Coating printing equipment and battery piece processing system

By employing coating, vibration, and baking processes in a coating and printing equipment on the solar cell substrate, the problems of uneven thickness and insufficient height of electroplated grid lines have been solved, thereby improving the photoelectric conversion efficiency and reliability of heterojunction solar cells.

CN223475460UActive Publication Date: 2025-10-28TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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Patent Information

Application Number
CN202422619059.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-29
Publication Date
2025-10-28
Estimated Expiration
2034-10-29

AI Technical Summary

Technical Problem

In the prior art, the electroplated grid lines have uneven thickness and insufficient height, which affects the photoelectric conversion efficiency and reliability of heterojunction cells.

Method used

A coating and printing equipment, including a coating device, a vibration device, and a baking device, is used. By coating the photosensitive adhesive on the substrate and vibrating it before baking, the photosensitive adhesive is more evenly distributed on the substrate, reducing thickness and groove width differences and improving the problem of uneven grid line thickness.

Benefits of technology

This improves the photoelectric conversion efficiency and reliability of the solar cells, reduces the shading area, and enhances the photoelectric conversion efficiency and reliability of the solar cells.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides coating printing equipment and a battery piece processing system. The coating and printing equipment comprises a coating device used for coating and printing photosensitive resist on a substrate, a vibrating device used for driving the substrate coated and printed with the photosensitive resist to vibrate, and a baking device used for baking and curing the photosensitive resist on the substrate, wherein the coating device, the vibrating device and the baking device are sequentially arranged in the processing direction of a battery piece. The photosensitive resist is driven to vibrate by the vibrating device before being baked and cured, so that the photosensitive resist is more uniformly distributed on the substrate, the thickness difference after the photosensitive resist is cured is reduced, the width difference of the groove is also reduced when the developing groove is subsequently printed on the photosensitive resist, and the fluctuation difference of the electroplating area of the electroplated surface on the substrate is also reduced; the problem that the thickness of the grid lines at the grooves is not uniform is effectively solved, meanwhile, the grid lines have no abnormal thickness, invalid increase of the shading area is effectively avoided, and the photoelectric conversion rate and the reliability of the battery piece are improved.
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Description

Technical Field

[0001] This utility model relates to the field of battery cell technology, and in particular to a coating and printing equipment and a battery cell processing system. Background Technology

[0002] Heterojunction solar cells currently employ screen-printed silver paste, which, after curing, forms silver grid lines on the surface of an ITO (TCO) conductive film. To reduce production costs, existing technologies use electroplated copper and tin grid lines instead of screen-printed silver grid lines. This involves first depositing a copper seed layer on the ITO (TCO) conductive film using PVD sputtering via copper interconnect technology, then printing photosensitive adhesive onto the copper seed layer, exposing and developing grooves, and finally electroplating the grid lines at the grooves. However, the electroplated grid lines in existing technologies are uneven in thickness and insufficient in height, affecting the photoelectric conversion efficiency and reliability of the solar cell. Utility Model Content

[0003] Therefore, it is necessary to provide a coating and printing equipment and a battery cell processing system to address the problems of uneven thickness and insufficient height of electroplated grid lines in existing technologies, which affect the photoelectric conversion efficiency and reliability of battery cells.

[0004] The technical solution is as follows:

[0005] On one hand, a coating and printing apparatus is provided for coating and printing photosensitive adhesive on a substrate of a battery cell. The coating and printing apparatus includes a coating device for coating and printing the photosensitive adhesive onto the substrate, a vibration device for vibrating the substrate coated and printed with the photosensitive adhesive, and a baking device for baking and curing the photosensitive adhesive on the substrate. The coating device, the vibration device, and the baking device are arranged sequentially along the processing direction of the battery cell.

