counterclockwise about the axis extending in the third direction (e.g., the z direction and / or the -z direction).

[0060] However, this is merely an example, and the arrangement of the second horizontal moving part 14 and the rotational moving part 15 is not limited thereto. For example, the rotational moving part 15 can be between the first horizontal moving part 13 and the second horizontal moving part 14. In an embodiment, the first horizontal moving part 13 can be disposed on the rotational moving part 15, and the second horizontal moving part 14 can be disposed on the first horizontal moving part 13.

[0061] Figure 2 is a perspective view schematically illustrating the first horizontal moving part 13 according to an embodiment.

[0062] Referring to Figure 2 , the first horizontal moving part 13 can include a lower module 131 and an upper frame 132.

[0063] The upper frame 132 can be disposed on the lower module 131. The upper frame 132 can be detachably connected to the lower module 131. The upper frame 132 can be linearly moved in a first direction (for example, an x direction and / or an -x direction) with respect to the lower module 131. The lower module 131 can provide power to the upper frame 132 so that the upper frame 132 can be moved.

[0064] The lower module 131 can correspond to a lower part 13D of the first horizontal moving part 13 described above with reference to Figure 1 , and the upper frame 132 can correspond to an upper part 13U of the first horizontal moving part 13 described above with reference to Figure 1 .

[0065] Figure 3 is a perspective view schematically illustrating the lower module 131 according to an embodiment, and Figure 4 to Figure 6 is a cross-sectional view schematically illustrating the apparatus 1 for manufacturing a display device according to an embodiment.

[0066] In detail, Figure 4 may correspond to a cross-sectional view taken along a line VI-VI' in Figure 2 , can correspond to a cross-sectional view taken along a line VII-VII' in Figure 5 , and Figure 2 may correspond to a cross-sectional view taken along a line VIII-VIII' in Figure 6 . Figure 2

[0067] First, referring to Figure 3 , the lower module 131 can include a frame part 1311, a ball screw part 1312, a pair of rail parts 1313, a pair of first supports 1314, a pair of second supports 1315, a plurality of stoppers 1316, and a driving part 1317.

[0068] ​The frame portion 1311 can constitute the outside of the lower module 131, and can provide a frame space E1311. The frame space E1311 can be disposed in the frame portion 1311. For example, the frame space E1311 can be provided as being recessed from one surface of the frame portion 1311. Accordingly, one surface of the frame portion 1311 can be open.

[0069] Referring to Figure 3 and Figure 6 At least a portion of the ball screw portion 1312 can be disposed in the frame space E1311. The ball screw portion 1312 can include a screw shaft 13121, a nut portion 13122, and a plurality of balls 13123.

[0070] The screw shaft 13121 can extend in a first direction (for example, an x-axis and / or -x-axis direction). The screw shaft 13121 can pass through the frame portion 1311 across the frame space E1311. The screw shaft 13121 can rotate about an axis extending in the first direction (for example, the x-axis and / or -x-axis direction). An additional bearing can be disposed at a boundary between the screw shaft 13121 and the frame portion 1311 for smooth rotation of the screw shaft 13121. An outer surface of the screw shaft 13121 can have the shape of an external thread.

[0071] The nut portion 13122 can be accommodated in the frame space E1311 and coupled to the screw shaft 13121. The screw shaft 13121 can pass through the nut portion 13122. That is, a portion of the screw shaft 13121 can be accommodated in the nut portion 13122. An inner surface of the nut portion 13122 that accommodates the portion of the screw shaft 13121 can have the shape of an internal thread. The external thread formed on the outer surface of the screw shaft 13121 and the internal thread formed on the inner surface of the nut portion 13122 can correspond to each other.

[0072] The plurality of balls 13123 can be accommodated in the nut portion 13122 and can be between the screw shaft 13121 and the nut portion 13122. That is, the plurality of balls 13123 can be in direct contact with each of the external thread formed on the outer surface of the screw shaft 13121 and the internal thread formed on the inner surface of the nut portion 13122. The plurality of balls 13123 can be arranged such that a rolling motion can occur in the ball screw portion 1312. That is, a frictional force between the screw shaft 13121 and the nut portion 13122 generated when the screw shaft 13121 is driven can be reduced.

