Gantry type sheet measuring device based on confocal laser displacement sensor

Abstract

A gantry type slice measuring device based on a confocal laser displacement sensor comprises a frame body, a mounting bottom plate, a gantry type support, a two-dimensional hollow moving platform, the confocal laser displacement sensor, a clamp assembly and a control system. The mounting bottom plate is mounted on the frame main body; a two-dimensional hollow moving platform is mounted on the mounting bottom plate; the gantry-type bracket is arranged on the mounting bottom plate, and an upper measuring head is mounted on a cross beam of the gantry-type bracket; the two bottom ends of the gantry type support are respectively provided with a multi-dimensional combined sliding table used for achieving rough adjustment of the upper measuring head. And a lower measuring head is mounted on one side edge of the hollow part of the mounting bottom plate. According to the utility model, the gantry type support is adopted to roughly adjust the upper measuring head, and then the upper measuring head adjusting unit is adopted to finely adjust the upper measuring head, so that the rough adjustment step is added, and the processing requirement of equipment is reduced.

Description

Technical Field

[0001] This utility model belongs to the technical field of thin-film measurement devices, specifically relating to a gantry-type thin-film measurement device based on a confocal laser displacement sensor. Background Technology

[0002] In the field of length measurement, thin sheets (hereinafter collectively referred to as thin sheets) such as feeler gauges with a thickness of <4mm, high-precision copper sheets, high-precision aluminum sheets, lithium battery cells, and thin rubber sheets are characterized by their thinness, susceptibility to bending and deformation under microgravity, easy wrinkling, and high requirements for the perpendicularity of the measuring axis to the surface of the thin sheet. GB / T 22523-2008 and JJG 62-2017 specify the thickness deviation and curvature of feeler gauges as two important technical parameters and their testing methods; GB / T 26303.3-2010 specifies the method for testing the external dimensions of copper and copper alloy processed materials; GB / T 3194-1998 specifies the permissible dimensional deviations of aluminum and aluminum alloy plates and strips. In addition, thickness and side curvature are also important geometric dimensional parameters for high-precision copper sheets and high-precision aluminum sheets; furthermore, lithium battery cells and thin rubber sheets have corresponding requirements for thickness and curvature.

[0003] In existing technologies, the measurement of key parameters such as thickness deviation and curvature of thin sheets generally adopts contact thickness measurement methods. Although these methods can basically meet the requirements of existing technical specifications in terms of measurement accuracy and reliability, they have the following shortcomings: First, the measurement requires certain operating experience and skills, resulting in slow measurement speed, low automation, and inability to achieve batch measurement. Second, the measuring force of contact measurement can cause indentation deformation, which can easily damage the thin sheet. At the same time, the flatness of the measuring instrument's measuring cap (anvil) and the deviation of the measuring position both affect the measurement results and are important sources of measurement error. Third, the measurement process is cumbersome, with low measurement efficiency and low automation, making it impossible to achieve online and batch measurement. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a gantry-type thin-film measuring device based on a confocal laser displacement sensor that is highly accurate, easy to operate, efficient, and capable of automatic batch measurement.

[0005] This utility model is implemented as follows:

[0006] A gantry-type thin-film measuring device based on a confocal laser displacement sensor includes: a frame body, a mounting base plate, a gantry-type bracket, a two-dimensional hollow moving platform, a confocal laser displacement sensor, a fixture assembly, and a control system;

[0007] The mounting base plate is a planar structure and is mounted on the main frame body; the two-dimensional hollow mobile platform is mounted on the mounting base plate;

[0008] The two-dimensional hollow moving platform is a hollow, electrically controlled two-dimensional platform with x and y axis movement. The clamping assembly is placed in its hollow part. The motion control of the two-dimensional hollow moving platform enables the clamping assembly to be positioned. The sheet to be inspected is mounted on the clamping assembly.

