Evaporation carrier
By designing an adjustable U-shaped carrier and card strip structure, the problem that existing evaporation carriers cannot fix substrates of different sizes is solved, and the substrates can be accurately positioned and stably fixed in the carrier, thereby improving the adaptability and stability of the evaporation process.
Patent Information
- Application Number
- CN202423077630.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-12-13
AI Technical Summary
Existing evaporation carriers have a single structure and cannot stably fix substrates of different sizes. They can only adapt to substrates of a single size, resulting in an unstable evaporation process.
A U-shaped carrier plate and an adjustable clip structure were designed. The front and rear and left and right position adjustment components were combined with threaded tubes, adjustment screws, knobs and other components to achieve precise positioning and fixation of the substrate.
It achieves stable fixation of substrates of different sizes, ensures the accuracy of the substrate's center position in the carrier, and improves the stability and adaptability of the evaporation process.
Smart Images
Figure CN223481263U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vapor deposition equipment technology, specifically to a vapor deposition carrier. Background Technology
[0002] Evaporation is a process in which the substance to be deposited is placed in a vacuum and evaporated or sublimated, causing it to precipitate on the surface of a workpiece or substrate. During evaporation, a evaporation carrier is needed to support and fix the object to be deposited, ensuring that the evaporation process can proceed smoothly.
[0003] Because existing vapor deposition carriers for substrate evaporation have a relatively simple structure, they cannot guarantee the stability of the substrate and can generally only be used for evaporation of substrates of a single size. The vapor deposition carriers cannot be adapted to fix substrates of different sizes and ensure that the substrates are effectively fixed in the center of the carrier. Therefore, there is a need to provide a vapor deposition carrier to solve the above problems. Utility Model Content
[0004] To address the shortcomings of existing technologies, this invention provides a vapor deposition carrier that solves the problems mentioned in the background.
[0005] This utility model provides the following technical solution: a vapor deposition carrier, including a U-shaped carrier plate, with perforations on both sides of the U-shaped carrier plate, a first locking strip provided on one side of the interior of the U-shaped carrier plate, a second locking strip provided on the side of the U-shaped carrier plate opposite to the first locking strip, a front-back position adjustment component provided on the outer side of the U-shaped carrier plate, and strip-shaped sliding holes provided at both ends of the upper wall of the first locking strip, with a left-right position adjustment component provided on the first locking strip through the strip-shaped sliding holes;
[0006] The front and rear position adjustment assembly includes a threaded tube, which is rotatably disposed below the U-shaped carrier plate.
[0007] Preferably, the front and rear position adjustment assembly further includes an adjustment screw, a connecting plate and a drive rod, a limit block is provided at the center of the lower surface of the U-shaped carrier plate, the threaded tube is rotatably connected to the limit block, and two adjustment screws are provided, which are respectively threaded to both ends of the threaded tube.
[0008] Preferably, the threads on the outer surfaces of the two adjusting screws at both ends of the threaded tube are in opposite directions, the end of the adjusting screw away from the threaded tube is connected to the connecting plate, and the driving rod is located at both ends of the inner side of the connecting plate.
[0009] Preferably, the drive rod is provided in two sets. One set of drive rods has one end away from the connecting plate passing through the through hole and connecting to the first locking strip. The other set of drive rods has one end away from the connecting plate passing through the through hole and connecting to the second locking strip.
[0010] Preferably, the left and right position adjustment component includes a mounting block, a bidirectional screw, a first knob, and a drive block. There are two mounting blocks, which are located at both ends of the upper surface of the first locking strip. The bidirectional screw is rotatably disposed between the two mounting blocks, and one end of the bidirectional screw passes through the mounting block and is connected to the first knob.
[0011] Preferably, there are two drive blocks, both of which are threadedly connected to a bidirectional screw, and the threads at both ends of the bidirectional screw are in opposite directions.