[0073] When the screw shaft 13121 rotates about an axis extending in the first direction (e.g., the x-axis and / or -x-axis direction), the nut portion 13122 can move linearly in the first direction (e.g., the x-axis and / or -x-axis direction). For example, when the screw shaft 13121 rotates clockwise about an axis extending in the first direction (e.g., the x-axis and / or -x-axis direction), the nut portion 13122 can move in the first direction (e.g., the x-axis direction), and when the screw shaft 13121 rotates counterclockwise about an axis extending in the first direction (e.g., the x-axis and / or -x-axis direction), the nut portion 13122 can move in the first direction (e.g., the -x-axis direction). In the structure described above, the movement accuracy of the nut portion 13122 can be enhanced. In addition, because the cross roller structure is not used, the durability of the apparatus 1 for manufacturing a display device can be enhanced.

[0074] The nut portion 13122 can include a nut opening OP13122 that accommodates a lubricant LB to be in contact with the screw shaft 13121. The nut opening OP13122 can be recessed from one surface of the nut portion 13122. The nut opening OP13122 can communicate with an inner space of the nut portion 13122 through which the screw shaft 13121 passes. In a state in which the lubricant LB is accommodated in the nut opening OP13122, the lubricant LB can be in contact with the outer surface of the screw shaft 13121. Also, when the nut portion 13122 moves linearly with respect to the screw shaft 13121, the lubricant LB can be delivered to the boundary between the screw shaft 13121 and the nut portion 13122. That is, the lubricant LB can be smoothly supplied to the plurality of balls 13123. Also, because the lubricant LB is accommodated in the nut opening OP13122, a phenomenon in which the lubricant LB can fall into the frame space E1311 can be reduced. Accordingly, the cleaning period of the apparatus 1 for manufacturing a display device can be lengthened, and the durability of the apparatus 1 for manufacturing a display device can be enhanced.

[0075] Referring back to Figure 3 A pair of rail portions 1313 can extend in the first direction (e.g., the x-axis and / or -x-axis direction), and can be fixed to the frame portion 1311 to be spaced apart from each other in the second direction (e.g., the y-axis and / or -y-axis direction). For example, two rail portions 1313 can be provided as a pair. The two rail portions 1313 can be disposed parallel to each other. The rail portion 1313 can not move with respect to the frame portion 1311 when fixed to the frame portion 1311.

[0076] Referring back to Figure 3 and Figure 4A pair of first supports 1314 can be connected to a pair of rail portions 1313 so as to linearly move in a first direction (e.g., x-axis and / or -x-axis direction). For example, two first supports 1314 can be provided as a pair. The pair of first supports 1314 can include a 1-1 opening OP1314-1 and a 1-2 opening OP1314-2.

[0077] The 1-1 opening OP1314-1 can accommodate the pair of rail portions 1313. That is, the pair of first supports 1314 can linearly move in a state in which the pair of rail portions 1313 is accommodated in the 1-1 opening OP1314-1. As Figure 3 and Figure 4 As illustrated in FIGS. 1-1 and 1-2, a groove can be formed in the pair of rail portions 1313, and a protrusion portion corresponding to the groove can be formed in the pair of first supports 1314 in contact with the pair of rail portions 1313. Accordingly, a phenomenon in which the pair of first supports 1314 deviates from the pair of rail portions 1313 can be reduced. However, this is only one example, and in an embodiment, the protrusion portion can be formed in the pair of rail portions 1313, and the groove can be formed in the pair of first supports 1314.

