Liquid discharge groove of silicon component grinding machine
By improving the structure of the drainage tank, the problem of blockage caused by silicon powder precipitation was solved, achieving convenient cleaning and anti-blocking effects, and improving the service life and processing accuracy of the equipment.
Patent Information
- Application Number
- CN202422896436.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-27
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2034-11-27
AI Technical Summary
Traditional silicon component grinding machine drain tanks are prone to clogs when idle due to silicon powder sedimentation, which are difficult to clean effectively.
A drainage tank structure was designed, comprising a tank body, a cleaning opening, a collection frame, a lifting handle, a filter screen, and a cover plate. The combination of the cleaning opening and the sink facilitates manual cleaning of precipitated silica powder, and the removable filter screen and connecting frame enable individual cleaning to prevent clogging.
It enables convenient cleaning of silicon powder, avoids clogging of the drain tank after long-term use, and improves cleaning efficiency and equipment lifespan.
Smart Images
Figure CN223466122U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of drainage groove, specifically relates to silicon component grinder drainage groove. BACKGROUND
[0002] The silicon component mainly includes silicon ring, silicon disc and silicon electrode, in the integrated circuit manufacturing process, etching wafer also carries out etching to the silicon component, and the silicon component and wafer are all silicon materials, so that etching electrical performance is more uniform, and the key to determine process quality, therefore, silicon is widely used in semiconductor etching process.
[0003] In the production process of silicon component, the surface of silicon component needs to be polished, the main purpose of silicon ring polishing is to ensure that its surface is smooth, reduce friction and wear, thereby improving its service life and performance. The traditional polishing process usually uses a grinding machine for processing, and cooling liquid needs to be sprayed on the surface of the silicon component during the polishing process, which can absorb and carry away heat, reduce the temperature of the grinding area, thereby reducing the risk of workpiece deformation and breakage, prolonging the service life of the tool, improving the machining precision and surface quality.
[0004] When the grinding machine processes the silicon component, the silicon powder generated in the polishing process is discharged outward through the drainage groove along with the cutting fluid, but the cutting fluid will stop flowing when the grinding machine is idle, at this time, the silicon powder is easy to deposit in the drainage groove and form a lump, and the surface of the drainage groove is generally closed, only a drainage opening is arranged at the tail for discharging outward, so it is not convenient for manual cleaning of the drainage groove, and the drainage groove is easy to be blocked after long-term use. UTILITY MODEL CONTENTS
[0005] The utility model aims at the defects and deficiencies of prior art, provides silicon component grinder drainage groove.
[0006] To achieve the above object, the utility model adopts the following technical scheme: a silicon component grinder drainage groove, including groove body, cleaning opening arranged on the upper end face of the groove body, subsidence groove arranged on the groove body and corresponding to the cleaning opening, collecting frame arranged in the subsidence groove on the groove body and used for collecting silicon powder, lifting handle arranged on the collecting frame and used for lifting the collecting frame from the subsidence groove, filter screen vertically arranged on the collecting frame and used for filtering silicon powder, the length and width of the collecting frame are smaller than the length and width of the cleaning opening, and the collecting frame is gap-fitted with the subsidence groove.
[0007] Further improvement is that two fixing blocks are arranged on the groove body at the end of the cleaning opening, a cover plate is rotatably arranged between the two fixing blocks, and one end of the cover plate is rotatably connected with the two fixing blocks through a rotating shaft.
[0008] Further improvement is that two fixing blocks are arranged in the cleaning opening on the groove body, and the two fixing blocks are symmetrically arranged on the inner side wall of the cleaning opening.
[0009] Further improvement is that the upper end surface of the cover plate is provided with a pulling handle.
[0010] Further improvement is that the outer side of the filter screen is provided with a connecting frame, the connecting frame is a reverse convex connecting frame, and the upper end surface of the collecting frame is fixedly provided with two dismounting plug blocks which are symmetrically arranged front and back, and the two dismounting plug blocks are provided with connecting sockets for inserting the lower end of the connecting frame.
