Semiconductor steel mesh pneumatic cleaning equipment capable of being bent for cleaning

Abstract

The utility model discloses semiconductor steel mesh pneumatic cleaning equipment capable of being bent for cleaning, and particularly relates to the technical field of cleaning, the semiconductor steel mesh pneumatic cleaning equipment comprises a shell, a top cover, a cleaning cavity, a rotating assembly, a water washing assembly, an adjusting assembly and a gas washing assembly, the top cover is installed on the top of the shell, and the cleaning cavity is formed in the top of the shell; a rotating assembly is installed above the cleaning cavity, a water washing assembly is installed on one side of the rotating assembly, a gas washing assembly is installed on the side, away from the water washing assembly, of the rotating assembly, and adjusting assemblies are installed in the water washing assembly and the gas washing assembly correspondingly; according to the semiconductor steel mesh pneumatic cleaning equipment capable of being bent for cleaning, a telescopic rod is installed to push a limiting sleeve to drive a spraying head and an air spraying head to adjust the angle, the cleaning equipment can be closer to the surface of a steel mesh in a complex or irregular shape by adjusting different angles, and therefore dirt and residues are more effectively removed.

Description

Technical Field

[0001] This utility model relates to the field of cleaning technology, and more specifically, to a flexible, cleanable pneumatic cleaning device for semiconductor steel mesh. Background Technology

[0002] Semiconductor stencil pneumatic cleaning equipment is a device that uses air pressure and high-pressure water jets to clean stencils. It generates air pressure through an air compressor, propelling water at high speed from nozzles to create a jet that impacts the stencil surface, effectively removing residues and dirt. This equipment boasts advantages such as high efficiency, environmental friendliness, and energy saving. It can clean stencils of various types and sizes and features a high degree of automation, saving time and labor costs. In semiconductor manufacturing, this cleaning equipment is crucial for ensuring chip quality and improving production efficiency. It helps remove various impurities that may be present during the manufacturing process, ensuring product purity and stable performance.

[0003] A search revealed that publication number CN 213645171 U discloses a semiconductor ultra-precision stencil cleaning device, comprising a housing and a cover plate. The cover plate is disposed on the upper end face of the housing, with an opening at its center. A spring groove is formed on the side wall of the opening, and a sliding opening is formed on the upper end face of the spring groove. A positioning mechanism is disposed within the spring groove. A precision stencil is vertically disposed within the housing, and a frame is fixedly installed around the perimeter of the precision stencil. A connecting block is fixedly installed on the upper end face of the frame. A retaining seat is fixedly installed on the bottom end face of the housing, and a retaining groove matching the frame is formed on the upper end face of the retaining seat. The frame rests against the retaining groove, and two cleaning mechanisms are symmetrically arranged on both sides of the frame. This invention eliminates the need for rinsing the surface residue of the precision stencil with large amounts of high-pressure water, thus avoiding water waste.

[0004] Existing pneumatic cleaning equipment for semiconductor stencils is difficult to effectively remove dirt and residues when dealing with complex or irregularly shaped stencil surfaces. Existing pneumatic cleaning equipment for semiconductor stencils may be limited by its fixed cleaning angle and method, making it difficult to cope with different types of stencils and more complex cleaning scenarios. This flexibility is crucial for the high precision and high cleanliness requirements in semiconductor manufacturing.

[0005] Therefore, a flexible, pneumatic cleaning device for semiconductor stencils is proposed to address the above problems. Utility Model Content

[0006] In order to overcome the above-mentioned defects of the prior art, the present invention provides a flexible and washable pneumatic cleaning device for semiconductor steel mesh to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a flexible and washable pneumatic cleaning device for semiconductor steel mesh, comprising a shell, a top cover, a cleaning chamber, a rotating assembly, a water washing assembly, an adjusting assembly, and an air washing assembly. The top cover is installed on the top of the shell, and a cleaning chamber is formed on the top of the shell. The rotating assembly is installed above the cleaning chamber, and a water washing assembly is installed on one side of the rotating assembly. An air washing assembly is installed on the side of the rotating assembly away from the water washing assembly, and adjusting assemblies are installed inside both the water washing assembly and the air washing assembly.