[0078] The 1-2 opening OP1314-2 can be disposed on the 1-1 opening OP1314-1, and a lubricant LB can be accommodated in the 1-2 opening OP1314-2 to be in contact with the pair of rail portions 1313. The 1-2 opening OP1314-2 can be recessed from one surface of the first support 1314. The 1-2 opening OP1314-2 can be in communication with the 1-1 opening OP1314-1. In a state in which the lubricant LB is accommodated in the 1-2 opening OP1314-2, the lubricant LB can be in contact with the pair of rail portions 1313. Accordingly, the lubricant LB can be delivered to a boundary between the pair of rail portions 1313 and the pair of first supports 1314. Accordingly, linear movement of the pair of first supports 1314 can be smoothly performed.

[0079] Also, because the lubricant LB is accommodated in the 1-2 opening OP1314-2, a phenomenon in which the lubricant LB can fall into the frame space E1311 can be reduced. Accordingly, a cleaning period of the apparatus 1 for manufacturing a display device can be lengthened, and durability of the apparatus 1 for manufacturing a display device can be enhanced.

[0080] Referring to Figure 3 and Figure 5, a pair of second support members 1315 can be connected to the pair of rail portions 1313 so as to move linearly in a first direction (e.g., the x-axis and / or the -x-axis direction). The pair of second support members 1315 can be spaced apart from the pair of first support members 1314 in the first direction (e.g., the x-axis and / or the -x-axis direction). For example, two second support members 1315 can be provided as a pair. The pair of second support members 1315 can include a 2-1st opening OP1315-1 and a 2-2nd opening OP1315-2.

[0081] The 2-1st opening OP1315-1 can accommodate the pair of rail portions 1313. That is, in a state where the pair of rail portions 1313 are accommodated in the 2-1st opening OP1315-1, the pair of second support members 1315 can move linearly. Figure 3 and Figure 5 , grooves may be formed in the pair of rail portions 1313, and protrusions corresponding to the grooves may be formed in the pair of second support members 1315 that contact the pair of rail portions 1313. Therefore, it is possible to reduce the phenomenon that the pair of second support members 1315 deviate from the pair of rail portions 1313. However, this is merely an example, and in one embodiment, the protrusions may be formed in the pair of rail portions 1313, and the grooves may be formed in the pair of second support members 1315.

[0082] The 2-2nd opening OP1315-2 may be provided on the 2-1st opening OP1315-1, and the lubricant LB may be accommodated in the 2-2nd opening OP1315-2 to contact the pair of rail portions 1313. The 2-2nd opening OP1315-2 may be recessed from one surface of the second support member 1315. The 2-2nd opening OP1315-2 may be communicated with the 2-1st opening OP1315-1. In a state where the lubricant LB is accommodated in the 2-2nd opening OP1315-2, the lubricant LB may contact the pair of rail portions 1313. Therefore, the lubricant LB may be transferred to the boundary between the pair of rail portions 1313 and the pair of second support members 1315. Therefore, the linear movement of the pair of second support members 1315 may be performed smoothly.

[0083] Moreover, since the lubricant LB is contained in the 2-2 opening OP1315-2, it is possible to reduce the possibility of the lubricant LB falling into the frame space E1311. Therefore, the cleaning cycle of the apparatus 1 for manufacturing a display device can be extended, and the durability of the apparatus 1 for manufacturing a display device can be enhanced.

[0084] A plurality of stoppers 1316 can be fixed to the pair of rail portions 1313 to limit movement of at least one of the pair of first supports 1314 and the pair of second supports 1315. The plurality of stoppers 1316 can be provided to protrude from one surface of the pair of rail portions 1313. Four stoppers 1316 can be provided, and the four stoppers 1316 are arranged on both ends of the two rail portions 1313. Accordingly, at least one of the pair of first supports 1314 and the pair of second supports 1315 can linearly move on the pair of rail portions 1313 before coming into contact with one of the plurality of stoppers 1316.

[0085] The stopper 1316 can include at least one material of urethane and plastic. Accordingly, damage that occurs when at least one of the pair of first supports 1314 and the pair of second supports 1315 collides with the stopper 1316 can be reduced. Accordingly, durability of the apparatus 1 for manufacturing a display device can be enhanced.

