Photomask box opening device

Abstract

The utility model discloses a photomask box opening device. The photomask box opening device comprises a main body part, a fixing mechanism and a jacking mechanism, wherein the main body part is used for placing a photomask box, the photomask box comprises a box body and a side cover plate arranged on one side of the box body, one end of the side cover plate is provided with a protruding part protruding out of the box body, and the fixing mechanism is connected to the main body part and used for fixing the box body of the photomask box placed on the main body part. The ejection mechanism is connected to the main body part, and the ejection mechanism is used for abutting against the protruding part on the side cover plate and pushing the protruding part in the direction away from the box body so as to eject the side cover plate from the box body. The side cover plate on the photomask box can be automatically opened, manual operation is not needed, use is more convenient, and labor cost can be reduced.

Description

Technical Field

[0001] This utility model relates to a photomask box opening device. Background Technology

[0002] Currently, a photomask box is a component used to store photomasks. During the production process, the photomask box needs to be opened and the photomasks taken out. Some companies still use manual methods to open the photomask box and manually take out and put out the photomasks. This not only increases labor costs, but also causes problems such as photomasks falling, breaking, and contamination due to human factors such as operational errors, resulting in unnecessary economic losses. Therefore, the industry trend is to use robotic arms to automatically take out the photomasks from the photomask box.

[0003] Some photomask cases, such as the Nikon Reticle Case, have side covers. To open these cases, the side covers must first be opened. Therefore, when using a robotic arm to automatically remove the photomask from the case, an additional opening device capable of automatically opening the side covers is necessary. Chinese Patent CN202601591U discloses a photomask storage case opener; however, this opener cannot open the side covers of the photomask case, and it requires manual operation, which is inconvenient and increases labor costs. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the defects of the prior art and provide a photomask box opening device that can automatically open the side cover of the photomask box without manual operation, making it more convenient to use and reducing labor costs.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is: a photomask box opening device, comprising:

[0006] The main component is used to place a photomask box. The photomask box includes a box body and a side cover plate provided on one side of the box body. One end of the side cover plate has a protrusion that protrudes from the box body.

[0007] A fixing mechanism is connected to the main body component and is used to fix the housing of the photomask box placed on the main body component;

[0008] A push-opening mechanism is connected to the main body component. The push-opening mechanism is used to abut against the protrusion on the side cover and push the protrusion away from the box body, thereby pushing the side cover open from the box body.

[0009] Further, a specific structure of the fixing mechanism is provided, the fixing mechanism including at least one vacuum suction cup connected to the main body component and used to adsorb and fix the box body of the photomask placed on the main body component.

[0010] Furthermore, the main body component has an inner cavity, and the main body component also has a supporting flat surface for placing the photomask box;

[0011] The bearing plane is provided with an adsorption hole that communicates with the inner cavity;

[0012] The vacuum suction cup is installed in the inner cavity and extends into the corresponding suction hole. The vacuum suction cup is used to suction the bottom surface of the box placed on the bearing plane from the corresponding suction hole.

[0013] Further, a specific structure of the opening mechanism is provided, the opening mechanism including a top plate and a moving drive mechanism;

[0014] The top plate is connected to the moving drive mechanism and is used to abut against the protrusion on the side cover when the photomask is placed on the main body component;

[0015] The moving drive mechanism is connected to the main body component and is used to drive the top plate to move so that the top plate pushes the protrusion away from the box body, thereby pushing the side cover plate off the box body.

[0016] Furthermore, the main body component has an inner cavity, and the main body component also has a supporting flat surface for placing the photomask box;

[0017] The bearing plane is provided with a through groove that communicates with the inner cavity;

[0018] The moving drive mechanism is located in the inner cavity;

[0019] The top plate is connected to the moving drive mechanism and extends from the through slot to the outside of the main body component.

[0020] Further, a specific structure of the aforementioned mobile drive mechanism is provided, the mobile drive mechanism including a motor, a transmission lead screw, a transmission nut, and a slider;

[0021] The transmission lead screw is rotatably connected to the main body component;

[0022] The slider is slidably connected to the main body component, and the top plate is connected to the slider;

[0023] The transmission nut is connected to the slider and is connected in conjunction with the transmission screw.

[0024] The motor is connected to the main body component and to the transmission screw, and is used to drive the transmission screw to rotate.

