Continuous large-scale deposition coating equipment
By designing a continuous, large-scale deposition equipment, the target replacement process is simplified, solving the problem of inconvenient target replacement and improving adaptability to different substrates and film adhesion.
Patent Information
- Application Number
- CN202422927172.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-11-29
AI Technical Summary
The target materials on existing coating equipment are not easy to replace, which makes it impossible to adapt to the surface characteristics and chemical compatibility requirements of different substrates in a timely manner, affecting the adhesion of the film layer.
A continuous large-scale deposition coating equipment was designed. By changing components and bolting connections, the target replacement process is simplified, allowing the target to be quickly replaced according to different substrates, thus ensuring the adhesion of the film layer.
It enables rapid replacement of the target material, adapts to the needs of different substrates, and improves the flexibility and deposition effect of the coating equipment.
Smart Images
Figure CN223481265U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of deposition coating technology, specifically to a continuous large-scale deposition coating equipment. Background Art
[0002] With the continuous development of electronic products, optoelectronic devices and surface treatment technologies, coating technology, as an important surface treatment method, has been widely used in the deposition of decorative or functional coatings on the surfaces of materials such as glass, metal, and plastic. Especially in large-scale production, it can significantly improve production efficiency, reduce idle time, and ensure stable film quality.
[0003] Different substrates require different target materials during the coating process. The material type of the substrate directly affects the selection of the target material. Each substrate has different surface characteristics and chemical compatibility. Therefore, it is necessary to select a suitable target material to ensure the adhesion of the film layer. However, the target materials on most coating equipment are not easy to replace, which makes it impossible to adapt to new substrate requirements in a timely manner. Based on this, this solution provides a continuous large-scale deposition coating equipment to solve the above-mentioned problems. Utility Model Content
[0004] To solve the above-mentioned technical problems, a continuous large-scale deposition coating equipment is provided. This technical solution addresses the issue mentioned in the background art that different target materials are required during the coating process on different substrates. The material type of the substrate directly affects the selection of the target material. Each substrate has different surface characteristics and chemical compatibility. Therefore, it is necessary to select a suitable target material to ensure the adhesion of the film layer. However, the target materials on most coating equipment are not easy to replace, resulting in the inability to adapt to the requirements of new substrates in a timely manner.
[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a continuous large-scale deposition coating equipment, including a worktable, with support legs fixedly installed at the four corners of the lower end of the worktable, a control box provided on the left side of the front end of the worktable, a deposition box fixedly connected to the upper end of the worktable, a rectangular opening extending through the upper end of the deposition box, connecting plates provided on both the front and rear sides of the rectangular opening, the lower end of the connecting plates being fixedly connected to the upper end of the deposition box, and a replacement component provided inside the rectangular opening;
[0006] The replacement component includes a connecting block, a handle fixedly connected to the upper end of the connecting block, mounting blocks fixedly connected to both the front and rear sides of the connecting block, the lower end of the mounting block abutting against the upper end of the connecting plate, the mounting block being connected to the connecting plate by a first bolt, a connecting frame fixedly connected to the lower end of the connecting block, a sealing gasket provided on the outer surface of the connecting frame, the upper end of the sealing gasket being fixedly connected to the lower end of the connecting block, a positive electrode plate provided inside the connecting frame, a target material provided at the lower end of the connecting frame, and the lower corners of the target material being connected to the connecting frame by second bolts.
[0007] Preferably, two rotating rollers are rotatably installed on both the left and right sides inside the workbench, and the outer surfaces of the two rotating rollers are connected to a conveyor belt. A servo motor is fixedly installed on the right front end of the workbench, and the output end of the servo motor is fixedly connected to the front end of the right rotating roller.
[0008] Preferably, two base plates are fixedly connected to the inner walls of the front and rear sides of the workbench, and a negative electrode plate is provided between the two base plates. The upper ends of the two base plates and the negative electrode plate abut against the lower end of the conveyor belt.
[0009] Preferably, rectangular grooves are provided at the bottom of both the left and right sides of the sedimentation tank. Electric telescopic rods are fixedly installed at the top front and rear sides of the inner top of the rectangular grooves. The output ends of the two electric telescopic rods are fixedly connected to baffles, and the lower end of the baffles is provided with rubber pads.