[0086] Referring to Figure 2 and Figure 3 The upper frame 132 can be detachably connected to the nut portion 1322, each of the pair of first supports 1314 and the pair of second supports 1315. The driving portion 1317 can be fixed to the frame portion 1311, and can provide power to the screw shaft 13121. In an embodiment, the driving portion 1317 can be connected to the screw shaft 13121 to rotate the screw shaft 13121 about an axis extending in a first direction. Power of the driving portion 1317 can be transmitted in the order of the screw shaft 13121, the nut portion 1322, the upper frame 132, the pair of first supports 1314, and the pair of second supports 1315.

[0087] As the driving portion 1317 moves the screw shaft 13121 (e.g., rotates), the nut portion 1322 can linearly move in a first direction (e.g., x-axis and / or -x-axis direction). When the nut portion 1322 linearly moves in the first direction (e.g., x-axis and / or -x-axis direction), the upper frame 132 fixed to the nut portion 1322 can linearly move in the first direction (e.g., x-axis and / or -x-axis direction). Also, the first support 1314 and the second support 1315 fixed to the upper frame 132 can linearly move in the first direction (e.g., x-axis and / or -x-axis direction). At this time, the first support 1314 and the second support 1315 can support the upper frame 132 so that the upper frame 132 can not be shaken but can linearly move stably.

[0088] Figure 7 is a top plan view of the upper frame 132 according to an embodiment, and Figure 8is a side plan view of the upper frame 132 according to an embodiment.

[0089] Referring to Figure 7 and Figure 8 The upper frame 132 can include a supply flow path FL.

[0090] The supply flow path FL is not visible from the outer surface of the upper frame 132. However, in Figure 7 and Figure 8 The supply flow path FL is shown by a dotted line for convenience of explanation.

[0091] First, referring to Figure 7 and Figure 8 The supply flow path FL1 can include a first flow path FL1, a second flow path FL2, a third flow path FL3, and a fourth flow path FL4.

[0092] The first flow path FL1 can extend in a first direction (for example, an x-axis and / or -x-axis direction) and can be recessed from one surface of the upper frame 132. The lubricant LB can be injected from the outside through the first flow path FL1.

[0093] The second flow path FL2 can branch from the first flow path FL1. The second flow path FL2 can extend in a third direction (for example, a z-axis and / or -z-axis direction) to communicate with the first flow path FL1.

[0094] The third flow path FL3 can branch from the first flow path FL1. The third flow path FL3 can include a 3-1 flow path FL3-1 and a 3-2 flow path FL3-2. The 3-1 flow path FL3-1 can extend in a second direction (for example, a y-axis and / or -y-axis direction) to communicate with the first flow path FL1. The intersection angle of the first flow path FL1 and the 3-1 flow path FL3-1 can be a right angle. The 3-2 flow path FL3-2 can extend in the third direction (for example, a z-axis and / or -z-axis direction) from both ends of the 3-1 flow path FL3-1.

[0095] The fourth flow path FL4 can branch from the first flow path FL1. The fourth flow path FL4 can include a 4-1 flow path FL4-1 and a 4-2 flow path FL4-2. The 4-1 flow path FL4-1 can extend in a second direction (for example, a y-axis and / or -y-axis direction) to communicate with the first flow path FL1. The intersection angle of the first flow path FL1 and the 4-1 flow path FL4-1 can be a right angle. The 4-2 flow path FL4-2 can extend in the third direction (for example, a z-axis and / or -z-axis direction) from both ends of the 4-1 flow path FL4-1.

[0096] Referring to Figure 4 to Figure 8 The supply flow path FL can supply the lubricant LB to each of the nut portion 13122, the pair of first supports 1314, and the pair of second supports 1315 at the same time.

[0097] The second flow path FL2 can be connected to the nut portion 13122. Specifically, the second flow path FL2 can communicate with the nut opening OP13122 of the nut portion 13122. Accordingly, the lubricant LB introduced into the first flow path FL1 can flow into the nut opening OP13122 through the second flow path FL2.

