Furnace tail boat and plasma deposition furnace

Abstract

The utility model relates to a furnace tail boat and a plasma deposition furnace, the furnace tail boat comprises a boat body, a boat handle and an electrode, the boat body is used for bearing a workpiece to be coated; boat handles are arranged at the two ends of the boat body, and an insertion opening is formed in the boat handle at one end of the boat body; and the electrode is inserted into the insertion port. The insertion port is formed in the boat handle, so that the electrode can be conveniently inserted into the insertion port, and connection between the electrode and the boat handle is achieved. According to the invention, the electrode is arranged to be in plug-in connection with the boat handle, so that the connection between the electrode and the boat handle is more reliable, and the electrode can be prevented from falling off. Through the plugging mode, the contact area of the electrode and the boat handle is larger, so that the contact current between the electrode and the boat handle can be effectively reduced, and the arcing phenomenon of the electrode is avoided. Therefore, the service life of the electrode can be effectively prolonged, consumption of spare parts is reduced, and production cost is reduced; meanwhile, the frequency of radio frequency can be reduced, and dust on the surface of the silicon wafer caused by radio frequency can be reduced, so that the product quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell coating equipment technology, and in particular to a furnace tail boat and a plasma deposition furnace. Background Technology

[0002] In the coating process of solar photovoltaic cells, an electrode head is needed to electrically connect the furnace tail boat and the furnace body. In the existing technology, a square groove is opened on the furnace tail boat, and the electrode head is inserted into the square groove. The electrode head is usually cylindrical. This connection method results in a line-to-surface contact between the electrode head and the square groove, which can easily lead to poor contact. Moreover, the contact point current is too high, causing arcing. This results in a short lifespan of the electrode head, a high number of radio frequency cycles, a large amount of dust on the silicon wafer surface, more defects, rapid consumption of spare parts, and high costs. Utility Model Content

[0003] Therefore, it is necessary to provide a furnace tail boat and a plasma deposition furnace to address the technical problem that the connection method of the electrode head of the furnace tail boat in the existing technology for coating photovoltaic cells is prone to poor contact.

[0004] A furnace tail boat, the furnace tail boat comprising:

[0005] The boat body is used to support the workpiece to be coated.

[0006] The boat handle is provided at both ends of the boat body, and an insertion interface is constructed on the boat handle at one end of the boat body;

[0007] Electrode, the electrode being inserted into the insertion interface;

[0008] The shape of the electrode insertion portion corresponds to that of the insertion interface, so that the outer peripheral surface of the electrode insertion portion fits against the inner wall of the insertion interface.

[0009] In one embodiment, the shank with the insertion interface is provided with a mounting protrusion, the mounting protrusion protruding from the side of the shank adjacent to the end face of the boat body, and the insertion interface is provided on the end face of the mounting protrusion away from the boat body.

[0010] In one embodiment, the shank includes:

[0011] Graphite blocks, multiple graphite blocks arranged side by side, each graphite block having a connecting hole;

[0012] Connectors that pass sequentially through connecting holes on the graphite blocks to secure each graphite block.

[0013] In one embodiment, the insertion interface is disposed on one of the graphite blocks, and the graphite block with the insertion interface protrudes from the adjacent graphite block.

[0014] In one embodiment, the interface includes:

[0015] A guide portion, located near the end of the shank, is configured as a tapered hole;

[0016] The insertion part is connected to the guide part, and the shape of the insertion part is adapted to the position where it is inserted with the electrode.

[0017] In one embodiment, the insertion portion is configured as a through-hole.

[0018] In one embodiment, the electrode includes:

[0019] A connector for adapting to the connector interface;

[0020] A connector is connected to the plug connector, the diameter of which is larger than that of the plug connector, and the connector is used to mate with the electrode rod on the furnace body.

[0021] In one embodiment, the end of the connector opposite to the mating connector is configured as an arc shape.

[0022] A plasma deposition furnace includes a tail boat as described above, and a furnace body. The furnace body has a furnace cavity, and the tail boat is disposed in the furnace cavity. The electrode is connected to the furnace body to achieve electrical connection.

[0023] In one embodiment, the plasma deposition furnace further includes a robotic arm for placing the furnace tail boat into the furnace cavity or removing the furnace tail boat from the furnace cavity. The robotic arm includes:

[0024] robotic arm;

[0025] The gripper is constructed as a plate-like structure, with one end connected to the robotic arm and the end of the gripper facing away from the robotic arm having an avoidance notch for avoiding mounting protrusions on the handle.

