Nozzle disassembling and assembling jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a nozzle disassembling and assembling jig which comprises a jig body, a driving assembly and a disassembling and assembling assembly. The dismounting and mounting assembly comprises at least two first dismounting and mounting parts, and each first dismounting and mounting part is movably arranged on the jig body; the driving assembly is arranged on the jig body and used for driving the first dismounting and mounting pieces to move so as to form a closed state or an unfolded state. When the first disassembly and assembly parts are in a closed state, the first disassembly and assembly parts are close to one another to define a first disassembly and assembly cavity allowing a nozzle to be inserted therein; and when the first disassembly and assembly parts are in an unfolded state, the first disassembly and assembly parts are far away from each other. The end portion of the nozzle dismounting and mounting jig can be unfolded or closed, when the nozzle is dismounted and mounted, the end portion of the nozzle dismounting and mounting jig is closed, and after dismounting and mounting are completed, the end portion of the nozzle dismounting and mounting jig is unfolded so that the inner wall can be cleaned conveniently.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a nozzle disassembly and assembly fixture. Background Technology

[0002] Photolithography is a complex process, and resist coating is one of the important steps in it.

[0003] Photoresist coating is a process in which photoresist is uniformly applied to the surface of a wafer after the wafer film deposition process. After coating, a uniform photoresist coating is obtained on the surface of the wafer, and then subsequent exposure and development steps are performed.

[0004] Photoresist coating is typically performed using a rotary coating machine or a coating and developing machine, which applies photoresist to the wafer surface through nozzles. Due to varying process requirements, different nozzle sizes are usually used, necessitating nozzle disassembly and assembly, which requires the use of disassembly and assembly fixtures.

[0005] Existing assembly and disassembly fixtures typically employ an integrated sleeve structure. After each use, the inner wall of the sleeve is usually contaminated with photoresist, which is difficult to clean thoroughly. Therefore, the nozzle is prone to contamination during subsequent uses.

[0006] Therefore, it is necessary to provide a nozzle disassembly and assembly fixture that is easy to clean and avoids contamination of the nozzle. Utility Model Content

[0007] The purpose of this utility model is to provide a nozzle disassembly and assembly fixture, the end of which can be opened or closed. When disassembling or assembling the nozzle, the end of the nozzle disassembly and assembly fixture is closed, and after disassembly or assembly is completed, the end of the nozzle disassembly and assembly fixture is opened to facilitate cleaning of the inner wall.

[0008] This utility model provides a nozzle assembly / disassembly fixture, comprising: a fixture body, a driving assembly, and an assembly / disassembly assembly; the assembly / disassembly assembly includes at least two first assembly / disassembly components, each of which is movably disposed on the fixture body; the driving assembly is disposed on the fixture body and is used to drive each of the first assembly / disassembly components to move to form a closed state or an open state; when the first assembly / disassembly components are in the closed state, they approach each other to form a first assembly / disassembly cavity for nozzle insertion; when the first assembly / disassembly components are in the open state, they move away from each other. In use, the nozzle assembly / disassembly fixture can close the first assembly / disassembly components to form a closed state, at which time the first assembly / disassembly cavity is used for nozzle insertion, which can meet the screwing requirements during normal nozzle assembly / disassembly; after use, the first assembly / disassembly components can be opened to form an open state, facilitating the cleaning of any adhering substances on the inner wall of the first assembly / disassembly components. This facilitates cleaning of the inner wall of the nozzle assembly / disassembly fixture and also helps to improve the cleaning effect, reduce the probability of residue on the inner wall after cleaning, and avoid contamination of the nozzle during the next use.

[0009] Optionally, the disassembly assembly includes at least two second disassembly components, each of which is movably disposed on the fixture body;

[0010] The drive assembly is also used to drive each of the second disassembly / assembly components to move to form a closed state or an unfolded state.

[0011] When the second disassembly component is in the closed state, each of the second disassembly components approaches each other to form a second disassembly cavity for nozzle insertion; when the second disassembly component is in the unfolded state, each of the second disassembly components moves away from each other.

[0012] Optionally, the fixture body has a first end and a second end along a first direction, the first disassembly / assembly component is disposed at the first end, and the second disassembly / assembly component is disposed at the second end.

[0013] Optionally, the first disassembly component is rotatably connected to the fixture body, and the drive assembly is used to drive each of the first disassembly components to rotate to form a closed state or an unfolded state.

[0014] And / or, when the disassembly assembly includes a second disassembly component, the second disassembly component is rotatably connected to the fixture body, and the drive assembly is used to drive each of the second disassembly components to rotate to form a closed state or an unfolded state.

[0015] Optionally, the drive component is disposed on the fixture body for linear motion;

[0016] When the drive component moves toward the first disassembly / assembly component relative to the fixture body, the drive component squeezes each of the first disassembly / assembly components so that they come together to form the closed state.

[0017] And / or, when the disassembly assembly includes a second disassembly component, when the drive assembly moves relative to the fixture body toward the second disassembly component, the drive assembly squeezes each of the second disassembly components so that they come together to form the closed state.