[0011] Further improvement is that the filter screen is two, and the two filter screens are symmetrically arranged on the left and right sides of the lifting handle.
[0012] After the above technical scheme is adopted, the beneficial effects of the present application are that when the grinder processes the silicon parts, the silicon powder generated in the polishing process is discharged outwardly along with the cutting fluid through the drainage groove, the cutting fluid stops flowing when the grinder is idle, at this time, the silicon powder is deposited in the collecting frame, and when cleaning, the worker only needs to put his hand into the cleaning opening and pull up the lifting handle to drive the collecting frame to be taken out of the groove body, and after the deposited silicon powder is cleaned, it is put back into the sink, so that the drainage groove can be conveniently cleaned by manual work, and the phenomenon of drainage groove blockage is not easy to occur after long-term use.
[0013] Further effect: when the groove body does not need to be cleaned, the cover plate is covered on the cleaning opening, so that the cleaning opening is closed, and part of the dust and impurities can be prevented from entering the groove body.
[0014] Further effect: when the two fixing blocks are arranged in the cleaning opening, the limiting clamping plate can prevent the cover plate from being turned down and entering the groove body.
[0015] Further effect: when the filter screen needs to be cleaned, the connecting frame is taken out of the connecting socket by lifting up, so that the filter screen can be directly and separately cleaned, and the cleaning effect of the filter screen can be improved; when installing, the lower end of the connecting frame is aligned with the connecting socket of the two dismounting plug blocks, and the dismounting plug blocks can limit the left and right movement of the connecting frame, so that the connecting frame is installed on the collecting frame. BRIEF DESCRIPTION OF DRAWINGS
[0016] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0017] Figure 1 is the front view of the utility model;
[0018] Figure 2 is the plan view of the utility model;
[0019] Figure 3 is the plan view of the utility cut of the utility model;
[0020] Figure 4 is the side view of the utility cut of the utility model;
[0021] Figure 5 is the plan view of the connection frame, dismounting plug block and connection socket of the utility cut of the utility model;
[0022] Figure 6 is the enlarged view of A part corresponding Figure 1 to.
[0023] Explanation of reference signs: groove body 1, cleaning opening 2, sunken groove 3, collection frame 4, pull handle 5, filter screen 6, fixing block 7, cover plate 8, limiting clamping plate 9, pull handle 10, connection frame 11, dismounting plug block 12, connection socket 13. DETAILED DESCRIPTION
[0024] The utility model will be further explained in combination with the drawings and specific embodiments.
[0025] Referring to Figure 1 paper Figure 6 , the technical scheme adopted in the specific embodiment is: a silicon component grinding machine drainage groove, comprising a groove body, a cleaning opening arranged on the upper end face of the groove body, a sunken groove arranged on the groove body and corresponding to the cleaning opening, a collection frame for collecting silicon powder arranged on the groove body in the sunken groove, a pull handle arranged on the collection frame for lifting the collection frame from the sunken groove by the hand, and a filter screen arranged vertically on the collection frame for filtering silicon powder, the length and width of the collection frame are smaller than the length and width of the cleaning opening, and the collection frame is gap-fitted with the sunken groove.
[0026] Two fixing blocks are arranged on the groove body at the end of the cleaning opening, a cover plate is rotatably arranged between the two fixing blocks, and one end of the cover plate is rotatably connected with the two fixing blocks through a rotating shaft.
[0027] The two fixing blocks are arranged in the cleaning opening on the groove body, and the two fixing blocks are symmetrically arranged on the inner side wall of the cleaning opening.
[0028] A pull handle is arranged on the upper end face of the cover plate.
[0029] The outer side of the filter screen is provided with a connecting frame, the connecting frame is a reverse convex connecting frame, the upper end surface of the collecting frame is fixedly provided with two dismounting blocks, the two dismounting blocks are symmetrically arranged front and back, and the two dismounting blocks are provided with connecting sockets for inserting the lower end of the connecting frame.
