Spraying device and wire cutting machine

Abstract

The embodiment of the utility model provides a spraying device and a wire cutting machine, and belongs to the technical field of wire cutting. The spraying device is used for the wire cutting machine and comprises a spraying unit and an air supply pipeline, the spraying unit comprises a liquid supply pipeline and a spraying assembly, and the liquid supply pipeline communicates with the spraying assembly and is used for providing spraying liquid for the spraying assembly; the gas supply pipeline is communicated with the liquid supply pipeline, and the gas supply pipeline is located on the upstream of the spraying assembly in the liquid supply direction of the liquid supply pipeline and used for providing gas for the liquid supply pipeline. According to the spraying device, the phenomenon that the retracting torque of the main roller driving motor is too large can be effectively improved.

Description

Technical Field

[0001] This application relates to the field of wire cutting technology, and more specifically, to a spraying device and a wire cutting machine. Background Technology

[0002] Wire EDM is a machining method that uses a high-speed reciprocating cutting wire that moves relative to the workpiece being cut (such as photovoltaic silicon rods, semiconductors, silicon carbide, sapphire, magnetic materials, etc.) to cut the workpiece.

[0003] During the cutting process of a wire dicing machine, taking a silicon rod as an example, the dicing wire cuts through the workpiece to form multiple silicon wafers. The workpiece needs to be lifted to separate from the dicing wire; this process is called "tool retraction." During tool retraction, the silicon wafers come into contact with the dicing wire, and the resistance between the dicing wire and the silicon wafers causes excessive retraction torque from the drive motor.

[0004] Typically, during the retraction process, a spray mechanism is used to spray liquid onto the side gaps of the silicon wafer to reduce the tension between the wafers, thereby reducing the pressure of the wafers on the cutting lines and consequently lowering the output torque of the drive motor during retraction. However, relying on existing spray mechanisms to spray liquid onto the silicon wafers still presents problems such as insufficient spray pressure, excessive torque during retraction, and difficulty in retraction. Utility Model Content

[0005] This application provides a spraying device and a wire cutting machine. The spraying device can effectively improve the problem of excessive retraction torque of the main roller drive motor.

[0006] In a first aspect, embodiments of this application provide a spraying device for a wire cutting machine. The spraying device includes a spraying unit and a gas supply pipeline. The spraying unit includes a liquid supply pipeline and a spraying assembly. The liquid supply pipeline is connected to the spraying assembly and is used to supply spraying liquid to the spraying assembly. The gas supply pipeline is connected to the liquid supply pipeline. Along the liquid supply direction of the liquid supply pipeline, the gas supply pipeline is located upstream of the spraying assembly and is used to supply gas to the liquid supply pipeline.

[0007] In this solution, taking a silicon rod as the workpiece to be cut as an example, in the retraction stage after the silicon rod is cut into multiple silicon wafers, the spraying device includes a spraying unit and an air supply pipeline. The air supply pipeline blows compressed gas into the liquid supply pipeline upstream of the spraying assembly. After the air supply pipeline supplies gas to the liquid supply pipeline, the gas increases the pressure and flow rate of the liquid in the liquid supply pipeline. Especially when the pressure in the liquid supply pipeline is low, introducing compressed gas into the liquid supply pipeline increases the initial kinetic energy of the sprayed material from the spraying assembly. The sprayed material has higher kinetic energy and impact force, allowing it to penetrate deeper into the gaps between the silicon wafers. This helps reduce the adhesion between adjacent silicon wafers, reduces the resistance to the movement of the cutting line, and thus reduces the retraction output torque of the main roller drive motor. Simultaneously, the introduction of compressed air also saves factory water resources and reduces production costs. Furthermore, the air supply line blows compressed gas into the liquid supply line upstream of the spray assembly. Compared to the air supply line being connected to the spray assembly itself, the air supply line is not connected to the spray assembly. The installation of the air supply line will not increase the weight of the spray assembly itself. The air supply line is directly connected to the liquid supply line upstream of the spray assembly. The modification of the spray device is less difficult and the manufacturing cost is lower.

