Air bag pump sealing assembly

By designing a sealed box and negative pressure hole structure in the airbag pump, combined with an air extraction device and pressure gauge, the problem of liquid contamination caused by the reciprocating motion of the drive column is solved, achieving the effect of timely detection and prevention of liquid contamination.

CN223469411UActive Publication Date: 2025-10-24QINGDAO BESLAN SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202423151357.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-19
Publication Date
2025-10-24
Estimated Expiration
2034-12-19

AI Technical Summary

Technical Problem

In the existing bellows pump, during the reciprocating motion of the driving column, the sealing component is prone to generate particles that contaminate the liquid, and it is difficult to detect them in time, resulting in liquid contamination and waste.

Method used

A sealing assembly for a wind pump was designed, including a sealing box and a negative pressure port. The air extraction device maintains a negative pressure state in the closed cavity, and the sealing performance is monitored in real time by a pressure gauge and a safety valve to detect sealing problems in a timely manner and prevent impurities from entering the liquid phase working chamber.

Benefits of technology

It effectively avoids the contamination of liquid by impurities generated by the reciprocating motion of the driving column, timely discovers sealing problems, prevents large-scale liquid contamination, and reduces waste.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223469411U_ABST
Patent Text Reader

Abstract

The utility model belongs to the technical field of liquid delivery pumps, and particularly relates to an air bag pump sealing assembly which comprises two sealing boxes, the two ends of a driving column are sleeved with the sealing boxes respectively, the sealing boxes are arranged on the two sides of a valve plate respectively, and sealing pieces are arranged between the sealing boxes and the driving column. The valve plate and the pump body are provided with negative pressure holes, the negative pressure holes are communicated with the cavity of the sealing box, the negative pressure holes are connected with an air extractor through a pipeline, the sealing assembly can effectively prevent the driving column from generating impurities and polluting liquid in a reciprocating mode, and even if tiny impurities are generated, the impurities cannot enter the liquid phase working cavity to pollute the liquid.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of liquid delivery pump, concretely relates to a wind bag pump sealing assembly. BACKGROUND

[0002] In the semiconductor industry, a delivery pump such as a wind bag pump is usually needed for delivering strong corrosive liquids such as acid and alkali. The wind bag pump is an indispensable pump body equipment in the semiconductor production industry chain and can also be used for delivering high-purity fluids in other fields. The wind bag pump uses compressed air as power and relies on the alternating increase and decrease of the working volume of the variable-volume wind bag in the pump cylinder to deliver special liquids. The pump cavity of the wind bag is divided into two working chambers, each of which is divided into a gas phase working chamber and a liquid phase working chamber. After the compressed air enters the gas phase working chamber of the pump, the compressed wind bag deforms and moves, and the compressed air is controlled by the reversing valve to enter the two gas phase working chambers in turn. The alternating liquid absorption and discharge of the liquid phase working chamber realize the delivery of the liquid.

[0003] In the prior art wind bag pump, such as the one disclosed in application No. 2023206711745, the driving column will make reciprocating motion with the deformation and movement of the wind bag. The driving column will generate particles by rubbing against the valve plate during reciprocating motion, which will cause the particles to enter the liquid phase working chamber and contaminate the liquid. Although there are currently sealing assemblies suitable for wind bag pumps, such as the center shaft assembly and wind bag pump disclosed in application No. 2023223631525, the telescopic corrugated pipe is sleeved on the center shaft to isolate the center shaft from the liquid phase working chamber of the wind bag pump. However, the connection between the corrugated pipe and the center shaft is repeatedly rubbed and moved, which generates particles. Moreover, the corrugated pipe continuously undergoes peristalsis, and the corrugated pipe is prone to shedding of plastic particles, generating particles that contaminate the liquid (fluid). If the sealing assembly fails, it is difficult for the workers to know in a short time, which will result in a large amount of contaminated liquid and waste. If the liquid contamination is not discovered in time, it will also affect downstream production. SUMMARY

[0004] To solve the above problems, the utility model provides a wind bag pump sealing assembly, which can effectively prevent the reciprocating motion of the driving column from generating impurities and contaminating the liquid. Even if tiny impurities are generated, they will not enter the liquid phase working chamber and contaminate the liquid. Once the sealing property of the sealing assembly fails, the workers can discover it in time to avoid a large amount of liquid contamination and waste.