[0018] Optionally, the drive assembly includes a sleeve that slides linearly over the fixture body.

[0019] Optionally, the outer contour of the cross-section formed by cutting the jig body along the sliding direction perpendicular to the sleeve is non-circular, and the inner cavity of the sleeve conformally fits the outer wall of the jig body.

[0020] And / or, the fixture body is an elongated strip extending along a first direction, and the sleeve slides along the first direction onto the fixture body;

[0021] And / or, the fixture body has an inner cavity that extends through both ends of the fixture body along a first direction.

[0022] Optionally, the first assembly / disassembly component includes a first driving part and a first main body part. One end of the first driving part is disposed on the fixture body, and the other end of the first driving part is connected to the first main body part. The outer surface of the first driving part is higher than the outer surface of the first main body part.

[0023] Optionally, the second assembly / disassembly component includes a second driving part and a second main body part. One end of the second driving part is disposed on the fixture body, and the other end of the second driving part is connected to the second main body part. The outer surface of the second driving part is higher than the outer surface of the second main body part.

[0024] Optionally, the nozzle assembly / disassembly fixture further includes a limiting component, which is disposed on the fixture body and / or the drive component to limit the travel distance of the drive component relative to the fixture body.

[0025] In summary, the nozzle disassembly and assembly fixture includes: a fixture body, a drive assembly, and a disassembly and assembly assembly; the disassembly and assembly assembly includes at least two first disassembly and assembly components, each of which is movably disposed on the fixture body; the drive assembly is disposed on the fixture body for driving each of the first disassembly and assembly components to move to form a closed state or an open state; when the first disassembly and assembly components are in the closed state, each of the first disassembly and assembly components approaches each other to form a first disassembly and assembly cavity for nozzle insertion; when the first disassembly and assembly components are in the open state, each of the first disassembly and assembly components moves away from each other.

[0026] With this configuration, the nozzle assembly / disassembly fixture described above can be closed during use, forming a closed state. At this time, the first assembly / disassembly chamber is used for nozzle insertion, which can meet the screwing requirements during normal nozzle assembly / disassembly. After the nozzle assembly / disassembly fixture is used, each of the first assembly / disassembly components can be unfolded to facilitate cleaning of any adhering substances on the inner wall of the first assembly / disassembly components. This facilitates cleaning of the inner wall of the nozzle assembly / disassembly fixture and also helps to improve the cleaning effect, reduce the probability of residue on the inner wall of the nozzle assembly / disassembly fixture after cleaning, and avoid contamination of the nozzle during the next use. Attached Figure Description

[0027] Figure 1 This is a three-dimensional structural diagram of a nozzle assembly / disassembly fixture according to an embodiment of the present invention;

[0028] Figure 2 This is a cross-sectional view of a nozzle assembly / disassembly fixture according to an embodiment of the present invention.

[0029] Figure 3 This is a schematic diagram of the internal structure of a nozzle assembly / disassembly fixture according to an embodiment of the present invention;

[0030] Figure 4 for Figure 2 A schematic diagram of the left-side view structure;

[0031] Figure 5 This is a schematic diagram of the structure of the first disassembly component in a closed state according to an embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of the second disassembly component in a closed state according to an embodiment of the present invention.

[0033] In the attached diagram:

[0034] 10-Jig body;

[0035] 20 - Drive assembly; 21 - Sleeve;

[0036] 30 - Assembly / disassembly component; 31 - First assembly / disassembly part; 311 - First drive unit; 312 - First main body part; 32 - Second assembly / disassembly part; 321 - Second drive unit; 322 - Second main body part;

[0037] 41-First disassembly / assembly chamber; 42-Second disassembly / assembly chamber;

[0038] 50 - Limiting component; 51 - Limiting groove; 52 - Limiting protrusion;

[0039] a - First direction. Detailed Implementation

[0040] The nozzle assembly and disassembly fixture proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0041] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0042] Please refer to Figures 1 to 3 As shown, this utility model provides a nozzle disassembly and assembly fixture, which includes: fixture body 10, drive assembly 20 and disassembly and assembly assembly 30.

[0043] The disassembly and assembly assembly 30 includes a plurality of first disassembly and assembly parts 31, each of which is movably disposed on the fixture body 10.

[0044] The drive component 20 is disposed on the fixture body 10 and is used to drive each of the first disassembly / assembly parts 31 to move to form a closed state or an unfolded state.

[0045] When the first disassembly / assembly component 31 is in the closed state, each of the first disassembly / assembly components 31 approaches each other to form a first disassembly / assembly cavity 41 for nozzle insertion; when the first disassembly / assembly component 31 is in the unfolded state, each of the first disassembly / assembly components 31 moves away from each other.

