Flow uniformizing assembly and coating equipment

Abstract

The utility model discloses a flow uniformizing assembly and coating equipment. The flow uniformizing assembly is used for uniformizing flow of gas in a coating cavity of the coating equipment and comprises a gas inlet baffle which is arranged in the coating cavity and is opposite to a gas inlet of the coating cavity, a first distance is formed between the gas inlet baffle and the gas inlet, and a second distance is formed between the gas inlet baffle and the gas inlet; and gas passing through the gas inlet flows into the coating cavity from the edge of the gas inlet baffle. The film coating equipment comprises a film coating cavity, a film coating device and a film coating device, wherein the film coating cavity is provided with a film coating chamber for placing a workpiece to be coated, and an air inlet and an air extraction opening which are communicated with the film coating chamber; and the flow uniformizing assembly is arranged in the coating cavity of the coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to a flow equalization component and a coating device including the flow equalization component. Background Technology

[0002] Currently, in coating equipment, monomeric gases enter the coating chamber through the inlet and then diffuse within it. The uneven gas density between the upper and lower layers of gas within the chamber leads to inconsistent deposition rates on the upper and lower workpieces, resulting in uneven coating thickness and consequently affecting the product's protective performance. Furthermore, coating equipment includes a vacuum system to establish and maintain a high vacuum environment within the coating chamber during the coating process. In traditional coating equipment, gas is directly extracted from the coating chamber through the exhaust port, which can easily lead to excessively high local gas concentrations and uneven airflow distribution within the chamber. Utility Model Content

[0003] To address the aforementioned technical problems, embodiments of this utility model provide a flow equalization component and a coating apparatus including the flow equalization component, which enables the monomer gas to be uniformly dispersed within the coating cavity, thereby improving coating uniformity.

[0004] According to one aspect of the present invention, a flow equalization component is provided for equalizing the flow of gas within the coating chamber of a coating equipment. The flow equalization component includes: an inlet baffle disposed within the coating chamber and opposite to the air inlet of the coating chamber, wherein the inlet baffle and the air inlet are spaced apart by a first distance, and gas passing through the air inlet flows into the coating chamber from the edge of the inlet baffle.

[0005] In some embodiments, the flow equalization component further includes: a suction baffle disposed in the coating cavity and opposite to the suction port of the coating cavity, wherein the suction baffle and the suction port are spaced apart by a second distance, and the gas in the coating cavity flows into the suction port from the edge of the suction baffle.

[0006] In some embodiments, the suction baffle is provided with guide grooves on both sides along its width direction.

[0007] In some embodiments, the suction baffle includes a plurality of spaced-apart separation baffles.

[0008] In some embodiments, the air intake baffle is provided with drainage grooves on both sides along its width direction.

[0009] In some embodiments, the air intake baffle is provided with a plurality of spaced-apart baffles on both sides along its width direction, and the baffles and the top or bottom of the air intake baffle and / or adjacent baffles form the flow channel.

[0010] In some embodiments, the position of the deflector on the air intake baffle is adjustable.

[0011] In some embodiments, the air intake baffle and / or the air extraction baffle are parallel to the inner wall of the coating cavity.

[0012] In some embodiments, the center of the air intake baffle along its width direction is aligned with the center of the air intake port. In some embodiments, the center of the air extraction baffle along its width direction is aligned with the center of the air extraction port.

[0013] In some embodiments, a gap exists between the air intake baffle and the top and / or bottom wall of the coating cavity. In some embodiments, a gap exists between the air extraction baffle and the top and / or bottom wall of the coating cavity.

[0014] According to another aspect of the present invention, a coating apparatus is provided. The coating apparatus includes: a coating chamber having a coating cavity for placing a workpiece to be coated, and an air inlet and an air outlet communicating with the coating cavity; and a flow equalization component disposed within the coating chamber of the coating apparatus.

[0015] In the flow equalization assembly according to an embodiment of the present invention, the monomer gas enters the coating chamber, is evenly dispersed in the coating chamber by the air inlet baffle, and then deposited in the coating chamber.

