Seed chuck

Abstract

The seed crystal chuck is used for connecting a seed crystal rod and a seed crystal when a crystal is grown by a pulling method, the seed crystal chuck comprises an integrated single-piece cylinder, the axis of the cylinder is used as a rotating central axis, and the cylinder is provided with a seed crystal rod assembling groove and a seed crystal assembling groove; the seed rod assembling groove is recessed inwards from the first axial end face of the cylinder and is used for fixedly assembling a seed rod; and the seed crystal assembling groove is recessed inwards from a second end surface opposite to the axial direction of the cylinder and is used for fixedly assembling a seed crystal. The seed crystal chuck can reduce the shielding of an observation view in the lifting process, and can simplify the structure and be convenient to assemble and disassemble.

Description

Technical Field

[0001] This disclosure relates to the field of crystal preparation, and more specifically to a seed crystal chuck. Background Technology

[0002] Currently, infrared detection technology is widely used around the world. Given the superior performance of indium antimonide material, which has intrinsic absorption in the wavelength range of 3-5μm, stable operation, and mature processing technology, indium antimonide has become an irreplaceable material in the field of infrared detection.

[0003] Crystal growth methods include gas-phase, solid-phase, solution, and melt growth methods. Currently, the main method for growing indium antimonide is the Czochralski method within melt growth. The advantage of this method is that it allows for real-time observation of crystal growth, using a seed crystal to extract a single crystal with a fixed crystal orientation. However, the fabrication of the seed crystal holder (i.e., the seed crystal chuck) has become a crucial step.

[0004] Patent document CN215757730U, authorized and published on February 8, 2022, discloses a seed crystal chuck. The cross-section of the seed crystal chuck (i.e., the cross-section made in the direction perpendicular to the axial direction) is approximately rectangular. Because the rotation trajectory formed by the rotation of the seed crystal has a radius of half the diagonal of the rectangle, it easily obstructs the field of view during the lifting process. The seed crystal chuck is threadedly engaged with the seed crystal rod through a threaded hole provided at the top. The seed crystal chuck clamps the seed crystal by means of two separate fixing posts that cooperate with the groove of the seed crystal, and the separate seed crystal chuck body and seed crystal chuck pressure head are fastened with screws to hold the seed crystal. This results in a complex structure and inconvenient assembly and disassembly. Utility Model Content

[0005] In view of the problems existing in the background art, one object of this disclosure is to provide a seed crystal chuck that can reduce the obstruction of the observation field during the lifting process.

[0006] Another objective of this disclosure is to provide a seed crystal chuck that simplifies the structure and facilitates assembly and disassembly.

[0007] Therefore, a seed crystal chuck is used to connect the seed crystal rod and the seed crystal during the Czochralski method of crystal growth. The seed crystal chuck includes a single-piece cylinder, the axis of which serves as the rotation center axis. The cylinder has a seed crystal rod assembly slot and a seed crystal assembly slot. The seed crystal rod assembly slot is recessed inward from a first end face along the axial direction of the cylinder and is used to fixably assemble the seed crystal rod. The seed crystal assembly slot is recessed inward from a second end face opposite to the axial direction of the cylinder and is used to fixably assemble the seed crystal.

[0008] The beneficial effects of this disclosure are as follows.

[0009] In the seed chuck according to this disclosure, since the seed chuck is a single-piece cylinder and the axis of the cylinder is used as the rotation center axis, after the seed chuck, seed rod, and seed crystal are assembled, when the seed rod drives the cylinder and seed crystal of the seed chuck to rotate, they will rotate around the axis of the cylinder. When the seed rod and seed crystal are the same as those in the prior art patent documents, the long side of the rectangular cross-section of the cylinder is shorter than that of the seed chuck in the prior art patent documents, but the short side is longer. The rotation trajectory formed by the rotation of the cylinder covers a smaller range on the horizontal plane than the rotation trajectory of the seed chuck in the patent documents. This reduces the obstruction of the observation field during the lifting process.