[0046] in Figures 1 to 4 Each of the first disassembly components 31 is in an unfolded state, and the multiple first disassembly components 31 are unfolded in a petal shape, which facilitates cleaning their inner walls. Figure 5 The image shows the first disassembly / assembly component 31 in its closed state. At this time, the components 31 approach and close together, forming an inner hexagonal first disassembly / assembly cavity 41. This cavity 41 is adapted to the shape of a nozzle of a specific specification. When disassembling or assembling the nozzle, the nozzle is inserted into the first disassembly / assembly cavity 41. The outer wall of the nozzle conforms to the cavity, allowing the nozzle to be turned by rotating the entire nozzle disassembly / assembly fixture, facilitating nozzle removal and installation. The main function of the first disassembly / assembly cavity 41 is to mate with the outer wall of the nozzle. Therefore, the shape of the first disassembly / assembly cavity 41 is adapted to the existing nozzle shape. Since the outer contour of the nozzle is typically non-cylindrical, the first disassembly / assembly cavity 41 is also non-cylindrical, ensuring that the nozzle can be turned when the nozzle disassembly / assembly fixture rotates.

[0047] The nozzle assembly / disassembly fixture described above can be closed during use, with the first assembly / disassembly component 31 closed, allowing the nozzle to be inserted into the first assembly / disassembly chamber 41, which meets the screwing requirements for normal nozzle assembly / disassembly. After use, the first assembly / disassembly components 31 can be unfolded to facilitate cleaning of any adhering substances on the inner wall of the first assembly / disassembly component 31. This facilitates cleaning of the inner wall of the nozzle assembly / disassembly fixture, improves the cleaning effect, reduces the probability of residue on the inner wall after cleaning, and avoids contamination of the nozzle during the next use.

[0048] Please continue to refer to this. Figures 1 to 4 As shown, in this embodiment, the first disassembly / assembly component 31 is rotatably connected to the fixture body 10, and the driving assembly 20 is used to drive each of the first disassembly / assembly components 31 to rotate to form a closed state or an unfolded state. Each of the first disassembly / assembly components 31 is centrally symmetrically distributed around a central line. One end of each first disassembly / assembly component 31 is rotatably connected to the fixture body 10, and the rotation axis of the first disassembly / assembly component 31 is perpendicular to the aforementioned central line; the other end of each first disassembly / assembly component 31 can swing relative to the other end. When the driving assembly 20 drives the first disassembly / assembly components 31 to swing and close together, each of the first disassembly / assembly components 31 surrounds and forms a ring structure, inside which a first disassembly / assembly cavity 41 is formed (see details). Figure 5(As shown). In other alternative embodiments, the first disassembly / assembly member 31 can also be linearly disposed on the fixture body 10, with each of the first disassembly / assembly members 31 symmetrically distributed around a center line, and each of the first disassembly / assembly members 31 moving radially towards the center line. When the driving component 20 drives the first disassembly / assembly members 31 to move linearly towards each other along the center line, a closed state can be formed; similarly, when the driving component 20 drives the first disassembly / assembly members 31 to move linearly away from each other along the center line, an unfolded state can be formed. The first disassembly / assembly member 31 can also adopt other more complex movement modes relative to the fixture body 10, and its movement mode can be adaptively adjusted based on actual usage requirements.

[0049] In this embodiment, six first disassembly / assembly components 31 are provided. The six first disassembly / assembly components 31 unfold into a petal shape and close to form a sleeve structure. In other alternative embodiments, the first disassembly / assembly components 31 can be set to two, three, or other numbers, and the number of first disassembly / assembly components 31 can be adjusted adaptively based on actual usage requirements.

[0050] In this embodiment, when the first disassembly / assembly component 31 is closed, the first disassembly / assembly components 31 are in contact with each other. That is, in the closed state, there are no gaps between adjacent first disassembly / assembly components 31, and the first disassembly / assembly cavity 41 is a complete chamber. In other alternative embodiments, when the first disassembly / assembly components 31 are closed, the adjacent first disassembly / assembly components 31 may be non-contacting, that is, there are gaps between adjacent first disassembly / assembly components 31 to prevent interference between them during movement. In this case, the first disassembly / assembly cavity 41 is partially connected to the outside.

[0051] Please combine Figure 1 , Figure 3 and Figure 4As shown, in this embodiment, the first disassembly / assembly component 31 includes a first driving part 311 and a first main body part 312. The first driving part 311 is rotatably connected to the fixture body 10; specifically, the two can be rotatably coupled via a rotating shaft, and the rotatable connection method is existing technology and will not be described in detail here. The first main body part 312 is connected to the first driving part 311. The first driving part 311 and the first main body part 312 are integrally formed, and their inner walls have the same shape and a smooth transition. When the first disassembly / assembly component 31 is in a closed state, the inner walls of the two together form an inner hexagonal first disassembly / assembly cavity 41. The outer wall shapes of the first drive unit 311 and the first main body 312 are different. The outer wall of the first drive unit 311 has a planar structure. When the first disassembly / assembly component 31 is in a closed state, the outer walls of each first drive unit 311 together form a regular hexagonal columnar structure. The outer wall of the first main body 312 has an arc structure. The outer wall of the first drive unit 311 is higher than the outer wall of the first main body 312. When the first disassembly / assembly component 31 is in a closed state, the outer wall of each first main body 312 together forms a cylindrical structure. Therefore, when the first disassembly / assembly component 31 is in a closed state, the outer contour of the structure formed by the combination of each first disassembly / assembly component 31 is partly a cylindrical structure and partly a hexagonal columnar structure.

