Sheet basket conveying device for polishing equipment and polishing equipment

Abstract

The utility model provides a piece basket conveying device for polishing equipment and the polishing equipment, the piece basket conveying device comprises a base, a driving module, a piece basket clamping jaw and a piece basket bracket, the driving module and the piece basket bracket are located on the base, and at least one transverse end part of the driving module extends out of the base; the wafer basket clamping jaw is positioned above the wafer basket bracket and is driven by the driving module to lift or transversely move; and the vertical inclination angles of the wafer basket bracket and the wafer basket clamping jaw are adjustable and the same. According to the wafer basket conveying device, the wafer baskets are conveyed between the discharging water tank of the polishing machine and the AGV, the basket conveying efficiency is improved, manual participation is reduced, and the automation degree and the production efficiency of equipment are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a wafer basket conveying device and a polishing device for polishing equipment. Background Technology

[0002] To increase production capacity, multiple polishing machines typically operate in parallel during production. To improve unloading efficiency and reduce quality issues such as dirt spots caused by silicon wafers being exposed to air, unloading water tanks are usually installed at the unloading points of the polishing machines. The length of the unloading water tank is the same as the dispersion direction of the multiple polishing machines. A conveyor belt (or conveyor chain) is installed in the unloading water tank. When the polishing machine is ready to unload, the empty wafer basket is placed on the conveyor belt in the unloading water tank. The conveyor belt transports the empty wafer basket to the unloading points of each polishing machine in sequence. The polished silicon wafers are inserted into the wafer basket by the unloading robot. When the wafer basket is full, it needs to be removed from the unloading water tank and transferred to a storage box (containing water) or the next process.

[0003] Typically, wafer trays are transferred by AGVs equipped with multi-axis robotic arms for loading and unloading. However, to prevent contamination of the polishing equipment's discharge trough, the sides and top are enclosed, leaving only an inlet for empty trays and an outlet for full trays. Due to the obstruction of the trough walls, the space for the multi-axis robotic arms to transfer trays and perform multi-axis rotation is limited, preventing them from directly reaching into the trough to load or unload trays. The inability of the AGV to directly connect with the discharge trough for tray transfer necessitates manual intervention, undoubtedly reducing the level of automation in production and increasing labor and personnel costs. Utility Model Content

[0004] The purpose of this invention is to provide a basket conveying device for polishing equipment and a polishing equipment to solve the problems mentioned in the background art.

[0005] The technical solution of this utility model includes: a wafer basket conveying device for polishing equipment, comprising: a base, a drive module, wafer basket grippers, and a wafer basket bracket. The drive module and the wafer basket bracket are located on the base, and at least one horizontal end of the drive module extends out of the base. The wafer basket grippers are located above the wafer basket bracket and are driven by the drive module to move up and down or laterally. The vertical tilt angles of the wafer basket bracket and the wafer basket grippers are adjustable and the same.

[0006] Furthermore, the tray gripper includes a finger cylinder, and two grippers of the finger cylinder are rotatably connected to a chuck. The chuck's rotation axis is horizontal, and the opposing surfaces of the two sets of chucks are respectively provided with tray slots.

[0007] Furthermore, the finger cylinder is mounted on a first mounting platform, and a second mounting platform is rotatably connected below the first mounting platform. The second mounting platform is provided with a claw guide rail. The rotating shaft of the second mounting platform and the claw guide rail are parallel to the rotating shaft of the claw, and the claw is slidably mounted on the claw guide rail.

[0008] Furthermore, one end of the second mounting platform is hinged to the first mounting platform, and the other end is provided with an adjusting rod. The other end of the adjusting rod is movably connected to the first mounting platform to adjust the distance between the non-hinged ends of the first mounting platform and the second mounting platform.

[0009] Furthermore, the tray support includes a first support platform and a second support platform. The first support platform is disposed on the base, and the second support platform is rotatably disposed above the first support platform with the axis of rotation being horizontal. The top of the second support platform is provided with a plurality of limiting blocks arranged in a ring for limiting the tray position.