[0008] Preferably, the rotating assembly includes a motor, a rotating plate, a limiting frame, and a steel mesh. The rotating plate is installed at the output end of the motor, and the limiting frame is installed on the top of the rotating plate. A steel mesh is installed between the two sets of limiting frames.

[0009] Preferably, the water washing assembly includes a water storage tank, a water supply pipe, a fixing ring, a fixing plate, a spray head, a rotating shaft, a limiting sleeve, and a rotating sleeve. A water supply pipe is provided on one side of the water storage tank, and a spray head is installed at one end of the water supply pipe. A limiting sleeve is fitted on the outer diameter of the spray head, and a rotating sleeve is fixed on one side of the limiting sleeve. A rotating shaft is installed on the inner diameter of the rotating sleeve, and fixing plates are installed at both ends of the rotating shaft. A fixing ring is installed on one side of the fixing plate.

[0010] Preferably, the air washing assembly includes an air tank, an air supply pipe, and an air jet head. The air supply pipe is provided on one side of the air tank, and an air jet head is installed at one end of the air supply pipe.

[0011] Preferably, the adjustment assembly includes a telescopic rod, a fixed frame, a fixed block, a first rotating shaft, a connecting rod, a telescopic plate, and a second rotating shaft. The telescopic rod is installed on one side of the fixed frame, and the output end of the telescopic rod is connected to the fixed block. The first rotating shaft is installed on the side of the fixed block away from the telescopic rod, and one end of the first rotating shaft is connected to the connecting rod. The second rotating shaft is installed on the end of the connecting rod away from the first rotating shaft, and the telescopic plate is installed on the end of the second rotating shaft away from the connecting rod.

[0012] Preferably, there are four spray heads arranged in a circular array with the water pipe as the center, and four air jet heads arranged in a circular array with the air pipe as the center.

[0013] The technical effects and advantages of this utility model are as follows:

[0014] 1. Compared with the existing technology, this flexible cleaning semiconductor steel mesh pneumatic cleaning equipment uses a telescopic rod to push the limiting sleeve to drive the spray head and air jet head to adjust the angle. By adjusting different angles, the cleaning equipment can get closer to the surface of the steel mesh with complex or irregular shapes, thereby more effectively removing dirt and residue.

[0015] 2. Compared with the existing technology, this flexible cleaning semiconductor steel mesh pneumatic cleaning equipment is equipped with multiple spray heads and air jets, which can fully cover the steel mesh surface when the angle of the multiple spray heads and air jets is adjusted, enabling the cleaning equipment to cope with more types of steel mesh and more complex cleaning scenarios. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model.

[0017] Figure 2 This is a schematic diagram of the cleaning chamber of this utility model.

[0018] Figure 3 This is a schematic diagram of the steel mesh structure of this utility model.

[0019] Figure 4 This is a schematic diagram of the structure of the spray head of this utility model.

[0020] Figure 5 This is a schematic diagram of the water supply pipe of this utility model.

[0021] Figure 6 This is a schematic diagram of the limiting sleeve of this utility model.

[0022] Figure 7 This is a schematic diagram of the structure of the fixing frame of this utility model.

[0023] Figure 8 This is a schematic diagram of the jet head of this utility model.

[0024] The attached diagram is labeled as follows: 1. Outer shell; 2. Top cover; 3. Cleaning chamber; 4. Motor; 5. Rotating plate; 6. Limiting frame; 7. Steel mesh; 8. Water storage tank; 9. Water supply pipe; 10. Fixing ring; 11. Fixing plate; 12. Spray head; 13. Rotating shaft; 14. Limiting sleeve; 15. Rotating sleeve; 16. Air storage tank; 17. Air supply pipe; 18. Jet nozzle; 19. Telescopic rod; 20. Fixing frame; 21. Fixing block; 22. First rotating shaft; 23. Connecting rod; 24. Telescopic plate; 25. Second rotating shaft; 40. Rotating assembly; 41. Water washing assembly; 42. Adjusting assembly; 43. Air washing assembly. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Example 1