[0012] Preferably, the lower end of the drive block is provided with a slider, the slider is slidably connected to the strip-shaped sliding hole, and the lower end of the slider is provided with an L-shaped clamping block passing through the strip-shaped sliding hole.
[0013] Preferably, a clamping element is provided at the center of the upper wall of the second card strip. The clamping element includes a clamping screw, a pressure block and a second knob. The clamping screw is threaded to the upper wall of the second card strip. The pressure block is located at the lower end of the clamping screw. The upper end of the clamping screw passes through the upper wall of the second knob and is connected to the second knob.
[0014] Compared with the prior art, the present invention has the following beneficial effects:
[0015] 1. This vapor deposition carrier is equipped with a front-to-back position adjustment component. When the substrate is placed on the U-shaped carrier plate, by rotating the threaded tube, under the limiting action of the drive rod, the two adjusting screws will move along the threaded tube. During the process of the two adjusting screws moving closer to each other and retracting into the threaded tube, the drive rod will push the first and second clamping strips to move synchronously and move closer to each other, thereby adapting to substrates of different widths and ensuring the accurate front-to-back position of the substrate inside the U-shaped carrier plate.
[0016] 2. This vapor deposition carrier is equipped with a left-right position adjustment component. By rotating the first knob, the bidirectional screw is rotated. Under the limiting action of the slider, the two drive blocks move along the bidirectional screw. When the two drive blocks move along the bidirectional screw and approach each other, the drive blocks will drive the two L-shaped clamps to approach each other through the slider. This adapts to substrates of different lengths and ensures that the left-right position of the substrate inside the U-shaped carrier is accurate. The operation is simple. Attached Figure Description
[0017] Figure 1 This is one of the schematic diagrams of the overall structure of the vapor deposition carrier of this utility model;
[0018] Figure 2 This is the second schematic diagram of the overall structure of the vapor deposition carrier of this utility model;
[0019] Figure 3 This is a schematic diagram of the installation structure of the No. 1 card strip and the left and right position adjustment component of this utility model;
[0020] Figure 4 This is a schematic diagram of the installation structure of the No. 2 card strip and the clamping component of this utility model;
[0021] Figure 5 This is a schematic diagram of the U-shaped carrier plate of this utility model;
[0022] Figure 6 This is a schematic diagram of the mounting structure of the slider of this utility model.
[0023] In the diagram: 1. U-shaped carrier plate; 101. Perforation; 2. No. 1 locking strip; 201. Strip-shaped sliding hole; 3. No. 2 locking strip; 4. Limiting block; 5. Front and rear position adjustment assembly; 501. Threaded tube; 502. Adjusting screw; 503. Connecting plate; 504. Drive rod; 6. Left and right position adjustment assembly; 601. Mounting block; 602. Bidirectional screw; 603. Drive block; 604. Slider; 605. L-shaped clamping block; 7. Clamping component; 701. Clamping screw; 702. Clamping block; 703. No. 2 knob. Detailed Implementation
[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0025] Please see Figure 1-6 A vapor deposition carrier includes a U-shaped carrier plate 1. Perforations 101 are provided on both sides of the U-shaped carrier plate 1. A first locking strip 2 is provided on one side of the interior of the U-shaped carrier plate 1. A second locking strip 3 is provided on the side of the U-shaped carrier plate 1 opposite to the first locking strip 2. A front-to-back position adjustment component 5 is provided on the outer side of the U-shaped carrier plate 1. A strip-shaped sliding hole 201 is provided at both ends of the upper wall of the first locking strip 2. A left-to-right position adjustment component 6 is provided on the first locking strip 2 through the strip-shaped sliding hole 201.
[0026] The front and rear position adjustment assembly 5 includes a threaded tube 501, which is rotatably disposed below the U-shaped carrier plate 1.