[0030] The filter screen is two, and the two filter screens are symmetrically arranged on the left and right sides of the pull handle.
[0031] The working principle of the utility model is: when the grinding machine processes the silicon parts, the silicon powder generated in the grinding process is discharged outward along with the cutting fluid through the drainage groove, the cutting fluid stops flowing when the grinding machine is idle, at this time, the silicon powder is deposited in the collecting frame, when cleaning, the worker only needs to insert the hand into the cleaning opening, pull up the pull handle to drive the collecting frame to be taken out from the groove body, and the deposited silicon powder is cleaned and then put back into the sink, which can facilitate manual cleaning of the drainage groove, and the phenomenon of drainage groove blockage is not easy to occur after long-term use.
[0032] When the groove body does not need to be cleaned normally, the cover plate is covered on the cleaning opening, so that the cleaning opening is closed, and part of the dust and impurities can be prevented from entering the groove body;
[0033] When the two fixing blocks are arranged in the cleaning opening, the limiting clamping plate can prevent the cover plate from turning down and entering the groove body;
[0034] When the filter screen needs to be cleaned, the connecting frame is taken out from the connecting socket by being pulled up, so that the filter screen can be directly and separately cleaned, and the cleaning effect of the filter screen can be improved; when installing, the lower end of the connecting frame is aligned with the connecting socket of the two dismounting blocks, the left and right movement of the connecting frame is limited through the dismounting block, and then the connecting frame is installed on the collecting frame.
[0035] The utility model protects the structure of the product, the model of each element is not the content protected by the utility model, and is a known technology, as long as the element on the market can realize the above functions of the utility model, it can be selected and applied to the silicon part grinding machine drainage groove.
[0036] The basic principle and main features of the utility model and its advantages are shown and described above, and the person skilled in the art should understand that the utility model is not limited by the above examples, and the above examples and the description in the description are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed, and the scope of protection of the utility model is defined by the appended claims and their equivalents. The utility model is not described in detail, which is the known technology of the person skilled in the art.
Claims
1. A drain tank for a silicon component grinder, characterized by: The utility model provides a silicon powder collecting device, including groove, the cleaning opening of setting in the upper end surface of groove, the subsided groove of setting in groove and with the corresponding cleaning opening, the collection frame of being used for collecting silicon powder is combined to set in the subsided groove of groove, the lifting handle of setting in the collection frame is used for the collection frame to lift from the subsided groove with hand, the filter screen of vertically setting in the collection frame is used for the filtration of silicon powder, the length and width of collection frame are less than the length and width of cleaning opening, and the clearance fit of collection frame and subsided groove.
2. The silicon component grinder drain according to claim 1, wherein: Two fixed blocks are arranged on the groove at the end of the cleaning opening, a cover plate is rotatably arranged between the two fixed blocks, and one end of the cover plate is rotatably connected with the two fixed blocks through a rotating shaft.
3. The silicon component grinder drain of claim 1, wherein: The two fixed blocks are arranged in the cleaning opening of the groove, and the two fixed blocks are symmetrically arranged on the inner side wall of the cleaning opening.
4. The silicon component grinder drain according to claim 2 or 3, wherein: The other end of the cover plate is provided with a limiting clamping plate.
5. The silicon component grinder drain of claim 1, wherein: The upper end surface of the cover plate is provided with a pulling handle.
6. The silicon component grinder drain according to claim 1 or 5, wherein: The outer side of the filter screen is provided with a connecting frame, the connecting frame is a reverse convex connecting frame, the upper end surface of the collection frame is fixedly provided with two disassembly plug blocks, the two disassembly plug blocks are symmetrically arranged front and back, and two disassembly plug blocks are provided with a connecting socket for inserting the lower end of the connecting frame. The filter screen has two, and the two filter screens are symmetrically arranged on the left and right sides of the lifting handle.