Bearing tool and degassing equipment

Abstract

The utility model discloses a bearing tool. The bearing tool comprises a base, a connecting piece and a bearing seat. The base is supported on the inner wall of the process pipe; the connecting piece is fixedly connected with the base; the bearing seat is fixedly connected with the connecting piece, the bearing seat and the base are arranged in a spaced mode, a gap exists between the bearing seat and the inner wall of the process pipe, the connecting piece is provided with a ventilation channel, one end of the ventilation channel communicates with the space of the side, away from the bearing seat, of the base, and the other end of the ventilation channel communicates with the space between the base and the bearing seat. A material is placed on the bearing seat, then the bearing tool is placed in a quartz tube, the base is supported at the tube neck of the quartz tube, and then the material is subjected to degassing operation. As the material is borne by the bearing seat, the material can be prevented from being contacted with the inner wall of the quartz tube. And meanwhile, the ventilation channel is formed in the connecting piece, so that the process gas can circulate through the ventilation channel, and the material is degassed in the process gas atmosphere. The utility model further discloses degassing equipment.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of material processing, and particularly relates to a bearing tool and a degassing device. BACKGROUND

[0002] For electronic devices that need to be used in a high-vacuum environment, the materials for preparing the electronic devices usually need to be degassed to avoid the outgassing from affecting the use of the electronic devices in the application process. At present, the outgassing of the materials is usually carried out in a high-temperature environment, and in some cases, the materials are placed in a quartz tube, hydrogen is then introduced into the quartz tube, and heating is carried out to degas. In the degassing process, the materials need to avoid contact with the quartz tube. CONTENT OF THE UTILITY MODEL

[0003] Therefore, it is necessary to provide a bearing tool and a degassing device capable of supporting materials in a quartz tube and avoiding contact between the materials and the quartz tube in the degassing process.

[0004] The technical scheme provided in the application is as follows:

[0005] A bearing tool comprises:

[0006] a base for supporting the inner wall of a process tube;

[0007] a connecting piece fixedly connected with the base;

[0008] a bearing seat fixedly connected with the connecting piece, the bearing seat being spaced apart from the base, and a gap being present between the bearing seat and the inner wall of the process tube;

[0009] The connecting piece is provided with a ventilation channel, one end of the ventilation channel being in space communication with the side of the base away from the bearing seat, and the other end being in space communication with the space between the base and the bearing seat.

[0010] The above bearing tool is used to place the materials on the bearing seat, and then the bearing tool is placed in the quartz tube, and the base is supported at the tube neck of the quartz tube. Next, the materials are degassed. Since the materials are supported by the bearing seat, the materials can avoid contact with the inner wall of the quartz tube. At the same time, the bearing seat and the inner wall of the quartz tube have a gap, and are spaced apart from the base, and the connecting piece is provided with a ventilation channel, so that the process gas can flow through the ventilation channel, and the materials can be degassed in the process gas atmosphere.

[0011] Further, the bearing seat is connected to one end of the connecting piece, the other end of the connecting piece extends to the side of the base away from the bearing seat, and the ventilation channel penetrates through the end of the connecting piece away from the bearing seat.

[0012] Furthermore, the connecting member is hollow and is provided with a first connecting hole and a second connecting hole connected to the interior to form the above-mentioned ventilation channel, the first connecting hole is located between the bearing seat and the base, and the second connecting hole is located on the side of the base away from the bearing seat.

[0013] Furthermore, the supporting seat includes a support plate and a retaining edge, the connecting member is connected to one side of the support plate, the retaining edge is connected to the side of the support plate away from the connecting member, and is arranged around the support plate to enclose a placement space on the support plate.

[0014] Furthermore, the retaining edge is provided with a connecting hole along its thickness direction.

[0015] Furthermore, the bottom of the rib is connected to the support plate, and the connecting hole includes an insertion section and a limiting section. One end of the insertion section passes through the top of the rib, and the other end is connected to the limiting section. The limiting section and the insertion section are set at an angle.

[0016] Furthermore, the retaining edge is provided with at least two connecting holes, and two of the at least two connecting holes are located on two opposite sides of the retaining edge.