[0010] Preferably, a vacuum pump is provided at the front end of the deposition tank, the output end of the vacuum pump is fixedly connected to an output pipe, the input end of the vacuum pump is fixedly connected to an input pipe, and the rear end of the input pipe is connected to the interior of the deposition tank.
[0011] Preferably, the rear end of the deposition tank is fixedly connected to a connecting pipe, and an electromagnetic coil is provided on the outer surface of the connecting pipe.
[0012] Preferably, heating rods are fixedly installed on both the front and rear sides of the upper top plate inside the sedimentation tank, and a temperature sensor is provided on the inner front wall of the sedimentation tank.
[0013] Compared with the prior art, the present invention provides a continuous large-scale deposition coating equipment, which has the following beneficial effects:
[0014] This invention involves removing the first bolt from the mounting block and connecting plate, then using the handle to remove the replacement component from the inside of the deposition chamber. Next, the second bolt is rotated to loosen the target material at the lower end of the connecting frame. After removing the second bolt from the inside of the connecting frame, the target material can be removed from the lower end of the connecting frame. Then, a target material compatible with the substrate is replaced. Finally, the replacement component is inserted into the inside of the deposition chamber through the rectangular opening, allowing the target material to adapt to the new substrate requirements and avoiding affecting the deposition effect. Attached Figure Description
[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;
[0016] Figure 2 This is a schematic diagram of the replacement component in this utility model;
[0017] Figure 3 This is a schematic diagram of the internal structure of the rectangular groove in this utility model;
[0018] Figure 4 This is a schematic diagram of the internal structure of the workbench in this utility model;
[0019] Figure 5 This is a schematic diagram of the internal structure of the sedimentation tank in this utility model.
[0020] The numbers on the map are:
[0021] 1. Workbench; 2. Support legs; 3. Control box; 4. Rotating roller; 5. Conveyor belt; 6. Base plate; 7. Servo motor; 8. Sedimentation tank; 9. Rectangular opening;
[0022] 10. Replacement component; 101. Connecting block; 102. Mounting block; 103. First bolt; 104. Sealing gasket; 105. Connecting frame; 106. Positive electrode plate; 107. Target material; 108. Second bolt; 109. Handle;
[0023] 11. Connecting plate; 12. Rectangular groove; 13. Electric telescopic rod; 14. Baffle; 15. Rubber pad; 16. Vacuum pump; 17. Output pipe; 18. Input pipe; 19. Connecting pipe; 20. Electromagnetic coil; 21. Heating rod; 22. Temperature sensor; 23. Negative electrode plate. DETAILED DESCRIPTION
[0024] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.
[0025] Reference Figures 1-5As shown, a continuous mass deposition coating equipment includes a worktable 1. Support legs 2 are fixedly installed at the four corners of the lower end of the worktable 1. A control box 3 is located on the left side of the front end of the worktable 1. The control box 3 is electrically connected to a servo motor 7, a heating rod, a temperature sensor 22, an electric telescopic rod 13, an electromagnetic coil 20, and a vacuum pump 16. A deposition tank 8 is fixedly connected to the upper end of the worktable 1. A rectangular opening 9 is formed through the upper end of the deposition tank 8. Connecting plates 11 are provided on both the front and rear sides of the rectangular opening 9. The lower ends of the connecting plates 11 are fixedly connected to the upper end of the deposition tank 8. A replacement component 10 is provided inside the rectangular opening 9. The replacement component 10 includes a connecting block 101. The area of the connecting block 101 is larger than the area of the sealing gasket 104, and the area of the sealing gasket 104 is larger than the area of the rectangular opening 9. A handle 109 is fixedly connected to the upper end of the connecting block 101. Mounting blocks 102 are fixedly connected to both sides. The lower end of the mounting block 102 abuts against the upper end of the connecting plate 11. The mounting block 102 is connected to the connecting plate 11 by the first bolt 103. A connecting frame 105 is fixedly connected to the lower end of the connecting block 101. The outer surface of the connecting frame 105 abuts against the rectangular opening 9. A sealing gasket 104 is provided on the outer surface of the connecting frame 105. When the connecting frame 105 is inserted into the interior of the deposition box 8 through the rectangular opening 9, the sealing gasket 104 abuts against the upper end of the deposition box 8 to prevent gas leakage when the vacuum pump 16 draws the gas pressure in the deposition box 8 to a low-pressure environment. The upper end of the sealing gasket 104 is fixedly connected to the lower end of the connecting block 101. A positive electrode plate 106 is provided inside the connecting frame 105. A target material 107 is provided at the lower end of the connecting frame 105. The four corners of the lower end of the target material 107 are connected to the connecting frame 105 by the second bolt 108.