[0006] In the coating and printing equipment described in the above embodiments, the substrate is first loaded onto a coating device, which then applies photosensitive emulsion (in liquid form) onto the substrate. Next, the substrate with the photosensitive emulsion applied is transferred from the coating device to a vibrating device, which vibrates the substrate to ensure the fluid photosensitive emulsion is evenly distributed on the substrate. Finally, the vibrated substrate is transferred to a baking device, which dries and cures the photosensitive emulsion, completing the photosensitive emulsion coating and printing process on the substrate. The coating and printing equipment in this application uses a vibration device to vibrate before the photosensitive emulsion is baked and cured, which makes the photosensitive emulsion more evenly distributed on the substrate and reduces the thickness difference of the photosensitive emulsion after curing. This ensures that when printing the developing grooves on the photosensitive emulsion later, the width difference of the grooves is also reduced, and the fluctuation difference of the electroplating area on the electroplating surface of the substrate is also reduced. This effectively improves the problem of uneven grid line thickness at the grooves. At the same time, the absence of abnormal grid line thickness also effectively avoids the ineffective increase of the light-blocking area, that is, the grid lines occupy a smaller light-receiving area. The reduction of the light-blocking area is beneficial to improving the photoelectric conversion efficiency and reliability of the solar cell.

[0007] The technical solution will be further explained below:

[0008] In one embodiment, the vibration device includes a fixing mechanism and a vibration platform for driving the substrate coated with the photosensitive adhesive to vibrate, wherein the fixing mechanism is used to fix the substrate to the vibration platform.

[0009] In one embodiment, the fixing mechanism includes a vacuum pumping component, and the vibrating platform is provided with at least one vacuum adsorption hole, one end of each vacuum adsorption hole extending to the top wall of the vibrating platform, and the other end communicating with the vacuum pumping component.

[0010] In one embodiment, the profile dimensions of the top wall of the vibration platform are larger than the profile dimensions of the front and back sides of the substrate.

[0011] In one embodiment, all of the vacuum adsorption holes are arranged in a rectangular array on the vibrating platform.

[0012] In one embodiment, the vibration device further includes a vibration mechanism that is drive-connected to the vibration platform.

[0013] In one embodiment, the coating and printing apparatus further includes a first transfer device located between the coating device and the vibrating device, and is used to transfer the substrate coated and printed with the photosensitive adhesive on the coating device to the vibrating device.

[0014] And / or, the coating and printing equipment further includes a second transfer device located between the vibrating device and the baking device, for transferring the substrate coated and printed with the photosensitive adhesive on the vibrating device to the baking device.

[0015] In one embodiment, the coating device, the vibration device, and the baking device cooperate to form a coating and printing module. There are two coating and printing modules. The coating and printing equipment also includes a flipping device, which is located between the two coating and printing modules and is used to flip the substrate by 180°. The two coating and printing modules are respectively used to coat and print the photosensitive adhesive on the front and back sides of the substrate.

[0016] In one embodiment, the two coating and printing modules are respectively configured as a first coating and printing module and a second coating and printing module. The coating and printing equipment further includes a feeding device and a discharging device. Along the processing direction of the battery cell, the feeding device is located on the side of the first coating and printing module away from the flipping device and is used to feed the substrate onto the coating device in the first coating and printing module. The discharging device is located on the side of the second coating and printing module away from the flipping device and is used to unload the substrate from the baking device in the second coating and printing module.

[0017] On the other hand, a battery cell processing system is provided, including a printing device for printing grid lines on photosensitive emulsion, a developing device for removing the photosensitive emulsion at the grid lines, an edge-sealing device for masking and wrapping the edges of a substrate, an electroplating device for electroplating copper and tin on the substrate, and the coating and printing device, wherein the coating and printing device, the printing device, the developing device, the edge-sealing device, and the electroplating device are arranged sequentially along the processing direction of the battery cell. Attached Figure Description

[0018] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the process of a coating and printing apparatus according to one embodiment.

[0021] Figure 2 for Figure 1 A schematic diagram of the vibration device in operation.

[0022] Figure 3 for Figure 2 A schematic diagram of the structure of the vibration platform.