[0052] Furthermore, the hexagonal columnar structure formed by the first assembly / disassembly component 31 is coaxially arranged with the cylindrical structure, and the diameter of the circumscribed circle of the hexagonal columnar structure is larger than the diameter of the cylindrical structure. Therefore, there is a height difference between the outer wall of the first driving part 311 and the outer wall of the first main body part 312 of the first assembly / disassembly component 31, forming a step between their outer walls.

[0053] In other alternative embodiments, the outer wall of the first driving part 311 and the outer wall of the first main body part 312 can be consistent, that is, the overall consistency of the outer wall of the first detachable part 31 is better. For example, the outer wall of the first main body part 312 can be configured as a planar structure coplanar with the outer wall of the first driving part 311.

[0054] The hexagonal columnar structure formed by the outer wall of the first drive unit 311 is used to cooperate with the inner wall of the drive assembly 20. The specific cooperation method is described in detail below in conjunction with the structure of the drive assembly 20.

[0055] In this embodiment, when the multiple first disassembly / assembly components 31 are in a closed state, they enclose and form a specific first disassembly / assembly cavity 41, which is adapted to a specific nozzle shape. To increase the applicability of the nozzle disassembly / assembly fixture, that is, to make the nozzle disassembly / assembly fixture adaptable to more nozzle specifications, a second disassembly / assembly component 32 is further added in this embodiment.

[0056] For further details, please refer to... Figures 1 to 4 As shown, the disassembly and assembly assembly 30 includes at least two second disassembly and assembly parts 32, each of which is movably disposed on the fixture body 10;

[0057] The drive assembly 20 is also used to drive each of the second disassembly / assembly parts 32 to move to form a closed state or an unfolded state;

[0058] When the second disassembly / assembly component 32 is in the closed state, each of the second disassembly / assembly components 32 approaches each other to form a second disassembly / assembly cavity 42 for nozzle insertion; when the second disassembly / assembly component 32 is in the unfolded state, each of the second disassembly / assembly components 32 moves away from each other.

[0059] in Figures 1 to 3 Each of the second disassembly components 32 is in a closed state, and the multiple second disassembly components 32 are unfolded in a petal shape to facilitate cleaning of their inner walls. Figure 6 The image shows the second disassembly / assembly component 32 in its closed state. At this time, the second disassembly / assembly components 32 approach and close together, forming an internal hexagonal second disassembly / assembly cavity 42. The second disassembly / assembly cavity 42 is adapted to the shape of another nozzle specification. When disassembling or assembling the nozzle, the nozzle is inserted into the second disassembly / assembly cavity 42. The outer wall of the nozzle conforms to the shape of the second disassembly / assembly cavity 42, and the nozzle can be screwed by rotating the entire nozzle disassembly / assembly fixture, facilitating nozzle disassembly and installation. The main function of the second disassembly / assembly cavity 42 is to mate with the outer wall of the nozzle. Therefore, the shape of the second disassembly / assembly cavity 42 is adapted to the existing nozzle shape. The outer contour of the nozzle is usually non-cylindrical, so the second disassembly / assembly cavity 42 is non-cylindrical, ensuring that the nozzle can be screwed when the nozzle disassembly / assembly fixture rotates.

[0060] The aforementioned nozzle assembly / disassembly fixture can be used to assemble / disassemble nozzles of a specific specification via the first assembly / disassembly component 31, and to assemble / disassemble nozzles of another specific specification via the second assembly / disassembly component 32. This allows the fixture to be adapted for assembling / disassembling nozzles of two different specifications, thus expanding its applicability. Furthermore, both the first assembly / disassembly component 31 and the second assembly / disassembly component 32 can be in a closed or open state. This satisfies the normal screwing and assembly / disassembly requirements of the nozzles. After use, the fixture can be unfolded to facilitate cleaning of the photoresist adhering to its inner wall, making the fixture easier to clean, improving cleaning efficiency, reducing the probability of residue on the inner wall after cleaning, and preventing contamination of the nozzles during subsequent use.

[0061] In this embodiment, the first disassembly cavity 41 has an internal hexagonal cross-section, and the second disassembly cavity 42 has an internal hexagonal cross-section. In other alternative embodiments, the cross-sections of the first disassembly cavity 41 and the second disassembly cavity 42 can be adjusted to adapt to the shape of the nozzle to be disassembled or assembled.