[0017] Furthermore, the base, the connecting piece and the supporting seat are all made of graphite.

[0018] Furthermore, in the arrangement direction of the supporting seat and the base, the projections of the supporting seat and the base are both circular, and the diameter of the supporting seat is larger than the diameter of the base.

[0019] A degassing device comprises the carrying tooling as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application.

[0021] Figure 1 A schematic diagram of the application structure of the load-bearing tooling provided in one embodiment of the present application;

[0022] Figure 2 for Figure 1 The structural diagram of the load-bearing tooling shown;

[0023] Figure 3 for Figure 2 A schematic structural diagram of the load-bearing tooling shown in FIG.

[0024] Figure 4 for Figure 2A cross-sectional structure schematic diagram of the carrying tool shown.

[0025] Label description:

[0026] 100, carrying tool; 110, base; 111, air hole; 120, connecting piece; 121, first communication hole; 122, second communication hole; 130, carrying seat; 131, supporting plate; 132, baffle; 133, placing space; 134, connecting hole; 1341, extending section; 1342, limiting section; 200, quartz tube. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0028] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0029] In order to facilitate understanding of the technical solutions of the present application, the problems caused by the contact between the material and the quartz tube during the degassing process are described as follows: first, degassing is usually carried out in a high-temperature environment, many materials will react with the silicon dioxide in the quartz tube in a high-temperature environment, resulting in changes in the composition of the material and damage to the quartz tube; second, the quartz tube may adhere to some materials in a high-temperature environment, making it difficult to separate and affecting the use of the material and the quartz tube; finally, the quartz tube itself may adsorb a certain amount of gas, and if the material contacts the quartz tube, the gas adsorbed by the quartz tube may be released to the material, affecting the degassing effect of the material.

[0030] Based on the above problems, on the one hand, the present application provides a carrying tool for carrying the material during degassing to avoid contact between the material and the inner wall of the quartz tube. In other embodiments, the quartz tube can also be other process tubes, which are not limited here. In the following, the quartz tube is taken as an example for description.

[0031] As shown in FIG. 1, the carrying tool comprises a base 110, a connecting piece 120 and a carrying seat 130. Figure 1 and Figure 2As shown, the carrying tool 100 comprises a base 110, a connecting piece 120 and a carrying seat 130. The base 110 is used to support on the inner wall of the quartz tube 200, for example Figure 1 The connecting piece 120 is fixedly connected with the base 110, and the carrying seat 130 is fixedly connected with the connecting piece 120. The carrying seat 130 is spaced apart from the base 110, for example Figure 1 The carrying seat 130 is located above the base 110, and there is a gap between the carrying seat 130 and the inner wall of the process tube.

[0032] Further, the connecting piece 120 is provided with a ventilation passage. One end of the ventilation passage is in space communication with the side of the base 110 away from the carrying seat 130, and the other end is in space communication between the base 110 and the carrying seat 130.

[0033] By using the carrying tool 100 described above, the material is placed on the carrying seat 130, and then the carrying tool 100 is placed into the quartz tube 200, and the base 110 is supported at the tube neck of the quartz tube 200. Next, the material is subjected to a degassing operation. Since the material is carried by the carrying seat 130, the material can be prevented from contacting the inner wall of the quartz tube 200. At the same time, the carrying seat 130 and the inner wall of the quartz tube 200 have a gap, and are spaced apart from the base 110, and the connecting piece 120 is provided with a ventilation passage, so that the process gas can flow through the ventilation passage, so that the material is degassed in the process gas atmosphere.

[0034] It should be explained that if the carrying seat 130 is directly supported on the inner wall of the quartz tube 200, in order to realize gas flow, a gas-permeable hole needs to be formed on the carrying seat 130, and the material is placed on the carrying seat 130, which may cause the gas flow to impact the material and blow the material off the carrying seat 130. In the present embodiment, the gas flow path is the gap between the ventilation passage and the carrying seat 130 and the inner wall of the quartz tube 200, so that the gas flow does not directly impact the material, and at the same time, a process gas atmosphere can be created for degassing, thereby improving the reliability of the degassing operation.

[0035] In one embodiment, the base 110, the connecting piece 120 and the carrying seat 130 are all made of graphite material, so as to ensure the high temperature resistance of the carrying tool 100.