[0025] Furthermore, the photomask box opening device also includes a positioning mechanism connected to the main body component and used to position the photomask box body placed on the main body component.

[0026] Further, a specific structure of the positioning mechanism is provided, the positioning mechanism including at least one positioning block connected to the main body component and used to abut against the side of the housing of the photomask placed on the main body component.

[0027] Furthermore, at least one in-situ sensor is connected to the main body component, which is used to detect the photomask box and generate a signal when the photomask box is placed on the main body component.

[0028] Furthermore, a detection sensor is also connected to the main body component. The detection sensor is triggered by the side cover plate to generate a signal when the side cover plate is pushed open into place.

[0029] After adopting the above technical solution, when the photomask box is transported and placed on the main body component, the fixing mechanism first fixes the box body of the photomask box placed on the main body component to prevent the box body from shifting; then the opening mechanism actuates and abuts against the protrusion on the side cover plate, and pushes the protrusion in the direction away from the box body to open the side cover plate from the box body, realizing automatic opening of the side cover plate on the photomask box without manual assistance, reducing labor costs and making it more convenient to use.

[0030] Furthermore, the photomask box includes a box body, side covers, and a top cover. The rear part of the top cover is connected to the box body, and the upper part of the side covers is connected to the front part of the top cover. The top cover covers the upper end of the box body, and the side covers cover the front end of the box body. When the photomask box opening device of this embodiment works in conjunction with a robotic arm, the robotic arm first transports the photomask box onto the main component. Then, the fixing mechanism fixes the box body, and the opening mechanism pushes the side covers off the box body. The robotic arm then picks up the top cover and lifts it up along with the side covers. The robotic arm can then automatically remove the photomask from the box. The entire process requires no manual intervention, avoiding manual opening and manual removal of the photomask, thus preventing the photomask from falling, breaking, or becoming contaminated due to manual handling, avoiding economic losses, and improving work efficiency. Attached Figure Description

[0031] Figure 1This is a schematic diagram of the structure of the photomask box opening device of this utility model;

[0032] Figure 2 This is a schematic diagram of the opening mechanism of this utility model;

[0033] Figure 3 This is a schematic diagram of the structure of the photomask box opening device of this utility model when the side cover of the photomask box is not opened;

[0034] Figure 4 This is a schematic diagram of the structure of the photomask box opening device of this utility model when the side cover of the photomask box is opened. Detailed Implementation

[0035] To make the contents of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0036] like Figures 1 to 4 As shown, a photomask box opening device includes:

[0037] The main component 1 is used to place the photomask box 2. The photomask box 2 includes a box body 3 and a side cover plate 4 provided on one side of the box body 3. One end of the side cover plate 4 has a protrusion 5 that protrudes from the box body 3.

[0038] A fixing mechanism 100 is connected to the main body component 1 and is used to fix the box body 3 of the photomask box 2 placed on the main body component 1;

[0039] A push-opening mechanism 200 is connected to the main body component 1. The push-opening mechanism 200 is used to abut against the protrusion 5 on the side cover plate 4 and push the protrusion 5 away from the box body 3, thereby pushing the side cover plate 4 off the box body 3.

[0040] Specifically, after the photomask box 2 is transported and placed on the main body component 1, the fixing mechanism 100 first fixes the box body 3 of the photomask box 2 placed on the main body component 1, thereby preventing the box body 3 from shifting; then the opening mechanism 200 actuates and abuts against the protrusion 5 on the side cover plate 4, thereby pushing the protrusion 5 away from the box body 3 and opening the side cover plate 4 from the box body 3, realizing automatic opening of the side cover plate 4 on the photomask box 2 without manual assistance, reducing labor costs and making it more convenient to use.

[0041] More specifically, the photomask box 2 includes the box body 3, the side cover plate 4, and the top cover plate 13. The rear part of the top cover plate 13 is connected to the box body 3, and the upper part of the side cover plate 4 is connected to the front part of the top cover plate 13. The top cover plate 13 is used to cover the upper end of the box body 3, and the side cover plate 4 is used to cover the front end of the box body 3. When the photomask box opening device of this embodiment works in conjunction with the robotic arm, the robotic arm can first transport and place the photomask box 2 on the main body component 1. Then, the fixing mechanism 100 fixes the box body 3 of the photomask box 2, and then the opening mechanism 200 pushes the side cover plate 4 off the box body 3. Then, the robotic arm can grasp the top cover plate 13 and lift it up together with the side cover plate 4. The robotic arm can then automatically remove the photomask from the photomask box 2. The entire process requires no manual intervention, avoiding manual opening of the box and manual handling of the photomask. This prevents the photomask from falling, breaking, or becoming contaminated due to manual handling, thus avoiding economic losses and improving work efficiency. In this embodiment, the photomask box 2 can be a Nikon Reticle Case photomask box 2.

