Uniform light source assembly for exposure machine

Abstract

The utility model discloses a dodging light source assembly for an exposure machine. The dodging light source assembly comprises a shell and a fixed block, a fixing block is fixed to one end of one side of the shell, a heat dissipation structure is arranged on one side of the shell, an installation structure is arranged in the fixing block, and an LED array is installed on one side in the shell. A reflecting mirror is installed on one side of the LED array, a lens is installed on one side of the reflecting mirror, a light uniformizing plate is installed on one side of the lens, the heat dissipation structure comprises heat dissipation fins, a heat dissipation block, fan blades, a motor and a through groove, and the heat dissipation fins are installed on one side of the shell; heat dissipation blocks are fixed to the surfaces of the heat dissipation fins, and through grooves are formed in the heat dissipation fins. The heat dissipation fins and the heat dissipation blocks are used in cooperation, the heat dissipation area of the shell can be increased, the heat dissipation effect of the shell is better, wind power can be generated, flowing of air on the surfaces of the heat dissipation fins is accelerated, and heat dissipation of the shell is faster.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of exposure machine, especially relates to a light -evening light source subassembly for exposure machine. BACKGROUND

[0002] Exposure machine is an important machine and equipment in semiconductor manufacturing process, and is used for projecting a pattern onto a silicon wafer to form a fine circuit pattern. One of the important components in the exposure machine is a light-evening light source subassembly. The light-evening light source subassembly is a crucial part of the exposure system, which is responsible for uniformizing the light emitted by the light source to ensure that the illumination on the exposure surface is consistent. However, the traditional light-evening light source subassembly of the exposure machine still has some problems when in use.

[0003] The light source of the light-evening light source subassembly of the exposure machine is usually an LED array or a fluorescent lamp tube, which generates a large amount of heat during operation. The traditional self-cooling method cannot quickly dissipate the heat, resulting in damage to the LED array or the fluorescent lamp tube during long-term use. Therefore, a light-evening light source subassembly for exposure machine is needed to solve the above problems. SUMMARY

[0004] The utility model discloses a light-evening light source subassembly for exposure machine to solve the defect that the light-evening light source subassembly cannot quickly dissipate heat during long-term use.

[0005] To solve the above technical problems, the utility model provides the following technical scheme: a light-evening light source subassembly for exposure machine, comprising a shell and a fixing block, one end of one side of the shell is fixed with the fixing block, one side of the shell is provided with a heat dissipation structure, the inside of the fixing block is provided with a mounting structure, one side of the inside of the shell is installed with an LED array, one side of the LED array is installed with a reflector, one side of the reflector is installed with a lens, one side of the lens is installed with a light-evening plate, the heat dissipation structure comprises a heat dissipation fin, a heat dissipation block, a fan blade, a motor and a through groove, the heat dissipation fin is installed on one side of the shell, the surface of the heat dissipation fin is fixed with the heat dissipation block, the inside of the heat dissipation fin is provided with the through groove, the motor is arranged on one side of the shell, the outside of the motor output end is provided with the fan blade.

[0006] Preferably, the heat dissipation fin is provided with a plurality of heat dissipation fins, and the plurality of heat dissipation fins are arranged at equal intervals on one side of the shell.

[0007] Preferably, the heat dissipation block is provided with two groups, and the two groups of heat dissipation blocks are symmetrically distributed on the outside of the heat dissipation fin.

[0008] Preferably, the fan leaves are provided with a plurality of fan leaves, and the plurality of fan leaves are distributed in a ring shape outside the output end of the motor.

[0009] Preferably, the mounting structure comprises a fixing bolt, a nut, a clamping block and a clamping groove, the clamping groove is arranged in the interior of the fixing block, the clamping block is inserted into the interior of the clamping groove, the top end of the clamping block is connected with the bottom end of the motor, the fixing bolt is arranged on one side of the clamping block, and the nut is arranged on the outer side of the fixing bolt.

[0010] Preferably, the clamping block is inserted into the interior of the clamping groove, and the clamping block and the clamping groove form an insertion structure.

[0011] Preferably, the nut is sleeved on the outer side of the fixing bolt, and the nut and the fixing bolt form a threaded connection.

[0012] The light source assembly for the exposure machine has the advantages that:

[0013] The heat dissipation fins and the heat dissipation block are used in cooperation, the heat dissipation area of the shell is increased, the heat dissipation effect is better, the motor and the fan leaves are used to generate wind power and accelerate the air flow on the surface of the heat dissipation fins, and the shell is cooled more quickly.

[0014] The clamping groove and the clamping block are used in cooperation, the motor is installed more quickly, the fixing bolt and the nut are used in cooperation to fix the motor after the installation of the motor is completed, and the motor is prevented from falling off. DRAWINGS

[0015] Figure 1 It is a front view structural schematic diagram of the utility model;

[0016] Figure 2 It is a bottom view structural schematic diagram of the utility model;

[0017] Figure 3 It is a front view cross section structural schematic diagram of the utility model;

[0018] Figure 4 It is a side view structural schematic diagram of the utility model;

[0019] Figure 5 It is a Figure 4 It is a local amplification structural schematic diagram of the utility model.

[0020] In the figure: 1, the shell; 2, heat dissipation structure;201, heat dissipation fin;202, heat dissipation block;203, fan blade;204, motor;205, through slot;3, fixed block;4, LED array;5, reflector;6, lens;7, light uniformity plate;8, mounting structure;801, fixing bolt;802, nut;803, clamping block;804, clamping groove. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] The utility model embodiment provides a kind of light uniformity source assembly for exposure machine, as shown in Figures 1-5 It includes shell 1 and fixed block 3;One end of the side of shell 1 is fixed with fixed block 3, and the side of shell 1 is provided with heat dissipation structure 2, and the inside of fixed block 3 is provided with mounting structure 8, and the side of the inside of shell 1 is provided with LED array 4;The side of LED array 4 is provided with reflector 5, the side of reflector 5 is provided with lens 6, and the side of lens 6 is provided with light uniformity plate 7.