[0008] In some embodiments, the number of spraying components is two, and the two spraying components are located on opposite sides of the workpiece being cut; the liquid supply pipeline includes a main liquid line and at least two branch liquid lines, the main liquid line is connected to the return water system, one end of the multiple branch liquid lines is connected to the main liquid line, and the other end of the multiple branch liquid lines is connected to the two spraying components respectively; the air supply pipeline includes a main air line and at least two branch air lines, the main air line is connected to an air source, one end of the multiple branch air lines is connected to the main air line, and the other end of the multiple branch air lines is connected to the multiple branch liquid lines respectively through a three-way valve.

[0009] In the above technical solution, two spraying components are used, which can simultaneously spray spray liquid onto opposite sides of the silicon wafers, better maintaining the gap between the wafers. The return water system is connected to the main liquid circuit, providing recycled water to the main liquid circuit, thus saving water resources. By connecting the other ends of multiple branch air circuits to multiple branch liquid circuits through three-way valves, the gas from the branch air circuits enters the branch liquid circuits through the three-way valves, achieving water-gas mixing. Compared to introducing gas into the main liquid circuit, the pipe diameter of the branch liquid circuits is smaller, reducing the difficulty of connecting the branch air circuits and branch liquid circuits. The three-way valves are also smaller, resulting in lower modification costs.

[0010] In some embodiments, the three-way valve between the gas branch and the liquid branch is located outside or inside the cutting room.

[0011] In the above technical solution, the position of the three-way valve between the branch gas path and the branch liquid path can be selected according to the actual situation. The connection position between the branch gas path and the branch liquid path can be located inside the cutting room or outside the cutting room, which provides greater flexibility.

[0012] In some embodiments, a solenoid valve is provided in the main gas line, which is used to control the opening and closing of the main gas line.

[0013] In the above technical solution, a solenoid valve is installed on the main air line. The solenoid valve can control the opening and closing of the air supply line, ensuring that the compressed air supply in the air supply line is only provided during the retraction stage. On the one hand, this can save production costs, and on the other hand, it can avoid the phenomenon of cutting fluid being blown onto the cutting wire mesh by compressed air during the normal slicing stage, which would cause cutting abnormalities such as wire breakage and wire skipping.

[0014] In some embodiments, a speed control valve is provided on the main gas line; or, a speed control valve is provided on the branch gas line.

[0015] In the above technical solution, a speed regulating valve is installed in the main air circuit. This valve can adjust the compressed air pressure in the main air circuit according to actual conditions, ensuring that the air pressure at the tool retraction spray meets the usage requirements. Alternatively, a speed regulating valve can be installed in the branch air circuit, which can also adjust the compressed air pressure in the branch air circuit according to actual conditions, ensuring that the air pressure at the tool retraction spray meets the usage requirements.

[0016] In some embodiments, a check valve is provided on the main gas line; or, a check valve is provided on the branch gas line.

[0017] In the above technical solution, by installing a one-way valve on the main gas line, the one-way valve can prevent backflow caused by excessive pressure after water and gas mix on the branch liquid line. Alternatively, by installing a one-way valve on the branch gas line, the same can be prevented from causing backflow caused by excessive pressure after water and gas mix on the branch liquid line.

[0018] In some embodiments, along the airflow direction of the main air path, a solenoid valve and a speed control valve are sequentially arranged on the main air path, and a one-way valve is arranged on the branch air path.

[0019] In the above technical solution, a solenoid valve and a speed control valve are installed in the main air circuit. The solenoid valve controls the flow of compressed air in the main air circuit, and when the solenoid valve is open, the speed control valve controls the air pressure of the compressed air in the main air circuit, ensuring that the spray pressure of the spray assembly meets the usage requirements. A one-way valve is installed in the branch air circuit to prevent backflow of compressed air after it enters the branch circuit.