[0027] As attached Figures 1 to 8 The illustrated flexible cleaning semiconductor stencil pneumatic cleaning device includes a housing 1, a top cover 2, a cleaning chamber 3, a rotating assembly 40, a water washing assembly 41, an adjusting assembly 42, and an air washing assembly 43. The top cover 2 is installed on the top of the housing 1, and the cleaning chamber 3 is opened on the top of the housing 1. The rotating assembly 40 is installed above the cleaning chamber 3, and the water washing assembly 41 is installed on one side of the rotating assembly 40. The air washing assembly 43 is installed on the side of the rotating assembly 40 away from the water washing assembly 41. The adjusting assembly 42 is installed inside both the water washing assembly 41 and the air washing assembly 43.

[0028] Specifically, the steel mesh 7 is fixed to the limiting frame 6 on the top of the rotating plate 5, and then the top cover 2 is closed to prevent water from spraying out. The steel mesh 7 rotates in the cleaning chamber 3, and the water washing components 41 and air washing components 43 on both sides clean it respectively. The limiting sleeve is pushed by the installation of the telescopic rod to drive the spray head and air jet head to adjust the angle. By adjusting different angles, the cleaning equipment can get closer to the surface of the complex or irregularly shaped steel mesh, thereby more effectively removing dirt and residue.

[0029] Example 2

[0030] Based on Example 1, the solution in Example 1 will be further described in detail below with reference to the specific working method, such as... Figures 1 to 5 As shown below, see details:

[0031] In a preferred embodiment, the rotating assembly 40 includes a motor 4, a rotating plate 5, a limiting frame 6, and a steel mesh 7. The rotating plate 5 is installed at the output end of the motor 4, and the limiting frame 6 is installed on the top of the rotating plate 5. The steel mesh 7 is installed between the two sets of limiting frames 6. The steel mesh 7 is fixed by fixing it to the limiting frame 6 on the top of the rotating plate 5. The motor 4 drives the rotating plate 5 to rotate, and the rotating plate 5 drives the steel mesh 7 to rotate through the limiting frame 6, so that the cleaning mechanisms on both sides clean the steel mesh 7.

[0032] In a preferred embodiment, the water washing assembly 41 includes a water storage tank 8, a water supply pipe 9, a fixing ring 10, a fixing plate 11, a spray head 12, a rotating shaft 13, a limiting sleeve 14, and a rotating sleeve 15. A water supply pipe 9 is provided on one side of the water storage tank 8, and a spray head 12 is installed at one end of the water supply pipe 9. A limiting sleeve 14 is fitted around the outer diameter of the spray head 12, and a rotating sleeve 15 is fixed to one side of the limiting sleeve 14. A rotating shaft 13 is installed on the inner diameter of the rotating sleeve 15, and fixing plates 11 are installed at both ends of the rotating shaft 13. A fixing ring 10 is installed on one side of the fixing plate 11. The water washing assembly 41... Water tank 8 supplies water to water pipe 9. At the end of water pipe 9, it splits into four small water pipes of the same size. Each small water pipe has a spray head 12 installed at its outlet. Each spray head 12 has a limiting sleeve 14 fitted on its outer diameter. One end of the limiting sleeve 14 is connected to a rotating sleeve 15. The rotating sleeve 15 can rotate on the rotating shaft 13, allowing the softer small water pipes to bend under the action of the limiting sleeve 14. By adjusting different angles, the cleaning equipment can get closer to the surface of the steel mesh with complex or irregular shapes, thereby more effectively removing dirt and residue.

[0033] In a preferred embodiment, the air washing assembly 43 includes an air tank 16, an air supply pipe 17, and a jet nozzle 18. The air supply pipe 17 is provided on one side of the air tank 16, and the jet nozzle 18 is installed at one end of the air supply pipe 17. After the initial spray cleaning by the spray head 12, the air washing assembly 43 on the side of the steel mesh 7 away from the water washing assembly 41 will further clean the steel mesh 7. The air washing assembly 43 removes dirt and residue through the air supply pipe 17 and the jet nozzle 18, and adjusts the angle by the adjusting assembly 42. After cleaning, it is blown dry to avoid leaving water stains.