[0016] Furthermore, the design of the suction baffle prevents the gas flowing in through the air inlet from dispersing in the coating chamber and then directly flowing into the suction port to be extracted from the coating chamber. This avoids excessively high local gas concentrations in the coating chamber and further ensures the uniformity of airflow in the coating chamber, which is beneficial to improving coating uniformity and film quality. Attached Figure Description

[0017] Other features and advantages of this utility model will be better understood through the following detailed description of optional embodiments in conjunction with the accompanying drawings, in which the same reference numerals denote the same or similar parts, wherein:

[0018] Figure 1 A schematic diagram of a coating apparatus according to an embodiment of the present invention is shown;

[0019] Figure 2 A schematic diagram of the structure of the air intake baffle of a flow equalization assembly according to an embodiment of the present invention is shown;

[0020] Figure 3 A schematic diagram of the structure of the air intake baffle of a flow equalization assembly according to another embodiment of the present invention is shown;

[0021] Figure 4 A schematic diagram of the structure of the suction baffle of a flow equalization component according to an embodiment of the present invention is shown;

[0022] Figure 5 A schematic diagram of the exhaust baffle of a flow equalization assembly according to another embodiment of the present invention is shown;

[0023] Figure 6 A schematic diagram of an intake baffle guiding gas according to an embodiment of the present invention is shown;

[0024] Figure 7 A schematic diagram showing an intake baffle guiding gas according to another embodiment of the present invention is shown; and

[0025] Figure 8 A schematic diagram of a gas extraction baffle guiding gas according to an embodiment of the present invention is shown. Detailed Implementation

[0026] The implementation and use of the embodiments are discussed in detail below. However, it should be understood that the specific embodiments discussed are merely illustrative of specific ways of implementing and using the present invention, and are not intended to limit the scope of the present invention. In the description, the structural positions of the various components, such as upper, lower, top, bottom, etc., are not absolute but relative. These directional descriptions are appropriate when the various components are arranged as shown in the figures, but these directional descriptions also change accordingly when the positions of the various components in the figures change.

[0027] like Figure 1 As shown, the coating equipment 100 includes a coating chamber 10, which has a coating cavity 11 for placing a workpiece to be coated, and an air inlet 12 and an air outlet 13 communicating with the coating cavity 11. A flow equalization assembly 20 is disposed within the coating cavity 11 of the coating chamber 10 for equalizing the flow of gas within the coating cavity 11. The flow equalization assembly 20 includes an air inlet baffle 21. The air inlet baffle 21 is disposed within the coating cavity 11 of the coating chamber 10 and is disposed opposite to the air inlet 12 of the coating chamber 10. A first distance separates the air inlet baffle 21 from the air inlet 12, and the gas passing through the air inlet 12 flows into the coating cavity 11 from the edge of the air inlet baffle 21.

[0028] The air inlet baffle 21 is used to diffuse the gas flowing in from the air inlet 12 outward. Specifically, the individual gas enters the coating chamber 11 from the air inlet 12, and is evenly dispersed in the coating chamber 11 after passing through the air inlet baffle 21, and then deposited in the coating chamber 11.

[0029] In some embodiments, the flow equalization assembly 20 further includes a suction baffle 22, which is disposed within the coating chamber 11 of the coating cavity 10 and opposite to the suction port 13 of the coating cavity 10. A second distance is spaced between the suction baffle 22 and the suction port 13, and gas within the coating cavity 11 flows into the suction port 13 from the edge of the suction baffle 22. The suction baffle 22 is used to ensure that the gas within the coating chamber 11 is uniformly discharged from the suction port 13, thereby making the gas flow within the coating chamber 11 more uniform.

[0030] The design of the exhaust baffle 22 prevents the gas flowing in through the air inlet 12 from being dispersed in the coating chamber 11 and then directly flowing into the exhaust port 13 to be extracted from the coating chamber 11. This avoids excessively high local gas concentration in the coating chamber 11 and further ensures the uniformity of airflow in the coating chamber 11, which is beneficial to improving coating uniformity and film quality.