[0020] In some embodiments, an air filter and a pressure reducing valve are provided between the air source and the main air path.

[0021] In the above technical solution, an air filter is installed between the air source and the main air path. The air filter can filter out dust and impurities in the gas, preventing dust and impurities from affecting the quality of the silicon wafers in the gas sprayed by the spray assembly. The pressure reducing valve can reduce the pressure of the air supplied by the air source to the preset compressed air pressure requirement.

[0022] In some embodiments, the spraying assembly includes a spray pipe and a plurality of nozzles. The spray pipe is connected to a liquid supply line, and the plurality of nozzles are spaced apart along the length of the spray pipe. The nozzles are connected to the interior of the spray pipe and are oriented toward the workpiece being cut.

[0023] In the above technical solution, the spray pipe is equipped with multiple nozzles. During the retraction process, compressed air enters the liquid supply pipe through the air supply pipe and then enters the spray pipe, from which it is sprayed out from multiple nozzles. The gas, liquid, or gas-liquid mixture sprayed from the multiple nozzles can enter the gap of the workpiece being cut, which is beneficial to the retraction process.

[0024] Secondly, this application also provides a wire EDM machine, which includes a frame, a cutting unit, and a spraying device as described in any of the foregoing embodiments. The cutting unit and the spraying device are disposed on the frame. The cutting unit is used to cut the workpiece, and the spraying device is disposed toward the workpiece.

[0025] In some embodiments, the wire cutting machine is a slicing machine.

[0026] Other features and advantages of the present application will be described in detail in the subsequent detailed description. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of a spray device provided in some embodiments of this application, used to cut off outdoor water and air mixing.

[0029] Figure 2 This is a schematic diagram of the structure of the spray device provided in some embodiments of this application, showing the mixing of water and air in the cutting chamber;

[0030] Figure 3 This is a schematic diagram of the structure of the spraying component in the spraying device provided in some embodiments of this application.

[0031] Icons: 100-Spraying device; 10-Spraying unit; 11-Liquid supply line; 111-Main liquid line; 112-Branch liquid line; 12-Spraying assembly; 121-Spray pipe; 122-Nozzle; 20-Air supply line; 21-Main air line; 22-Branch air line; 23-Three-way valve; 24-Solenoid valve; 25-Speed ​​control valve; 26-Check valve; 30-Air source; 31-Air filter; 32-Pressure reducing valve; 200-Workpiece to be cut; 201-Silicon wafer. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0035] In the description of the embodiments of this application, it should be noted that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this application is usually placed during use. It is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on this application. In addition, the terms "first," "second," "third," etc. are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0036] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up" and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] In related technologies, after the silicon rod is cut, the cutting line needs to be separated from the silicon wafer, which requires a tool retraction process. In this retraction process, a spray assembly is constructed using spray pipes and nozzles. The spray assembly sprays liquid towards the side gaps of the silicon wafer through the nozzles, reducing the tension between the silicon wafers and thus reducing the pressure of the silicon wafer on the cutting line. This can reduce the output torque of the drive motor during tool retraction. However, relying solely on existing spray pipes to provide liquid and using nozzles to spray liquid onto the workpiece not only wastes water resources but also still results in excessive drive motor torque and difficulty in tool retraction during the process.

[0038] This application provides a spraying device for use in wire cutting machines. Please refer to [link / reference needed]. Figures 1 to 3 The spraying device 100 includes a spraying unit 10 and an air supply line 20. The spraying unit 10 includes a liquid supply line 11 and a spraying assembly 12. The liquid supply line 11 is connected to the spraying assembly 12 and is used to supply spraying liquid to the spraying assembly 12. The air supply line 20 is connected to the liquid supply line 11 and is located upstream of the spraying assembly 12 along the liquid supply direction of the liquid supply line 11. The air supply line 20 is used to supply gas to the liquid supply line 11.