[0036] As an example, in the arrangement direction of the carrying seat 130 and the base 110, the projections of the carrying seat 130 and the base 110 are both circular, and the diameter of the carrying seat 130 is greater than the diameter of the base 110. For example Figure 1As shown, the base 110 is supported at the tube neck of the quartz tube 200, and the carrier 130 is located in the tube body. The diameter of the tube neck is smaller than that of the tube body, so the diameter of the carrier 130 can be larger than that of the base 110, thereby improving the carrying capacity. Of course, in other embodiments, if the space in the quartz tube 200 is limited, in order to ensure that there is a gap between the carrier 130 and the inner wall of the quartz tube 200, or for other reasons, the diameter of the carrier 130 can also be smaller than or equal to the diameter of the base 110. Of course, it is preferred that the diameter of the carrier 130 is larger than the diameter of the base 110.

[0037] In one embodiment, the base 110 is provided with a vent hole 111, and the two ends of the vent hole 111 penetrate the base 110 towards and away from the two sides of the carrier 130, respectively, to increase the gas flow rate and ensure the process gas atmosphere for material degassing. Preferably, the number of vent holes 111 is multiple. It should be noted that the number of vent holes 111 needs to be determined on the premise of ensuring the support strength of the base 110, so the number of vent holes 111 is limited, but the above-mentioned vent passage can also achieve gas flow.

[0038] In one embodiment, the carrier 130 is connected to one end of the connecting piece 120, and the other end of the connecting piece 120 extends to the side of the base 110 away from the carrier 130. The vent passage penetrates one end of the connecting piece 120 away from the carrier 130 to communicate with the space below the base 110, and the other end penetrates the part of the connecting piece 120 between the carrier 130 and the base 110 to communicate with the space between the carrier 130 and the base 110.

[0039] Further, the connecting piece 120 is hollow, and the connecting piece 120 is provided with a first communication hole 121 and a second communication hole 122 which communicate with the inside to form the above-mentioned vent passage. That is, the first communication hole 121, the second communication hole 122 and the hollow inside constitute the above-mentioned vent passage, and the two ends of the vent passage penetrate the connecting piece 120 and form the above-mentioned first communication hole 121 and the second communication hole 122. The first communication hole 121 is located between the carrier 130 and the base 110, and the second communication hole 122 is located at the side of the base 110 away from the carrier 130.

[0040] Specifically Figure 1 In the embodiment shown, the connecting piece 120 is columnar, and the first communication hole 121 and the second communication hole 122 both penetrate the side wall of the connecting piece 120, and the number of the first communication hole 121 and the second communication hole 122 is multiple to improve the gas flow rate.

[0041] Please refer to Figure 3 and Figure 4In one embodiment, the carrier 130 comprises a supporting plate 131 and a retaining edge 132, the connecting member 120 is connected to one side of the supporting plate 131, the retaining edge 132 is connected to the side of the supporting plate 131 away from the connecting member 120, and is arranged around the supporting plate 131 to enclose a placing space 133 on the supporting plate 131, facilitating the placing of materials. Preferably, the retaining edge 132 is arranged at the edge of the supporting plate 131, i.e. around the edge of the supporting plate 131, thereby forming the above-mentioned placing space 133.

[0042] In one embodiment, the retaining edge 132 is provided with a connecting hole 134 penetrating through the thickness of the retaining edge 132, the connecting hole 134 is used for the passing of a taking and placing tool, so that the taking and placing tool is connected with the carrier tool 100, and then the carrier tool 100 is put into or taken out of the quartz tube 200 through the taking and placing tool.

[0043] Further, the bottom of the retaining edge 132 is connected with the supporting plate 131, the connecting hole 134 is located at the top of the retaining edge 132, and the connecting hole 134 comprises a penetrating segment 1341 and a limiting segment 1342, one end of the penetrating segment 1341 penetrates through the top of the retaining edge 132, the other end communicates with the limiting segment 1342, and the limiting segment 1342 is arranged at an angle with the penetrating segment 1341. In this way, the taking and placing tool can extend into the connecting hole 134 through the penetrating segment 1341, and then enter the limiting segment 1342, and the taking and placing tool is limited by the limiting segment 1342, avoiding the taking and placing tool from being taken out of the connecting hole 134 during the taking and placing process.