[0010] Furthermore, one end of the second support is hinged to the first support, and the other end is provided with a first adjusting block. The first support is provided with a second adjusting block corresponding to the position of the first adjusting block. The first adjusting block and the second adjusting block are respectively provided with adjusting slots with horizontal axes, and locking members are inserted through the adjusting slots.

[0011] Furthermore, a rotary motor is provided at the bottom of the first support platform, and the output shaft of the rotary motor is vertical, which is used to drive the tray support to rotate around the output shaft.

[0012] Furthermore, the drive module includes a lifting motor, a lifting module, a transverse motor, and a translation module. The lifting module is disposed on the base, and the translation module is disposed on the sliding end of the lifting module and moves along the height direction of the base driven by the lifting motor. The basket gripper is disposed on the sliding end of the translation module and moves along the length direction of the base driven by the transverse motor.

[0013] Furthermore, a pair of opposite sides of the tray holder are provided with a through-beam grating, which can detect whether there is a tray at the tray holder.

[0014] The technical solution of this utility model also includes: a polishing device, which includes a material feeding tank, and the outer side of the upper basket position and / or lower basket position of the material feeding tank is provided with a plate basket conveying device for polishing device as described above.

[0015] The beneficial effects of this utility model are as follows: by using a tray conveying device, the tray is transferred between the material discharge tank of the polishing machine and the AGV vehicle, which improves the tray transfer efficiency, reduces manual intervention, and improves the automation level and production efficiency of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a commonly used tray structure in this field;

[0017] Figure 2 This is a usage state diagram of an embodiment of this utility model;

[0018] Figure 3 This is a structural schematic diagram of an embodiment of the present utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the basket gripper in an embodiment of this utility model;

[0020] Figure 5 This is a schematic diagram of the structure of the tray support in an embodiment of this utility model.

[0021] In the picture:

[0022] 100. Basket; 101. Basket opening; 102. Basket bottom; 103. H-side; 104. U-side;

[0023] 200. Feeding trough; 201. Layup position; 202. Bottom layup position;

[0024] 300. Base;

[0025] 400. Drive module; 401. Lifting motor; 402. Lifting module; 403. Horizontal movement motor; 404. Horizontal movement module; 405. Auxiliary guide rail; 406. Auxiliary guide block;

[0026] 500, Basket gripper; 501, Finger cylinder; 502, Pneumatic gripper; 503, Clamping claw; 504, Basket slot; 505, First mounting platform; 506, Second mounting platform; 507, Clamping claw guide rail; 508, First adjusting rod; 509, Second adjusting rod; 510, First abutment block; 511, Second abutment block;

[0027] 600, Basket support; 601, First support platform; 602, Second support platform; 603, Limiting block; 604, First adjusting block; 605, Second adjusting block; 606, Adjusting slot; 607, Locking component;

[0028] 700. Through-beam grating;

[0029] 800. Rotary motor. Detailed Implementation

[0030] The technical solution of this utility model will be clearly and completely described below with reference to its embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0031] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] Reference Appendix Figure 1-5 This embodiment provides a tray conveying device for a polishing machine and a polishing machine equipped with such a tray conveying device. In order to clearly and concisely explain the installation of the tray conveying device in the polishing machine, the tray conveying device will be described in conjunction with the relevant structure in the polishing machine below.

[0034] Before describing the wafer basket conveying device and the polishing equipment equipped with the wafer basket conveying device, it is necessary to briefly describe the structure of wafer baskets commonly used in the art, so as to understand the configuration and operating principle of the relevant structure in this embodiment. (See attached document.) Figure 1The wafer basket 100 has a cubic shape, with both the basket opening 101 and the basket bottom 102 being open. The width of the basket gradually decreases from the basket opening 101 to the basket bottom 102 to prevent silicon wafers from falling out. The wafer basket 100 has multiple silicon wafer receiving slots inside. Conventionally, based on the shape of the side plates of the wafer basket 100, the two side plates along the length direction of the wafer basket 100 (i.e., the direction in which the multiple silicon wafer receiving slots are distributed) are named H-side 103 and U-side 104, respectively. The specific shape of the wafer basket 100 (e.g., the concave and convex structure) is affected by the requirements of the production process. Different manufacturers have different design requirements, but usually, the gripping part of the wafer basket 100 is designed at the basket opening 101 and U-side 104.