[0009] The gantry bracket is mounted on the mounting base plate, and an upper measuring head adjustment unit is installed on its crossbeam. The upper measuring head of the confocal laser displacement sensor is installed on the upper measuring head adjustment unit. Multi-dimensional combination slides are provided at both bottom ends of the gantry bracket for coarse adjustment of the upper measuring head. An tilt sensor is also installed on the crossbeam of the gantry bracket.

[0010] The mounting base plate is hollow in the middle, and a lower measuring head adjustment unit is installed on one side of the hollow part. The lower measuring head of the confocal laser displacement sensor is installed on the lower measuring head adjustment unit.

[0011] The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, which respectively realize the fine adjustment of the upper measuring head and the lower measuring head of the confocal laser displacement sensor; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor;

[0012] The control system is installed inside the main frame.

[0013] Furthermore, the confocal laser displacement sensor is one of the following: CL-L030 laser coaxial displacement meter, IFS2406-10 spectral confocal sensor, or HPS-CFL030 spectral confocal displacement sensor.

[0014] Furthermore, an angle sensor is fixedly installed on the crossbeam of the gantry frame to detect the tilt angle of the gantry frame.

[0015] The advantages of this utility model are: it realizes batch and fully automatic inspection of thin sheets, uses a gantry bracket to perform coarse adjustment of the upper measuring head, and then uses the upper measuring head adjustment unit to perform fine adjustment of the upper measuring head. The addition of the coarse adjustment step reduces the processing requirements of the equipment. Attached Figure Description

[0016] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0017] Figure 1 It is a structural diagram of the present utility model.

[0018] Figure 2 This is a schematic diagram of the structure after removing the two-dimensional hollow mobile platform in this utility model.

[0019] Reference numerals:

[0020] 1-Mounting base plate, 2-Two-dimensional hollow moving platform, 3-Gantry bracket, 31-Crossbeam, 4-Clamping assembly, 51-Upper measuring head, 52-Lower measuring head, 61-Multi-dimensional combined slide, 62-Multi-dimensional combined slide, 7-L-shaped connecting rib, 81-Upper measuring head adjustment unit, 82-Lower measuring head adjustment unit, 9-Tilt sensor. Detailed Implementation

[0021] This embodiment of the gantry-type thin-film measuring device based on a confocal laser displacement sensor is an improvement on the mechanical structure assembly of a feeler gauge calibration device based on non-contact optics proposed in application number 202411701720.0. The contents that are the same as those proposed will not be described in detail here.

[0022] In the non-contact optical feeler gauge calibration device proposed in application number 202411701720.0, the upper and lower measuring heads can only be fine-tuned through the upper and lower measuring head adjustment units, which places extremely high demands on the processing performance of the equipment. Therefore, this embodiment improves it by adding a coarse adjustment structure to the upper measuring head, specifically, as follows: Figure 1 and Figure 2 As shown, a gantry-type thin-film measuring device based on a confocal laser displacement sensor includes: a mounting base plate 1, a two-dimensional hollow moving platform 2, a gantry-type bracket 3, a confocal laser displacement sensor, a fixture assembly 4, a control system (not shown), and a frame body (not shown); the control system is installed inside the frame body.

[0023] The mounting base plate 1 is a planar structure, which is mounted on the main frame. A two-dimensional hollow moving platform 2 is mounted on the mounting base plate 1. The two-dimensional hollow moving platform 2 is a hollow, electrically controlled two-dimensional platform with x and y axis movement. The clamping assembly 4 is placed in its hollow part. The motion control of the two-dimensional hollow moving platform enables the clamping assembly to be positioned. The sheet to be inspected is mounted on the clamping assembly 4.

[0024] The gantry bracket 3 is mounted on the mounting base plate 1. An upper measuring head adjustment unit 81 is installed on its crossbeam 31, and an upper measuring head 51 of a confocal laser displacement sensor is installed on the upper measuring head adjustment unit 81. A multi-dimensional combination slide 61 and 62 are respectively provided at the two bottom ends of the gantry bracket 3 to realize coarse adjustment of the upper measuring head 51 in the x, y, and z axes. An tilt sensor 9 is also installed on the crossbeam 31 of the gantry bracket 3 to detect the tilt angle of the gantry bracket 7 and feed the data back to the lower computer of the control system for data correction.