[0062] Please continue to refer to this. Figures 1 to 3As shown, in this embodiment, the second disassembly / assembly component 32 is rotatably connected to the fixture body 10. The driving assembly 20 is used to drive each of the second disassembly / assembly components 32 to rotate to form a closed state or an unfolded state. Each of the second disassembly / assembly components 32 is centrally symmetrically distributed around a central line. One end of each second disassembly / assembly component 32 is rotatably connected to the fixture body 10, and the rotation axis of the second disassembly / assembly component 32 is perpendicular to the aforementioned central line. The other end of each second disassembly / assembly component 32 can swing relative to each other. When the driving assembly 20 drives the second disassembly / assembly components 32 to swing and close together, each of the second disassembly / assembly components 32 surrounds and forms a ring structure, inside which a second disassembly / assembly cavity 42 is formed (see details). Figure 6 (As shown). In other alternative embodiments, the second disassembly / assembly member 32 can be linearly disposed on the fixture body 10. Each of the second disassembly / assembly members 32 is symmetrically distributed around a center line, and each of the second disassembly / assembly members 32 moves radially towards the center line. When the driving component 20 drives the second disassembly / assembly members 32 to move linearly towards each other along the center line, a closed state can be formed; similarly, when the driving component 20 drives the second disassembly / assembly members 32 to move linearly away from each other along the center line, an unfolded state can be formed. The second disassembly / assembly member 32 can also adopt other more complex movement modes relative to the fixture body 10, and its movement mode can be adaptively adjusted based on actual usage requirements.

[0063] In this embodiment, six second disassembly / assembly components 32 are provided. The six second disassembly / assembly components 32 unfold into a petal shape and close to form a sleeve structure. In other alternative embodiments, the second disassembly / assembly components 32 can be set to two, three, or other numbers, and the number of second disassembly / assembly components 32 can be adjusted adaptively based on actual usage requirements.

[0064] In this embodiment, when the second disassembly / assembly components 32 are closed, they are in contact with each other. That is, in the closed state, there are no gaps between adjacent second disassembly / assembly components 32, and the second disassembly / assembly cavity 42 is a complete chamber. In other alternative embodiments, when the second disassembly / assembly components 32 are closed, adjacent second disassembly / assembly components 32 may be non-contacting, i.e., there are gaps between adjacent second disassembly / assembly components 32 to prevent interference between them during movement. In this case, the second disassembly / assembly cavity 42 is partially connected to the outside.

[0065] Please combine Figure 1 , Figure 2 and Figure 3As shown, in this embodiment, the second disassembly / assembly component 32 includes a second driving part 321 and a second main body part 322. The second driving part 321 is rotatably connected to the fixture body 10; specifically, the two can be rotatably coupled via a rotating shaft, and the rotatable connection method is existing technology and will not be described in detail here. The second main body part 322 is connected to the second driving part 321. The second driving part 321 and the second main body part 322 are integrally formed, and their inner walls have the same shape. When the second disassembly / assembly component 32 is in a closed state, the inner walls of the two together form an inner hexagonal second disassembly / assembly cavity 42. The outer wall shapes of the second drive unit 321 and the second main body 322 are different. The outer wall of the second drive unit 321 has a planar structure. When the second disassembly / assembly member 32 is in the closed state, the outer walls of each second drive unit 321 together form a regular hexagonal columnar structure. The outer wall of the second main body 322 has an arc structure. The outer wall of the second drive unit 321 is higher than the outer wall of the second main body 322. When the second disassembly / assembly member 32 is in the closed state, the outer wall of each second main body 322 together forms a cylindrical structure. Therefore, when the second disassembly / assembly member 32 is in the closed state, the outer contour of the structure formed by the combined structure of each second disassembly / assembly member 32 is partly cylindrical and partly hexagonal columnar.

[0066] Furthermore, the hexagonal columnar structure formed by the second assembly / disassembly component 32 is coaxially arranged with the cylindrical structure, and the diameter of the circumscribed circle of the hexagonal columnar structure is larger than the diameter of the cylindrical structure. Therefore, there is a height difference between the outer wall of the second driving part 321 and the outer wall of the second main body part 322 of the second assembly / disassembly component 32, forming a step between the two outer walls.

[0067] In other alternative embodiments, the outer walls of the second drive portion 321 and the second main body portion 322 can be kept consistent, that is, the overall consistency of the outer walls of the second detachable component 32 is better. For example, the outer wall of the second main body portion 322 can be configured as a planar structure coplanar with the outer wall of the second drive portion 321.

[0068] The hexagonal columnar structure formed by the outer wall of the second drive unit 321 is used to cooperate with the inner wall of the drive assembly 20. The specific cooperation method is described in detail below in conjunction with the structure of the drive assembly 20.

[0069] Please continue to refer to this. Figures 1 to 3 As shown, the drive assembly 20 includes a sleeve 21, which slides along a straight line and is fitted over the fixture body 10.

[0070] The fixture body 10 is elongated in shape, extending along a first direction a, and the sleeve 21 slides over the fixture body 10 along the first direction a. In this embodiment, the first direction a is parallel to the axial direction of the sleeve 21 and the fixture body 10.

[0071] The fixture body 10 has a first end and a second end along a first direction a. The first disassembly / assembly component 31 is disposed at the first end, and the second disassembly / assembly component 32 is disposed at the second end. Each first disassembly / assembly component 31 is symmetrically arranged around the central axis of the fixture body 10 itself, and each second disassembly / assembly component 32 is also symmetrically arranged around the central axis of the fixture body 10 itself.

[0072] In this embodiment, the outer contour of the jig body 10 is generally a hexagonal columnar structure. The six sides of the first end of the jig body 10 are rotatably connected to six first disassembly / assembly parts 31, and the six sides of the second end of the jig body 10 are rotatably connected to six second disassembly / assembly parts 32.