[0098] The third flow path FL3 can be connected to each of the pair of first supports 1314. Specifically, each of the pair of 3-2 flow paths FL3-2 can communicate with the 1-2 openings OP1314-2 of the pair of first supports 1314. Accordingly, the lubricant LB introduced into the first flow path FL1 can flow into the 1-2 openings OP1314-2 through the 3-1 flow path FL3-1 and the 3-2 flow path FL3-2.

[0099] The fourth flow path FL4 can be connected to each of the pair of second supports 1315. Specifically, each of the pair of 4-2 flow paths FL4-2 can communicate with the 2-2 openings OP1315-2 of the pair of second supports 1315. Accordingly, the lubricant LB introduced into the first flow path FL1 can flow into the 2-2 openings OP1315-2 through the 4-1 flow path FL4-1 and the 4-2 flow path FL4-2.

[0100] In the above-described structure, when the lubricant LB is introduced into the first flow path FL1, the lubricant LB can be supplied to the ball screw portion 1312, the pair of first supports 1314, and the pair of second supports 1315 at the same time. That is, the speed at which the lubricant LB is supplied to the apparatus 1 for manufacturing the display device can be improved.

[0101] Figure 9 is a perspective view schematically illustrating a display device 2 according to an embodiment, and Figure 10 is a cross-sectional view schematically illustrating the display device 2 according to an embodiment.

[0102] Referring to Figure 9 and Figure 10 The display device 2 can include a display area DA for displaying an image and a non-display area NDA surrounding the display area DA. As described below with reference to Figure 11Further discussed, the pixel PX connected to the scan line SL and the data line DL can be included in the display area DA. The display device 2 can further include a display substrate S. The display substrate S can include the substrate 100, the intermediate layer of the display layer DL, and the layer excluding the common electrode 23.

[0103] The display layer DL and the thin film encapsulation layer TFE can be arranged on the substrate 100. The display layer DL can include a pixel circuit layer PCL and a display element layer DEL.

[0104] The substrate 100 can contain glass or a polymer resin such as polyether sulfone, polyacrylate, polyether imide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyarylate, polyimide, polycarbonate (PC), triacetyl cellulose (TAC), or cellulose acetate propionate.

[0105] A barrier layer (not shown) can be further provided between the display layer DL and the substrate 100. The barrier layer is a barrier layer for preventing penetration of external foreign substances, and can have a single-layer or multi-layer structure containing an inorganic material such as silicon nitride (SiNx) (where x > 0) or silicon oxide (SiOx) (where x > 0).

[0106] The pixel circuit layer PCL can be provided on the substrate 100. The pixel circuit layer PCL can include a thin film transistor TFT, and a buffer layer 111, a first insulating layer 13a, a second insulating layer 13b, a third insulating layer 151, and a planarization layer 17 arranged under and / or over components of the thin film transistor TFT.

[0107] The buffer layer 111 can contain an inorganic insulating material such as silicon nitride, silicon oxynitride, and silicon oxide, and can have a single-layer or multi-layer structure containing the inorganic insulating material described above.

[0108] The thin film transistor TFT can include a semiconductor layer 120, and the semiconductor layer 120 can contain polysilicon. In an embodiment, the semiconductor layer 120 can contain amorphous silicon, oxide semiconductor, or organic semiconductor, etc. The semiconductor layer 120 can include a channel region 12c and a drain region 12a and a source region 12b located on both sides of the channel region 12c. A gate electrode 141 can overlap the channel region 12c.

[0109] The gate electrode 141 can contain a low-resistance metal material. The gate electrode 141 can contain a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and can have a multi-layer or single-layer structure containing the materials described above.

[0110] The first insulating layer 13a between the semiconductor layer 120 and the gate electrode 141 can include an inorganic insulating material such as silicon oxide (SiO2), silicon nitride (SiNx), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0111] The second insulating layer 13b can be provided to cover the gate electrode 141. Similar to the first insulating layer 13a, the second insulating layer 13b can include an inorganic insulating material such as silicon oxide (SiO2), silicon nitride (SiNx), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0112] The upper electrode Cst2 of the storage capacitor Cst can be disposed above the second insulating layer 13b. The upper electrode Cst2 can overlap the gate electrode 141 thereunder. At this time, the gate electrode 141 and the upper electrode Cst2 overlapping each other with the second insulating layer 13b therebetween can form the storage capacitor Cst. That is, the gate electrode 141 can serve as a lower electrode Cst1 of the storage capacitor Cst.