[0035] In the polishing equipment provided in this embodiment, multiple polishing machines are arranged side by side. Each set of polishing machines has a discharge trough 200 at its discharge point. The length direction of the discharge trough 200 is the same as the dispersion direction of the multiple polishing machines. A conveyor belt (or conveyor chain) is provided in the discharge trough 200 to transport the wafer basket 100. The starting end of the conveyor belt is the upper basket position 201 of the discharge trough 200, and the ending end of the conveyor belt is the lower basket position 202 of the discharge trough 200. (The conveyor belt is generally...) The circular conveyor belt (the beginning and end of the conveyor belt refer to the two ends of the direction in which the wafer basket 100 is conveyed, not the actual ends of the conveyor belt) means that when an empty wafer basket 100 is placed in the upper basket position 201, the basket opening 101 of the wafer basket 100 faces the unloading robot of the polishing machine. The conveyor belt conveys the wafer basket 100 sequentially to the unloading position of each polishing machine. Each unloading robot sequentially inserts the polished silicon wafers into the wafer basket 100. Under normal circumstances, the wafer basket 100 is exactly full of silicon wafers when it is sent to the lower basket position 202.

[0036] To facilitate the docking of the unloading trough 200 with the AGV vehicle and ensure smooth loading of empty baskets or unloading of full baskets, this embodiment includes a basket conveying device at the long end of the unloading trough 200. In practice, depending on requirements, the basket conveying device can be installed only on the outside of the upper basket position 201, only on the outside of the lower basket position 202, or both on the outside of the upper basket position 201 and the lower basket position 202. The following will describe the configuration with a higher degree of automation—installing basket conveying devices on the outside of both the upper basket position 201 and the lower basket position 202.

[0037] The tray conveying device includes a base 300, a drive module 400, tray grippers 500, and tray support 600. The drive module 400 and tray support 600 are located on the base 300. The tray grippers 500 are located above the tray support 600 and are connected to the drive module 400. The drive module 400 extends out of the base 300 toward the horizontal end of the unloading water tank 200 (i.e., extends into the space above the unloading water tank 200). The tray grippers 500 are driven by the drive module 400 to move up and down or laterally to grip and transfer the tray 100 between the tray support 600 and the upper tray position 201, and between the lower tray position 202 and the tray support 600.

[0038] Referring to the attached diagram, to facilitate docking with the multi-axis robot on the AGV vehicle, no obstructions are provided between the tray holder 600 and the external AGV vehicle on the base 300, so that the multi-axis robot can grip the tray 100 on the tray holder 600. Other structural components of the base 300 (such as the support frame, support plate, and skin) can be configured according to usage requirements, based on the principle of enabling the installation and operation of equipment such as the drive module 400; no further specific limitations are made here.

[0039] The drive module 400 includes a lifting motor 401, a lifting module 402, a transverse motor 403, and a transverse module 404. Both the lifting module 402 and the transverse module 404 are linear modules (existing technology), which are small in size, require less working space (compared to multi-axis robots), are easy to deploy, have sensitive movements, and high stability. The linear guide rail in the lifting module 402 is arranged vertically, and its slide is driven by the lifting motor 401. The linear guide rail in the transverse module 404 is arranged horizontally and is fixedly connected to the slide in the lifting module 402. It is driven by the lifting motor 401 to move vertically, and the slide in the transverse module 404 is driven by the transverse motor 403. The basket gripper 500 is fixedly connected to the slide in the transverse module 404 and is driven by the transverse motor 403 to move horizontally.