[0026] Reference Figures 3-5As shown, two rotating rollers 4 are rotatably mounted on both the left and right sides of the workbench 1. The outer surfaces of the two rotating rollers 4 are connected to a conveyor belt 5. A servo motor 7 is fixedly mounted on the right front side of the workbench 1. The output end of the servo motor 7 is fixedly connected to the front end of the right rotating roller 4. Two base plates 6 are fixedly connected to the inner walls of the front and rear sides of the workbench 1. A negative electrode plate 23 is set between the two base plates 6. The substrate is connected to the negative electrode plate 23, and the target material 107 is connected to the positive electrode plate 106. An electric field is established between the two electrodes. Under the action of the electric field, positive ions will be accelerated towards the substrate. During the deposition process, negative ions move towards the target 107. When positive ions collide with the target 107, sputtering occurs, causing atoms of the target 107 to be sputtered out and fly towards the substrate, thus achieving film deposition. The upper ends of the two base plates 6 and the negative electrode plate abut against the lower end of the conveyor belt 5. Rectangular grooves 12 are provided on the bottom ends of both sides of the deposition box 8. Electric telescopic rods 13 are fixedly installed on the front and rear sides of the top of the rectangular grooves 12. The output ends of the two electric telescopic rods 13 are fixedly connected to baffles 14. When the substrate enters the interior of the deposition box 8, the electric telescopic rods 13 drive the baffles 14. Move downwards until the rubber pad 15 at the lower end of the baffle 14 abuts against the upper end of the conveyor belt 5. The two base plates 6 and the two baffles 14 are located on the same vertical plane, and the two base plates 6 provide support below the conveyor belt 5. The lower end of the baffle 14 is provided with a rubber pad 15. A vacuum pump 16 is provided at the front end of the sedimentation tank 8. The output end of the vacuum pump 16 is fixedly connected to an output pipe 17, and the input end of the vacuum pump 16 is fixedly connected to an input pipe 18. The rear end of the input pipe 18 is connected to the interior of the sedimentation tank 8. A connecting pipe 19 is fixedly connected to the rear end of the sedimentation tank 8. The front end of the connecting pipe 19 is arc-shaped. The arc-shaped opening faces the lower end of the target 107. An electromagnetic coil 20 is provided on the outer surface of the connecting pipe 19. Argon gas is supplied to the interior of the deposition chamber 8 through the connecting pipe 19. Under the action of the electromagnetic coil 20, the argon gas is ionized to form high-energy ions. Heating rods 21 are fixedly installed on both the front and rear sides of the upper top plate inside the deposition chamber 8. After the heating rods 21 raise the temperature of the deposition chamber 8, the atomic activity of the substrate surface is enhanced, and the interaction between the substrate and the sputtered target 107 atoms is more intense, thereby improving the film adhesion. A temperature sensor 22 is provided on the inner wall of the front side of the deposition chamber 8.
[0027] The working principle and usage process of this utility model are as follows: Before use, replace the appropriate target material 107 according to the substrate to be coated. During the replacement process, firstly rotate the first bolt 103 to remove it from the inside of the mounting block 102 and the connecting plate 11. Then, remove the replacement component 10 from the inside of the deposition box 8 through the handle 109. Next, rotate the second bolt 108 to remove it from the inside of the connecting frame 105 and the target material 107. Then, the target material 107 can be removed and replaced. The appropriate target material 107 is abutted against the lower end of the connecting frame 105 and fixed by the second bolt 108. After the replacement is completed, insert the replacement component 10 into the inside of the deposition box 8 through the rectangular opening 9 so that the sealing gasket 104 abuts against the upper end of the deposition box 8. Finally, the installation is completed by the first bolt 103.