[0039] In this scheme, taking the workpiece 200 to be cut as a silicon rod as an example, in the retraction stage after the silicon rod is cut into multiple silicon wafers 201, the spray device 100 includes a spray unit 10 and an air supply pipeline 20. The air supply pipeline 20 blows compressed gas into the liquid supply pipeline 11 upstream of the spray assembly 12. After the air supply pipeline 20 supplies gas to the liquid supply pipeline 11, the gas can increase the pressure and flow rate of the liquid in the liquid supply pipeline 11. Especially when the pressure in the liquid supply pipeline 11 is low, introducing compressed gas into the liquid supply pipeline 11 can increase the initial kinetic energy of the sprayed material from the spray assembly 12. The sprayed material has higher kinetic energy and impact force, which can better penetrate into the gaps of the silicon wafers 201, which helps to reduce the adhesion between adjacent silicon wafers 201, reduce the resistance of the cutting line movement, and thus reduce the retraction output torque of the main roller drive motor. At the same time, the introduction of compressed air can also save factory water and reduce production costs. Furthermore, compressed gas is blown into the liquid supply line 11 upstream of the spray assembly 12 by the air supply line 20. Compared to the air supply line 20 being connected to the spray assembly 12 itself, the air supply line 20 is not connected to the spray assembly 12. The setting of the air supply line 20 will not increase the weight of the spray assembly 12 itself. The air supply line 20 is directly connected to the liquid supply line 11 upstream of the spray assembly 12. The modification of the spray device 100 is less difficult and the manufacturing cost is lower.

[0040] It should be noted that after gas is blown into the liquid supply line 11 from the gas supply line 20, the gas and liquid may encounter each other, which may result in uneven gas content in the water. Therefore, the gas does not mix with the water, and the spray from the spray assembly 12 may be gas, liquid, or a gas-liquid mixture. Compressed air drives the recycled water to be sprayed from the spray assembly 12, forming a solid cone-shaped water-gas mixture, which makes the recycled water droplets finer and improves the spraying effect.

[0041] In some embodiments, as Figure 1 and Figure 2 As shown, there are two spraying components 12, which are located on opposite sides of the workpiece being cut. The liquid supply pipeline 11 includes a main liquid line 111 and at least two branch liquid lines 112. The main liquid line 111 is connected to the return water system. One end of each branch liquid line 112 is connected to the main liquid line 111, and the other end of each branch liquid line 112 is connected to the two spraying components 12. The air supply pipeline 20 includes a main air line 21 and at least two branch air lines 22. The main air line 21 is connected to the air source 30. One end of each branch air line 22 is connected to the main air line 21, and the other end of each branch air line 22 is connected to the branch liquid lines 112 via a three-way valve 23.

[0042] Two spray components 12 are set, allowing them to simultaneously spray spray liquid onto opposite sides of the silicon wafer 201, better maintaining the gap between the silicon wafers 201. The return water system is connected to the main liquid path 111, providing recycled water to the main liquid path 111, thus saving water resources. By connecting the other ends of multiple branch air paths 22 to multiple branch liquid paths 112 via three-way valves 23, the compressed air from the branch air paths 22 enters the branch liquid paths 112 through the three-way valves 23, achieving water-air mixing. Compared to introducing gas into the main liquid path 111, the pipe diameter of the branch liquid path 112 is smaller, reducing the difficulty of connecting the branch air paths 22 and the branch liquid path 112. The three-way valves 23 are also smaller, resulting in lower modification costs.

[0043] The number of branch liquid passages 112 can be two, three, or four, and the specific number of branch liquid passages 112 can be determined according to the actual situation. The number of branch gas passages 22 is set in correspondence with the number of branch liquid passages 112.

[0044] In this embodiment, there are two branch liquid passages 112. One end of each branch liquid passage 112 is connected to the main liquid passage 111, and the other end of each branch liquid passage 112 is connected to the two spray components 12 respectively. Correspondingly, there are two branch air passages 22. One end of each branch air passage 22 is connected to the main air passage 21, and the other end of each branch air passage 22 is connected to the two branch liquid passages 112 respectively through a three-way valve 23.