[0005] The technical solution of the utility model is as follows:

[0006] The wind bag pump sealing assembly comprises two sealing boxes, the sealing boxes are sleeved on two ends of a driving column respectively, the sealing boxes are arranged on two sides of a valve plate respectively, a sealing element is arranged between the sealing boxes and the driving column, a negative pressure hole is arranged on the valve plate and a pump body, the negative pressure hole communicates with a cavity of the sealing box, and the negative pressure hole is connected with a gas suction device through a pipeline.

[0007] Preferably, a pressure gauge is arranged on the pipeline, and the change of the pressure in the sealing box can be directly judged through the pressure gauge.

[0008] Preferably, a safety valve is arranged on the pipeline, and when the pressure in the sealing box is too large, the safety valve can be used for pressure relief in time, which is beneficial to preventing safety accidents.

[0009] Preferably, the sealing box is fixedly connected with the valve plate, the fixed connection between the sealing box and the valve plate can make the connection between the sealing box and the valve plate firm, because the wind bag pump will vibrate during operation, and if the connection is not firm, the wind bag pump is easy to fall off, which will delay production and may seriously pollute the liquid.

[0010] Preferably, the sealing box is a barrel-shaped structure, the sealing box is a barrel-shaped structure with a side wall and a bottom and without a top, the driving column penetrates the bottom of the sealing box and a cavity of the sealing box, then penetrates the valve plate and another sealing box on the other side of the valve plate, and the top end of the sealing box is fixedly connected with the valve plate.

[0011] Preferably, the sealing box, the sealing element, the driving column and the valve plate surround a closed cavity, the closed cavity is communicated with the negative pressure hole, the closed cavity is suctioned by the gas suction device, so that the closed cavity is in a negative pressure state, and if impurities are generated due to friction or other reasons, the impurities will be sucked into the closed cavity due to the negative pressure state of the closed cavity, and the impurities are prevented from entering a liquid phase working cavity to pollute the liquid.

[0012] Preferably, a switch is arranged on the pipeline.

[0013] Preferably, the negative pressure holes of the two sealing boxes communicated with each other are connected with the same gas suction device through the pipeline.

[0014] The air bag pump sealing assembly of the utility model, through the closed cavity structure in the sealing box, makes the relative movement of the liquid phase working cavity and the driving column and the valve plate be isolated, avoids the impurity pollution liquid because of the reciprocating movement of the driving column, simultaneously the closed cavity structure uses the air extraction device to extract air, makes it be in the negative pressure state, even if the impurity is produced because of the reciprocating movement between the driving column and the sealing box, also will inhale the impurity into the closed cavity because of the negative pressure state, avoids the impurity pollution liquid, simultaneously also is provided with the pressure gauge, through the pressure gauge real-time monitoring closed cavity, once the cavity has a problem, the sealing property is destroyed, causes the pressure change, the staff can find in time, avoids the pollution of a large amount of liquid.

[0015] The air bag pump sealing assembly provided by the utility model can effectively avoid the generation of impurities due to the reciprocating movement of the driving column, and the pollution of liquid, even if tiny impurities are generated, the impurities will not enter the liquid phase working cavity to pollute the liquid, once the sealing property of the sealing assembly has a problem, the staff can also find in time, avoid the pollution of a large amount of liquid, and cause waste. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structural schematic view of the utility model;

[0017] Figure 2 It is Figure 1 It is an enlarged view of A in the middle;

[0018] Figure 3 It is a structural schematic view of the negative pressure pipe in the utility model;

[0019] In the drawing, 1 is a pump body, 2 is a valve plate, 3 is a pressure gauge, 4 is a driving column, 5 is a sealing element, 6 is a sealing box, 7 is an air bag, 8 is a negative pressure hole, 9 is a safety valve, 10 is an air extraction device, and 11 is a liquid phase working cavity. DETAILED DESCRIPTION

[0020] The technical solutions of the embodiments of the application will be described clearly and completely in combination with the drawings, obviously, the described embodiments are part of the embodiments of the application, not all the embodiments. Based on the embodiments in the application embodiments, all other embodiments obtained by the person skilled in the art without creative labor belong to the range of the application claimed by the application.