[0010] The seed chuck according to this disclosure is a single, integral cylindrical body, which simplifies the structure and makes assembly and disassembly easier compared to the separate seed chuck body and seed chuck pressure head with screws in the prior art patent documents. Attached Figure Description

[0011] Figure 1 This is an exploded view of the seed chuck according to the present disclosure, in which the seed rod and the seed are shown.

[0012] Figure 2 yes Figure 1 A front view of the assembled seed chuck, in which the seed rod and the seed crystal are shown.

[0013] The reference numerals in the attached figures are explained below.

[0014] 100 Seed Crystal Chuck 16 U-Shaped Rod Through Hole

[0015] D-axis 2L-shaped bar

[0016] 1. Cylinder 21. Horizontal section

[0017] 10 axis 22 vertical section

[0018] 11 Seed Crystal Rod Assembly Slots 3 U-Shaped Rods

[0019] 111 Bottom Surface 31 Horizontal Section

[0020] 12 seed crystal assembly slots, 32 arc-shaped segments

[0021] 121 bottom 200 seed crystal rod

[0022] 13. Perforation for the first end face 200a L-shaped bar

[0023] 14 Second end face 300 seed crystal

[0024] 15L-shaped bar with through hole 300a; U-shaped bar with groove. Detailed Implementation

[0025] The accompanying drawings illustrate embodiments of this disclosure, and it will be understood that the disclosed embodiments are merely examples of this disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but are intended only as the basis for the claims and as an illustrative basis to teach those skilled in the art how to implement this disclosure in various ways.

[0026] Reference Figure 1 and Figure 2 According to the present disclosure, the seed crystal chuck 100 is used to connect the seed crystal rod 200 and the seed crystal 300 when growing crystals by the Czochralski method. The seed crystal chuck 100 includes an integral cylindrical body 1. The axis 10 of the cylindrical body 1 serves as the rotation center axis. The cylindrical body 1 has a seed crystal rod mounting groove 11 and a seed crystal mounting groove 12. The seed crystal rod mounting groove 11 is recessed inward from a first end face 13 along the axial direction D of the cylindrical body 1 and is used to fixably assemble the seed crystal rod 200. The seed crystal mounting groove 12 is recessed inward from a second end face 14 opposite to the axial direction D of the cylindrical body 1 and is used to fixably assemble the seed crystal 300.

[0027] In the seed chuck 100 according to this disclosure, since the seed chuck 100 is a single-piece cylinder 1 and the axis 10 of the cylinder 1 is used as the rotation center axis, after the seed chuck 100 is assembled with the seed rod 200 and the seed crystal 300, when the seed rod 200 drives the cylinder 1 and the seed crystal 300 of the seed chuck 100 to rotate, they will rotate around the axis 10 of the cylinder 1. When the seed rod 200 and the seed crystal 300 are the same as those in the prior art patent documents, the long side of the rectangular cross-section of the cylinder 1 is shorter than that of the seed chuck in the prior art patent documents, but the short side is longer. The rotation trajectory formed by the rotation of the cylinder 1 covers a smaller range on the horizontal plane than the rotation trajectory of the seed chuck in the patent documents. This reduces the obstruction of the observation field during the lifting process.

[0028] The seed chuck 100 according to this disclosure is a single, integral cylindrical body 1. Compared with the separate seed chuck body and seed chuck pressure head along with screws in the prior art patent documents, the structure is simplified and the assembly and disassembly are convenient.

[0029] The cylinder 1 can be made of, but is not limited to, molybdenum. Molybdenum has high thermal conductivity, high melting point, and low specific heat of melting. It will not melt in high-temperature environments and will not accumulate heat.

[0030] exist Figure 1In the example shown, the bottom surface 111 of the seed rod mounting slot 11 and the bottom surface 121 of the seed rod mounting slot 12 are spaced apart along the axial direction D of the cylinder 1. This avoids interference during the assembly of the seed rod 200 and the seed crystal 300 on the cylinder 1. Furthermore, while ensuring the strength of the cylinder 1, the distance between the bottom surface 111 of the seed rod mounting slot 11 and the bottom surface 121 of the seed rod mounting slot 12 along the axial direction D of the cylinder 1 can be minimized. This allows the length of the seed rod 200 fixed in the seed rod mounting slot 11 and the length of the seed crystal 300 fixed in the seed rod mounting slot 12 to be maximized, thereby improving the rotational stability of the seed crystal 300.