[0073] Furthermore, the inner cavity of the sleeve 21 is a hexagonal columnar inner cavity that matches the outer contour of the jig body 10, and the inner cavity of the sleeve 21 also matches the regular hexagonal columnar structure formed by the outer wall of the first drive part 311 and the regular hexagonal columnar structure formed by the outer wall of the second drive part 321.

[0074] Combination Figure 1 and Figure 2 As shown, when the sleeve 21 slides toward the second end of the fixture body 10 (the end near the second disassembly / assembly member 32), the six sides of the inner wall of the sleeve 21 correspond to the outer walls of the six second driving parts 321 respectively. Therefore, the sleeve 21 presses the second driving parts 321 of each second disassembly / assembly member 32, causing the second disassembly / assembly member 32 to rotate and close to form a closed state. As the second disassembly / assembly member 32 rotates and closes, the second disassembly / assembly member 32 gradually retracts into the sleeve 21. Because there is a height difference between the outer wall of the second drive part 321 and the outer wall of the second main body part 322, the outer wall of the hexagonal columnar structure formed by the six second drive parts 321 fits conformally to the inner wall of the sleeve 21. The outer wall of the cylindrical structure formed by the six second main body parts 322 has a gap with the inner wall of the sleeve 21. The setting of this gap allows for a large adjustment range in the thickness of the second main body part 322, which is conducive to adjusting the shape of the inner wall of the second main body part 322, and thus flexibly adjusting the shape of the second disassembly cavity formed by the inner walls of the six second main body parts 322.

[0075] When the second disassembly / assembly member 32 rotates to form a closed state, the axial end of the second drive part 321 abuts against the second end of the fixture body 10 and cannot continue to rotate inward. At this time, the second disassembly / assembly member 32 rotates inward to the limit position. At this limit position, the state corresponding to the second disassembly / assembly member 32 is axial extension.

[0076] Combination Figure 1 and Figure 2As shown, since the sleeve 21 slides towards the second disassembly / assembly component 32, the sleeve 21 moves away from the first disassembly / assembly component 31. The first disassembly / assembly component 31 is located outside the sleeve 21 and is not constrained by the sleeve 21. Therefore, at this time, the six first disassembly / assembly components 31 can be freely unfolded into an unfolded state. In addition, a torsion spring can be added at the connection shaft between the first disassembly / assembly component 31 and the fixture body 10 so that when the first disassembly / assembly component 31 is not constrained by the sleeve 21, the torsion spring drives the first disassembly / assembly component 31 to rotate outward and unfold naturally.

[0077] Similarly, when the sleeve 21 slides toward the first disassembly / assembly component 31, the hexagonal sides of the inner wall of the sleeve 21 correspond to the outer walls of the six first driving parts 311. Therefore, the sleeve 21 presses against the first driving parts 311 of each first disassembly / assembly component 31, causing the first disassembly / assembly components 31 to rotate and close together to form a closed state. At this time, the second disassembly / assembly component 32 is located outside the sleeve 21 and is not constrained by the sleeve 21, and can be freely unfolded into an unfolded state. Similarly, since there is a height difference between the outer wall of the first driving part 311 and the outer wall of the first main body 312, the outer wall of the hexagonal columnar structure formed by the six first driving parts 311 conforms to the inner wall of the sleeve 21, while there is a gap between the outer wall of the cylindrical structure formed by the six first main body 312 and the inner wall of the sleeve 21. The setting of this gap allows for a larger adjustment space for the thickness of the first main body 312, which is conducive to adjusting the shape of the inner wall of the first main body 312, and thus flexibly adjusting the shape of the first disassembly / assembly cavity formed by the inner walls of the six first main body 312.

[0078] The aforementioned drive component 20 is configured as a sleeve structure and slides linearly onto the fixture body 10, which makes the structure of the entire nozzle disassembly and assembly fixture relatively simple and helps to improve the structural compactness of the nozzle disassembly and assembly fixture. Moreover, through linear sliding cooperation, it is beneficial to achieve control of the first disassembly and assembly component 31 and the second disassembly and assembly component 32 with a smaller sliding stroke, which facilitates the use of the nozzle disassembly and assembly fixture.

[0079] In this embodiment, the outer wall of each first driving part 321 is planar, and the outer wall of each first main body part 312 is arc-shaped. This results in the outer walls of each first driving part 321 forming a regular hexagonal columnar structure when the second detachable component 32 is in the closed state; and the outer walls of each first main body part 312 forming a cylindrical structure. In other alternative embodiments, the shapes of the outer walls of the first driving part 321 and the first main body part 312 can be adjusted according to actual needs, as long as the outer wall of the first driving part 321 is higher than the outer wall of the first main body part 312. Similarly, the shapes of the outer walls of the second driving part 321 and the second main body part 322 can also be adjusted according to actual needs, which will not be elaborated here.

[0080] In this embodiment, the outer contour of the sleeve 21 is a cylindrical surface. In other alternative embodiments, the outer contour of the sleeve 21 can be set as a hexagonal column or other structures, and the outer contour of the sleeve 21 can be adaptively adjusted based on actual gripping and usage requirements.