[0042] like Figure 1 As shown, the fixing mechanism 100 may include at least one vacuum suction cup 6 connected to the main body component 1 and used to adsorb and fix the box body 3 of the photomask box 2 placed on the main body component 1; wherein, the specific structure of the vacuum suction cup 6 is prior art well known to those skilled in the art, and will not be described in detail in this embodiment.

[0043] like Figure 1 , 3 As shown in Figures 1 and 4, the main body component 1 has an inner cavity, and the main body component 1 also has a bearing plane 7 for placing the photomask box 2;

[0044] The bearing plane 7 is provided with an adsorption hole 8 that communicates with the inner cavity;

[0045] The vacuum suction cup 6 is installed in the inner cavity and extends into the corresponding suction hole 8. The vacuum suction cup 6 is used to suction the bottom surface of the box 3 placed on the bearing plane part 7 from the corresponding suction hole 8.

[0046] like Figures 1 to 4 As shown, the top opening mechanism 200 may include a top plate 9 and a moving drive mechanism;

[0047] The top plate 9 is connected to the moving drive mechanism and is used to abut against the protrusion 5 on the side cover plate 4 when the photomask 2 is placed on the main body component 1;

[0048] The moving drive mechanism is connected to the main body component 1 and is used to drive the top plate 9 to move so that the top plate 9 pushes the protrusion 5 away from the box body 3, thereby pushing the side cover plate 4 off the box body 3.

[0049] like Figures 1 to 4 As shown, the bearing plane 7 is provided with a through groove 10 that communicates with the inner cavity;

[0050] The moving drive mechanism is disposed in the inner cavity;

[0051] The top plate 9 is connected to the moving drive mechanism and extends from the through groove 10 to the outside of the main body component 1; specifically, the part of the top plate 9 that extends outward is used to abut against the protrusion 5 on the side cover plate 4.

[0052] like Figures 1 to 4 As shown, the moving drive mechanism includes, but is not limited to, the following structure: a motor 11, a lead screw 12, a drive nut, and a slider 14.

[0053] The transmission screw 12 is rotatably connected to the main body component 1;

[0054] The slider 14 is slidably connected to the main body component 1, and the top plate 9 is connected to the slider 14 and extends outward from the through groove 10;

[0055] The transmission nut is connected to the slider 14 and is connected in conjunction with the transmission screw 12;

[0056] The motor 11 is connected to the main body component 1 and connected to the transmission screw 12, and is used to drive the transmission screw 12 to rotate, thereby driving the transmission nut and the slider 14 to move, and thereby driving the top plate 9 to move; in this embodiment, the motor 11, the transmission screw 12, and the slider 14 are all located in the inner cavity.

[0057] In this embodiment, a first limit sensor 15 and a second limit sensor 16 are connected to the main body component 1, and a sensing plate 17 is connected to the slider 14. The first limit sensor 15 is used to detect the sensing plate 17 and send a signal when the slider 14 drives the top plate 9 to move forward to its limit position. The second limit sensor 16 is used to detect the sensing plate 17 and send a signal when the slider 14 drives the top plate 9 to move backward to its limit position. Specifically, the signals emitted by the first limit sensor 15 and the second limit sensor 16 are received by the host computer. When the host computer receives the signal emitted by the first limit sensor 15 or the signal emitted by the second limit sensor 16, it controls the motor 11 to stop rotating. In this embodiment, the first limit sensor 15, the second limit sensor 16, and the sensing plate 17 are all located in the inner cavity. The first limit sensor 15 and the second limit sensor 16 are both U-shaped photoelectric switches.

[0058] like Figure 1 , 3 As shown in Figure 4, the photomask box opening device may further include a positioning mechanism connected to the main body component 1 and used to position the box body 3 of the photomask box 2 placed on the main body component 1; specifically, the positioning mechanism can accurately position the box body 3 of the photomask box 2 so that the top plate 9 can be accurately aligned with the protrusion 5 on the side cover plate 4.