[0045] In some embodiments, please combine Figure 1 and Figure 2 The three-way valve 23 between the gas branch line 22 and the liquid branch line 112 is located outside or inside the cutting room. The position of the three-way valve 23 between the gas branch line 22 and the liquid branch line 112 can be selected according to the actual situation. The connection position between the gas branch line 22 and the liquid branch line 112 can be located inside or outside the cutting room, providing greater flexibility.

[0046] The three-way valve 23 refers to a valve device with three ports: one inlet and two outlets (left inlet, right outlet, and bottom outlet). The function of the three-way valve 23 is to allow the gas branch 22 to be introduced into the liquid branch 112, thereby enabling the introduction of compressed gas.

[0047] The cutting chamber refers to the cutting work area that performs the cutting function on the silicon rod. The cutting chamber is equipped with a cutting unit, which includes a cutting wheel and a cutting wire. The cutting wire is wound on the cutting wheel and performs the wire cutting function on the silicon rod. The branch liquid path 112 of the liquid supply pipeline 11 is connected to the spray assembly 12.

[0048] Please refer to Figure 1 The three-way valve 23 between branch gas path 22 and branch liquid path 112 is located outside the cutting room. This means that the three-way valve 23 is a portion of the branch liquid path 112 located outside the cutting room, and the connection point between branch gas path 22 and branch liquid path 112 is located outside the cutting room. Please refer to... Figure 2 The three-way valve 23 between the branch gas path 22 and the branch liquid path 112 is located in the cutting chamber. This means that the three-way valve 23 is set on the branch liquid path 112 and is located in part of the cutting chamber. The connection point between the branch gas path 22 and the branch liquid path 112 is located in the cutting chamber, but the three-way valve 23 is set on the branch liquid path 112. The three-way valve 23 is not connected to the spray assembly 12 itself, and will not increase the weight of the spray assembly 12, nor will it modify the spray assembly 12.

[0049] In some embodiments, a solenoid valve 24 is provided on the main air passage 21, which is used to control the opening and closing of the main air passage 21. By providing a solenoid valve 24 on the main air passage 21, the solenoid valve 24 can control the opening and closing of the air supply line 20, ensuring that the compressed air supply in the air supply line 20 is only provided during the retraction stage. On the one hand, this can save production costs, and on the other hand, it can avoid the phenomenon of cutting fluid being blown onto the cutting wire mesh by compressed air during the normal slicing stage, which would cause cutting abnormalities such as wire breakage and skipping.

[0050] A solenoid valve (24) is an electromagnetically controlled industrial device, a fundamental component of automation systems used to control fluids. It is an actuator, not limited to hydraulic or pneumatic systems. It is used in industrial control systems to adjust the direction, flow rate, speed, and other parameters of the medium. The solenoid valve (24) can be used with different circuits to achieve the desired control, ensuring both precision and flexibility.

[0051] In some embodiments, a speed regulating valve 25 is provided on the main air passage 21; or, a speed regulating valve 25 is provided on the branch air passage 22. By providing a speed regulating valve 25 on the main air passage 21, the speed regulating valve 25 can adjust the air pressure of the compressed air in the main air passage 21 according to the actual situation, so that the air pressure at the tool retraction spray meets the usage requirements. Alternatively, by providing a speed regulating valve 25 on the branch air passage 22, the air pressure of the compressed air in the branch air passage 22 can also be adjusted according to the actual situation, so that the air pressure at the tool retraction spray meets the usage requirements.

[0052] The speed control valve 25 can be set on the main air passage 21 to synchronously regulate the compressed air pressure of the two branch air passages 22 in the air supply line 20. Of course, the speed control valve 25 can also be set on the branch air passages 22, with each branch air passage 22 having a corresponding speed control valve 25, which can respectively regulate the compressed air pressure of the corresponding branch air passage 22.