[0113] In this way, the storage capacitor Cst and the thin film transistor TFT can overlap each other. In some embodiments, the storage capacitor Cst can not overlap the thin film transistor TFT.

[0114] The upper electrode Cst2 can include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and / or copper (Cu), and can have a single-layer or multi-layer structure including the above-described materials.

[0115] The third insulating layer 151 can be provided to cover the upper electrode Cst2. The third insulating layer 151 can include an inorganic insulating material such as silicon oxide (SiO2), silicon nitride (SiNx), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2). The third insulating layer 151 can have a single-layer or multi-layer structure including the above-described inorganic insulating materials.

[0116] Each of the drain electrode 16a and the source electrode 16b can be located on the third insulating layer 151. The drain electrode 16a and the source electrode 16b can include a good conductive material. The drain electrode 16a and the source electrode 16b can include a conductive material including Mo, Al, Cu, Ti, or the like, and can have a multi-layered or single-layered structure including the above-described material. In an embodiment, the drain electrode 16a and the source electrode 16b can have a Ti / Al / Ti multi-layered structure.

[0117] The planarization layer 17 can include an organic insulating material. The planarization layer 17 can include a general-purpose polymer such as polymethyl methacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenol group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a p-xylene polymer, a vinyl alcohol polymer, and an organic insulating material such as a blend thereof.

[0118] The display element layer DEL can be provided on the pixel circuit layer PCL having the above-described structure. The display element layer DEL can include an organic light emitting diode OLED, and a pixel electrode 21 of the organic light emitting diode OLED can be electrically connected to the thin film transistor TFT through a contact hole defined in the planarization layer 17.

[0119] The pixel PX can include the organic light emitting diode OLED and the thin film transistor TFT. Each pixel PX can emit red light, green light, or blue light, or emit red light, green light, blue light, or white light, for example, through the organic light emitting diode OLED.

[0120] The pixel electrode 21 can include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). In an embodiment, the pixel electrode 21 can include a reflective layer including Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, or a compound thereof. In an embodiment, the pixel electrode 21 can further include a layer formed of ITO, IZO, ZnO, or In2O3 on / under the above-described reflective layer.

[0121] A pixel definition layer 19 having an opening 190P for exposing a center of the pixel electrode 21 can be provided on the pixel electrode 21. The pixel definition layer 19 can include an organic insulating material and an inorganic insulating material. The opening 190P can define an emission area (hereinafter, referred to as an emission area EA) of light emitted from the organic light emitting diode OLED. For example, a width of the opening 190P can correspond to a width of the emission area EA.

[0122] The light-emitting layer 22 can be provided in the opening 190P of the pixel-defining layer 19. The light-emitting layer 22 can contain a polymer or a low-molecular-weight organic material that emits light of a specific color. In an embodiment, the light-emitting layer 22 can contain a quantum dot material. The light-emitting layer 22 can be formed by ejecting a droplet into the apparatus 1 for manufacturing a display device according to an embodiment.

[0123] Although not shown, a first functional layer and a second functional layer can be arranged under the light-emitting layer 22 and on the light-emitting layer 22. The first functional layer can include, for example, a hole-transporting layer (HTL) and a hole-injecting layer (HIL). The second functional layer can be a component provided on the light-emitting layer 22 and is optional. The second functional layer can include an electron-transporting layer (ETL) and / or an electron-injecting layer (EIL). The first functional layer and / or the second functional layer can be a common layer formed to completely cover the substrate 100, similar to the common electrode 23 which will be described later.

[0124] The common electrode 23 can contain a conductive material having a low work function. For example, the common electrode 23 can include a (semi-)transparent layer containing Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, Li, Ca, or an alloy thereof. In an embodiment, the common electrode 23 can further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer containing the above-described material.