[0025] The middle of the mounting base plate 1 is hollow, and one side of the hollow part is fixedly connected to the lower measuring head adjustment unit 82 by an L-shaped connecting rib 7. The lower measuring head 52 of the confocal laser displacement sensor is mounted on the lower measuring head adjustment unit 82.

[0026] The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 are multi-dimensional adjustment structures, which respectively realize the fine adjustment of the upper measuring head 51 and the lower measuring head 52 of the confocal laser displacement sensor. By adjusting the displacement and angle of the upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82, the upper measuring head 51 and the lower measuring head 52 are made coaxial, thus meeting the measurement requirements of the confocal laser displacement sensor.

[0027] The confocal laser displacement sensor can be one of the following: CL-L030 laser coaxial displacement meter, IFS2406-10 spectral confocal sensor, or HPS-CFL030 spectral confocal displacement sensor. The upper measuring head adjustment unit 81 and the lower measuring head adjustment unit 82 can use optional accessories provided by the confocal laser displacement sensor manufacturer, such as adjustment fixtures (model OP-88285), or they can be self-made or use other relevant fixtures.

[0028] This invention uses a gantry-type support for coarse adjustment of the upper measuring head, and then uses an upper measuring head adjustment unit for fine adjustment of the upper measuring head. The addition of a coarse adjustment step reduces the processing requirements of the equipment.

[0029] The above embodiments and figures are not intended to limit the product form and style of this utility model. Any appropriate changes or modifications made by those skilled in the art should be considered as not departing from the patent scope of this utility model.

Claims

1. A gantry-type thin-film measuring device based on a confocal laser displacement sensor, characterized in that: include: The main frame, mounting base plate, gantry frame, two-dimensional hollow moving platform, confocal laser displacement sensor, fixture assembly, and control system; The mounting base plate is a planar structure and is mounted on the main frame body; the two-dimensional hollow mobile platform is mounted on the mounting base plate; The two-dimensional hollow moving platform is a hollow, electrically controlled two-dimensional platform with x and y axis movement. The clamping assembly is placed in its hollow part. The motion control of the two-dimensional hollow moving platform enables the clamping assembly to be positioned. The sheet to be inspected is mounted on the clamping assembly. The gantry bracket is mounted on the mounting base plate, and an upper measuring head adjustment unit is installed on its crossbeam. The upper measuring head of the confocal laser displacement sensor is installed on the upper measuring head adjustment unit. Multi-dimensional combination slides are provided at both bottom ends of the gantry bracket for coarse adjustment of the upper measuring head. An tilt sensor is also installed on the crossbeam of the gantry bracket. The mounting base plate is hollow in the middle, and a lower measuring head adjustment unit is installed on one side of the hollow part. The lower measuring head of the confocal laser displacement sensor is installed on the lower measuring head adjustment unit. The upper measuring head adjustment unit and the lower measuring head adjustment unit are multi-dimensional adjustment structures, which respectively realize the fine adjustment of the upper measuring head and the lower measuring head of the confocal laser displacement sensor; by adjusting the displacement and angle of the upper measuring head adjustment unit and the lower measuring head adjustment unit, the upper measuring head and the lower measuring head are made coaxial, thereby meeting the measurement requirements of the confocal laser displacement sensor; The control system is installed inside the main frame.

2. The gantry-type thin-film measuring device based on a confocal laser displacement sensor as described in claim 1, characterized in that: The confocal laser displacement sensor is one of the following: CL-L030 laser coaxial displacement meter, IFS2406-10 spectral confocal sensor, or HPS-CFL030 spectral confocal displacement sensor.

3. The gantry-type thin-film measuring device based on a confocal laser displacement sensor as described in claim 1, characterized in that: An angle sensor is fixedly installed on the crossbeam of the gantry frame to detect the tilt angle of the gantry frame.

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