[0023] Explanation of reference numerals in the attached figures:

[0024] 10. Coating and printing equipment; 100. Coating device; 200. Vibration device; 210. Vibration platform; 211. Vacuum suction hole; 220. Vibration mechanism; 300. Baking device; 400. First transfer device; 500. Second transfer device; 600. Tilting device; 700. Feeding device; 800. Unloading device; 20. Substrate; 30. Photosensitive adhesive. Detailed Implementation

[0025] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0026] Currently, in the process of processing solar cells based on copper interconnect technology, there are problems such as uneven thickness and insufficient height of electroplated grid lines, which affect the photoelectric conversion efficiency and reliability of the solar cells.

[0027] Through investigation and research, the inventors discovered that no matter how the process parameters were adjusted or the scraper material was changed, there was always some uneven printing of photosensitive adhesive on the substrate, which seriously affected the processing quality of the next process, resulting in abnormally thick grid lines in the solar cells. Moreover, once this unevenness occurred, the photoelectric conversion efficiency and reliability of the processed solar cells were low.

[0028] Based on this, the following embodiments of the coating and printing equipment and battery cell processing system of this application are proposed to solve the above-mentioned technical problems.

[0029] like Figure 1 and Figure 2As shown, in one embodiment, a coating and printing apparatus 10 is provided for coating and printing photosensitive adhesive 30 onto a substrate 20 of a battery cell. The coating and printing apparatus 10 includes a coating device 100 for coating and printing the photosensitive adhesive 30 onto the substrate 20, a vibration device 200 for vibrating the substrate 20 coated with the photosensitive adhesive 30, and a baking device 300 for baking and curing the photosensitive adhesive 30 on the substrate 20. The coating device 100, vibration device 200, and baking device 300 are aligned along the processing direction of the battery cell (e.g., ...). Figure 2 Set them sequentially according to the direction shown in A.

[0030] In the above embodiment, the coating and printing equipment 10 is used as follows: First, a substrate 20 is loaded onto a coating apparatus 100, which then coats and prints photosensitive adhesive 30 (in liquid form) onto the substrate 20. Next, the substrate 20 coated with the photosensitive adhesive 30 is transferred from the coating apparatus 100 to a vibrating device 200. The vibrating device 200 vibrates the substrate 20, causing the fluid photosensitive adhesive 30 to distribute evenly on the substrate 20. Finally, the vibrated substrate 20 is transferred to a baking apparatus 300, which dries and cures the photosensitive adhesive 30, completing the coating and printing of the photosensitive adhesive 30 onto the substrate 20. The coating and printing equipment 10 in this application vibrates via a vibration device 200 before the photosensitive adhesive 30 is baked and cured, making the photosensitive adhesive 30 more evenly distributed on the substrate 20. This reduces the thickness difference of the photosensitive adhesive 30 after curing, ensuring that the width difference of the grooves is also reduced when printing the developing grooves on the photosensitive adhesive 30. The fluctuation difference of the electroplating area on the electroplating surface of the substrate 20 is also reduced, effectively improving the problem of uneven grid line thickness at the grooves. At the same time, the absence of abnormal grid line thickness also effectively avoids the ineffective increase of the light-blocking area, that is, the grid lines occupy a smaller light-receiving area. The reduction of the light-blocking area is beneficial to improving the photoelectric conversion efficiency and reliability of the solar cell.

[0031] The coating apparatus 100 can be configured as any of the coating structures in the prior art for coating and printing photosensitive emulsion 30. The baking apparatus 300 can be configured as any of the baking structures in the prior art for baking and curing photosensitive emulsion 30.

[0032] It should be noted that substrate 20 refers to a silicon wafer on which intrinsic amorphous silicon, an N-type doped amorphous silicon layer, a conductive thin film layer, and a copper seed layer are sequentially deposited on the front side, and intrinsic amorphous silicon, a P-type doped amorphous silicon layer, a conductive thin film layer, and a copper seed layer are sequentially deposited on the back side. Photosensitive adhesive 30 is coated and printed on the copper seed layer.