[0021] As Figures 1-3As shown, a kind of wind bag pump sealing assembly, wind bag pump includes pump body 1, wind bag 7, valve plate 2 on pump body 1 separates pump body 1 into left chamber and right chamber, and wind bag 7 is arranged in two chambers, and each chamber includes gas phase working chamber and liquid phase working chamber 11, and the drive column 4 in wind bag pump is abutted to the front end of wind bag 7 in two chambers by passing through the both ends of valve plate 2, sealing assembly includes sealing box 6, sealing box 6 is respectively set in the both ends of drive column 4, sealing box 6 is respectively arranged on the both sides of valve plate 2, and sealing element 5 is arranged between sealing box 6 and drive column 4;Valve plate 2 and pump body 1 are provided with negative pressure hole 8 (valve plate 2 is provided with negative pressure hole 8, and pump body 1 is also provided with negative pressure hole 8, and the two negative pressure holes 8 are communicated), and the cavity of sealing box 6 is communicated with negative pressure hole 8, and negative pressure hole 8 is connected with suction device 10 by pipeline, and switch is arranged on the pipeline;Sealing box 6, sealing element 5, drive column 4 and valve plate 2 form a closed cavity, the closed cavity is communicated with negative pressure hole 8, and the closed cavity is suctioned by suction device 10, so that the closed cavity is in a negative pressure state, at this time, if fine particles and other impurities are generated due to friction and the like, the impurities will be sucked into the closed cavity due to the negative pressure state of the closed cavity, to prevent the impurities from entering the liquid phase working chamber 11 and polluting the liquid.

[0022] In another embodiment, the sealing element 5 can be selected from a sealing gasket or a mechanical sealing assembly for shaft reciprocation, and other prior art sealing elements suitable for shaft reciprocation.

[0023] In another embodiment, a pressure gauge 3 is arranged on the pipeline, so that the change of pressure in the sealing box 6 can be directly judged, once the sealing box 6 is damaged or the sealing is not tight, and the liquid flows in, the staff can find the problem of the sealing box 6 in time through the pressure gauge 3, to avoid a large amount of pollution of the liquid; A safety valve 9 is further arranged on the pipeline, when the pressure in the sealing box 6 is too large, the safety valve 9 can be used for pressure relief in time, which is beneficial to prevent safety accidents.

[0024] In another embodiment, the sealing box 6 is fixedly connected with the valve plate 2, and the specific fixed connection mode can be welding or other prior art connection modes, as long as the connection between the sealing box 6 and the valve plate 2 is stable and closed, and the fixed connection between the sealing box 6 and the valve plate 2 can make the connection between the sealing box 6 and the valve plate 2 firm, because the wind bag pump will vibrate during operation, if the connection is not firm, it is easy to fall off, which will delay production and may seriously pollute the liquid.

[0025] In another embodiment, the sealing box 6 has a barrel structure, the sealing box 6 has a barrel structure standing on the side, which is composed of a side wall and a bottom, without a top, the drive column 4 penetrates the bottom of the sealing box 6 and the cavity of the sealing box 6, and then penetrates the valve plate 2 and the sealing box 6 on the other side of the valve plate 2, and the top end of the sealing box 6 is fixedly connected with the valve plate 2.

[0026] In another embodiment, the negative pressure holes 8 of the two sealing boxes 6 are connected to the same air extraction device 10 through pipes, and switches are arranged on the pipes, so that the air extraction device 10 can simultaneously extract air from the two sealing boxes 6 or extract air from one of the two sealing boxes 6.