[0053] When a solenoid valve 24 is installed on the main air passage 21, the speed control valve 25 is installed downstream of the solenoid valve 24 on the air supply line 20. That is, the speed control valve 25 can be installed on the downstream side of the solenoid valve 24 on the main air passage 21, or it can be installed on the branch air passage 22.

[0054] In some embodiments, a one-way valve 26 is provided on the main gas passage 21; or, a one-way valve 26 is provided on the branch gas passage 22. By providing a one-way valve 26 on the main gas passage 21, the one-way valve 26 can prevent backflow caused by excessive pressure after water and air mix in the branch liquid passage 112; similarly, by providing a one-way valve 26 on the branch gas passage 22, the same problem of backflow caused by excessive pressure after water and air mix in the branch liquid passage 112 can be prevented.

[0055] A one-way valve 26 allows fluid to flow only through the inlet, but prevents backflow of the medium through the outlet; it is commonly known as a check valve. A one-way valve is also called a non-return valve or check valve. It is used in hydraulic systems to prevent oil from flowing in the opposite direction, or in pneumatic systems to prevent compressed air from flowing in the opposite direction.

[0056] The location of the one-way valve 26 can be determined according to the actual situation. The one-way valve 26 can be set on the main air line 21 or the branch air line 22. If the main air line 21 or the branch air line 22 is equipped with a speed control valve 25, the one-way valve 26 can be set on the downstream side of the speed control valve 25 on the air supply line 20.

[0057] In some embodiments, please refer to Figure 1 and Figure 2Along the airflow direction of the main air passage 21, a solenoid valve 24 and a speed control valve 25 are sequentially installed on the main air passage 21, and a one-way valve 26 is installed on the branch air passage 22. By installing the solenoid valve 24 and the speed control valve 25 on the main air passage 21, the solenoid valve 24 can control the on / off state of the compressed air in the main air passage 21. When the solenoid valve 24 is open, the speed control valve 25 can control the air pressure of the compressed air in the main air passage 21, ensuring that the retraction spray pressure of the spray assembly 12 meets the usage requirements. The one-way valve 26 installed on the branch air passage 22 prevents backflow of compressed air after it enters the branch liquid passage 112.

[0058] In some embodiments, an air filter 31 and a pressure reducing valve 32 are provided between the air source 30 and the main air passage 21. The air filter 31 filters dust and impurities in the gas, preventing dust and impurities from affecting the quality of the silicon wafer 201 in the gas sprayed by the spray assembly 12. The pressure reducing valve 32 reduces the pressure of the air supplied by the air source 30 to a preset compressed air pressure requirement.

[0059] Air filter 31 is a device that uses porous filter material to capture dust from a gas-solid two-phase flow and purify the gas. Pressure reducing valve 32 is a valve that reduces the inlet pressure to a desired outlet pressure by adjustment and automatically maintains a stable outlet pressure by relying on the energy of the medium itself.

[0060] In some embodiments, the spray assembly 12 includes a spray pipe 121 and a plurality of nozzles 122. The spray pipe 121 is connected to the liquid supply line 11, and the plurality of nozzles 122 are spaced apart along the length of the spray pipe 121. The nozzles 122 are connected to the interior of the spray pipe 121 and are oriented toward the workpiece 200 being cut. With the plurality of nozzles 122 on the spray pipe 121, during the retraction phase, compressed air enters the liquid supply line 11 through the air supply line 20, then enters the spray pipe 121 and is ejected from the plurality of nozzles 122. The gas, liquid, or gas-liquid mixture ejected from the plurality of nozzles 122 can enter the gaps in the workpiece 200 being cut, facilitating the retraction phase.

[0061] This application also provides a wire cutting machine, which includes a frame, a cutting unit, and a spraying device 100 of any of the foregoing embodiments. The cutting unit and the spraying device 100 are disposed on the frame. The cutting unit is used to cut the workpiece 200, and the spraying device 100 is disposed toward the workpiece 200.