[0033] The vibration frequency and vibration time of the vibration device 200 can be flexibly adjusted according to actual usage needs. Specifically, in this embodiment, the vibration frequency of the vibration device 200 is 10Hz; the vibration time of the vibration device 200 is 1s to 3s. Compared with the existing coating and printing process based on copper interconnect technology, in this application, the uniformity of the thickness of the photosensitive adhesive 30 after coating, printing and curing is controlled from ±3μm to ±1μm, the difference in groove width is controlled from ±6μm to ±2μm, and the electroplating surface on the substrate 20 is controlled from ±90mm. 2 Fluctuation difference controlled to ±30mm 2 The percentage of uneven grid line thickness has been reduced from 19% to 0%.

[0034] like Figure 2 As shown, the vibration device 200 further includes a fixing mechanism and a vibration platform 210 for driving the substrate 20 coated with photosensitive adhesive 30 to vibrate. The fixing mechanism is used to fix the substrate 20 onto the vibration platform 210. In this way, the fixing mechanism can fix the substrate 20 and the vibration platform 210 as one unit, so that the substrate 20 and the vibration platform 210 vibrate synchronously, reducing the breakage rate of the substrate 20 and improving the reliability of the coating and printing equipment 10.

[0035] like Figure 2 As shown, optionally, the vibration device 200 also includes a vibration mechanism 220, which is connected to the vibration platform 210 via a transmission connection. Thus, the vibration mechanism 220 can drive the substrate 20 to vibrate via the vibration platform 210, improving the practicality of the coating and printing equipment 10.

[0036] In this specific embodiment, the vibration mechanism 220 can be configured as a vibration pump. In other embodiments, the vibration platform 210 can also be configured as a platform structure capable of vibration itself.

[0037] like Figure 2 and Figure 3 As shown, in one embodiment, the fixing mechanism includes a vacuum pumping component. The vibrating platform 210 is provided with at least one vacuum adsorption hole 211. One end of each vacuum adsorption hole 211 extends to the top wall of the vibrating platform 210, and the other end communicates with the vacuum pumping component. In this way, the vacuum pumping component can evacuate the vacuum adsorption hole 211, so that a negative pressure is formed inside the vacuum adsorption hole 211 to firmly adsorb the substrate 20, thereby improving the reliability of the coating and printing equipment 10.

[0038] The vacuum pump can be configured as a vacuum pump. Specifically, in this embodiment, the fixing mechanism also includes connecting hoses, and each vacuum suction port 211 is connected to the vacuum pump via these connecting hoses. In other embodiments, the fixing mechanism can also be a mechanical limiting structure fixedly mounted on the vibration platform 210.

[0039] like Figure 2 As shown, optionally, the outline dimensions of the top wall of the vibrating platform 210 are larger than the outline dimensions of the front and back sides of the substrate 20. In this way, the entire substrate 20 coated with photosensitive adhesive 30 can be adhered to the vibrating platform 210, improving the reliability of the coating and printing equipment 10.

[0040] like Figure 3 As shown, optionally, all vacuum adsorption holes 211 are arranged in a rectangular array on the vibrating platform 210. In this way, the vacuum adsorption holes 211 are evenly spaced on the entire vibrating platform 210, so that the adsorption force on the substrate 20 coated with photosensitive adhesive 30 is more evenly distributed when it is adsorbed and fixed, thereby improving the reliability of the coating and printing equipment 10.

[0041] The dimensions of the vibration platform 210, as well as the number and size of the vacuum adsorption holes 211, can be flexibly adjusted according to actual usage needs. Specifically, in this embodiment, the length of the vibration platform 210 is greater than the length of the substrate 20, and the width of the vibration platform 210 is greater than the width of the substrate 20. The vibration platform 210 has a length of 215 mm and a width of 107.5 mm. The diameter of the vacuum adsorption holes 211 is 1 mm, and the vacuum adsorption holes 211 are arranged in a rectangular array of 72 rows and 24 columns. In other embodiments, all the vacuum adsorption holes 211 can also be arranged in a ring array on the vibration platform 210.

[0042] like Figure 2 As shown, in one embodiment, the coating and printing apparatus 10 further includes a first transfer device 400, which is located between the coating apparatus 100 and the vibration device 200, and is used to transfer the substrate 20 coated with photosensitive adhesive 30 on the coating apparatus 100 to the vibration device 200. Thus, the first transfer device 400 can automatically transfer the substrate 20 from the coating apparatus 100 to the vibration device 200, improving the practicality of the coating and printing apparatus 10.