[0027] The front and rear position adjustment assembly 5 also includes an adjustment screw 502, a connecting plate 503 and a drive rod 504. A limit block 4 is provided at the center of the lower surface of the U-shaped carrier plate 1. The threaded tube 501 is rotatably connected to the limit block 4. There are two adjustment screws 502. The two adjustment screws 502 are respectively threaded to both ends of the threaded tube 501. When the substrate is placed on the U-shaped carrier plate 1, by rotating the threaded tube 501, under the limiting action of the drive rod 504, the two adjustment screws 502 will move along the threaded tube 501, moving closer to each other or further away from each other.
[0028] Among them, the threads on the outer surfaces of the two adjusting screws 502 at both ends of the threaded tube 501 are opposite. The end of the adjusting screw 502 away from the threaded tube 501 is connected to the connecting plate 503. The driving rod 504 is set at both ends of the inner side of the connecting plate 503. There are two sets of driving rods 504. One set of driving rods 504 passes through the through hole 101 and is connected to the first locking strip 2. The other set of driving rods 504 passes through the through hole 101 and is connected to the second locking strip 3. When the two adjusting screws 502 move closer to each other and retract into the threaded tube 501, they will push the first locking strip 2 and the second locking strip 3 to move synchronously and move closer to each other through the driving rod 504, thereby adjusting the position of the substrate and ensuring that the front and rear positions of the substrate inside the U-shaped carrier plate 1 are accurate.
[0029] The left and right position adjustment component 6 includes a mounting block 601, a bidirectional screw 602, a first knob, and a drive block 603. There are two mounting blocks 601, which are located at both ends of the upper surface of the first locking strip 2. The bidirectional screw 602 is rotatably located between the two mounting blocks 601. One end of the bidirectional screw 602 passes through the mounting block 601 and is connected to the first knob. By rotating the first knob, the bidirectional screw 602 is driven to rotate. Under the limiting action of the slider 604, the two drive blocks 603 move along the bidirectional screw 602, moving closer to each other or further away from each other.
[0030] There are two drive blocks 603, both of which are threadedly connected to the bidirectional screw 602. The threads at both ends of the bidirectional screw 602 are in opposite directions. A slider 604 is provided at the lower end of the drive block 603. The slider 604 is slidably connected to the strip-shaped sliding hole 201. An L-shaped clamping block 605 is provided at the lower end of the slider 604 through the strip-shaped sliding hole 201. When the two drive blocks 603 move along the bidirectional screw 602 and approach each other, the drive blocks 603 will drive the two L-shaped clamping blocks 605 to approach each other through the slider 604, adjusting the left and right position of the substrate and ensuring that the left and right position of the substrate inside the U-shaped carrier plate 1 is accurate.
[0031] The second card strip 3 has a clamping component 7 at its center on the upper wall. The clamping component 7 includes a clamping screw 701, a pressure block 702, and a second knob 703. The clamping screw 701 is threaded to the upper wall of the second card strip 3. The pressure block 702 is located at the lower end of the clamping screw 701. The upper end of the clamping screw 701 passes through the upper wall of the second knob 703 and is connected to the second knob 703. By rotating the second knob 703, the clamping screw 701 can be effectively driven to rotate and move. During the downward rotation of the clamping screw 701, the pressure block 702 can be driven to move downward synchronously. During the downward movement of the pressure block 702, the substrate can be effectively clamped to prevent the substrate from moving up and down, thereby further ensuring the stability of the substrate.
[0032] Working principle: When the substrate is placed on the U-shaped carrier plate 1, by rotating the threaded tube 501, under the limiting action of the drive rod 504, the two adjusting screws 502 will move along the threaded tube 501. During the process of the two adjusting screws 502 moving closer to each other and retracting into the threaded tube 501, they will push the first clamping strip 2 and the second clamping strip 3 to move synchronously and move closer to each other through the drive rod 504, adjusting the position of the substrate, thereby ensuring that the front and back position of the substrate inside the U-shaped carrier plate 1 is accurate. By rotating the first knob and driving the bidirectional screw 602 to rotate, under the limiting action of the slider 604, the two driving blocks 603 move along the bidirectional screw 602. When the two driving blocks 603 move along the bidirectional screw 602 and move closer to each other, the driving blocks 603 will drive the two L-shaped clamping blocks 605 to move closer to each other through the slider 604, adjusting the left and right position of the substrate, ensuring that the left and right position of the substrate inside the U-shaped carrier plate 1 is accurate.