[0031] Reference Figure 1 and Figure 2 In one example, the seed rod mounting groove 11 is used for an interference fit with the seed rod 200; the cylinder 1 has an L-shaped through hole 15 for the rod, which extends in a direction perpendicular to the axial direction D, at the portion corresponding to the seed rod mounting groove 11. The seed chuck 100 also includes an L-shaped rod 2, which is composed of a horizontal portion 21 and a vertical portion 22. The horizontal portion 21 is used to insert the L-shaped through hole 15 for the rod in the cylinder 1 and the through L-shaped through hole 200a for the rod in the seed rod 200. The length of the horizontal portion 21 extends at least across the portions of the cylinder 1 located on both sides of the seed rod 200 in the direction perpendicular to the axial direction D. By providing the horizontal portion 21 of the L-shaped rod 2, the limiting of the seed rod 200 relative to the cylinder 1 in the axial direction D can be further enhanced.

[0032] In one example, the length of the horizontal portion 21 is set such that the end of the horizontal portion 21 protrudes from the cylinder 1. The shorter the amount of the end of the horizontal portion 21 protruding from the cylinder 1, the better, thereby reducing the impact of the portion of the horizontal portion 21 protruding from the cylinder 1 on the field of view.

[0033] Reference Figure 1 In one example, the horizontal portion 21 and the vertical portion 22 of the L-shaped rod 2 have the same diameter and length. Thus, the horizontal portion 21 and the vertical portion 22 of the L-shaped rod 2 can be used in reverse order, improving the ease of use of the L-shaped rod 2.

[0034] Reference Figure 1 and combined Figure 2 In one example, the diameters of the horizontal portion 21 and the vertical portion 22 of the L-shaped rod 2 are smaller than the diameters of the L-shaped rod through hole 15 of the cylinder 1 and the L-shaped rod through hole 200a of the seed crystal rod 200. The smaller the difference between the diameters of the horizontal portion 21 and the vertical portion 22 of the L-shaped rod 2 and the diameters of the L-shaped rod through hole 15 of the cylinder 1 and the L-shaped rod through hole 200a of the seed crystal rod 200, the better, as long as the clearance fit is sufficient for easy assembly and disassembly.

[0035] Reference Figure 1In one example, the portion of the seed rod assembly groove 11, excluding the through hole 15 for the L-shaped rod, is a cylindrical shape that complements the portion of the outer surface of the seed rod 200, excluding the through hole 200a for the L-shaped rod.

[0036] Similarly, the material of L-shaped rod 2 can be, but is not limited to, molybdenum.

[0037] Reference Figure 1 and Figure 2 In one example, the seed crystal assembly slot 12 is used for an interference fit with the seed crystal 300; the cylinder 1 has two U-shaped bar through holes 16 in a direction perpendicular to the axial direction D at the portion corresponding to the seed crystal assembly slot 12; the seed crystal chuck 100 also includes a U-shaped bar 3, which is composed of two horizontal sections 31 and an arc-shaped section 32. Each horizontal section 31 is inserted into the corresponding U-shaped bar through hole 16 of the cylinder 1 and the U-shaped bar groove 300a on opposite sides of the seed crystal 300. The length of each horizontal section 31 extends at least across the portions of the cylinder 1 located on both sides of the seed crystal 300 in a direction perpendicular to the axial direction D. By setting the two horizontal sections 31 of the U-shaped bar 3, the limiting position of the seed crystal 300 relative to the cylinder 1 in the axial direction D can be further enhanced. In addition, compared with the two separate fixing columns used in the prior art patent documents, the number of parts is reduced, the overall structure is improved, and assembly and disassembly are convenient. Further, as Figure 2 As shown, during assembly, the vertical portion 22 of the L-shaped rod 2, near its end, is located between the arc-shaped segment 32 of the U-shaped rod 3 and the cylinder 1. This not only increases the circumferential constraint on the vertical portion 22 of the L-shaped rod 2, but also makes the overall structure after assembly more compact.