[0059] like Figure 1 , 3 As shown in Figure 4, the positioning mechanism includes at least one positioning block 18 connected to the main body component 1 and used to abut against the side of the housing 3 of the photomask box 2 placed on the main body component 1; in this embodiment, the positioning block 18 is connected to the bearing plane portion 7, and there are 3 positioning blocks 18. The first positioning block 18 is used to abut against the rear side of the housing 3, the second positioning block 18 is used to abut against the left side of the housing 3, and the third positioning block 18 is used to abut against the right side of the housing 3. The side cover plate 4 is located on the front side of the housing 3.

[0060] like Figure 1As shown, at least one in-situ sensor 19 is also connected to the main body component 1. The in-situ sensor 19 is used to detect the photomask 2 when it is placed on the main body component 1 and generate a signal. Specifically, the bearing plane 7 is provided with a detection hole communicating with the inner cavity. The in-situ sensor 19 is installed in the inner cavity, and the in-situ sensor 19 detects the photomask 2 placed on the bearing plane 7 from the corresponding detection hole. In this embodiment, the in-situ sensor 19 can be a plunger-type limit switch, a part of which extends from the corresponding detection hole. When the photomask 2 is placed on the bearing plane 7, the plunger-type limit switch is triggered. Of course, in some embodiments, the in-situ sensor 19 can also be a proximity switch aligned with the corresponding detection hole. When the photomask 2 is placed on the bearing plane 7, it is detected by the proximity switch.

[0061] like Figure 1 , 3 As shown in Figure 4, a detection sensor 20 is also connected to the main body component 1. The detection sensor 20 is used to generate a signal when the side cover plate 4 is pushed open into place. Specifically, the detection sensor 20 is connected to the main body component 1 through a bracket. The detection sensor 20 can be a micro switch, which will be triggered when the side cover plate 4 is pushed open into place.

[0062] More specifically, when the photomask box opening device of this application embodiment works in conjunction with the robotic arm, the robotic arm first transports the photomask box 2 onto the bearing plane 7 on the main body component 1, and the positioning mechanism positions the photomask box 2. After the photomask box 2 is placed in place, the in-situ sensor 19 detects the photomask box 2 and generates a signal to the host computer. Under the control of the host computer, the vacuum suction cup 6 in the fixing mechanism 100 suctions the bottom surface of the box body 3, thereby fixing the photomask box 2. Then, under the control of the host computer, the motor 11 rotates and drives the transmission screw 12 to rotate, thereby driving the slider 14 and the top plate 9 to move, so that the top plate 9 abuts against the protrusion 5 on the side cover plate 4 and pushes the protrusion 5 away from the box body 3 to push the side cover plate 4 open from the box body 3. When the side cover plate 4 is pushed open to the correct position, the detection sensor 20 is triggered. The detection sensor 20 generates a signal and sends it to the host computer. Under the control of the host computer, the robotic arm picks up the top cover plate 13 and lifts it up together with the side cover plate 4. Then, the robotic arm can automatically remove the photomask from the photomask box 2, avoiding manual opening and closing and manual removal and placement of the photomask. This avoids situations such as the photomask falling, breaking, or becoming contaminated due to manual handling, thus avoiding economic losses and improving work efficiency.

[0063] In summary, after the photomask box 2 is transported and placed on the main body component 1, the fixing mechanism 100 first fixes the box body 3 of the photomask box 2 placed on the main body component 1, thereby preventing the box body 3 from shifting; then the opening mechanism 200 actuates and abuts against the protrusion 5 on the side cover plate 4, thereby pushing the protrusion 5 away from the box body 3 and opening the side cover plate 4 from the box body 3, realizing automatic opening of the side cover plate 4 on the photomask box 2 without manual assistance, reducing labor costs and making it more convenient to use.