[0044] In one embodiment, the retaining edge 132 is provided with at least two connecting holes 134, and two of the at least two connecting holes 134 are located at opposite sides of the retaining edge 132, thereby improving the stability during the taking and placing process after the taking and placing tool is inserted into the connecting holes 134 at the opposite sides.

[0045] The above embodiments have described the structure of the carrier tool 100. In order to facilitate the understanding of the application of the carrier tool 100, the application process of the carrier tool 100 in the above embodiments is described as follows. Figure 1 The application process of the carrier tool 100 in the above embodiments is described as follows.

[0046] The materials are placed in the placing space 133, then the taking and placing tool is inserted into the connecting hole 134 and extends into the limiting segment 1342, the carrier tool 100 is lifted by the taking and placing tool and is put into the quartz tube 200, until the base 110 contacts the tube neck of the quartz tube 200, then the taking and placing tool is taken out of the connecting hole 134. The quartz tube 200 is heated and hydrogen is input into the quartz tube 200 through the air passage, so as to deaerate the materials. After the deaeration is completed, the taking and placing tool is extended into the quartz tube 200 and enters the limiting segment 1342 through the penetrating segment 1341, then the carrier tool 100 is lifted and taken out.

[0047] It can be understood that when the carrier tool 100 is located in the quartz tube 200, the extension section 1341 penetrates through the top of the retaining rim 132, and the insertion tool inserted from the top can be inserted into the connecting hole 134.

[0048] In another aspect, the application also provides a gas removal device, which comprises the carrier tool 100 in the above embodiments.

[0049] Although the embodiments of the application have been shown and described, it is to be understood that the application is not limited to these embodiments. It will be obvious to a person skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirit of the application, and the scope of the application is defined by the appended claims and their equivalents.

Claims

1. A load bearing tool, characterized by, The application relates to a bearing device for a process pipe. The bearing device comprises a base, a connecting piece, and a bearing seat. The connecting piece is fixedly connected with the base. The bearing seat is fixedly connected with the connecting piece. The bearing seat is spaced apart from the base, and a gap exists between the bearing seat and the inner wall of the process pipe.

2. The load bearing tooling of claim 1, wherein, The connecting piece is provided with a ventilation passage.

3. The load bearing tooling of claim 2, wherein, One end of the ventilation passage is in space communication with the side of the base away from the bearing seat.

4. The load bearing tooling of claim 1, wherein, The other end of the ventilation passage is in space communication with the space between the base and the bearing seat.

5. The load bearing tooling of claim 4, wherein, The connecting piece is hollow.

6. The load bearing tooling of claim 5, wherein, The connecting piece is provided with a first communication hole and a second communication hole in communication with the inside of the connecting piece.

7. The load bearing tooling of claim 5, wherein, The first communication hole is located between the bearing seat and the base.

8. The load bearing tooling of claim 1, wherein, The second communication hole is located on the side of the base away from the bearing seat.

9. The load bearing tooling of claim 1 wherein, The bearing seat comprises a supporting plate and a baffle.

10. A gas removal apparatus characterized by, The connecting piece is connected with one side of the supporting plate. The baffle is connected with the side of the supporting plate away from the connecting piece. The baffle surrounds the supporting plate to form a placing space. The baffle is provided with a connecting hole in the thickness direction of the baffle. The bottom of the baffle is connected with the supporting plate. The connecting hole comprises a protruding section and a limiting section. One end of the protruding section penetrates the top of the baffle. The other end of the protruding section is in communication with the limiting section. The limiting section and the protruding section are arranged at an angle. The baffle is provided with at least two connecting holes. Two of the connecting holes are located on opposite sides of the baffle. The base, the connecting piece, and the bearing seat are made of graphite. In the arrangement direction of the bearing seat and the base, the projections of the bearing seat and the base are circular. The diameter of the bearing seat is greater than that of the base. The bearing device comprises the bearing device according to any one of claims 1-9. The bearing device comprises the bearing device according to any one of claims 1-9.

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