[0033] Furthermore, by rotating the second knob 703, the clamping screw 701 can be effectively driven to rotate and move. During the downward rotation of the clamping screw 701, the pressure block 702 can be driven to move downward synchronously. During the downward movement of the pressure block 702, the substrate can be effectively clamped, preventing the substrate from moving up and down, and further ensuring the stability of the substrate.
[0034] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vapor deposition carrier, characterized in that, The U-shaped carrier plate (1) has perforations (101) on both sides of its side walls. A first-order clip (2) is provided on one side of the interior of the U-shaped carrier plate (1). A second-order clip (3) is provided on the side of the U-shaped carrier plate (1) away from the first-order clip (2). A front-back position adjustment component (5) is provided on the outside of the U-shaped carrier plate (1). A strip-shaped sliding hole (201) is provided at both ends of the upper wall of the first-order clip (2). A left-right position adjustment component (6) is provided on the first-order clip (2) through the strip-shaped sliding hole (201). The front and rear position adjustment component (5) includes a threaded tube (501), which is rotatably disposed below the U-shaped carrier plate (1).
2. The vapor deposition carrier according to claim 1, characterized in that, The front and rear position adjustment assembly (5) also includes an adjustment screw (502), a connecting plate (503) and a drive rod (504). A limit block (4) is provided at the center of the lower surface of the U-shaped carrier plate (1). The threaded tube (501) is rotatably connected to the limit block (4). There are two adjustment screws (502), and the two adjustment screws (502) are respectively threaded to both ends of the threaded tube (501).
3. The vapor deposition carrier according to claim 2, characterized in that, The threads on the outer surfaces of the two adjusting screws (502) at both ends of the threaded tube (501) are in opposite directions. The end of the adjusting screw (502) away from the threaded tube (501) is connected to the connecting plate (503). The driving rod (504) is located at both ends of the inner side of the connecting plate (503).
4. The vapor deposition carrier according to claim 3, characterized in that, The drive rod (504) is provided in two sets. One set of the drive rod (504) has one end away from the connecting plate (503) passing through the through hole (101) and connected to the first card strip (2). The other set of the drive rod (504) has one end away from the connecting plate (503) passing through the through hole (101) and connected to the second card strip (3).
5. The vapor deposition carrier according to claim 1, characterized in that, The left and right position adjustment component (6) includes a mounting block (601), a bidirectional screw (602), a first knob, and a drive block (603). There are two mounting blocks (601), which are located at both ends of the upper surface of the first locking strip (2). The bidirectional screw (602) is rotatably located between the two mounting blocks (601), and one end of the bidirectional screw (602) passes through the mounting block (601) and is connected to the first knob.
6. A vapor deposition carrier according to claim 5, characterized in that, Two drive blocks (603) are provided, and both drive blocks (603) are threadedly connected to a bidirectional screw (602). The threads at both ends of the bidirectional screw (602) are in opposite directions.
7. A vapor deposition carrier according to claim 6, characterized in that, The lower end of the drive block (603) is provided with a slider (604), the slider (604) is slidably connected to the strip-shaped sliding hole (201), and the lower end of the slider (604) is provided with an L-shaped clamping block (605) passing through the strip-shaped sliding hole (201).
8. The vapor deposition carrier according to claim 1, characterized in that, A clamping element (7) is provided at the center of the upper wall of the second card strip (3). The clamping element (7) includes a clamping screw (701), a pressure block (702) and a second knob (703). The clamping screw (701) is threadedly connected to the upper wall of the second card strip (3). The pressure block (702) is located at the lower end of the clamping screw (701). The upper end of the clamping screw (701) passes through the upper wall of the second knob (703) and is connected to the second knob (703).