[0031] exist Figure 1 In the illustrated embodiment, the coating cavity 10 has two air inlets 12 and three air extraction ports 13. In other embodiments, the coating cavity 10 may have any number of air inlets 12, such as one or three, and the coating cavity 10 may also have any number of air extraction ports 13, such as one or two.

[0032] In some embodiments, the width of the air intake baffle 21 is greater than the diameter of the air intake port 12; for example, the width of the air intake baffle 21 is 2-5 times the diameter of the air intake port 12. In some embodiments, the width of the air extraction baffle 22 is greater than the diameter of the air extraction port 13; for example, the width of the air extraction baffle 22 is 2-5 times the diameter of the air extraction port 13. The air intake baffle 21 and the air extraction baffle 22 can be fixed to the coating chamber 11 in any way, for example, fixed to the inner wall of the coating chamber 11.

[0033] like Figure 2 As shown, in some embodiments, the air intake baffle 21 is provided with flow channels 211 on both sides along its width direction, and the flow channels 211 are conducive to promoting the flow of gas.

[0034] In some embodiments, the intake baffle 21 is provided with a plurality of spaced-apart baffles 212 on both sides along its width direction. A flow channel 211 is formed between the top and / or bottom of the baffles 212 and the intake baffle 21, and a flow channel 211 is formed between adjacent baffles 212.

[0035] like Figure 3 As shown, in some embodiments, the position of the baffle 212 on the intake baffle 21 is adjustable. That is, the distance between the top and / or bottom of the baffle 212 and the intake baffle 21 is adjustable, the distance between adjacent baffles 212 is adjustable, and therefore the size of the guide groove 211 is adjustable.

[0036] In some embodiments, the baffle 212 is provided with an adjustment assembly 213 for adjusting the position of the baffle 212 on the intake baffle 21, thereby adjusting the size of the airflow channel 211. The adjustment assembly 213 includes an elongated hole 2131 and a threaded member 2132 disposed on the baffle 212. The baffle 212 is fixed to the intake baffle 211 by the threaded member 2132 passing through the elongated hole 2131 on the baffle 212. The position of the baffle 212 on the intake baffle 21 is changed by adjusting the elongated hole 2131 and the threaded member 2132, thereby adjusting the size of the airflow channel 211.

[0037] like Figure 4 As shown, in some embodiments, the suction baffle 22 is provided with guide grooves 221 on both sides along its width direction, and the guide grooves 221 are conducive to promoting the flow of gas.

[0038] like Figure 5 As shown, in some embodiments, the suction baffle 22 includes a plurality of spaced-apart separation baffles 222.

[0039] In some embodiments, the air intake baffle 21 is parallel to the inner wall of the coating chamber 11 of the coating cavity 10, and the air extraction baffle 22 is parallel to the inner wall of the coating chamber 11 of the coating cavity 10. When the inner wall of the coating chamber 11 of the coating cavity 10 is a flat inner wall, the air intake baffle 21 and the air extraction baffle 22 have a flat plate structure; when the inner wall of the coating chamber 11 of the coating cavity 10 is a circumferential inner wall, the air intake baffle 21 and the air extraction baffle 22 have an arc-shaped plate structure.

[0040] In some embodiments, the center of the air intake baffle 21 along its width direction is aligned with the center of the air intake 12. That is, the orthographic projection of the air intake 12 onto the air intake baffle 21 is located at the center of the air intake baffle 21 along its width direction. In some embodiments, the center of the air extraction baffle 22 along its width direction is aligned with the center of the air extraction port 13. That is, the orthographic projection of the air extraction port 13 onto the air extraction baffle 22 is located at the center of the air extraction baffle 22 along its width direction.

[0041] In some embodiments, there is a gap between the air intake baffle 21 and the top and / or bottom wall of the coating chamber 11 of the coating cavity 10. In some embodiments, there is a gap between the air extraction baffle 22 and the top and / or bottom wall of the coating chamber 11 of the coating cavity 10.