[0062] In some embodiments, the wire cutting machine is a slicing machine. The workpiece 200 to be cut can be a photovoltaic silicon rod, semiconductor, silicon carbide, sapphire, or magnetic material, etc. Taking a silicon rod as an example, the workpiece 200 to be cut is a silicon rod.

[0063] The cutting unit includes a drive motor, multiple cutting wheels, and a cutting wire wound around the cutting wheels. The multiple cutting wheels are rotatably mounted on a frame. The main roller drive motor drives at least one cutting wheel to rotate, thereby moving the cutting wire. The cutting unit drives the cutting wire to move at high speed via the main roller drive motor, and the cutting wire performs wire cutting on the workpiece 200. The cutting wire can be diamond wire. Under the cutting action of the cutting wire, the silicon rod is cut into multiple silicon wafers 201. After the cutting wire completes the cutting of the silicon rod, it is positioned between two adjacent silicon wafers 201. A spray device 100 sprays gas, liquid, or a gas-liquid mixture between the silicon wafers 201, reducing the resistance to the movement of the cutting wire and thus reducing the retraction output torque of the main roller drive motor.

[0064] It should be noted that, unless there is any conflict, the features in the embodiments of this application can be combined with each other.

[0065] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A spraying device for a wire cutting machine, characterized in that, include: A spray unit includes a liquid supply pipeline and a spray assembly, wherein the liquid supply pipeline is connected to the spray assembly and is used to supply spray liquid to the spray assembly; An air supply line is connected to the liquid supply line and runs along the liquid supply direction of the liquid supply line. The air supply line is located upstream of the spray assembly and is used to supply gas to the liquid supply line. The number of spraying assemblies is two, and the two spraying assemblies are located on opposite sides of the workpiece being cut. The liquid supply pipeline includes a main liquid line and at least two branch liquid lines. The main liquid line is connected to the return water system. One end of each of the branch liquid lines is connected to the main liquid line, and the other end of each of the branch liquid lines is connected to two of the spray components. The gas supply pipeline includes a main gas line and at least two branch gas lines. The main gas line is connected to a gas source. One end of each of the branch gas lines is connected to the main gas line, and the other end of each branch gas line is connected to the branch gas line via a three-way valve.

2. The spraying device according to claim 1, characterized in that, The three-way valve between the gas branch and the liquid branch is located outside or inside the cutting room.

3. The spraying device according to claim 1, characterized in that, A solenoid valve is installed on the main gas line, and the solenoid valve is used to control the opening and closing of the main gas line.

4. The spraying device according to claim 1, characterized in that, A speed control valve is provided on the main gas line; or, a speed control valve is provided on the branch gas line.

5. The spraying device according to claim 1, characterized in that, A one-way valve is installed on the main gas line; or, a one-way valve is installed on the branch gas line.

6. The spraying device according to claim 1, characterized in that, Along the airflow direction of the main air path, a solenoid valve and a speed control valve are sequentially arranged on the main air path, and a one-way valve is arranged on the branch air path.

7. The spraying device according to claim 1, characterized in that, An air filter and a pressure reducing valve are installed between the air source and the main air circuit.

8. The spraying device according to claim 1, characterized in that, The spray assembly includes a spray pipe and multiple nozzles. The spray pipe is connected to the liquid supply pipeline. The multiple nozzles are spaced apart along the length of the spray pipe. The nozzles are connected to the interior of the spray pipe and are oriented toward the workpiece being cut.

9. A wire cutting machine, characterized in that, The device includes a frame, a cutting unit, and a spraying device according to any one of claims 1-8, wherein the cutting unit and the spraying device are disposed on the frame, the cutting unit is used to cut the workpiece, and the spraying device is disposed facing the workpiece.

10. The wire cutting machine according to claim 9, characterized in that, The wire cutting machine is a slicing machine.

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