Manipulator for switching feeding channel and discharging channel of silicon wafer RCA cleaning equipment

Abstract

According to the mechanical arm for switching the feeding channel and the discharging channel of the silicon wafer RCA cleaning equipment, the swing arm rotates clockwise or anticlockwise, at the moment, the sliding block is driven by the oblong hole to ascend in the first vertical channel, the mechanical arm clamps the basket to ascend to the end of the horizontal channel, the basket ascends to the limit state, and the swing arm continues to rotate; the sliding block translates in the horizontal channel, at the moment, the flower basket moves to the position above the second conveying line from the position above the first conveying line, in the process, the rotating motor works, 90-degree rotation of the flower basket is achieved, in the process that the swing arm continues to rotate, the sliding block descends along the second vertical channel, the connecting rod drives the flower basket to descend, and the flower basket is placed on the second conveying line; and the basket is continuously conveyed along the second conveying line, so that the basket is stably conveyed from one conveying line to another vertical conveying line.

Description

Technical Field

[0001] This utility model relates to the field of RCA cleaning equipment, and in particular to a robotic arm for switching the loading and unloading channels of silicon wafer RCA cleaning equipment. Background Art

[0002] In the semiconductor manufacturing industry, the cleaning of silicon wafers directly affects the quality of subsequent processes and the performance of the final product. Therefore, tank-type RCA cleaning equipment is usually chosen for cleaning.

[0003] During silicon wafer cleaning, the silicon wafers need to be placed in baskets and transported by conveyor lines to the corresponding workstations for cleaning. Due to space limitations, the conveyor lines are often vertically distributed during the transport process. When the baskets are transported to two vertical conveyor lines, how to smoothly transport them from one conveyor line to the other has become an urgent problem for researchers in this field. Utility Model Content

[0004] The technical problem to be solved by this utility model is: how to smoothly transport a flower basket from one conveyor line to another vertical conveyor line;

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model relates to a robotic arm for switching the loading and unloading channels of a silicon wafer RCA cleaning equipment, comprising: a frame; a track plate mounted on the frame, with a first vertical channel, a horizontal channel, and a second vertical channel interconnected on its end face; wherein the first vertical channel and the second vertical channel are arranged in parallel, and the tops of the first vertical channel and the second vertical channel are respectively connected to the end of the horizontal channel; a drive shaft rotatably mounted on the track plate; a swing arm, one end of which is connected to the drive shaft, and the other end of which has an elongated hole; and a connecting rod with the slider fixed to its back; wherein... The slider passes through the elongated hole and slides within the first vertical channel, the horizontal channel, or the second vertical channel; a rotating motor is fixed to the bottom of the connecting rod; a rotating disk is fixed to the output end of the rotating motor, and its bottom is provided with a clamping claw for holding the silicon wafer basket; when the drive shaft rotates, the swing arm carries the slider from the bottom of the first vertical channel, through the horizontal channel, to the bottom of the second vertical channel. At this time, the rotating motor rotates 90°, and the basket is transferred from the end of the first conveyor line stroke to the beginning of the second conveyor line stroke perpendicular to the first conveyor line.

[0007] In this design, the swing arm rotates clockwise or counterclockwise. During this rotation, the slider, driven by the elongated hole, rises in the first vertical channel. The robotic arm then grips the flower basket and rises to the end of the horizontal channel. Once the basket reaches its limit, the swing arm continues to rotate, and the slider moves horizontally within the channel. The flower basket then moves from above the first conveyor line to above the second conveyor line. During this process, the rotating motor operates, achieving a 90-degree rotation of the flower basket. As the swing arm continues to rotate, the slider descends along the second vertical channel, and the connecting rod lowers the flower basket, placing it on the second conveyor line. The basket continues to be transported along the second conveyor line, thus smoothly transporting the flower basket from one conveyor line to another vertical conveyor line.

[0008] To ensure the stability of the connecting rod during movement, this utility model employs a horizontal slide rail on the track plate; a horizontal slider is slidably mounted on the horizontal slide rail, and a vertical slide rail is mounted on it; wherein, the rod body of the connecting rod cooperates with the vertical slide rail;

[0009] In this design, the connecting rod is slidably connected to the vertical slide rail, and the vertical slide rail and horizontal slider are integrated. The horizontal slider is connected to the horizontal slide rail, which ensures the stability of the connecting rod during lifting and horizontal movement, so that the connecting rod will not cause the flower basket to sway during movement.

[0010] To achieve the rotation of the drive shaft, this utility model connects the input end of the drive shaft to a motor fixed on the frame.