[0125] A thin film encapsulation layer TFE can be provided on the common electrode 23. In an embodiment, the thin film encapsulation layer TFE can include at least one inorganic encapsulation layer and at least one organic encapsulation layer, and in an embodiment, Figure 10 The exemplary thin film encapsulation layer TFE includes a first inorganic encapsulation layer 31, an organic encapsulation layer 32, and a second inorganic encapsulation layer 33, which are sequentially stacked.

[0126] The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 can contain one or more inorganic materials of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 32 can contain a polymer-based material. The polymer-based material can include an acrylic resin, an epoxy resin, a polyimide, a polyvinyl, etc. In an embodiment, the organic encapsulation layer 32 can contain an acrylate.

[0127] In an embodiment, the thin film encapsulation layer TFE can have a structure in which the substrate 100 and the upper substrate as a transparent member are coupled to each other as a sealing member and an internal space between the substrate 100 and the upper substrate is sealed. At this time, a moisture absorbing or a filler material can be located in the internal space. The sealing member can be a sealant, and in an embodiment, the sealing member can include a material cured by laser. For example, the sealing member can be a frit. Specifically, the sealing member can be a urethane-based resin, an epoxy-based resin, an acrylic-based resin as an organic sealant, or silicon as an inorganic sealant. The urethane-based resin can be, for example, urethane acrylate, or the like. The acrylic-based resin can be, for example, butyl acrylate, ethylhexyl acrylate, or the like. The sealing member can include a material cured by heat.

[0128] The display substrate DS as described above with reference to Figure 1 to Figure 8 The display substrate DS as described above with reference to Figure 1 to Figure 8 The display substrate DS as described above with reference to

[0129] Figure 11 is an equivalent circuit diagram of a pixel of the display device 2 according to an embodiment.

[0130] Each pixel PX can include a pixel circuit PC and a display element (for example, an organic light emitting diode OLED) connected to the pixel circuit PC. The pixel circuit PC can include a first thin film transistor T1, a second thin film transistor T2, and a storage capacitor Cst. Each pixel PX can emit, for example, red light, green light, blue light, or white light through the organic light emitting diode OLED.

[0131] The second thin film transistor T2 can be a switching thin film transistor, can be connected to a scan line SL and a data line DL, and can be configured to transmit a data voltage input from the data line DL to the first thin film transistor T1 in response to a switching voltage input from the scan line SL. The storage capacitor Cst can be connected to the second thin film transistor T2 and a driving voltage line PL, and can store a voltage corresponding to a difference between a voltage transmitted from the second thin film transistor T2 and a first power voltage ELVDD supplied to the driving voltage line PL.

[0132] The first thin film transistor T1 can be a driving thin film transistor, can be connected to the driving voltage line PL and the storage capacitor Cst, and can control a driving current flowing through the organic light emitting diode OLED from the driving voltage line PL in response to a value of the voltage stored in the storage capacitor Cst. The organic light emitting diode OLED can emit light having a certain brightness by using the driving current. An opposite electrode (for example, a cathode) of the organic light emitting diode OLED can receive a second power voltage ELVSS.

[0133] Figure 11 The example pixel circuit PC includes two thin film transistors and one storage capacitor, and the embodiments are not limited thereto. The number of thin film transistors and the number of storage capacitors can be changed differently according to the design of the pixel circuit PC. For example, the pixel circuit PC can further include four, five, or more thin film transistors in addition to the two thin film transistors described above.

[0134] According to one or more embodiments, the durability of an apparatus manufacturing a display device and the speed of a manufacturing process of the display device can be improved.

[0135] Effects of the present disclosure are not limited to the aforementioned features, and other effects not mentioned herein can be clearly understood from the following description by those skilled in the art.

[0136] It is to be understood that the embodiments described herein are to be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as being applicable to other similar features or aspects in other embodiments. While one or more embodiments have been described with reference to the figures, it will be apparent to those with ordinary skill in the art that various changes in form and details can be made therein without departing from the spirit and scope as defined by the following claims.