[0040] When loading an empty basket into the layup position 201, the multi-axis robotic arm of the empty basket AGV transfers the empty basket to the basket holder 600. The lifting motor 401 drives the slide, translation module, translation motor, and basket gripper 500 in the lifting module 402 to descend. The basket gripper 500 picks up the empty basket. The lifting motor 401 drives the basket gripper 500 to rise. The translation motor drives the slide, basket gripper 500, and empty basket in the translation module to move laterally above the layup position 201. The lifting motor 401 drives the basket gripper 500 to descend. The basket gripper 500 places the empty basket in the layup position 201. The lifting motor 401 drives the basket gripper 500 to rise, and the translation motor drives the slide and basket gripper 500 in the translation module to move laterally above the basket holder 600 (reset). The principle for loading a full basket into the layup position 202 is the same and will not be repeated.

[0041] To ensure equipment safety and smooth production, this embodiment provides through-beam gratings 700 on a set of opposite sides of the tray support 600. The through-beam gratings 700 can be mounted on the base 300 and are used to detect whether there is a tray at the tray support 600. The through-beam grating 700 on the outer side of the upper tray position 201 is connected to the control system to regulate the movement of the AGV's multi-axis robot arm. The through-beam grating 700 on the outer side of the lower tray position 202 is connected to the control system to regulate the movement of the tray conveying device on the outer side of the lower tray position 202. Only when no tray 100 is detected on the tray support 600 can the AGV's multi-axis robot arm or the tray conveying device on the outer side of the lower tray position 202 transfer the tray 100 to the tray support 600, preventing collisions between trays 100 and between the tray 100 and the equipment.

[0042] To improve the operational stability of the drive module 400, an auxiliary guide rail 405 and an auxiliary guide block 406 can be configured on the outside of the lifting module 402. The auxiliary guide rail 405 is parallel to the linear guide rail in the lifting module 402, and the auxiliary guide block 406 is slidably mounted on the auxiliary guide rail 405. The transverse guide rail is fixedly connected to the auxiliary guide block 406. By utilizing the auxiliary guide block 406 in conjunction with the slide in the lifting module 402, the stability during the lifting process is improved, and equipment wear is reduced.

[0043] Since the transverse module 404 needs to move up and down with the slide in the lifting module 402, the auxiliary guide block 406 and the slide in the lifting module 402 need to bear the entire mass load of the transverse module 404, the transverse motor 403, the basket gripper 500 and the basket 100. The measure of adding auxiliary guide rails 405 and auxiliary guide blocks 406 to the outside of the transverse module 404 to improve stability requires increasing the overall material usage and material strength of the device, which will increase the manufacturing cost of the device. Therefore, although the above measures are optional, a better approach can be adopted. For example, the linear guide rail in the transverse module 404 can pass through the slide, so that the top surface of the linear guide rail is in full contact with the slide to improve the sliding stability of the slide.

[0044] To prevent water from spilling out of the tray 100 after it comes out of the discharge trough 200, causing dirt on the factory floor and potentially affecting the safety of AGV vehicles, the tray gripper 500 can be tilted, with the end near the tray opening 101 higher than the end near the tray bottom 102. This keeps the tray 100 tilted during the gripping process, allowing water to drip into the discharge trough 200 before it moves laterally away from the discharge trough 200.

[0045] To accommodate the gripping angle of the tray gripper 500 and accurately pick up and place the tray 100, thereby improving the automation level and operating efficiency of the equipment, the tray support 600 and the conveyor belt in the unloading trough 200 can be adapted to be tilted. However, due to the influence of the manufacturing and assembly precision of the parts, the vertical tilt angles of the tray gripper 500 and the tray support 600 may not be accurately matched. Therefore, the tray gripper 500 and the tray support 600 can be configured with an adjustable vertical tilt angle. After the equipment is assembled and before production, the vertical tilt angles of the tray gripper 500 and the tray support 600 can be corrected accordingly.

[0046] For example, attached Figure 4 In the tray clamp 500, a finger cylinder 501 is provided. Two grippers 502 (i.e., the portion of the piston rod extending outside the finger cylinder 501) of the finger cylinder 501 are rotatably connected to chucks 503. The rotating shafts of the chucks 503 are horizontal, and the facing surfaces of the two sets of chucks 503 are respectively provided with tray grooves 504 for correspondingly clamping onto the outer contour of the tray 100. During calibration before production, rotating the chucks 503 will change the vertical tilt angle of the tray grooves 504. After accurate calibration, the chucks 503 can be fixed.