[0011] In this way, the rotation of the motor enables the drive shaft to rotate on its own.

[0012] To accommodate different conveyor line heights, this invention employs a limiting part fixed on the connecting rod; the limiting part extends to both sides with limiting protrusions; a limiting screw is disposed on the track plate; when the slider is located in the first vertical channel and the limiting protrusion abuts against the limiting screw, it is in a limit state; or when the slider is located in the second vertical channel and the limiting protrusion abuts against the limiting screw, it is in a limit state.

[0013] When the limiting protrusion and the limiting screw abut against each other, the bottom of the flower basket comes into contact with the conveyor line, ensuring the smooth transfer of the flower basket.

[0014] To achieve the adjustment of the extreme position of this device, this utility model uses the limiting screw connected to the track plate through the mounting base; by rotating the limiting screw, the extreme position of the slider can be adjusted.

[0015] When facing a high conveyor line, by rotating the limit screw, the limit screw moves upward, and the downward stroke of the slider is shortened, which can smoothly transfer the flower basket to the conveyor line.

[0016] The beneficial effects of this utility model are as follows: This utility model is a robotic arm for switching the loading and unloading channels of a silicon wafer RCA cleaning equipment. The swing arm rotates clockwise or counterclockwise. At this time, the slider rises in the first vertical channel under the drive of the elongated hole. The robotic arm holds the basket and rises to the end of the horizontal channel. At this time, the basket rises to its limit. The swing arm continues to rotate, and the slider moves horizontally in the horizontal channel. At this time, the basket moves from above the first conveyor line to above the second conveyor line. During this process, the rotating motor works to realize the 90-degree rotation of the basket. As the swing arm continues to rotate, the slider descends along the second vertical channel. The connecting rod drives the basket to descend and place the basket on the second conveyor line. It continues to be transported along the second conveyor line. In this way, the basket is smoothly transported from one conveyor line to another vertical conveyor line. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the structure of this utility model without a frame;

[0020] In the diagram: 1-Frame, 2-Track plate, 3-First vertical channel, 4-Horizontal channel, 5-Second vertical channel, 6-Drive shaft, 7-Swing arm, 8-Oblong hole, 9-Connecting rod, 10-Slider, 11-Rotating motor, 12-Rotating disk, 13-Claw, 14-Horizontal slide rail, 15-Horizontal slider, 16-Vertical slide rail, 17-Limiting part, 18-Limiting protrusion, 19-Limiting screw, 20-Mounting base. DETAILED DESCRIPTION

[0021] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0022] like Figure 1-2As shown, this utility model is a robotic arm for switching the loading and unloading channels of a silicon wafer RCA cleaning equipment, comprising: a frame 1; a track plate 2, which is mounted on the frame 1, and has a first vertical channel 3, a horizontal channel 4, and a second vertical channel 5 that are interconnected on its end face; wherein the first vertical channel 3 and the second vertical channel 5 are arranged in parallel, and the tops of the first vertical channel 3 and the second vertical channel 5 are respectively connected to the end of the horizontal channel 4; a drive shaft 6, which is rotatably mounted on the track plate 2; a swing arm 7, one end of which is connected to the drive shaft 6, and the other end of which has an elongated hole 8; a connecting rod 9, the back of which is fixed with the slider 10; wherein, the The slider 10 passes through the elongated hole 8 and slides within the first vertical channel 3, the horizontal channel 4, or the second vertical channel 5; the rotating motor 11 is fixed to the bottom of the connecting rod 9; the rotating disk 12 is fixed to the output end of the rotating motor 11, and its bottom is provided with a claw 13 for clamping the silicon wafer basket; when the drive shaft 6 rotates, the swing arm 7 moves the slider 10 from the bottom of the first vertical channel 3, through the horizontal channel 4, to the bottom of the second vertical channel 5. At this time, the rotating motor 11 rotates 90°, and the basket is transferred from the end of the first conveyor line to the beginning of the second conveyor line perpendicular to the first conveyor line.

[0023] In this design, the swing arm rotates clockwise or counterclockwise. During this rotation, the slider, driven by the elongated hole, rises in the first vertical channel. The robotic arm then grips the flower basket and rises to the end of the horizontal channel. Once the basket reaches its limit, the swing arm continues to rotate, and the slider moves horizontally within the channel. The flower basket then moves from above the first conveyor line to above the second conveyor line. During this process, the rotating motor operates, achieving a 90-degree rotation of the flower basket. As the swing arm continues to rotate, the slider descends along the second vertical channel, and the connecting rod lowers the flower basket, placing it on the second conveyor line. The basket continues to be transported along the second conveyor line, thus smoothly transporting the flower basket from one conveyor line to another vertical conveyor line.