[0027] In another embodiment, the pressure gauge 3 is electrically connected to an alarm device, and when the pressure gauge 3 detects that the pressure changes by more than a set value, the pressure gauge 3 feeds back a signal to the alarm device, and the alarm device emits an alarm sound, so that the staff can timely find that the sealing assembly has a problem.

[0028] Working principle: before the air bag pump starts to work, the air extraction device 10 is turned on, so that the closed cavity in the sealing element 5 is in a negative pressure state, then the air extraction device 10 and the switches on the pipes are turned off, the air bag pump is started, and the closed cavity isolates the liquid phase working cavity 11 from the relative movement of the driving column 4 and the valve plate 2, so as to avoid that impurities pollute the liquid due to the reciprocating movement of the driving column 4; if impurities are generated between the driving column 4 and the sealing box 6 and the sealing element 5 due to friction or the like, the impurities can be sucked into the closed cavity due to the negative pressure state of the closed cavity; when the value of the pressure gauge 3 suddenly changes, the staff can timely find that the sealing property of the sealing assembly has a fault, and the operation of the air bag pump is stopped in time, so as to avoid that the liquid is greatly polluted; when the pressure in the closed cavity changes, the safety valve 9 emits an alarm and releases pressure, so as to timely remind the staff and release pressure to ensure safety.

[0029] The air bag pump sealing assembly of the utility model, through the closed cavity structure in the sealing box 6, the liquid phase working cavity 11 is isolated from the relative movement of the driving column 4 and the valve plate 2, so as to avoid that impurities pollute the liquid due to the reciprocating movement of the driving column 4, and the closed cavity structure uses the air extraction device 10 to extract air, so that the closed cavity is in a negative pressure state, even if impurities are generated between the driving column 4 and the sealing box 6 due to reciprocating movement, the impurities can be sucked into the closed cavity due to the negative pressure state, so as to avoid that the impurities pollute the liquid; and the pressure gauge 3 is further arranged, the closed cavity is monitored in real time through the pressure gauge 3, once the cavity has a problem and the sealing property is damaged, the pressure changes, the staff can timely find, and the pollution of a large amount of liquid is avoided.

[0030] The air bag pump sealing assembly can effectively avoid that impurities are generated due to the reciprocating movement of the driving column 4 and pollute the liquid, even if tiny impurities are generated, the impurities cannot enter the liquid phase working cavity 11 and pollute the liquid, once the sealing property of the sealing assembly has a problem, the staff can timely find, the pollution of a large amount of liquid is avoided, and waste is caused.

Claims

1. A windkessel pump seal assembly, characterized by: The sealing assembly comprises two sealing boxes (6) respectively sleeved on both ends of the driving column (4) and arranged on both sides of the valve plate (2), and a sealing element (5) is arranged between the sealing box (6) and the driving column (4); the valve plate (2) and the pump body (1) are provided with a negative pressure hole (8) communicating with the cavity of the sealing box (6), and the negative pressure hole (8) is connected with a gas suction device (10) through a pipeline.

2. A windsock pump seal assembly according to claim 1, wherein: A pressure gauge (3) is arranged on the pipeline.

3. A windsock pump seal assembly according to claim 1, wherein: A safety valve (9) is arranged on the pipeline.

4. A windsock pump seal assembly according to claim 1, wherein: The sealing box (6) is fixedly connected with the valve plate (2).

5. A windsock pump seal assembly according to claim 1, wherein: The sealing box (6) has a barrel-shaped structure.

6. A windsock pump seal assembly according to claim 1, wherein: The sealing box (6), the sealing element (5), the driving column (4) and the valve plate (2) form a closed cavity, and the closed cavity is communicated with the negative pressure hole (8).

7. A windsock pump seal assembly according to claim 1, wherein: A switch is arranged on the pipeline.

8. A windsock pump seal assembly according to claim 1, wherein: The negative pressure holes (8) of the two sealing boxes (6) are connected with the same gas suction device (10) through the pipeline.