[0081] In this embodiment, the sleeve 21 and the fixture body 10 can be clearance-fitted to ensure that the sleeve 21 can slide flexibly along the fixture body 10. Since the nozzle head is usually downward, when assembling or disassembling the nozzle, the nozzle assembly / disassembly fixture is in a vertical position, and the assembly / disassembly component at the upper end forms a closed state and engages with the nozzle. At this time, holding the sleeve 21 vertically, the fixture body 10 naturally slides down under the action of gravity, causing the assembly / disassembly component at the upper end to naturally slide into the sleeve 21 and be constrained, thus forming a closed state. In other alternative embodiments, a damping pad layer can also be provided on the sleeve 21 and the fixture body 10 to ensure the relative stability of the positions of the sleeve 21 and the fixture body 10.

[0082] In this embodiment, the outer contour of the jig body 10 is generally a hexagonal columnar structure, and the inner cavity of the sleeve 21 is adapted to the shape of the outer contour of the jig body 10. The cross-section of the outer contour of the jig body 10 is set as hexagonal rather than circular, which can ensure that the sleeve 21 slides linearly with a single degree of freedom relative to the jig body 10 without relative rotation, so as to ensure the normal disassembly and assembly function of the nozzle disassembly and assembly jig. In other alternative embodiments, the outer contour of the cross-section formed by cutting the jig body 10 along the sliding direction perpendicular to the sleeve 21 (first direction a, which is also the axial direction of the jig body 10) can be set as rectangular or other non-circular structures. The specific rectangular cross-section can be adaptively adjusted according to actual needs.

[0083] In this embodiment, the drive assembly 20 includes a sleeve 21, and the disassembly assembly 30 includes a first disassembly assembly consisting of multiple first disassembly components 31 and a second disassembly assembly consisting of second disassembly components 32. When the sleeve 21 reciprocates linearly, it can be used to drive the first disassembly components 31 and the second disassembly components 32 to switch between a closed state and an open state. In other alternative embodiments, the drive assembly 20 may include multiple sleeves, and the disassembly assembly 30 may also include more disassembly assemblies. One sleeve cooperates with one disassembly assembly to drive a specific disassembly assembly to switch between a closed state and an open state. For example, the fixture body 10 may be configured as a cross structure, with one disassembly assembly configured at each end, and each rod of the fixture body 10 is fitted with a sleeve. Four sleeves cooperate with four disassembly assemblies, which can be adapted to the disassembly and assembly of four different specifications of nozzles. The number of sleeves 21 included in the drive assembly 20 and the number of disassembly assemblies included in the disassembly assembly 30 can be flexibly adjusted based on actual usage requirements.

[0084] In this embodiment, the drive component 20 is fitted over the fixture body 10 and moves linearly relative to the fixture body 10. In other alternative embodiments, the drive component 20 may also be rotatably mounted on the fixture body 10, and the rotation of the drive component 20 drives the disassembly / assembly component 30 to move, switching between a closed state and an unfolded state. For example, multiple cams may be intermittently arranged on the inner wall of the drive component 20. When the drive component 20 rotates, when a cam aligns with the first disassembly / assembly component 31, the cam drives the first disassembly / assembly component 31 to rotate inward to form a closed state. When the groove between adjacent cams aligns with the first disassembly / assembly component 31, the disassembly / assembly component can rotate outward to form an unfolded state. The movement mode and driving mode of the drive component 20 relative to the fixture body 10 can be adjusted according to actual needs.

[0085] Please continue to refer to this. Figure 2 As shown, in this embodiment, the jig body 10 has an inner cavity that extends through both ends of the jig body 10 along the first direction a. That is, the jig body 10 forms a thin-walled sleeve structure, and in a cross-section cut perpendicular to its axial direction, its outer peripheral wall is a regular hexagon, and its inner peripheral wall is also a regular hexagon. This structure maintains high structural strength of the jig body 10 while also facilitating lightweight design. In other alternative embodiments, the jig body 10 can also be a solid structure, or its interior can be a honeycomb structure to ensure good structural strength.

[0086] In this embodiment, the nozzle disassembly and assembly fixture further includes a limiting component 50, which is disposed on the fixture body 10 and / or the drive component 20 to limit the movement stroke of the drive component 20 relative to the fixture body 10. By limiting the movement, the drive component 20 can be prevented from moving too much relative to the fixture body 10, which could cause the drive component 20 to fall off and separate.

[0087] Please refer to Figure 2 and Figure 3 As shown, the limiting component 50 includes a limiting groove 51 and a limiting protrusion 52. The limiting groove 51 is formed on the outer wall of the fixture body 10 and extends through the inner wall of the fixture body 10. The limiting groove 51 extends along the axial direction of the limiting component 50. The limiting protrusion 52 is connected to the inner wall of the sleeve 21, and a portion of the limiting protrusion 52 is located within the limiting groove 51. The two ends of the limiting groove 51 in the longitudinal direction are used to limit the sliding limit position of the limiting protrusion 52 in the axial direction of the limiting component 50, thereby limiting the sliding stroke of the sleeve 21 and preventing the sleeve 21 from slipping off the fixture body 10.