[0043] like Figure 2 As shown, optionally, the coating and printing apparatus 10 further includes a second transfer device 500, which is located between the vibrating device 200 and the baking device 300, and is used to transfer the substrate 20 coated with photosensitive adhesive 30 on the vibrating device 200 to the baking device 300. Thus, the second transfer device 500 can automatically transfer the substrate 20 on the vibrating device 200 to the baking device 300, improving the practicality of the coating and printing apparatus 10.

[0044] Both the first transfer device 400 and the second transfer device 500 can be configured as any of the existing conveying and transfer structures. Specifically, in this embodiment, both the first transfer device 400 and the second transfer device 500 can be configured as a belt conveying and transfer structure.

[0045] like Figure 1 As shown, in one embodiment, the coating apparatus 100, the vibration device 200, and the baking apparatus 300 cooperate to form a coating and printing module. There are two coating and printing modules. The coating and printing equipment 10 also includes a flipping device 600, located between the two coating and printing modules, used to flip the substrate 20 180°. The two coating and printing modules are respectively used to coat and print photosensitive adhesive 30 onto the front and back sides of the substrate 20. Thus, by setting two coating and printing modules and using the flipping device 600 to flip the substrate 20, it is possible to coat and print photosensitive adhesive 30 on both the front and back sides of the substrate 20, improving the practicality of the coating and printing equipment 10.

[0046] The flipping device 600 can be configured as any of the existing flipping structures for flipping the substrate 20.

[0047] like Figure 1 As shown, optionally, the two coating and printing modules are respectively configured as a first coating and printing module and a second coating and printing module. The coating and printing equipment 10 also includes a loading device 700 and a unloading device 800. Along the processing direction of the battery cell, the loading device 700 is located on the side of the first coating and printing module away from the flipping device 600, and is used to load the substrate 20 onto the coating device 100 in the first coating and printing module. The unloading device 800 is located on the side of the second coating and printing module away from the flipping device 600, and is used to unload the substrate 20 from the baking device 300 in the second coating and printing module. In this way, the loading device 700 can perform automatic loading, and the unloading device 800 can perform automatic unloading, improving the practicality of the coating and printing equipment 10.

[0048] The feeding device 700 can be configured as any feeding structure in the prior art. The unloading device 800 can be configured as any unloading structure in the prior art.

[0049] In one embodiment, a battery cell processing system is provided, including a printing device for printing grid lines on a photosensitive adhesive 30, a developing device for removing the photosensitive adhesive 30 at the grid line pattern positions, an edge-wrapping device for masking the edges of a substrate 20, an electroplating device for electroplating copper and tin on the substrate 20, and a coating and printing device 10 as described in any of the above embodiments. The coating and printing device 10, the printing device, the developing device, the edge-wrapping device, and the electroplating device are arranged sequentially along the processing direction of the battery cell.

[0050] Optionally, the solar cell processing system further includes a film removal and re-etching device for removing residual photosensitive adhesive 30, edge-binding adhesive, and copper seed layer from the surface of the substrate 20, and a light injection device for performing light injection processing on the substrate 20. The electroplating equipment, film removal and re-etching device, and light injection device are arranged sequentially along the processing direction of the solar cell.

[0051] The printing equipment can be configured as any of the existing technologies for printing grid line patterns; the developing equipment can be configured as any of the existing technologies for developing structures for removing the photosensitive adhesive 30 at the grid line positions; the edge-wrapping equipment can be configured as any of the existing technologies for wrapping the edge mask of the substrate 20; the electroplating equipment can be configured as any of the existing technologies for electroplating copper and tin layers; the film removal and re-etching equipment can be configured as any of the existing technologies for removing residual adhesive film and copper seed layer; and the light injection equipment can be configured as any of the existing technologies for light injection structures for battery cell repair and efficiency improvement, which will not be described in detail here.