[0064] Furthermore, the photomask box 2 includes the box body 3, the side cover plate 4, and the top cover plate 13. The rear part of the top cover plate 13 is connected to the box body 3, and the upper part of the side cover plate 4 is connected to the front part of the top cover plate 13. The top cover plate 13 is used to cover the upper end of the box body 3, and the side cover plate 4 is used to cover the front end of the box body 3. When the photomask box opening device of this embodiment works in conjunction with the robotic arm, the robotic arm can first transport and place the photomask box 2 on the main body component 1. Then, the fixing mechanism 100 fixes the box body 3 of the photomask box 2, and then the opening mechanism 200 opens the side cover plate 4 from the box body 3. Then the robotic arm can suck up the top cover plate 13 and lift the top cover plate 13 together with the side cover plate 4 upwards. Then the robotic arm can automatically take out the photomask 2. The whole process does not require human intervention, avoiding manual opening of the box and manual handling of the photomask. This avoids situations such as the photomask falling, breaking, and contaminating due to human handling, thus avoiding economic losses and improving work efficiency.

[0065] The specific embodiments described above further illustrate the technical problems, technical solutions, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A photomask box opening device, characterized in that, include: The main component (1) is used to place the photomask box (2). The photomask box (2) includes a box body (3) and a side cover plate (4) provided on one side of the box body (3). One end of the side cover plate (4) has a protrusion (5) protruding from the box body (3). A fixing mechanism (100) is connected to the main body component (1) and is used to fix the box body (3) of the photomask box (2) placed on the main body component (1); A top-opening mechanism (200) is connected to the main body component (1). The top-opening mechanism (200) is used to abut against the protrusion (5) on the side cover plate (4) and push the protrusion (5) away from the box body (3) to push the side cover plate (4) off the box body (3).

2. The photomask box opening device according to claim 1, characterized in that, The fixing mechanism (100) includes at least one vacuum suction cup (6) connected to the main body component (1) and used to adsorb and fix the box body (3) of the photomask box (2) placed on the main body component (1).

3. The photomask box opening device according to claim 2, characterized in that, The main body component (1) has an inner cavity, and the main body component (1) also has a bearing plane (7) for placing the photomask box (2); The bearing plane (7) is provided with an adsorption hole (8) that communicates with the inner cavity; The vacuum suction cup (6) is installed in the inner cavity and extends into the corresponding suction hole (8). The vacuum suction cup (6) is used to suction the bottom surface of the box (3) placed on the bearing plane (7) from the corresponding suction hole (8).

4. The photomask box opening device according to claim 1, characterized in that, The top opening mechanism (200) includes a top plate (9) and a moving drive mechanism; The top plate (9) is connected to the moving drive mechanism and is used to abut against the protrusion (5) on the side cover plate (4) when the photomask box (2) is placed on the main body component (1); The moving drive mechanism is connected to the main body component (1) and is used to drive the top plate (9) to move so that the top plate (9) pushes the protrusion (5) away from the box body (3) and thus pushes the side cover (4) off the box body (3).

5. The photomask box opening device according to claim 4, characterized in that, The main body component (1) has an inner cavity, and the main body component (1) also has a bearing plane (7) for placing the photomask box (2); The bearing plane (7) is provided with a through groove (10) communicating with the inner cavity. The moving drive mechanism is located in the inner cavity. The top plate (9) is connected to the moving drive mechanism and extends from the through groove (10) to the outside of the main body component (1).

6. The photomask box opening device according to claim 4, characterized in that, The moving drive mechanism includes a motor (11), a transmission screw (12), a transmission nut, and a slider (14); The transmission screw (12) is rotatably connected to the main body component (1); The slider (14) is slidably connected to the main body component (1), and the top plate (9) is connected to the slider (14); The transmission nut is connected to the slider (14) and is connected in conjunction with the transmission screw (12); The motor (11) is connected to the main body component (1) and connected to the transmission screw (12) and is used to drive the transmission screw (12) to rotate.

7. The photomask box opening device according to claim 1, characterized in that, It also includes a positioning mechanism for a housing (3) connected to the main body component (1) and used to position the photomask box (2) placed on the main body component (1).

8. The photomask box opening device according to claim 7, characterized in that, The positioning mechanism includes at least one positioning block (18) connected to the main body component (1) and used to abut against the side of the housing (3) of the photomask box (2) placed on the main body component (1).

9. The photomask box opening device according to claim 1, characterized in that, At least one in-situ sensor (19) is also connected to the main component (1), the in-situ sensor (19) is used to detect the photomask box (2) and generate a signal when the photomask box (2) is placed on the main component (1).

10. The photomask box opening device according to claim 1, characterized in that, The main body component (1) is also connected to a detection sensor (20), which is used to generate a signal when the side cover plate (4) is pushed open into place.

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