Claims

1. An apparatus for manufacturing a display device, characterized by comprising: The apparatus includes: a table on which a display substrate is disposed; an inspection part disposed on the table to inspect the display substrate; and a first horizontal moving part configured to linearly move the table in a first direction, wherein the first horizontal moving part includes: a lower module; and an upper frame configured to linearly move in the first direction with respect to the lower module, and the lower module includes: a frame part providing a frame space; a ball screw part of which at least a portion is disposed in the frame space and includes a screw shaft extending in the first direction and a nut part coupled to the screw shaft; a pair of rail parts extending in the first direction and fixed to the frame part to be spaced apart from each other in a second direction crossing the first direction; a pair of first supports connected to the pair of rail parts so as to linearly move in the first direction; and a driving part connected to the screw shaft to rotate the screw shaft about an axis extending in the first direction, and the upper frame includes a supply flow path to supply a lubricant to the nut part and each of the pair of first supports at the same time, and is detachably connected to the nut part and each of the pair of first supports.

2. The apparatus of claim 1, wherein, As the driving part rotates the screw shaft, the nut part linearly moves in the first direction, power of the driving part is transmitted in an order of the screw shaft, the nut part, the upper frame, and the pair of first supports, and the ball screw part further includes a plurality of balls between the screw shaft and the nut part.

3. The apparatus of claim 1, wherein, The supply flow path includes: a first flow path; a second flow path branched from the first flow path and connected to the nut part; and a third flow path branched from the first flow path and connected to each of the pair of first supports, the first flow path extends in the first direction, and the second flow path extends in a third direction crossing the first and second directions to communicate with the first flow path, and the third flow path includes: a 3-1 flow path extending in the second direction to communicate with the first flow path; and a pair of 3-2 flow paths extending in the third direction from ends of the 3-1 flow path, and an intersection angle of the first flow path and the 3-1 flow path is a right angle.

4. The apparatus of claim 1, wherein, The supply flow path includes: a first flow path; a second flow path branched from the first flow path and connected to the nut part; and a third flow path branched from the first flow path and connected to each of the pair of first supports the nut part includes a nut opening communicating with the second flow path, and the lubricant is contained in the nut opening to be in contact with the screw shaft, and the pair of first supports includes: a 1-1 opening in which the pair of rail parts are contained; and a 1-2 opening in which each of the pair of first supports is contained, a first-2 opening disposed on the first-1 opening and in which the lubricant is contained to be in contact with the pair of rail portions.

5. The apparatus of claim 1, wherein, The lower module further includes a pair of second supports spaced apart from the pair of first supports in the first direction and connected to the pair of rail portions to linearly move in the first direction.

6. The apparatus of claim 5, wherein, The supply flow path includes: a first flow path; a second flow path branched from the first flow path and connected to the nut portion; a third flow path branched from the first flow path and connected to each of the pair of first supports; and a fourth flow path branched from the first flow path and connected to each of the pair of second supports, the fourth flow path includes: a fourth-1 flow path extending in the second direction to communicate with the first flow path; and a pair of fourth-2 flow paths extending from an end of the fourth-1 flow path in a third direction intersecting the first direction and the second direction, and an intersection angle of the first flow path and the fourth-1 flow path is a right angle.

7. The apparatus of claim 5, wherein, The pair of second supports includes: a second-1 opening in which the pair of rail portions is contained; and a second-2 opening disposed on the second-1 opening and in which the lubricant is contained to be in contact with the pair of rail portions.

8. The apparatus of claim 1, wherein, The lower module further includes a plurality of stops fixed to the pair of rail portions to restrict movement of the pair of first supports, and The stops each include a urethane material.

9. The apparatus of claim 1, wherein, The inspection portion includes an optical portion configured to inspect an optical characteristic of the display substrate and a probe portion configured to inspect an electrical characteristic of the display substrate.

10. The apparatus of claim 1, wherein, Further including a second horizontal movement portion to linearly move the stage in the second direction and a rotational movement portion to rotate the stage about an axis extending in a third direction intersecting the first direction and the second direction.

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