[0052] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0053] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0054] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0055] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0056] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0057] It should also be understood that, in interpreting the connection or positional relationships of components, although not explicitly described, connection and positional relationships are interpreted to include a range of error, which should be within the acceptable deviation range of a specific value as determined by a person skilled in the art. For example, "approximately," "about," or "substantially" can mean within one or more standard deviations, without limitation herein.

[0058] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A coating and printing apparatus for coating and printing photosensitive adhesive (30) on a substrate (20) of a battery cell, characterized in that, The coating and printing equipment (10) includes a coating device (100) for coating and printing the photosensitive adhesive (30) onto the substrate (20), a vibration device (200) for vibrating the substrate (20) coated and printed with the photosensitive adhesive (30), and a baking device (300) for baking and curing the photosensitive adhesive (30) on the substrate (20). The coating device (100), the vibration device (200), and the baking device (300) are arranged sequentially along the processing direction of the battery cell.

2. The coating and printing equipment according to claim 1, characterized in that, The vibration device (200) includes a fixing mechanism and a vibration platform (210) for driving the substrate (20) coated with the photosensitive adhesive (30) to vibrate. The fixing mechanism is used to fix the substrate (20) on the vibration platform (210).

3. The coating and printing equipment according to claim 2, characterized in that, The fixing mechanism includes a vacuum pumping component. The vibrating platform (210) is provided with at least one vacuum adsorption hole (211). One end of each vacuum adsorption hole (211) extends to the top wall of the vibrating platform (210), and the other end is connected to the vacuum pumping component.

4. The coating and printing equipment according to claim 3, characterized in that, The top wall of the vibration platform (210) has a larger profile dimension than the front and back profile dimensions of the substrate (20).

5. The coating and printing equipment according to claim 3, characterized in that, All of the vacuum adsorption holes (211) are arranged in a rectangular array on the vibrating platform (210).

6. The coating and printing equipment according to claim 2, characterized in that, The vibration device (200) further includes a vibration mechanism (220), which is connected to the vibration platform (210) in a transmission manner.

7. The coating and printing equipment according to any one of claims 1 to 6, characterized in that, The coating and printing equipment (10) further includes a first transfer device (400), which is located between the coating device (100) and the vibration device (200) and is used to transfer the substrate (20) coated and printed with the photosensitive adhesive (30) on the coating device (100) to the vibration device (200). And / or, the coating and printing apparatus (10) further includes a second transfer device (500) located between the vibrating device (200) and the baking device (300), and is used to transfer the substrate (20) coated and printed with the photosensitive adhesive (30) on the vibrating device (200) to the baking device (300).

8. The coating and printing equipment according to any one of claims 1 to 6, characterized in that, The coating device (100), the vibration device (200), and the baking device (300) cooperate to form a coating and printing module. There are two coating and printing modules. The coating and printing equipment (10) also includes a flipping device (600). The flipping device (600) is located between the two coating and printing modules and is used to flip the substrate (20) 180°. The two coating and printing modules are respectively used to coat and print the photosensitive adhesive (30) on the front and back sides of the substrate (20).

9. The coating and printing equipment according to claim 8, characterized in that, The two coating and printing modules are respectively configured as a first coating and printing module and a second coating and printing module. The coating and printing equipment (10) also includes a feeding device (700) and a unloading device (800). Along the processing direction of the battery cell, the feeding device (700) is located on the side of the first coating and printing module away from the flipping device (600) and is used to feed the substrate (20) onto the coating device (100) in the first coating and printing module. The unloading device (800) is located on the side of the second coating and printing module away from the flipping device (600) and is used to unload the substrate (20) on the baking device (300) in the second coating and printing module.

10. A battery cell processing system, characterized in that, The device includes a printing apparatus for printing grid lines on a photosensitive emulsion (30), a developing apparatus for removing the grid lines from the photosensitive emulsion (30), an edge-sealing apparatus for masking the edges of a substrate (20), an electroplating apparatus for electroplating copper and tin on the substrate (20), and a coating and printing apparatus (10) as described in any one of claims 1 to 9, wherein the coating and printing apparatus (10), the printing apparatus, the developing apparatus, the edge-sealing apparatus, and the electroplating apparatus are arranged sequentially along the processing direction of the battery cell.