[0034] In a preferred embodiment, the adjustment assembly 42 includes a telescopic rod 19, a fixing frame 20, a fixing block 21, a first rotating shaft 22, a connecting rod 23, a telescopic plate 24, and a second rotating shaft 25. The telescopic rod 19 is mounted on one side of the fixing frame 20, and the output end of the telescopic rod 19 is connected to the fixing block 21. The first rotating shaft 22 is mounted on the side of the fixing block 21 away from the telescopic rod 19, and one end of the first rotating shaft 22 is connected to the connecting rod 23. The second rotating shaft 25 is mounted on the end of the connecting rod 23 away from the first rotating shaft 22, and the telescopic plate 24 is mounted on the end of the second rotating shaft 25 away from the connecting rod 23. A telescopic plate 24 is fixed to the surface of each limiting sleeve 14, and each telescopic plate 24 is connected to the connecting rod 23 via the second rotating shaft 25. 23 is connected to the fixing block 21 via the first rotating shaft 22. A telescopic rod 19 is connected to one side of the fixing block 21. The telescopic rod 19 is fixed by a fixing bracket 20 installed on one side of the fixing ring 10. When the telescopic rod 19 extends or retracts forward, it will drive the fixing block 21 to move forward, thereby driving the connecting rod 23 to move forward. Since the first rotating shaft 22 and the second rotating shaft 25 installed on both sides of the connecting rod 23 are rotatably connected, and since the telescopic plate 24 and the limiting sleeve 14 are fixedly connected, and the limiting sleeve 14 can only rotate around the rotating shaft 13 via the rotating sleeve 15, the connecting rod 23 will drive the limiting sleeve 14 to rotate when it drives the telescopic plate 24 forward. The rotation of the limiting sleeve 14 will drive the softer water pipe 9 and the air pipe 17 to rotate, thereby achieving the purpose of adjusting different angles.

[0035] As a preferred embodiment, there are four spray heads 12 arranged in a circular array with the water pipe 9 as the center, and four air jet heads 18 arranged in a circular array with the air pipe 17 as the center. When spraying, the multiple spray heads 12 and air jet heads 18 can be adjusted at different angles to achieve complete coverage of the steel mesh surface, enabling the cleaning equipment to cope with more types of steel mesh and more complex cleaning scenarios.

[0036] The working process of this utility model is as follows: The steel mesh 7 is fixed to the limiting frame 6 on the top of the rotating plate 5, and then the top cover 2 is put on to seal it and prevent water from spraying out. The rotating plate 5 is driven to rotate by the motor 4, and the rotating plate 5 drives the steel mesh 7 to rotate through the limiting frame 6. A water washing component 41 and an air washing component 43 are installed on both sides of the steel mesh 7 respectively. The water washing component 41 supplies water to the water supply pipe 9 through the water storage tank 8. At the end of the water supply pipe 9, it splits into four small water pipes of the same size. The output port of each small water pipe is... Each spray head 12 is equipped with a limiting sleeve 14 fitted on its outer diameter. One end of the limiting sleeve 14 is connected to a rotating sleeve 15, which can rotate on a rotating shaft 13. A telescopic plate 24 is fixed to the surface of each limiting sleeve 14. Each telescopic plate 24 is connected to a connecting rod 23 via a second rotating shaft 25. The connecting rod 23 is connected to a fixing block 21 via a first rotating shaft 22. A telescopic rod 19 is connected to one side of the fixing block 21. The telescopic rod 19 is inserted through a fixing bracket 20 installed on one side of the fixing ring 10. When the telescopic rod 19 extends or retracts forward, it drives the fixed block 21 to move forward, thereby driving the connecting rod 23 to move forward. Since the first rotating shaft 22 and the second rotating shaft 25 installed on both sides of the connecting rod 23 are rotatably connected, and since the telescopic plate 24 and the limiting sleeve 14 are fixedly connected, and the limiting sleeve 14 can only rotate around the rotating shaft 13 via the rotating sleeve 15, the connecting rod 23 will drive the limiting sleeve 14 to rotate when it drives the telescopic plate 24 forward. Since a small, relatively soft water pipe is installed on the inner diameter of the limiting sleeve 14, it will drive... The small water pipe is bent to achieve multi-angle cleaning of the steel mesh 7. After initial cleaning by spraying with the spray head 12, the air washing component 43 on the side of the steel mesh 7 away from the water washing component 41 will further clean the steel mesh 7. The air washing component 43 removes dirt and residue through the air supply pipe 17 and the air jet head 18, and the angle is adjusted by the aforementioned adjustment component 42. After cleaning, it is blown dry to avoid leaving water stains. The above is the working principle of this flexible cleaning semiconductor steel mesh pneumatic cleaning equipment.