[0038] Similarly, in one example, the length of each horizontal segment 31 is set such that the end of the horizontal segment 31 protrudes from the cylinder 1. Likewise, the shorter the amount by which the end of each horizontal segment 31 protrudes from the cylinder 1, the better, thereby reducing the impact of the portion of the end of each horizontal segment 31 protruding from the cylinder 1 on the field of view.

[0039] like Figure 1 As shown, the cross-section of U-shaped rod 3 is constant.

[0040] Reference Figure 1 and combined Figure 2 In one example, the diameter of the horizontal segment 31 of the U-shaped rod 3 is smaller than the diameter of the through hole 16 for the U-shaped rod of the cylinder 1 and the groove 300a for the U-shaped rod of the seed crystal 300. The smaller the difference between the diameter of the horizontal segment 31 of the U-shaped rod 3 and the diameter of the through hole 16 for the U-shaped rod of the cylinder 1 and the groove 300a for the U-shaped rod of the seed crystal 300, the better, as long as the clearance fit is sufficient for easy assembly and disassembly.

[0041] Reference Figure 1In one example, the portion of the seed crystal assembly groove 12, excluding the through hole 16 for the U-shaped rod, is a square columnar shape that complements the portion of the outer surface of the seed crystal 300, excluding the groove 300a for the U-shaped rod. Thus, the shape of the seed crystal 300 can be adapted to the growth of indium antimonide crystals.

[0042] Similarly, the material of U-shaped rod 3 can be, but is not limited to, molybdenum.

[0043] It should be noted that in the seed chuck 100 according to this disclosure, if the cylinder 1 does not include the L-shaped bar through hole 15 and the U-shaped bar through hole 16, then the outer circumferential surface of the cylinder 1 is an ideal cylinder with a constant cross-section; if the cylinder 1 includes the L-shaped bar through hole 15 and the U-shaped bar through hole 16, then the outer circumferential surface of the cylinder 1 is an almost ideal cylinder with a constant cross-section. Since the area occupied by the L-shaped bar through hole 15 and the U-shaped bar through hole 16 on the outer circumferential surface is only a very small area, the cylinder 1 can still be regarded as an ideal cylinder with a constant cross-section.

[0044] It should be noted that in the seed crystal chuck 100 according to this disclosure, the dimensions of the specific structures of the cylinder 1, the L-shaped rod 2, and the U-shaped rod 3 can be determined according to the usage requirements.

[0045] It should be noted that the seed crystal chuck 100 according to this disclosure is applicable to various situations of Czochralski crystal growth, and is not limited to indium antimonide crystal growth.

[0046] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. A seed crystal chuck for connecting a seed crystal rod (200) and a seed crystal (300) during the Czochralski method of crystal growth, characterized in that, The seed crystal chuck (100) includes an integral cylindrical body (1), the axis (10) of the cylindrical body (1) is used as the rotation center axis, and the cylindrical body (1) has a seed crystal rod assembly groove (11) and a seed crystal assembly groove (12). The seed crystal rod assembly groove (11) is recessed inward from the first end face (13) of the cylinder (1) along the axial direction (D). The seed crystal rod assembly groove (11) is used to fixally assemble the seed crystal rod (200). The seed crystal assembly groove (12) is recessed inward from the second end face (14) opposite to the axial direction (D) of the cylinder (1), and the seed crystal assembly groove (12) is used to fixally assemble the seed crystal (300).

2. The seed crystal chuck according to claim 1, characterized in that, The bottom surface (111) of the seed crystal rod assembly groove (11) and the bottom surface (121) of the seed crystal assembly groove (12) are spaced apart along the axial direction (D) of the cylinder (1).