[0047] A simpler implementation involves installing a horizontal bolt at the connection between the gripper 503 and the pneumatic gripper 502. Loosening the bolt allows the gripper 503 and the pneumatic gripper 502 to rotate relative to each other, while tightening the bolt secures the gripper 503. However, this concentrates the weight load of both the gripper 503 and the tray 100 onto the pneumatic gripper 502, accelerating its wear rate and reducing its service life.

[0048] Therefore, in some preferred embodiments, a first mounting platform 505 and a second mounting platform 506 are provided below the slide of the transverse module 404 and are rotatably connected. The first mounting platform 505 is used to mount the finger cylinder 501, and the second mounting platform 506 is provided with a claw guide rail 507. The claw 503 passes through the second mounting platform 506 and is slidably connected to the claw guide rail 507. The rotation axis of the second mounting platform 506 and the claw guide rail 507 are parallel to the rotation axis of the claw 503, respectively. The vertical tilt angle of the claw 503 can be changed by rotating the second mounting platform 506. In practice, the second mounting platform 506 bears the weight load of the claw 503 and the claw guide rail 507, while the slide of the transverse module 404 bears the weight load of the second mounting platform 506. The pneumatic gripper 502 of the finger cylinder 501 does not bear the weight load of the claw 503, which can reduce the wear rate of the pneumatic gripper 502 and extend its service life. Compared with the second mounting platform 506, the cost of the finger cylinder 501 is higher. This improvement can greatly reduce the maintenance cost of the device.

[0049] Since the chuck 503 needs to be guided by the chuck guide rail 507 and also needs to be pushed and extended by the pneumatic gripper 502, the chuck guide rail 507 can be placed above the second mounting platform 506. The chuck 503 is vertically inserted through the second mounting platform 506 and then connected to the chuck guide rail 507 and the pneumatic gripper 503. The part of the chuck 503 above the second mounting platform 506 is used for sliding under force, and the part of the chuck 503 below the second mounting platform 506 is used to clamp the tray 100. In order to make the chuck 503 slide smoothly, the second mounting platform 506 should be appropriately provided with a long through hole located outside the chuck guide rail 507 and extending in the same direction as the chuck guide rail 507.

[0050] In implementation, one end of the second mounting platform 506 is hinged to the first mounting platform 505, and the other end is equipped with an adjusting rod. The adjusting rod can adjust the distance between the non-hinged ends of the first mounting platform 505 and the second mounting platform 506. The configuration of the adjusting rod can be configured according to specific usage requirements, for example, with... Figure 4 In this design, the adjusting rod includes a first adjusting rod 508 and a second adjusting rod 509. The bottom of the first adjusting rod 508 is rotatably connected to the second mounting platform 506, and its top slides through the first mounting platform 505 and is locked by a nut. The second adjusting rod 509 passes through the first mounting platform 505 and is threadedly connected to it. The bottom end of the second adjusting rod 509 abuts against the second mounting platform 506. By adjusting the length of the top end of the first adjusting rod 508 extending beyond the first mounting platform 505 and the length of the bottom end of the second adjusting rod 509 extending beyond the first mounting platform 505, the distance between the non-hinged ends of the first mounting platform 505 and the second mounting platform 506 can be changed, thereby changing the vertical tilt angle of the second mounting platform 506. It is worth noting that, for smooth adjustment, the diameter of the through hole of the first adjusting rod 508 on the first mounting platform 505 should be larger than the diameter of the first adjusting rod 508, but smaller than the outer diameter of the nut at its top. The shape and radial dimension of the through hole of the first adjusting rod 508 on the first mounting platform 505 can be determined based on the positional change of the first adjusting rod 508 during the adjustment of the vertical tilt angle of the second mounting platform 506. A long through hole or a round hole can be used. Since the calibration before production is only a fine adjustment, it is sufficient to correspond to the vertical tilt angle of the conveyor belt in the tray 100 and the unloading water tank 200. When the angle adjustment range is 5° to 7°, a round hole can also meet the usage requirements.