[0042] Combination Figure 6 and Figure 7 As shown, the monomer gas flows into the coating chamber 11 through the air inlet 12, impacts the air inlet baffle 21, and then flows into the coating chamber 11 from the edge of the air inlet baffle 21. It is evenly dispersed in the coating chamber 11 and then deposited in the coating chamber 11.

[0043] like Figure 8 As shown, the gas in the coating chamber 11 impacts the suction baffle 22 and flows into the suction port 13 from the edge of the suction baffle 22, directly exiting the coating chamber 11. The design of the suction baffle 22 prevents the gas introduced through the air inlet 12 from dispersing in the coating chamber 11 and then directly flowing into the suction port 13 and exiting the coating chamber 11. This avoids excessively high local gas concentrations in the coating chamber 11, further ensuring the uniformity of airflow in the coating chamber 11, which is beneficial for improving coating uniformity and film quality.

[0044] In some embodiments, the coating chamber 11 is provided with a rotating support 111 for placing the workpiece 70 to be coated. The motor 112 at the bottom of the coating chamber 11 drives the magnetic fluid sealing transmission device to rotate, and the magnetic fluid sealing transmission device drives the rotating support 111 to rotate through the transmission mechanism. The rotating support 111 drives the workpiece 70 to be coated to rotate, which can improve the uniformity of the film layer.

[0045] In some embodiments, the coating equipment 100 further includes a continuous feeding device for conveying solid raw materials, such as solid phenelzine granules, pellet phenelzine, sheet phenelzine, etc.

[0046] In some embodiments, the coating apparatus 100 further includes a sublimation chamber and a pyrolysis furnace. The sublimation chamber is used to heat and sublimate the solid raw material and to deliver the sublimated gas to the pyrolysis chamber of the pyrolysis furnace. The pyrolysis furnace is used to perform a pyrolysis reaction on the sublimated gas and to deliver the gas to the coating chamber 11 through the gas inlet 12.

[0047] In some embodiments, the coating equipment 100 further includes a liquid feeding device 30, which is connected to the coating chamber 11 and is used to transport the gaseous raw material after the liquid raw material is vaporized to the coating chamber 11.

[0048] In some embodiments, the coating equipment 100 further includes a gas feeding device 40, which is connected to the coating chamber 11 and is used to transport gaseous raw materials into the coating chamber 11.

[0049] In some embodiments, the coating apparatus 100 further includes a plasma discharge mechanism 50. A plasma excitation power supply 51 (such as a radio frequency power supply) generates a radio frequency electric field within the coating chamber 11 of the coating chamber 10 by directly loading an electrode plate 52 within the coating chamber 11, thereby acting on the gas within the coating chamber 11. Specifically, during coating, the radio frequency power supply discharges process gases such as nitrogen or inert gases and reactant gases within the coating chamber 11 by providing a radio frequency electric field, thereby creating a plasma environment within the coating chamber 11 and placing the reactant gases in a high-energy state.

[0050] In some embodiments, the cavity wall of the coating chamber 11 is provided with a temperature control device, which can realize multi-regional temperature regulation of the cavity wall. By adjusting the temperature of the cavity wall of the coating chamber 11, the deposition rate of the upper and lower layer monomer gases is made consistent under the combined influence of monomer gas density and temperature, so that the thickness of the upper and lower layer coatings is uniform.

[0051] In some embodiments, the coating equipment 100 further includes a real-time film thickness monitoring system 60, which monitors the thickness of the film layer on the workpiece and shuts off the feeding device when the film layer reaches a predetermined thickness.

[0052] In some embodiments, the coating apparatus 100 further includes a vacuum system for evacuating the coating chamber. The vacuum system includes a pump assembly for extracting air from the coating chamber. A cold trap is provided between the pump assembly and the coating chamber for trapping condensable gases in the extracted air.