[0026] The beneficial effects of this utility model are:

[0027] This technical solution provides a furnace tail boat for use in a plasma deposition furnace. The boat body carries the workpiece to be coated. Boat handles are provided at both ends of the boat body to facilitate loading and unloading by a robotic arm. An insertion interface is constructed on the boat handle to connect the electrode to the handle. In this application, the electrode is designed to insert into the handle, with the insertion portion of the electrode corresponding to the shape of the interface, so that the outer peripheral surface of the electrode insertion portion fits snugly against the inner wall of the interface. This makes the connection between the electrode and the handle more reliable, preventing electrode detachment. Furthermore, the insertion design increases the contact area between the electrode and the handle, effectively reducing the contact current and preventing electrode arcing. This effectively improves electrode lifespan, reducing spare parts consumption and production costs. Simultaneously, it reduces the number of radio frequency (RF) cycles and dust accumulation on the silicon wafer surface caused by RF, thereby improving product quality. Attached Figure Description

[0028] Figure 1 A front view of the furnace tail boat provided in an embodiment of this utility model;

[0029] Figure 2 A three-dimensional structural schematic diagram of the furnace tail boat provided in an embodiment of this utility model;

[0030] Figure 3 A front view of the electrodes in the furnace tail boat provided in an embodiment of this utility model;

[0031] Figure 4 A schematic diagram of the structure after the furnace tail boat and the gripper in the robotic arm are connected according to an embodiment of the present utility model;

[0032] Figure 5 A schematic diagram of the structure of the furnace tail boat and the gripper in the robotic arm after being connected in one embodiment of the present utility model, from another perspective.

[0033] Figure 6 A schematic diagram of the gripper structure in a robotic arm provided in an embodiment of this utility model;

[0034] Figure 7 This is a cross-sectional view of a plasma deposition furnace provided in an embodiment of the present invention.

[0035] Reference numerals:

[0036] Furnace tail boat 100; boat body 110; boat handle 120; graphite block 121; connector 122; mounting protrusion 123; insertion interface 124; electrode 130; plug connector 131; butt connector 132; plasma deposition furnace 200; furnace body 210; electrode rod 220; gripper 230; clearance notch 231. Detailed Implementation

[0037] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0040] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0041] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0042] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0043] See Figure 1This utility model provides a furnace tail boat 100, which includes a boat body 110, a boat handle 120, and an electrode 130. The boat body 110 is used to carry the workpiece to be coated. Boat handles 120 are provided at both ends of the boat body 110, and an insertion interface 124 is constructed on one end of the boat handle 120. The electrode 130 is inserted into the insertion interface 124. The shape of the insertion portion of the electrode 130 corresponds to that of the insertion interface, so that the outer peripheral surface of the insertion portion of the electrode 130 fits against the inner wall of the insertion interface 124. This technical solution provides a furnace tail boat 100 for use in a plasma deposition furnace 200. The boat body 110 is used to carry the workpiece to be coated. By providing boat handles 120 at both ends of the boat body, it is easy to mount a robotic arm to place the boat body 110 into or remove it from the furnace body 210. An interface 124 is constructed on the handle 120 to facilitate the insertion of the electrode 130 into the interface 124, thereby achieving the connection between the electrode 130 and the handle 120. In this application, the electrode 130 is configured to be inserted into the handle 120, and the shape of the insertion portion of the electrode 130 corresponds to the shape of the interface, so that the outer peripheral surface of the insertion portion of the electrode 130 fits against the inner wall of the interface 124. On the one hand, this makes the connection between the electrode 130 and the handle 120 more reliable, thereby preventing the electrode 130 from falling off. On the other hand, the insertion form increases the contact area between the electrode 130 and the handle 120, thereby effectively reducing the contact current between them and avoiding arcing of the electrode 130. Thus, the service life of the electrode 130 can be effectively improved, thereby reducing spare parts consumption and production costs; at the same time, it can also reduce the number of radio frequency cycles and reduce dust on the silicon wafer surface caused by radio frequency, thereby improving product quality.