[0051] In the above embodiments, the gripper 502 of the claw 503 and the finger cylinder 501 can still be connected by bolts. However, the operation of correcting the vertical tilt angle of the gripper 503 becomes more complicated. It is necessary to first loosen the connection between the gripper 503 and the finger cylinder 501, and then adjust the second mounting platform 506. When the second mounting platform 506 and the first mounting platform 505 are stably connected by a hinge end and an adjusting rod, the gripper 503 and the finger cylinder 501 do not necessarily need to be bolted. Two bolts can be installed on the top of the gripper 503. A first abutment block 510 is provided, and a second abutment block 511 is provided on the pneumatic gripper 502 of the finger cylinder 501. The second abutment block 511 is positioned between the two first abutment blocks 510. The second abutment block 511 drives the first abutment blocks 510 and the gripper 503 to move through the abutment action, thereby realizing the clamping and placement of the tray 100. By adaptively configuring the shape and size of the first abutment block 510 and the second abutment block 511, the two can rotate around the horizontal axis to meet the usage requirements and reduce the operation when correcting the angle.

[0052] Reference Appendix Figure 5 A vertically adjustable tray support 600 is mounted on a base 300. It includes a first support platform 601 and a second support platform 602. The first support platform 601 is located on the base 300, and the second support platform 602 is rotatably positioned above the first support platform 601 with its axis of rotation horizontal. The top of the second support platform 602 has multiple ring-shaped limiting blocks 603 for limiting the tray 100 and preventing it from slipping due to tilting. Specifically, one end of the second support platform 602 is hinged to the first support platform 601, and the other end has a first adjusting block 604. The first support platform 601 has a second adjusting block 605 corresponding to the position of the first adjusting block 604. The first adjusting block 604 and the second adjusting block 605 each have horizontally axial adjusting slots 606, and locking elements 607 pass through the adjusting slots 606. The locking element 607 can be a bolt, similar to the through hole on the first mounting plate 505 of the adjusting rod. Because the angle adjustment during correction is relatively small, the adjusting slot 606 can be set as a long through hole or a round hole.

[0053] In addition, to avoid surface contamination and abnormalities on the silicon wafers, they should be placed in a water environment as much as possible during transfer. Therefore, a full-basket AGV typically contains a water tank. However, to ensure the stability of the silicon wafers during transfer to the next process and to prevent them from slipping or impacting the inner wall of the water tank, thus causing quality problems, and considering the smooth connection between the full-basket AGV and subsequent processes, the wafer basket 100 generally needs to be rotated so that the basket opening 101 faces upwards and placed in the water tank of the AGV. Therefore, in this embodiment, a rotary motor 800 is provided at the bottom of the first support platform 601. The output shaft of the rotary motor 800 is vertical and is used to drive the wafer basket support 600 to rotate around the output shaft. The rotary motor 800 rotates the tray 100 180°, so that the opening 101 of the tray 100 faces the AGV (because the AGV and the polishing machine's unloading robot are located on opposite sides of the unloading water tank 200). The multi-axis robot then grasps the opening 101 of the tray 100, flips it 90° on the AGV, and the opening 101 of the tray 100 faces upwards, allowing the bottom 102 to slowly fall into the water tank of the AGV. If the rotary motor 800 is not used, the multi-axis robot on the AGV must grasp the U-side 104 of the tray 100. After flipping the tray 100 90° so that the opening 101 faces upwards, part of the multi-axis robot's structure is located to the side of the tray 100. Due to obstruction by the side wall of the water tank in the AGV, the multi-axis robot cannot descend to a height sufficient to smoothly place the tray 100 into the water tank.

[0054] Adaptively, sensors can be installed in the drive module 400, rotary motor 800, etc., to ensure the accuracy of lifting, lateral movement, rotation, etc., and the signals of the lifting motor 401, lateral movement motor 403, rotary motor 800 and the drive motor of the conveyor belt in the unloading water tank 200 can be interconnected to regulate the orderly operation of each device through the original central control system in the factory.