[0053] In some embodiments, the vacuum system further includes a valve whose opening can be controlled to adjust the pumping speed of the pump group to control the stability of the vacuum pressure in the coating chamber.

[0054] In some embodiments, the vacuum system further includes a pressure sensor for detecting pressure in the pump assembly.

[0055] In some embodiments, the coating equipment further includes a tail gas treatment device, which is connected to the pump group of the vacuum system and is used to treat and discharge the gas extracted by the pump group of the vacuum system. The tail gas treatment device includes, but is not limited to, the recovery or pollution-free treatment of reaction raw materials, process gases, or auxiliary gases of doping elements such as nitrogen, inert gases, hydrogen, and hydrocarbon gases, before discharging them to the outside world to prevent environmental pollution and to enable recycling.

[0056] According to embodiments of this utility model, the feeding system of the coating equipment can simultaneously achieve gas feeding, liquid feeding, and solid feeding. This multi-functional feeding method provides conditions for the coating equipment to deposit different film layers. By combining different types and methods of raw materials, the coating equipment can deposit multi-functional composite film layers sequentially or simultaneously, integrating ordinary CVD, PECVD, and ICVD technologies. This solves the problem that existing coating equipment can only achieve single CVD deposition technology, that is, it can only introduce a single type of raw material and can only deposit one film layer at a time, requiring multiple start-ups and shutdowns and feeding cycles to complete the composite film layer, resulting in poor film quality and long coating cycles.

[0057] The technical content and features of this utility model have been disclosed above. However, it is understood that, under the creative concept of this utility model, those skilled in the art can make various changes and improvements to the disclosed concept, all of which fall within the protection scope of this utility model. The description of the above embodiments is illustrative rather than restrictive, and the protection scope of this utility model is determined by the claims.

Claims

1. A flow equalization component for equalizing the flow of gas within the coating chamber of a coating equipment, characterized in that, include: An air inlet baffle is disposed within the coating cavity and is positioned opposite to the air inlet of the coating cavity. A first distance separates the air inlet baffle from the air inlet. Gas flowing through the air inlet enters the coating cavity from the edge of the air inlet baffle. An air extraction baffle is disposed within the coating cavity and is positioned opposite to the air extraction port of the coating cavity. A second distance is spaced between the air extraction baffle and the air extraction port. Gas within the coating cavity flows into the air extraction port from the edge of the air extraction baffle.

2. The flow equalization component according to claim 1, characterized in that, The air extraction baffle is provided with guide grooves on both sides along its width direction.

3. The flow equalization component according to claim 1, characterized in that, The air extraction baffle includes multiple spaced-apart separation baffles.

4. The flow equalization component according to claim 1, characterized in that, The air intake baffle is provided with drainage grooves on both sides along its width direction.

5. The flow equalization component according to claim 4, characterized in that, The air intake baffle is provided with a plurality of spaced-apart baffles on both sides along its width direction, and the baffles and the top or bottom of the air intake baffle and / or adjacent baffles form the flow channel.

6. The flow equalization component according to claim 5, characterized in that, The position of the deflector on the air intake baffle is adjustable.

7. The flow equalization component according to any one of claims 1 to 6, characterized in that, The air intake baffle and / or the air extraction baffle are parallel to the inner wall of the coating cavity.

8. The flow equalization component according to any one of claims 1 to 6, characterized in that, The center of the air intake baffle is aligned with the center of the air intake along its width direction; and / or The center of the suction baffle along its width direction is aligned with the center of the suction port.

9. The flow equalization component according to any one of claims 1 to 6, characterized in that, There is a gap between the air intake baffle and the top and / or bottom wall of the coating cavity; and / or There is a gap between the air extraction baffle and the top and / or bottom wall of the coating cavity.

10. A coating apparatus, characterized in that, include: The coating chamber has a coating chamber for placing the workpiece to be coated, and an air inlet and an air outlet connected to the coating chamber. as well as The flow equalization component according to any one of claims 1 to 9 is disposed in the coating chamber of the coating cavity.

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