3. The seed crystal chuck according to claim 1, characterized in that, The seed crystal rod assembly slot (11) is used for interference fit with the seed crystal rod (200); The cylinder (1) has an L-shaped through hole (15) for a rod that extends in a direction perpendicular to the axial direction (D) in the part corresponding to the seed crystal rod assembly groove (11). The seed crystal chuck (100) also includes an L-shaped rod (2), which is composed of a horizontal portion (21) and a vertical portion (22). The horizontal portion (21) is used to insert the L-shaped rod through hole (15) of the cylinder (1) and the through L-shaped rod through hole (200a) of the seed crystal rod (200). The length of the horizontal portion (21) is at least across the portions of the cylinder (1) located on both sides of the seed crystal rod (200) in the direction perpendicular to the axial direction (D).

4. The seed crystal chuck according to claim 3, characterized in that, The length of the horizontal portion (21) is set such that the end of the horizontal portion (21) protrudes from the cylinder (1).

5. The seed crystal chuck according to claim 3, characterized in that, The portion of the seed rod assembly groove (11), excluding the through hole (15) for the L-shaped rod, is a cylindrical shape complementary to the portion of the outer surface of the seed rod (200), excluding the through hole (200a) for the L-shaped rod; and / or The horizontal portion (21) and the vertical portion (22) of the L-shaped bar (2) have the same diameter and length; and / or The diameters of the horizontal portion (21) and the vertical portion (22) of the L-shaped rod (2) are smaller than the diameters of the through hole (15) of the L-shaped rod of the cylinder (1) and the through hole (200a) of the L-shaped rod of the seed crystal rod (200).

6. The seed crystal chuck according to claim 1, characterized in that, The seed crystal assembly slot (12) is used for interference fit with the seed crystal (300); The cylinder (1) has two U-shaped through holes (16) in the part corresponding to the seed crystal assembly groove (12) that are perpendicular to the axial direction (D); The seed crystal chuck (100) also includes a U-shaped bar (3), which is composed of two horizontal sections (31) and an arc-shaped section (32). Each horizontal section (31) is inserted into the corresponding U-shaped bar through hole (16) of the cylinder (1) and the U-shaped bar groove (300a) on the opposite sides of the seed crystal (300). The length of each horizontal section (31) extends at least across the portion of the cylinder (1) located on both sides of the seed crystal (300) in a direction perpendicular to the axial direction (D).

7. The seed crystal chuck according to claim 6, characterized in that, The length of each horizontal segment (31) is set such that the end of the horizontal segment (31) protrudes from the cylinder (1).

8. The seed crystal chuck according to claim 6, characterized in that, The portion of the seed crystal assembly groove (12), excluding the through hole (16) for the U-shaped bar, is a square column that complements the portion of the outer surface of the seed crystal (300), excluding the groove (300a) for the U-shaped bar.

9. The seed crystal chuck (100) according to claim 8, characterized in that, The cross-section of the U-shaped bar (3) is constant; and / or The diameter of the horizontal segment (31) of the U-shaped bar (3) is smaller than the diameter of the through hole (16) of the U-shaped bar of the cylinder (1) and the groove (300a) of the U-shaped bar of the seed crystal (300).

10. The seed crystal chuck according to claim 3, characterized in that, The seed crystal assembly slot (12) is used for interference fit with the seed crystal (300); The cylinder (1) has two U-shaped through holes (16) in the part corresponding to the seed crystal assembly groove (12) that are perpendicular to the axial direction (D); The seed crystal chuck (100) also includes a U-shaped bar (3), which is composed of two horizontal sections (31) and an arc-shaped section (32). Each horizontal section (31) is inserted into the corresponding U-shaped bar through hole (16) of the cylinder (1) and the U-shaped bar groove (300a) on the opposite sides of the seed crystal (300). The length of each horizontal section (31) extends at least across the portion of the cylinder (1) located on both sides of the seed crystal (300) in a direction perpendicular to the axial direction (D). When the L-shaped rod (2) is assembled, the part of the vertical part (22) near the end of the L-shaped rod (2) is located between the arc-shaped section (32) of the U-shaped rod (3) and the cylinder (1).

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