[0028] In use, the substrate is placed on the surface of the conveyor belt 5. Then, the controller controls the servo motor 7 to drive the rotating roller 4 to rotate. The rotation of the rotating roller 4 drives the conveyor belt 5 to move, thereby moving the substrate at the upper end of the conveyor belt 5 directly below the deposition chamber 8. Next, the controller controls the two sets of electric telescopic rods 13 to move the baffle 14 downward inside the rectangular groove 12 until the rubber pad 15 at the lower end of the baffle 14 abuts against the upper end of the conveyor belt 5, thereby achieving a sealing effect in the deposition chamber 8. At the same time, the vacuum pump 16 evacuates the air pressure inside the deposition chamber 8 to a low-pressure environment. Then, argon gas is introduced into the deposition chamber 8 through the connecting pipe 19. The argon gas... The electromagnetic coil 20 is ionized into high-energy ions. These high-energy ions bombard the target material 107, sputtering out the atoms or molecules of the target material 107 and depositing them onto the substrate surface. During the deposition process, a thin film gradually forms on the substrate surface. Once the thin film is formed, the electric telescopic rod 13 drives the baffle 14 to move upward. Driven by the servo motor 7, the conveyor belt 5 transports the coated substrate out of the deposition box 8. During the coating process, the next substrate to be coated is placed on the conveyor belt 5 in advance. When the coated substrate is removed from the deposition box 8, the next substrate enters the deposition box 8 for coating.
[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A continuous large-scale deposition coating equipment, characterized in that: The system includes a workbench (1), with support legs (2) fixedly installed at the four corners of the lower end of the workbench (1). A control box (3) is provided on the left side of the front end of the workbench (1). A sedimentation box (8) is fixedly connected to the upper end of the workbench (1). A rectangular opening (9) is provided through the upper end of the sedimentation box (8). Connecting plates (11) are provided on both the front and rear sides of the rectangular opening (9). The lower end of the connecting plate (11) is fixedly connected to the upper end of the sedimentation box (8). A replacement component (10) is provided inside the rectangular opening (9). The replacement component (10) includes a connecting block (101), with a handle (109) fixedly connected to the upper end of the connecting block (101). Mounting blocks (102) are fixedly connected to both the front and rear sides of the connecting block (101). The lower end of the mounting block (102) abuts against the upper end of the connecting plate (11). The mounting block (102) is connected to the connecting plate (11) by a first bolt (103). The lower end of the connecting block (101) is fixed. A connecting frame (105) is connected, and a sealing gasket (104) is provided on the outer surface of the connecting frame (105). The upper end of the sealing gasket (104) is fixedly connected to the lower end of the connecting block (101). A positive electrode plate (106) is provided inside the connecting frame (105). A target material (107) is provided at the lower end of the connecting frame (105). The four corners of the lower end of the target material (107) are connected to the connecting frame (105) by a second bolt (108).
2. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: Two rotating rollers (4) are rotatably installed on both the left and right sides inside the workbench (1). The outer surfaces of the two rotating rollers (4) are connected to the conveyor belt (5). A servo motor (7) is fixedly installed on the right front end of the workbench (1). The output end of the servo motor (7) is fixedly connected to the front end of the right rotating roller (4).
3. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: Two base plates (6) are fixedly connected to the inner walls of the front and rear sides of the workbench (1). A negative electrode plate (23) is provided between the two base plates (6). The upper ends of the two base plates (6) and the negative electrode plate abut against the lower end of the conveyor belt (5).
4. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: The sedimentation tank (8) has rectangular grooves (12) at the bottom of both the left and right sides. Electric telescopic rods (13) are fixedly installed on the front and back sides of the top of the rectangular grooves (12). The output ends of the two electric telescopic rods (13) are fixedly connected to baffles (14). The lower end of the baffles (14) is provided with rubber pads (15).
5. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: A vacuum pump (16) is provided at the front end of the sedimentation tank (8). The output end of the vacuum pump (16) is fixedly connected to an output pipe (17), and the input end of the vacuum pump (16) is fixedly connected to an input pipe (18). The rear end of the input pipe (18) is connected to the interior of the sedimentation tank (8).
6. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: The rear end of the sedimentation tank (8) is fixedly connected to a connecting pipe (19), and an electromagnetic coil (20) is provided on the outer surface of the connecting pipe (19).
7. The continuous large-scale deposition coating equipment according to claim 1, characterized in that: Heating rods (21) are fixedly installed on both the front and rear sides of the upper top plate inside the sedimentation tank (8), and a temperature sensor (22) is provided on the inner front wall of the sedimentation tank (8).