[0088] The limiting protrusion 52 can be detachably provided on the inner wall of the fixture body 10, for example, by means of threaded connection to the fixture body 10, so as to facilitate the assembly of the fixture body 10 and the drive component 20.

[0089] In other alternative embodiments, the positions of the limiting groove 51 and the limiting protrusion 52 can be interchanged, that is, the limiting groove 51 is formed on the sleeve 21, and the limiting protrusion 52 is provided on the outer wall of the fixture body 10.

[0090] In other alternative embodiments, the limiting component 50 may be provided only on the fixture body 10 or only on the drive component 20. For example, the limiting component 50 may be a protruding structure provided on the fixture body 10, which limits the sliding stroke of the drive component 20 by interfering with the drive component 20.

[0091] In other alternative embodiments, the limiting component 50 may employ other limiting structures. For example, the limiting component 50 may employ mechanical limiting structures such as limiting pins or limiting screws, or it may employ known electronic or photoelectric limiting structures, which can then be used in conjunction with an electric drive structure. The specific structure of the limiting component 50 can be adjusted based on the cooperation method between the fixture body 10 and the drive component 20 and actual usage requirements, and will not be elaborated here.

[0092] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0093] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A nozzle assembly / disassembly fixture, characterized in that, Includes: fixture body, drive assembly, and assembly / disassembly assembly; The disassembly and assembly assembly includes at least two first disassembly and assembly components, each of which is movably disposed on the fixture body; The driving component is disposed on the fixture body and is used to drive each of the first disassembly / assembly parts to move to form a closed state or an unfolded state. When the first disassembly / assembly component is in a closed state, each of the first disassembly / assembly components approaches each other to form a first disassembly / assembly cavity for nozzle insertion; when the first disassembly / assembly component is in an open state, each of the first disassembly / assembly components moves away from each other.

2. The nozzle assembly / disassembly fixture as described in claim 1, characterized in that, The disassembly and assembly assembly includes at least two second disassembly and assembly components, each of which is movably disposed on the fixture body; The drive assembly is also used to drive each of the second disassembly / assembly components to move to form a closed state or an unfolded state. When the second disassembly component is in the closed state, each of the second disassembly components approaches each other to form a second disassembly cavity for nozzle insertion; when the second disassembly component is in the unfolded state, each of the second disassembly components moves away from each other.

3. The nozzle assembly / disassembly fixture as described in claim 2, characterized in that, The fixture body has a first end and a second end along a first direction, the first disassembly / assembly component is disposed at the first end, and the second disassembly / assembly component is disposed at the second end.

4. The nozzle assembly / disassembly fixture as described in claim 1 or 2, characterized in that, The first disassembly component is rotatably connected to the fixture body, and the drive assembly is used to drive each of the first disassembly components to rotate to form a closed state or an unfolded state. And / or, when the disassembly assembly includes a second disassembly component, the second disassembly component is rotatably connected to the fixture body, and the drive assembly is used to drive each of the second disassembly components to rotate to form a closed state or an unfolded state.

5. The nozzle assembly / disassembly fixture as described in claim 1 or 2, characterized in that, The drive component is disposed on the fixture body for linear motion; When the drive component moves toward the first disassembly / assembly component relative to the fixture body, the drive component squeezes each of the first disassembly / assembly components so that they come together to form the closed state. And / or, when the disassembly assembly includes a second disassembly component, when the drive assembly moves relative to the fixture body toward the second disassembly component, the drive assembly squeezes each of the second disassembly components so that they come together to form the closed state.

6. The nozzle assembly / disassembly fixture as described in claim 1, characterized in that, The drive assembly includes a sleeve that slides linearly over the fixture body.

7. The nozzle assembly / disassembly fixture as described in claim 6, characterized in that, The outer contour of the cross section formed by cutting the jig body along the sliding direction perpendicular to the sleeve is non-circular, and the inner cavity of the sleeve conformally fits the outer wall of the jig body. And / or, the fixture body is an elongated strip extending along a first direction, and the sleeve slides along the first direction onto the fixture body; And / or, the fixture body has an inner cavity that extends through both ends of the fixture body along a first direction.

8. The nozzle assembly / disassembly fixture as described in claim 1, characterized in that, The first assembly / disassembly component includes a first driving part and a first main body part. One end of the first driving part is disposed on the fixture body, and the other end of the first driving part is connected to the first main body part. The outer surface of the first driving part is higher than the outer surface of the first main body part.

9. The nozzle assembly / disassembly fixture as described in claim 2, characterized in that, The second assembly / disassembly component includes a second driving part and a second main body part. One end of the second driving part is disposed on the fixture body, and the other end of the second driving part is connected to the second main body part. The outer surface of the second driving part is higher than the outer surface of the second main body part.

10. The nozzle assembly / disassembly fixture as described in claim 1, characterized in that, The nozzle assembly / disassembly fixture further includes a limiting component, which is disposed on the fixture body and / or the drive component to limit the travel distance of the drive component relative to the fixture body.

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