[0024] like Figure 1-2 As shown, in order to ensure the stability of the connecting rod during the movement, the present invention adopts a horizontal slide rail 14 on the track plate 2; a horizontal slider 15, which is slidably disposed on the horizontal slide rail 14, and a vertical slide rail 16 is disposed on it; wherein, the rod body of the connecting rod 9 cooperates with the vertical slide rail 16.

[0025] In this design, the connecting rod is slidably connected to the vertical slide rail, and the vertical slide rail and horizontal slider are integrated. The horizontal slider is connected to the horizontal slide rail, which ensures the stability of the connecting rod during lifting and horizontal movement, so that the connecting rod will not cause the flower basket to sway during movement.

[0026] To achieve the rotation of the drive shaft, this utility model connects the input end of the drive shaft 6 to a motor fixed on the frame 1.

[0027] In this way, the rotation of the motor enables the drive shaft to rotate on its own.

[0028] like Figure 1-2 As shown, in order to adapt to different conveyor line heights, this utility model employs a limiting part 17 fixed on the connecting rod 9; the limiting part 17 extends to both sides with limiting protrusions 18; a limiting screw 19 is disposed on the track plate 2; when the slider 10 is located in the first vertical channel 3, and the limiting protrusion 18 abuts against the limiting screw 19, it is in a limit state; or when the slider 10 is located in the second vertical channel 4, and the limiting protrusion 18 abuts against the limiting screw 19, it is in a limit state.

[0029] When the limiting protrusion and the limiting screw abut against each other, the bottom of the flower basket comes into contact with the conveyor line, ensuring the smooth transfer of the flower basket.

[0030] like Figure 1-2 As shown, to achieve the adjustment of the extreme position of this device, the present invention uses the limiting screw 19 connected to the track plate 2 via the mounting base 20; by rotating the limiting screw 19, the extreme position of the slider 10 can be adjusted.

[0031] When facing a high conveyor line, by rotating the limit screw, the limit screw moves upward, and the downward stroke of the slider is shortened, which can smoothly transfer the flower basket to the conveyor line.

[0032] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A robotic arm for switching the loading and unloading channels of a silicon wafer RCA cleaning equipment, characterized in that, include: frame; The track plate is mounted on the frame, and its end face has a first vertical channel, a horizontal channel, and a second vertical channel that are interconnected. The first vertical channel and the second vertical channel are arranged in parallel, and the tops of the first vertical channel and the second vertical channel are respectively connected to the end of the horizontal channel; The drive shaft is rotatably mounted on the track plate; The swing arm has one end connected to the drive shaft and the other end has an elongated hole. The connecting rod has a slider fixed to its back. The slider passes through the elongated hole and slides within the first vertical channel, the horizontal channel, or the second vertical channel. Rotate the motor, which is fixed to the bottom of the connecting rod; A rotating disk is fixed to the output end of the rotating motor, and its bottom is provided with claws for holding silicon wafer baskets. When the drive shaft rotates, the swing arm carries the slider from the bottom of the first vertical channel, through the horizontal channel to the bottom of the second vertical channel. At this time, the rotating motor rotates 90°, and the flower basket is transferred from the end of the first conveyor line to the beginning of the second conveyor line, which is perpendicular to the first conveyor line.

2. The robotic arm for switching the loading and unloading channels of the silicon wafer RCA cleaning equipment according to claim 1, characterized in that, The track plate is equipped with a horizontal slide rail; A horizontal slider is slidably mounted on the horizontal slide rail, on which a vertical slide rail is mounted; The connecting rod body engages with the vertical slide rail.

3. The robotic arm for switching the loading and unloading channels of the silicon wafer RCA cleaning equipment according to claim 2, characterized in that, The input end of the drive shaft is connected to a motor fixed on the frame.

4. The robotic arm for switching the loading and unloading channels of the silicon wafer RCA cleaning equipment according to claim 3, characterized in that, A limiting part is fixed on the connecting rod; The limiting part extends to both sides with limiting protrusions; A limiting screw is mounted on the track plate; When the slider is located within the first vertical channel and the limiting protrusion abuts against the limiting screw, it is in a limit state; or When the slider is located in the second vertical channel and the limiting protrusion abuts against the limiting screw, it is in the limit state.

5. The robotic arm for switching the loading and unloading channels of the silicon wafer RCA cleaning equipment according to claim 4, characterized in that, The limiting screw is connected to the track plate via a mounting base; The limit position of the slider can be adjusted by rotating the limit screw.

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