Claims

1. A flexible, cleanable pneumatic cleaning device for semiconductor stencils, comprising a housing (1), a top cover (2), a cleaning chamber (3), a rotating assembly (40), a water washing assembly (41), an adjusting assembly (42), and an air washing assembly (43), characterized in that: The top of the outer shell (1) is fitted with a top cover (2), and a cleaning chamber (3) is opened on the top of the outer shell (1). A rotating assembly (40) is installed above the cleaning chamber (3), and a water washing assembly (41) is installed on one side of the rotating assembly (40). An air washing assembly (43) is installed on the side of the rotating assembly (40) away from the water washing assembly (41), and an adjustment assembly (42) is installed inside both the water washing assembly (41) and the air washing assembly (43).

2. The flexible, cleanable pneumatic cleaning device for semiconductor stencils according to claim 1, characterized in that: The rotating assembly (40) includes a motor (4), a rotating plate (5), a limiting frame (6) and a steel mesh (7). The output end of the motor (4) is equipped with the rotating plate (5), and the top of the rotating plate (5) is equipped with the limiting frame (6). A steel mesh (7) is installed between the two sets of the limiting frames (6).

3. The flexible, cleanable pneumatic cleaning device for semiconductor stencils according to claim 1, characterized in that: The water washing assembly (41) includes a water storage tank (8), a water supply pipe (9), a fixing ring (10), a fixing plate (11), a spray head (12), a rotating shaft (13), a limiting sleeve (14), and a rotating sleeve (15). A water supply pipe (9) is provided on one side of the water storage tank (8), and a spray head (12) is installed at one end of the water supply pipe (9). A limiting sleeve (14) is fitted on the outer diameter of the spray head (12), and a rotating sleeve (15) is fixed on one side of the limiting sleeve (14). A rotating shaft (13) is installed on the inner diameter of the rotating sleeve (15), and a fixing plate (11) is installed at both ends of the rotating shaft (13). A fixing ring (10) is installed on one side of the fixing plate (11).

4. The flexible cleaning semiconductor stencil pneumatic cleaning equipment according to claim 3, characterized in that: The air washing assembly (43) includes an air tank (16), an air supply pipe (17) and an air jet (18). The air supply pipe (17) is provided on one side of the air tank (16), and an air jet (18) is installed at one end of the air supply pipe (17).

5. The flexible, cleanable pneumatic cleaning device for semiconductor stencils according to claim 1, characterized in that: The adjustment assembly (42) includes a telescopic rod (19), a fixed frame (20), a fixed block (21), a first rotating shaft (22), a connecting rod (23), a telescopic plate (24), and a second rotating shaft (25). The telescopic rod (19) is installed on one side of the fixed frame (20), and the output end of the telescopic rod (19) is connected to the fixed block (21). The first rotating shaft (22) is installed on the side of the fixed block (21) away from the telescopic rod (19), and one end of the first rotating shaft (22) is connected to the connecting rod (23). The second rotating shaft (25) is installed on the end of the connecting rod (23) away from the first rotating shaft (22), and the telescopic plate (24) is installed on the end of the second rotating shaft (25) away from the connecting rod (23).

6. The flexible cleaning semiconductor stencil pneumatic cleaning device according to claim 4, characterized in that: The spray head (12) has four units arranged in a circular array with the water pipe (9) as the center, and the jet head (18) has four units arranged in a circular array with the air pipe (17) as the center.

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