[0055] The process of conveying and unloading the basket 100 using the above-mentioned basket conveying device and polishing equipment is as follows: The empty basket AGV transfers the empty basket to the basket support 600 outside the upper basket position 201 → The drive module 400 outside the upper basket position 201 drives the basket gripper 500 to move, transferring the empty basket to the upper basket position 201 (the more specific process has been detailed above) → The unloading robot of the polishing machine unloads the basket, and the conveyor belt in the unloading water tank 200 conveys the basket 100 to the lower basket position 202 → The drive module 400 outside the lower basket position 202 drives the basket gripper 500 to move, transferring the full basket to the basket support 600 outside the lower basket position 202 → The rotary motor 800 rotates the basket support 600 and the full basket on it by 180° → The full basket AGV moves the full basket away.

[0056] Compared with the prior art, the beneficial effects of this utility model are as follows: by using a tray conveying device, the tray 100 is transferred between the unloading water tank 200 of the polishing machine and the AGV vehicle, thereby improving the tray transfer efficiency, reducing manual intervention, and improving the automation level and production efficiency of the equipment.

[0057] The above are preferred embodiments of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A tray conveying device for a polishing machine, characterized in that, include: The device comprises a base, a drive module, a tray gripper, and a tray support. The drive module and the tray support are located on the base, and at least one horizontal end of the drive module extends out of the base. The tray gripper is located above the tray support and is driven by the drive module to move up and down or laterally. The vertical tilt angles of the tray support and the tray gripper are adjustable and the same.

2. The basket conveying device for polishing equipment according to claim 1, characterized in that, The tray gripper includes a finger cylinder, and two grippers of the finger cylinder are rotatably connected to a chuck. The chuck's rotation axis is horizontal, and the opposing surfaces of the two sets of chucks are respectively provided with tray slots.

3. The basket conveying device for polishing equipment according to claim 2, characterized in that, The finger cylinder is mounted on a first mounting platform, and a second mounting platform is rotatably connected below the first mounting platform. The second mounting platform is provided with a claw guide rail. The rotating shaft of the second mounting platform and the claw guide rail are parallel to the rotating shaft of the claw, and the claw is slidably mounted on the claw guide rail.

4. The basket conveying device for polishing equipment according to claim 3, characterized in that, One end of the second mounting platform is hinged to the first mounting platform, and the other end is provided with an adjusting rod. The other end of the adjusting rod is movably connected to the first mounting platform to adjust the distance between the non-hinged ends of the first mounting platform and the second mounting platform.

5. The basket conveying device for polishing equipment according to any one of claims 1-4, characterized in that, The tray support includes a first support platform and a second support platform. The first support platform is disposed on the base, and the second support platform is rotatably disposed above the first support platform with the axis of rotation being horizontal. The top of the second support platform is provided with a plurality of limiting blocks arranged in a ring for limiting the tray position.

6. The basket conveying device for polishing equipment according to claim 5, characterized in that, One end of the second support is hinged to the first support, and the other end is provided with a first adjusting block. The first support is provided with a second adjusting block corresponding to the position of the first adjusting block. The first adjusting block and the second adjusting block are respectively provided with adjusting slots with horizontal axes, and locking members are inserted in the adjusting slots.

7. The basket conveying device for polishing equipment according to claim 5, characterized in that, The bottom of the first tray is equipped with a rotary motor, the output shaft of which is vertical and is used to drive the tray bracket to rotate around the output shaft.

8. The basket conveying device for polishing equipment according to any one of claims 1-4 and 6-7, characterized in that, The drive module includes a lifting motor, a lifting module, a transverse motor, and a translation module. The lifting module is mounted on the base, and the translation module is located at the sliding end of the lifting module and moves along the height direction of the base driven by the lifting motor. The basket gripper is located at the sliding end of the translation module and moves along the length direction of the base driven by the transverse motor.

9. The basket conveying device for polishing equipment according to claim 8, characterized in that, The tray holder has a set of opposite sides provided with a through-beam grating, which can detect whether there is a tray at the tray holder.

10. A polishing device, characterized in that, The device includes a material feeding trough, and the outer side of the upper basket position and / or lower basket position of the material feeding trough is provided with a plate basket conveying device for the polishing equipment according to any one of claims 1-9.

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