[0023] The utility model further preferably in the embodiment, as shown in Figures 1-5 It includes heat dissipation fin 201, heat dissipation block 202, fan blade 203, motor 204 and through slot 205 heat dissipation fin 201 is installed on the side of shell 1;The surface of heat dissipation fin 201 is fixed with heat dissipation block 202, and through slot 205 is arranged in the inside of heat dissipation fin 201, and motor 204 is arranged on the side of shell 1, and fan blade 203 is arranged on the outside of the output end of motor 204, and heat dissipation fin 201 is provided with a plurality of, and the plurality of heat dissipation fin 201 is arranged at equal intervals on the side of shell 1, and heat dissipation block 202 is provided with two groups, and the two groups of heat dissipation block 202 are symmetrically distributed on the outside of heat dissipation fin 201, and fan blade 203 is provided with a plurality of, and the plurality of fan blade 203 is annularly distributed on the outside of the output end of motor 204.

[0024] Specifically, when shell 1 needs to be cooled during use, the use of heat dissipation fin 201 and heat dissipation block 202 can increase the heat dissipation area of shell 1, so that the cooling effect is better, and when cooling, the external power supply starts motor 204 to drive fan blade 203 to rotate, thereby driving the air flow on the surface of heat dissipation fin 201 to flow, accelerating the speed of air flow on the surface of heat dissipation fin 201, so that the cooling effect of heat dissipation fin 201 is better, thereby completing the cooling work.

[0025] In the further preferred embodiment of the utility model, as shown in Figures 1-5 The installation structure 8 comprises a fixing bolt 801, a nut 802, a clamping block 803 and a clamping groove 804. The clamping groove 804 is arranged in the interior of the fixing block 3. The clamping block 803 is inserted into the interior of the clamping groove 804. The top end of the clamping block 803 is connected with the bottom end of the motor 204. The clamping block 803 is fixed with the fixing bolt 801 on one side. The nut 802 is arranged on the outside of the fixing bolt 801. The clamping block 803 is inserted into the interior of the clamping groove 804. The clamping block 803 and the clamping groove 804 form an insertion structure. The nut 802 is sleeved on the outside of the fixing bolt 801. The nut 802 and the fixing bolt 801 form a threaded connection.

[0026] Specifically, before heat dissipation, the clamping block 803 at the bottom end of the motor 204 is aligned with the clamping groove 804 and then inserted into the clamping groove 804, so that the installation of the motor 204 is more convenient. After the insertion is completed, the nut 802 is fixed on the outside of the fixing bolt 801, so that the motor 204 is fixed, and the installation of the motor 204 is more convenient.

[0027] Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A light uniformization source assembly for an exposure machine, comprising a housing (1) and a fixing block (3); Its characterized in that: One end of the side of the housing (1) is fixed with the fixing block (3), one side of the housing (1) is provided with a heat dissipation structure (2), the inside of the fixing block (3) is provided with a mounting structure (8), one side of the inside of the housing (1) is mounted with an LED array (4); One side of the LED array (4) is mounted with a reflector (5), one side of the reflector (5) is mounted with a lens (6), one side of the lens (6) is mounted with a light uniformization plate (7), the heat dissipation structure (2) comprises heat dissipation fins (201), heat dissipation blocks (202), fan blades (203), motors (204) and through grooves (205), the heat dissipation fins (201) are mounted on one side of the housing (1); The surface of the heat dissipation fins (201) is fixed with the heat dissipation blocks (202), the inside of the heat dissipation fins (201) is provided with the through grooves (205), the motor (204) is arranged on one side of the housing (1), the outside of the output end of the motor (204) is provided with the fan blades (203).

2. The uniform light source assembly for an exposure machine according to claim 1, wherein: The heat dissipation fins (201) are provided in plurality, and the plurality of heat dissipation fins (201) are arranged at equal intervals on one side of the housing (1).

3. A uniform light source assembly for an exposure apparatus according to claim 2, wherein: The heat dissipation blocks (202) are provided in two groups, and the two groups of heat dissipation blocks (202) are symmetrically distributed on the outside of the heat dissipation fins (201).

4. The uniform light source assembly for an exposure apparatus according to claim 1, wherein: The fan blades (203) are provided in plurality, and the plurality of fan blades (203) are annularly distributed on the outside of the output end of the motor (204).

5. The uniform light source assembly for an exposure apparatus according to claim 1, wherein: The mounting structure (8) comprises fixing bolts (801), nuts (802), clamping blocks (803) and clamping grooves (804), the clamping grooves (804) are formed in the inside of the fixing block (3), the clamping blocks (803) are inserted into the inside of the clamping grooves (804), the top end of the clamping block (803) is connected with the bottom end of the motor (204), the fixing bolts (801) are fixed on one side of the clamping block (803), and the nuts (802) are arranged on the outside of the fixing bolts (801).

6. A uniform light source assembly for an exposure apparatus according to claim 5, wherein: The clamping block (803) is inserted into the inside of the clamping groove (804), and an insertion structure is formed between the clamping block (803) and the clamping groove (804).

7. The uniform light source assembly for an exposure apparatus according to claim 5, wherein: The nut (802) is sleeved on the outside of the fixing bolt (801), and a threaded connection is formed between the nut (802) and the fixing bolt (801).

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