[0044] Understandably, in this embodiment, the boat body 110 is constructed by spaced-apart graphite sheets with through holes, each corresponding to a ceramic connecting rod that passes through the through holes in the graphite sheets to secure them. The large surfaces of the graphite sheets are spaced apart. Two spaced-apart boat handles 120 are provided at each end of the boat body, and the handles 120 are also made of graphite.

[0045] In one embodiment, a mounting protrusion 123 is constructed on the handle 120, which is provided with an insertion interface 124. The mounting protrusion 123 protrudes from the side of the handle 120 adjacent to the end face of the boat body 110, and the insertion interface 124 is located on the end face of the mounting protrusion 123 away from the boat body 110. By providing the mounting protrusion 123 on the handle 120 and placing the insertion interface 124 on the mounting protrusion 123, the position of the insertion interface 124 is lowered, so that the insertion interface 124 can correspond to the position of the electrode rod on the furnace body 210, thereby enabling the electrode 130 inserted into the insertion interface 124 to connect with the electrode rod on the furnace body 210.

[0046] In one embodiment, the handle 120 includes graphite blocks 121 and connectors 122. Multiple graphite blocks 121 are arranged side by side, and each graphite block 121 is configured with a connecting hole. The connectors 122 pass through the connecting holes on the graphite blocks 121 in sequence to fasten each graphite block 121.

[0047] Specifically, the graphite block 121 is sandwiched between graphite sheets, and the connector 122 is a ceramic rod. The ceramic rod passes through the connecting hole on the graphite block 121 and the through hole on the graphite sheet in sequence, and the two ends are locked by nuts.

[0048] In one embodiment, an interface 124 is disposed on one of the graphite blocks 121, and the graphite block 121 with the interface 124 protrudes beyond the adjacent graphite blocks 121. Specifically, the thickness of the graphite block 121 with the interface 124 is greater than the thickness of the other graphite blocks 121. It should be noted that the top surfaces of all graphite blocks 121 are flush, and the bottom surface of the graphite block 121 with the interface 124 is lower than the bottom surface of the other graphite blocks 121. The interface 124 is disposed on the portion of the graphite block 121 that protrudes beyond the other graphite blocks 121.

[0049] In one embodiment, the insertion interface 124 includes a guide portion and an insertion portion. The guide portion, located near the end of the handle 120, is configured as a tapered hole. The insertion portion communicates with the guide portion, and its shape is adapted to the insertion position of the electrode 130. The tapered hole of the guide portion guides the electrode 130 through its tapered surface, facilitating insertion of the electrode 130 into the insertion portion. The shape of the insertion portion is adapted to the insertion position of the electrode 130, resulting in a larger contact area between the electrode 130 and the insertion portion, thereby reducing arcing of the electrode 130. Specifically, the insertion portion is configured as a through-hole with a circular diameter.

[0050] In one embodiment, the electrode 130 includes a plug 131 and a mating connector 132. The plug 131 is adapted to the plug interface 124. The mating connector 132 is connected to the plug 131. The diameter of the mating connector 132 is larger than the diameter of the plug 131. The mating connector 132 is used to mate with the electrode rod 220 on the furnace body 210.

[0051] In this embodiment, the connector 132 is used to connect the plug connector 131 and the electrode rod 220. The plug connector 131 is used to plug into the plug interface 124 on the handle 120 to connect the electrode 130 to the handle. The diameter of the connector 132 is set to be larger than the diameter of the plug connector 131 to facilitate the relative positioning of the connector 132 and the electrode rod 220. The connector 132 is used to connect with the electrode rod 220 on the furnace body 210, thereby connecting the electrode 130 to the furnace body 210 and the boat body 110, and further realizing the electrical connection between the boat body 110 and the furnace body 210.

[0052] In one embodiment, the end of the connector 131 facing away from the connector 132 is configured as an arc. Setting the end of the connector 131 facing away from the connector 132 as an arc facilitates guidance during insertion and also prevents damage to the handle 120 or the furnace body 210 due to inaccurate alignment caused by the tip of the electrode 130 being too sharp.

[0053] This utility model also provides a plasma deposition furnace 200, which includes the furnace tail boat 100 as described above, and a furnace body 210. The furnace body 210 has a furnace cavity, and the furnace tail boat 100 is disposed within the furnace cavity. The electrode 130 is connected to the furnace body 210 via a connection. By applying the furnace tail boat 100 to the plasma deposition furnace 200, and constructing an insertion interface 124 on the boat handle 120, the electrode 130 is inserted into the interface 124, thereby achieving the connection between the electrode 130 and the boat handle 120. In this application, by setting the electrode 130 to be inserted into the boat handle 120, on the one hand, the connection between the electrode 130 and the boat handle 120 is more reliable, thus preventing the electrode 130 from falling off; on the other hand, the insertion form increases the contact area between the electrode 130 and the boat handle 120, thereby effectively reducing the contact current between them and preventing arcing of the electrode 130. This effectively extends the lifespan of electrode 130, thereby reducing spare parts consumption and production costs. At the same time, it also reduces the number of radio frequency (RF) cycles and the amount of dust on the silicon wafer surface caused by RF, thus improving product quality.

[0054] In one embodiment, the plasma deposition furnace 200 further includes a robotic arm for placing the furnace tail boat 100 into the furnace cavity or removing the furnace tail boat 100 from the furnace cavity. The robotic arm includes a robotic arm and a gripper 230. The gripper 230 is constructed as a plate-like structure. One end of the gripper 230 is connected to the robotic arm, and the end of the gripper 230 away from the robotic arm is provided with an avoidance notch 231 for avoiding the mounting protrusion 123 on the boat handle 120.

[0055] The robotic arm is used to pick up and place the tail boat 100, and the gripper 230 is used to support the boat handle 120, thereby lifting the tail boat 100. By providing an avoidance notch 231 at the end of the gripper 230 away from the robotic arm to avoid the mounting protrusion 123 on the boat handle 120, interference between the gripper 230 and the mounting protrusion 123 is prevented. This allows the gripper 230 to better support the boat handle 120 while preventing damage to the mounting protrusion 123.

[0056] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. A furnace stern boat, characterized in that, The furnace stern boat includes: The boat body is used to support the workpiece to be coated. The boat handle is provided at both ends of the boat body, and an insertion interface is constructed on the boat handle at one end of the boat body; Electrode, the electrode being inserted into the insertion interface; The shape of the electrode insertion portion corresponds to that of the insertion interface, so that the outer peripheral surface of the electrode insertion portion fits against the inner wall of the insertion interface.

2. The furnace stern boat according to claim 1, characterized in that, The shank with the insertion interface has a mounting protrusion. The mounting protrusion protrudes from the side of the shank adjacent to the end face of the boat body. The insertion interface is located on the end face of the mounting protrusion away from the boat body.

3. The furnace stern boat according to claim 1, characterized in that, The rudder includes: Graphite blocks, multiple graphite blocks arranged side by side, each graphite block having a connecting hole; Connectors that pass sequentially through connecting holes on the graphite blocks to secure each graphite block.

4. The furnace stern boat according to claim 3, characterized in that, The insertion interface is provided on one of the graphite blocks, and the graphite block with the insertion interface protrudes from the adjacent graphite block.

5. The furnace stern boat according to claim 1, characterized in that, The interface includes: A guide portion, located near the end of the shank, is configured as a tapered hole; The insertion part is connected to the guide part, and the shape of the insertion part is adapted to the position where it is inserted with the electrode.

6. The furnace stern boat according to claim 5, characterized in that, The insertion part is constructed as a through-hole with a circular diameter.

7. The furnace stern boat according to claim 1, characterized in that, The electrode includes: A connector for adapting to the connector interface; A connector is connected to the plug connector, the diameter of which is larger than that of the plug connector, and the connector is used to mate with the electrode rod on the furnace body.

8. The furnace stern boat according to claim 7, characterized in that, The end of the connector opposite to the mating connector is constructed in an arc shape.

9. A plasma deposition furnace, characterized in that, The plasma deposition furnace includes a tail boat as described in any one of claims 1-8, and the plasma deposition furnace also includes a furnace body, the furnace body having a furnace cavity, the tail boat being disposed within the furnace cavity, and the electrode being connected to the furnace body for electrical connection.

10. The plasma deposition furnace according to claim 9, characterized in that, The plasma deposition furnace further includes a robotic arm for placing the furnace tail boat into the furnace cavity or removing the furnace tail boat from the furnace cavity. The robotic arm includes: robotic arm; The gripper is constructed as a plate-like structure, with one end connected to the robotic arm and the end of the gripper facing away from the robotic arm having an avoidance notch for avoiding mounting protrusions on the handle.

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